TWM630157U - Film structure - Google Patents

Film structure Download PDF

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TWM630157U
TWM630157U TW111201450U TW111201450U TWM630157U TW M630157 U TWM630157 U TW M630157U TW 111201450 U TW111201450 U TW 111201450U TW 111201450 U TW111201450 U TW 111201450U TW M630157 U TWM630157 U TW M630157U
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Taiwan
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film layer
film
substrate
layers
film layers
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TW111201450U
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Chinese (zh)
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吳宗豐
李文亮
蘇修賢
蔡宇硯
林佳德
陳奕燊
陳進龍
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翔名科技股份有限公司
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Publication of TWM630157U publication Critical patent/TWM630157U/en

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Abstract

一種膜層結構,包括一基材、多個第一膜層及多個第二膜層。第一膜層設置於該基材上,上述第一膜層是沿著一第一方向設置。第二膜層設置於該基材上,上述第二膜層是沿著一第二方向設置。其中,上述第一膜層與上述第二膜層交疊設置,該第一方向與該第二方向具有一夾角。 A film layer structure includes a base material, a plurality of first film layers and a plurality of second film layers. The first film layer is disposed on the substrate, and the first film layer is disposed along a first direction. The second film layer is disposed on the substrate, and the second film layer is disposed along a second direction. Wherein, the first film layer and the second film layer are arranged overlappingly, and the first direction and the second direction have an included angle.

Description

膜層結構 Membrane structure

一種膜層結構,特別是一種增加耐受性的膜層結構。 A film structure, particularly a film structure with increased resistance.

在各式工程器械中,不論是機械設備或手工具,例如斗齒、夾鉗、掘齒、鏈球、大鋼剪或油壓粉碎機等機械,為了提高其表面的抗衝擊與抗摩擦特性,都會在其表面塗佈塗層,藉此延長這些機械的使用壽命。 In all kinds of engineering equipment, whether it is mechanical equipment or hand tools, such as bucket teeth, clamps, digging teeth, chain balls, large steel shears or hydraulic pulverizers and other machinery, in order to improve the impact resistance and anti-friction characteristics of the surface, Coatings are applied to their surfaces, thereby extending the life of these machines.

目前,常見的塗佈方式是以熱噴塗或是氬焊等方法進行表面處理,將耐磨耗抗衝擊和抗摩擦之材料塗佈於機械表面,來提供機械的抗衝擊與抗摩擦特性。然而,熱噴塗之膜層其附著力較弱(機械接合處)容易造成脫落,而氬焊則是熱影響區較大,受限於焊條之形狀與材料。 At present, the common coating method is to carry out surface treatment by thermal spraying or argon welding, and coat the mechanical surface with wear-resistant, impact-resistant and anti-friction materials to provide mechanical impact and anti-friction properties. However, the adhesion of the thermally sprayed film is weak (mechanical joints), and it is easy to fall off, while the argon welding has a larger heat-affected zone, which is limited by the shape and material of the electrode.

因此,如何解決上述問題,便是本領域具通常知識者值得去思量的。 Therefore, how to solve the above problems is worth considering by those with ordinary knowledge in the field.

有鑑於此,本創作提供一種膜層結構,以雷射熔覆方法在基材上形成膜層結構,雷射熔覆可提供形成冶金接合、熱影響區小、材料應用廣泛、能以焊線或是粉末方式進行熔覆加工等優點,可克服熱噴塗與氬焊的限制。其具體技術手段如下: In view of this, this creation provides a film layer structure, which is formed on a substrate by a laser cladding method. Laser cladding can provide metallurgical bonding, small heat affected zone, wide material application, and can be used for wire bonding. Or powder method for cladding processing and other advantages, can overcome the limitations of thermal spraying and argon welding. The specific technical means are as follows:

一種膜層結構,包括一基材、多個第一膜層及多個第二膜層。第一膜層設置於該基材上,上述第一膜層是沿著一第一方向設置。第二膜層設置於該基材上,上述第二膜層是沿著一第二方向設置。其中,上述第一膜層與上述第二膜層交疊設置,該第一方向與該第二方向具有一夾角。 A film layer structure includes a base material, a plurality of first film layers and a plurality of second film layers. The first film layer is disposed on the substrate, and the first film layer is disposed along a first direction. The second film layer is disposed on the substrate, and the second film layer is disposed along a second direction. Wherein, the first film layer and the second film layer are arranged overlappingly, and the first direction and the second direction have an included angle.

上述之膜層結構,其中,該夾角為40~90度之間。 In the above-mentioned film layer structure, the included angle is between 40 and 90 degrees.

上述之膜層結構,其中,上述第一膜層之間具有間隔,形成多個第一溝槽。 In the above-mentioned film layer structure, there are spaces between the first film layers, and a plurality of first trenches are formed.

上述之膜層結構,其中,上述第一膜層彼此緊靠而設置。 In the above-mentioned film layer structure, the first film layers are arranged in close proximity to each other.

上述之膜層結構,其中,上述第一膜層彼此交疊。 In the above-mentioned film layer structure, the first film layers are overlapped with each other.

上述之膜層結構,其中,上述第二膜層之間具有間隔,形成多個第二溝槽。 In the above-mentioned film layer structure, there are spaces between the second film layers, and a plurality of second trenches are formed.

上述之膜層結構,其中,上述第二膜層彼此交疊。 In the above-mentioned film layer structure, the second film layers are overlapped with each other.

上述之膜層結構,其中,上述第二膜層彼此緊靠而設置。 In the above-mentioned film layer structure, the second film layers are disposed in close proximity to each other.

上述之膜層結構,其中,該第一膜層與該第二膜層的厚度為0.5~20mm。 In the above-mentioned film layer structure, the thickness of the first film layer and the second film layer is 0.5-20 mm.

100:膜層結構 100: Membrane layer structure

101:基材 101: Substrate

110:第一膜層 110: The first film layer

110’:聚焦點 110': focus point

111:第一方向 111: The first direction

112:交疊處 112: Overlap

120:第二膜層 120: Second film layer

121:第二方向 121: Second direction

122:交疊處 122: Overlap

210:雷射 210: Laser

220:噴嘴 220: Nozzle

221:熔覆材料 221: Cladding material

S10~S40:流程圖步驟 S10~S40: Flowchart steps

A、B:虛線 A, B: dotted line

D1:第一溝槽 D1: The first groove

D2:第二溝槽 D2: Second groove

θ:夾角 θ: included angle

圖1所繪示為本創作之膜層結構。 Figure 1 shows the film layer structure of this creation.

圖2A所繪示為膜層結構的俯視圖。 FIG. 2A is a top view of the film structure.

圖2B所繪示為膜層結構的側截面圖。 FIG. 2B is a side cross-sectional view of the film structure.

圖3A所繪示為第二實施例之膜層結構。 FIG. 3A shows the film layer structure of the second embodiment.

圖3B為膜層分離的示意圖。 Figure 3B is a schematic diagram of membrane separation.

圖4A所繪示為第二實施例膜層結構的俯視圖。 FIG. 4A is a top view of the film layer structure of the second embodiment.

圖4B所繪示為第二實施例膜層結構的側截面圖。 FIG. 4B is a side cross-sectional view of the film layer structure of the second embodiment.

圖5A、圖6A、圖6B、圖7A、圖7B、圖8A與圖8B所繪示為耐受性的膜層結構的製造方法。 FIGS. 5A , 6A, 6B, 7A, 7B, 8A and 8B illustrate the manufacturing method of the resistant film structure.

圖5B所繪示為雷射熔覆的示意圖。 FIG. 5B is a schematic diagram of laser cladding.

圖9A所繪示為第三實施例的第一膜層。 FIG. 9A shows the first film layer of the third embodiment.

圖9B所繪示為第三實施例的第二膜層。 FIG. 9B shows the second film layer of the third embodiment.

請參閱圖1,圖1所繪示為本創作之膜層結構。膜層結構100包括一基材101、多個第一膜層110及第二膜層120。其中,基材101指的便是機械工具的表面,例如斗齒、夾鉗、掘齒、鏈球、大鋼剪或油壓粉碎機的表面。而第一膜層110與第二膜層120設置在基材101的表面上,並且第一膜層110與第二膜層120是交疊設置在基材101的表面。 Please refer to FIG. 1. FIG. 1 shows the film layer structure of the present invention. The film structure 100 includes a substrate 101 , a plurality of first film layers 110 and a second film layer 120 . Wherein, the base material 101 refers to the surface of a mechanical tool, such as a bucket tooth, a clamp, a digging tooth, a hammer, a large steel shear or a surface of a hydraulic pulverizer. The first film layer 110 and the second film layer 120 are disposed on the surface of the substrate 101 , and the first film layer 110 and the second film layer 120 are disposed on the surface of the substrate 101 overlappingly.

接著,請參閱圖2A與圖2B,圖2A所繪示為膜層結構的俯視圖,圖2B所繪示為膜層結構的側截面圖。從圖2A中可以看出,第一膜層110是沿著一第一方向111而設置,且第一膜層110是長條狀形成。第二膜層120則是沿著一第二方向121設置,且第二膜層120是長條狀形成。進一步的,第一方向111與第二方向121之間具有一夾角θ。在一實施例中,夾角θ的角度可為40~90度。換言之,第一膜層110與第二膜層120是交錯並且設置在基材101上。 Next, please refer to FIGS. 2A and 2B , FIG. 2A is a top view of the film structure, and FIG. 2B is a side cross-sectional view of the film structure. As can be seen from FIG. 2A , the first film layer 110 is disposed along a first direction 111 , and the first film layer 110 is formed in a strip shape. The second film layer 120 is disposed along a second direction 121 , and the second film layer 120 is formed in a strip shape. Further, there is an included angle θ between the first direction 111 and the second direction 121 . In one embodiment, the angle of the included angle θ may be 40-90 degrees. In other words, the first film layer 110 and the second film layer 120 are staggered and disposed on the substrate 101 .

請參閱圖2B,圖2B是圖2A中的虛線A的側截面圖。可看出第一膜層110與第二膜層120是交錯並且設置在基材101上。並且,個別的第一膜層110之間具有間隔,並形成一第一溝槽D1。個別的第二膜層120之間也具有間隔,並形成一第二溝槽D2。具體來說,在本實施例中,第一膜層110與第二膜層120並非完全覆蓋 基材101,基材101的表面依然可從第一溝槽D1或第二溝槽D2露出。此外,在某些實施例中,第一溝槽D1或第二溝槽D2可為不定值,也就是每個第一膜層110可以不同距離設置,每個第二膜層120可以不同距離設置。 Please refer to FIG. 2B , which is a side cross-sectional view taken along the dotted line A in FIG. 2A . It can be seen that the first film layer 110 and the second film layer 120 are staggered and disposed on the substrate 101 . In addition, there is a space between the individual first film layers 110, and a first trench D1 is formed. There is also a space between the individual second film layers 120, and a second trench D2 is formed. Specifically, in this embodiment, the first film layer 110 and the second film layer 120 are not completely covered The substrate 101, the surface of the substrate 101 can still be exposed from the first trench D1 or the second trench D2. In addition, in some embodiments, the first trench D1 or the second trench D2 may be indeterminate, that is, each of the first film layers 110 may be provided at different distances, and each of the second film layers 120 may be provided at different distances set up.

請參閱圖3A與圖3B,圖3A所繪示為第二實施例之膜層結構,圖3B為膜層分離的示意圖。在圖3A與圖3B的實施例中,多個第一膜層110是彼此緊靠而設置於基材101上,多個第二膜層120則是彼此緊靠而設置於第一膜層110上。並且,第一膜層110仍沿著第一方向111設置,第二膜層120仍沿著第二方向121設置。因此,第一膜層110與第二膜層120各自以不同方向排列成薄膜完全覆蓋基材101。 Please refer to FIG. 3A and FIG. 3B , FIG. 3A shows the film layer structure of the second embodiment, and FIG. 3B is a schematic diagram of the separation of the film layers. In the embodiment of FIGS. 3A and 3B , the plurality of first film layers 110 are disposed on the substrate 101 in close proximity to each other, and the plurality of second film layers 120 are disposed on the first film layer 110 in close proximity to each other superior. Moreover, the first film layer 110 is still arranged along the first direction 111 , and the second film layer 120 is still arranged along the second direction 121 . Therefore, the first film layer 110 and the second film layer 120 are respectively arranged in different directions to form a thin film that completely covers the substrate 101 .

接著請參閱圖4A與圖4B,圖4A所繪示為第二實施例膜層結構的俯視圖,圖4B所繪示為第二實施例膜層結構的側截面圖,並且圖4B為圖4A中虛線B的截面圖。從4A中可以看出,彼此緊靠而設置的第二膜層120完全覆蓋了第一膜層110。從圖3A與圖4B中可以看出,被第二膜層120所覆蓋的第一膜層110,仍是以與第二膜層120不同的方向所形成,且覆蓋於基材101上。 Next, please refer to FIGS. 4A and 4B , FIG. 4A is a top view of the film layer structure of the second embodiment, FIG. 4B is a side cross-sectional view of the film layer structure of the second embodiment, and FIG. Sectional view of dotted line B. It can be seen from 4A that the second film layer 120 disposed next to each other completely covers the first film layer 110 . It can be seen from FIG. 3A and FIG. 4B that the first film layer 110 covered by the second film layer 120 is still formed in a different direction from the second film layer 120 and covers the substrate 101 .

請參閱圖9A與圖9B,圖9A所繪示為第三實施例的第一膜層。圖9B所繪示為第三實施例的第二膜層。為清晰表現第三實施例的第一膜層110與第二膜層120的特徵,因此將第一膜層110與第二膜層120分別繪製於圖9A與圖9B,實際實施時,第一膜層110與第二膜層120將會設置在同一基材101上,並且第一膜層110與第二膜層120彼此交疊。在第三實施例中,多個第一膜層110可彼此交疊,而部分的交疊可形成交疊處112。同樣的,多個第二膜層120也可彼此交疊,部分的交疊而形成交疊處122。並且,第一膜層110仍沿著第一方向111設置,第二膜層120則沿著第二方向121設置。 Please refer to FIG. 9A and FIG. 9B , FIG. 9A shows the first film layer of the third embodiment. FIG. 9B shows the second film layer of the third embodiment. In order to clearly show the characteristics of the first film layer 110 and the second film layer 120 of the third embodiment, the first film layer 110 and the second film layer 120 are drawn in FIG. 9A and FIG. 9B respectively. The film layer 110 and the second film layer 120 will be disposed on the same substrate 101 , and the first film layer 110 and the second film layer 120 will overlap each other. In the third embodiment, the plurality of first film layers 110 may overlap with each other, and a partial overlap may form an overlap 112 . Similarly, the plurality of second film layers 120 may also overlap each other, and the overlapping portions 122 may be formed by partially overlapping. Moreover, the first film layer 110 is still disposed along the first direction 111 , and the second film layer 120 is disposed along the second direction 121 .

上述第一膜層110與第二膜層120分別具有多種設置方式,緊靠設置、具有間隔的設置與彼此交疊的設置,但並不限於第一膜層110與第二膜層120須採用同樣的設置方法。例如第一膜層110為緊靠設置,而第二膜層120為具有間隔的設置;或著,第一膜層110為具有間隔的設置,而第二膜層120為緊靠設置。此外,在另一實施例中,第一膜層110或第二膜層120也可分別設置為網狀。 The above-mentioned first film layer 110 and the second film layer 120 respectively have various arrangement methods, such as close arrangement, spaced arrangement, and mutually overlapping arrangement, but not limited to the first film layer 110 and the second film layer 120. The same setting method. For example, the first film layers 110 are arranged in close proximity, and the second film layers 120 are arranged with intervals; or, the first film layers 110 are arranged with intervals, and the second film layers 120 are arranged in close proximity. In addition, in another embodiment, the first film layer 110 or the second film layer 120 can also be respectively arranged in a mesh shape.

在一實施例中,第一膜層110與第二膜層120的厚度為0.5~20毫米(mm),且第一膜層110與第二膜層120可為相同或不同的厚度。此外,第一膜層110與第二膜層120的硬度是大於基材101,提供更佳的抗衝擊與抗摩擦特性以保護基材101。具體來說,第一膜層110與第二膜層120的材料選用鎢鋼(Tungsten steel)、碳化鎢(Tungsten carbide)、氧化鋁(Al2O3)、二氧化鋯(ZrO2)、鐵基合金、鎳基合金或鈷基合金,並且第一膜層110與第二膜層120可選用相同或不同的材料。 In one embodiment, the thickness of the first film layer 110 and the second film layer 120 is 0.5˜20 millimeters (mm), and the thickness of the first film layer 110 and the second film layer 120 may be the same or different. In addition, the hardness of the first film layer 110 and the second film layer 120 is greater than that of the substrate 101 to provide better impact resistance and anti-friction properties to protect the substrate 101 . Specifically, the materials of the first film layer 110 and the second film layer 120 are selected from tungsten steel (Tungsten steel), tungsten carbide (Tungsten carbide), aluminum oxide (Al 2 O 3 ), zirconium dioxide (ZrO 2 ), iron base alloy, nickel-based alloy or cobalt-based alloy, and the first film layer 110 and the second film layer 120 can be made of the same or different materials.

請參閱圖5A、圖6A、圖6B、圖7A、圖7B、圖8A與圖8B,圖5A、圖6A、圖6B、圖7A、圖7B、圖8A與圖8B所繪示為耐受性的膜層結構的製造方法。首先,進行步驟S10,提供一基材101(如圖6A、6B所示)。接著,進行步驟S20,在基材101上沿著第一方向111形成多個第一膜層110(如圖7A、7B所示)。然後,進行步驟S30,在基材101上沿著第二方向121形成多個第二膜層120(如圖8A、8B所示)。而第二膜層120與第一膜層110的交疊處,則以第二膜層120覆蓋第一膜層110而形成。 Please refer to Figures 5A, 6A, 6B, 7A, 7B, 8A and 8B, Figures 5A, 6A, 6B, 7A, 7B, 8A and 8B depict tolerance The manufacturing method of the film layer structure. First, step S10 is performed to provide a substrate 101 (as shown in FIGS. 6A and 6B ). Next, step S20 is performed to form a plurality of first film layers 110 on the substrate 101 along the first direction 111 (as shown in FIGS. 7A and 7B ). Then, step S30 is performed to form a plurality of second film layers 120 along the second direction 121 on the substrate 101 (as shown in FIGS. 8A and 8B ). The overlap of the second film layer 120 and the first film layer 110 is formed by covering the first film layer 110 with the second film layer 120 .

在一實施例中,於步驟S20中,是每間隔一段距離形成一個第一膜層110,使第一膜層110彼此之間形成多個個第一溝槽D1,而基材101可從第一溝槽D1中露出。 In one embodiment, in step S20 , a first film layer 110 is formed at intervals so that a plurality of first trenches D1 are formed between the first film layers 110 , and the substrate 101 can be formed from the first film layer 110 . A trench D1 is exposed.

在一實施例中,於步驟S30中,是每間隔一段距離形成一個第二膜層120,使第一膜層110彼此之間形成多個個第二溝槽D2,而基材101可從第一溝槽D1中露出。 In one embodiment, in step S30, a second film layer 120 is formed at intervals of a certain distance, so that a plurality of second trenches D2 are formed between the first film layers 110, and the substrate 101 can be formed from the first film layer 110. A trench D1 is exposed.

在另一實施例中,於步驟S20中,多個第一膜層110是彼此緊靠而形成,使第一膜層110覆蓋基材101。(如圖3A、3B所示) In another embodiment, in step S20 , a plurality of first film layers 110 are formed in close contact with each other, so that the first film layers 110 cover the substrate 101 . (As shown in Figure 3A, 3B)

在另一實施例中,於步驟S30中,多個第二膜層110是彼此緊靠而形成,使第二膜層110覆蓋第一膜層110或基材101。(如圖3A、3B所示) In another embodiment, in step S30 , a plurality of second film layers 110 are formed close to each other, so that the second film layers 110 cover the first film layer 110 or the substrate 101 . (As shown in Figure 3A, 3B)

請參閱圖5B,圖5B所繪示為雷射熔覆的示意圖。在步驟S20與步驟S30中,第一膜層110與第二膜層120是經由雷射熔覆的方式形成。雷射熔覆是使用一雷射210聚焦在基材101上,同時對著聚焦點110’以噴嘴220噴出粉狀的熔覆材料221。而這些熔覆材料會受到雷射210影響而熔化,從而沾附在基材101上,此時持續移動基材101,便可將熔覆材料221沾附在基材101上。接下來,熔覆材料冷卻和固化後,便形成第一膜層110或第二膜層120。 Please refer to FIG. 5B , which is a schematic diagram of laser cladding. In step S20 and step S30, the first film layer 110 and the second film layer 120 are formed by laser cladding. In the laser cladding, a laser 210 is used to focus on the substrate 101, and at the same time, the powder cladding material 221 is sprayed with a nozzle 220 toward the focus point 110'. These cladding materials will be melted under the influence of the laser 210 , and thus adhere to the substrate 101 . At this time, the cladding material 221 can be adhered to the substrate 101 by continuously moving the substrate 101 . Next, after the cladding material is cooled and solidified, the first film layer 110 or the second film layer 120 is formed.

進一步的,在本實施例中,是選用鎢鋼(Tungsten steel)、碳化鎢(Tungsten carbide)、氧化鋁(Al2O3)、二氧化鋯(ZrO2)、鐵基合金、鎳基合金或鈷基合金作為熔覆材料221,並以此形成第一膜層110或第二膜層120。其中,第一膜層110與第二膜層120可選用相同或不同的材料形成。在一實施例中,在形成第一膜層110或第二膜層120雷射熔覆的過程中,製程氣體為氬氣,載氣流量為1-15 l/min,工作距離為10-14mm,雷射功率為300-1500W,掃描速率為1-20mm/s,送粉速率為10-50g/s。 Further, in this embodiment, tungsten steel (Tungsten steel), tungsten carbide (Tungsten carbide), aluminum oxide (Al 2 O 3 ), zirconium dioxide (ZrO 2 ), iron-based alloy, nickel-based alloy or The cobalt-based alloy is used as the cladding material 221 to form the first film layer 110 or the second film layer 120 . Wherein, the first film layer 110 and the second film layer 120 may be formed of the same or different materials. In one embodiment, in the process of forming the first film layer 110 or the second film layer 120 by laser cladding, the process gas is argon, the flow rate of the carrier gas is 1-15 l/min, and the working distance is 10-14 mm , the laser power is 300-1500W, the scanning rate is 1-20mm/s, and the powder feeding rate is 10-50g/s.

請返參圖5A,在一實施例中,還可進行步驟S40,以雷射對第一膜層110或第二膜層120的表面進行重熔。具體來說,是使用低功率的雷射照射第一膜層110 或第二膜層120表面,使其短暫溶解並重新固化,如此可有效排除第一膜層110或第二膜層120中的雜質與氣體,進一步提高第一膜層110或第二膜層120的硬度、耐磨性與腐蝕性。在一實施例中,在步驟S40的重熔過程中,雷射功率為300-500W,載氣流量為1-15 l/min,工作距離為10-14mm,掃描速率為1-20mm/s。經過上述步驟S10~S40後,便完成本創作之膜層結構100。 Referring back to FIG. 5A , in one embodiment, step S40 may also be performed to re-melt the surface of the first film layer 110 or the second film layer 120 with a laser. Specifically, a low-power laser is used to irradiate the first film layer 110 or the surface of the second film layer 120 to dissolve and re-solidify for a short time, so that impurities and gases in the first film layer 110 or the second film layer 120 can be effectively eliminated, and the first film layer 110 or the second film layer 120 can be further improved. hardness, wear resistance and corrosion resistance. In one embodiment, in the remelting process of step S40, the laser power is 300-500W, the carrier gas flow is 1-15 l/min, the working distance is 10-14mm, and the scanning rate is 1-20mm/s. After the above steps S10-S40, the film layer structure 100 of the present invention is completed.

本創作之膜層結構,透過雷射熔覆在基材101上的形成第一膜層110與第二膜層120,並且選用硬度高於基材101的材料形成第一膜層110與第二膜層120,如此便可提高膜層結構的抗衝擊與抗摩擦的特性。相對於傳統的熱噴塗或氬焊技術,雷射熔覆具備可形成冶金接合、熱影響區小、材料應用廣泛,並且能以焊線或是粉末方式進行熔覆加工等優點,有效提高各類工程機械的使用壽命。 In the film layer structure of the present invention, the first film layer 110 and the second film layer 120 are formed on the base material 101 by laser cladding, and a material with a hardness higher than that of the base material 101 is selected to form the first film layer 110 and the second film layer 120 . The film layer 120 can improve the impact resistance and friction resistance of the film layer structure. Compared with traditional thermal spraying or argon welding technology, laser cladding has the advantages of forming metallurgical bonding, small heat affected zone, wide application of materials, and cladding processing by wire or powder, effectively improving various The service life of construction machinery.

本創作以實施例說明如上,然其並非用以限定本創作所主張之專利權利範圍。其專利保護範圍當視後附之申請專利範圍及其等同領域而定。凡本領域具有通常知識者,在不脫離本專利精神或範圍內,所作之更動或潤飾,均屬於本創作所揭示精神下所完成之等效改變或設計,且應包含在下述之申請專利範圍內。 This creation is described above with examples, but it is not intended to limit the scope of the patent rights claimed by this creation. The scope of patent protection shall depend on the scope of the appended patent application and its equivalent fields. Anyone with ordinary knowledge in this field, without departing from the spirit or scope of this patent, makes changes or modifications, all belong to the equivalent changes or designs completed under the spirit disclosed in this creation, and should be included in the following patent application scope Inside.

100:膜層結構 100: Membrane layer structure

101:基材 101: Substrate

110:第一膜層 110: The first film layer

120:第二膜層 120: Second film layer

Claims (9)

一種膜層結構,包括:一基材;多個第一膜層,設置於該基材上,上述第一膜層是沿著一第一方向設置;及多個第二膜層,設置於該基材上,上述第二膜層是沿著一第二方向設置;其中,上述第一膜層與上述第二膜層交疊設置,該第一方向與該第二方向具有一夾角。 A film layer structure comprises: a base material; a plurality of first film layers disposed on the base material, the first film layers are disposed along a first direction; and a plurality of second film layers disposed on the base material On the substrate, the second film layer is arranged along a second direction; wherein, the first film layer and the second film layer are arranged overlappingly, and the first direction and the second direction have an included angle. 如請求項1所述之膜層結構,其中,該夾角為40~90度。 The film structure according to claim 1, wherein the included angle is 40-90 degrees. 如請求項1所述之膜層結構,其中,上述第一膜層之間具有間隔,形成多個第一溝槽。 The film structure of claim 1, wherein the first film layers are spaced apart to form a plurality of first trenches. 如請求項1所述之膜層結構,其中,上述第一膜層彼此緊靠而設置。 The film structure according to claim 1, wherein the first film layers are arranged in close proximity to each other. 如請求項1所述之膜層結構,其中,上述第一膜層彼此交疊。 The film structure of claim 1, wherein the first film layers overlap each other. 如請求項1所述之膜層結構,其中,上述第二膜層之間具有間隔,形成多個第二溝槽。 The film structure of claim 1, wherein the second film layers are spaced apart to form a plurality of second trenches. 如請求項1所述之膜層結構,其中,上述第二膜層彼此緊靠而設置。 The film structure according to claim 1, wherein the second film layers are arranged in close proximity to each other. 如請求項1所述之膜層結構,其中,上述第二膜層彼此交疊。 The film structure of claim 1, wherein the second film layers overlap each other. 如請求項1所述之膜層結構,其中,該第一膜層與該第二膜層的厚度為0.5~20mm。 The film structure of claim 1, wherein the thickness of the first film layer and the second film layer is 0.5-20 mm.
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