TWM627796U - Automatically conveying and storage apparatus of semi-finished goods - Google Patents

Abstract

The present invention reveals an automatically conveying and storage apparatus of semi-finished goods, concluding a storage compartment and a control device. The inside of the storage compartment can be defined as a storage space, with more the one storage place, and a passing port. The control device comprises a control center and an automatic arm which is controlled by the control center moving between the storage space and the passing port. The automatic arm comprise a scanning unit which performing a scanning procedure in front of each storage place and passing port to detect if other storage box exist, and ensure the prevention of the damage to the storage box.

Description

Automatic conveying and storage device for semi-finished semiconductor wafers

An automatic conveying and storage device, particularly an automatic conveying and storage device for semi-finished semiconductor wafers.

The new type of semiconductor integrated circuit (IC) has enabled the rapid and advanced development of the technology industry in modern life, enabling people to obtain a richer and more convenient life, and the application level of semiconductors not only covers the intelligent With the development of 5G communication, AI smart technology and IoT Internet of Things, semiconductors have become the key application basis for many technology industries.

The process of semiconductor manufacturing is generally film coating, photoresist coating, photoresist development, etching and photoresist removal, so that a desired circuit diagram can be displayed on a wafer; finally, cutting, pasting, welding and molding are performed. The steps produce a finished wafer. Since the finished wafer involves the operation of an entire technological equipment, the quality requirements of the finished wafer are extremely important. Therefore, various manufacturing industries are very careful about the production environment and equipment requirements of the wafer.

However, when the wafer product needs to be manufactured in large quantities or efficiently, the transfer of the wafer between the above-mentioned production steps and equipment is extremely important. Risk of quality degradation, and when the wafer is in the upper and lower production steps During a preparation period between the steps, most of the wafers are stored in a corner and wait, which often results in a defective rate due to exposure of the wafer to an ambient air, resulting in a waste of cost and material.

In view of this, the development can enable the wafer to achieve excellent transfer quality that reduces collisions between the above-mentioned production step equipment, reduces personnel costs, and the wafer can be maintained in good environmental quality during the preparation period, reducing defects. The generation of high efficiency is the goal that each manufacturing industry needs to develop.

In order to develop a wafer that can achieve excellent transfer quality between various production equipment, reduce personnel costs, and maintain a good environmental quality of the wafer during the preparation period, the present invention provides an automatic transportation of semi-finished semiconductor wafers and storage device, which includes a storage device and an operation device, the interior of the storage device can be defined with an accommodating space including more than one storage position and a pickup port, the operation device includes a control center and an automatic arm, The automatic arm is driven by the control center to move between the pick-up port and the accommodating space. The automatic arm includes a detection device, and the detection device executes a detection program corresponding to the storage position or the pick-up port.

Wherein, the detection device utilizes a laser principle to execute the detection procedure, and the laser principle can be presented in an occlusion type, a reflection type or a contrast type.

Wherein, the automatic arm includes an operation center and a gripping device disposed at a free end of the automatic arm, and the detection device is provided on the gripping device, the operation center receives the instruction from the control center, and The clamping device and the detection device are driven.

Further, the control center includes a monitoring module, a data recording module and a control module that are connected to each other, the monitoring module monitors an environmental condition of the accommodating space, and generates a monitoring result and transmits it to the data a recording module and the control module; the data recording module stores the monitoring result; the control module evaluates the monitoring result and regulates the monitoring module, the data recording module or the automatic arm.

Further, a scanning password is set near each of the storage positions, and the scanning password is presented in a 2D or RFID manner, and its content includes a stored data, and the monitoring module is arranged on the gripping device or the automatic arm. The monitoring module is a scanner and scans the scanning passwords to generate the stored data record in the data record module.

Further, when the control module evaluates that the monitoring result is abnormal, the control module transmits a warning message notification.

Further, the operation device includes an operation interface, the operation interface provides a setting of the control center, and the control center gives the command to the automatic arm through the setting.

A control method for an automatic conveying and storage device for semi-finished semiconductor wafers, the step of storing a storage box comprises: a control center of an operating device selects a free storage position according to a storage data of a data recording module and forms an instruction ; An automatic arm of the operating equipment receives the instruction through an operation center, and drives a gripping device to the extraction port to grip the storage box; the automatic arm moves the gripping device and the storage box to the storage position. Relative position, a detection device executes a detection procedure, and generates a detection result to the operation center; the operation center receives the detection result and determines whether there is another storage box in the storage position, if not, the operation center Drive the gripping device to store the storage box; if there is, the operation center immediately suspends the movement of the automatic arm, and transmits an abnormal message to the control center; and the control center receives the abnormal message, immediately stops the instruction, and stores it in the The abnormal message is marked on the data.

Wherein, performing the step of removing the storage box from the storage position includes: the control center transmits the command to the operation center, and the command includes the storage position where the storage box to be moved is located; The operation center receives the command and drives the gripping device to the relative position of the storage position, a monitoring module scans a scanning password near the storage position, and returns a scanning result to the control center; and the The control center confirms whether the relative position of the storage position is consistent with the command, and if so, the gripping device grips the storage box on the storage position; if not, the control center stops the command and records the data record module The abnormal message is marked on the stored data.

Further, when the control module marks the abnormal message, it transmits a warning message notification.

The automatic arm can move between the pick-up port and the accommodating space, so that the automatic transportation and storage device for semi-finished semiconductor wafers provided by the present invention can move the storage box without the user entering and leaving the accommodating space, not only reducing the need for To accommodate the crisis of space pollution, it can save unnecessary personnel costs.

Through the detection device, before the storage box is stored, it can be pre-confirmed whether there is another storage box in the storage position or the extraction port, so as to ensure that the storage position or the extraction port is clear to prevent the storage box from colliding resulting in destruction.

10: Storage Devices

11: Accommodating space

111: Storage area

12: Open the door

13: Transport space

131: Partition

1311: Extraction port

132: input port

133: output port

134: hatch

20: Transport equipment

30: Operating equipment

31: Operation interface

32: Control Center

321: Monitoring module

322:Data logging module

323: Control Module

33: Automatic Arm

331: Gripper device

3311: Abutment Plate

3312: Gripper

332: Detection device

A: Storage box

Fig. 1 is the three-dimensional schematic diagram of the new preferred embodiment

Figure 2 is a schematic diagram of the interior of the new preferred embodiment

FIG. 3 is a schematic diagram of part of the structure of the new preferred embodiment

FIG. 4 is a three-dimensional schematic diagram of the system structure of the new preferred embodiment

FIG. 5 is a schematic diagram of the first step of the system according to the new preferred embodiment.

6 is a schematic diagram of the second step of the system according to the new preferred embodiment

Please refer to FIG. 1 to FIG. 3 , which are preferred embodiments of the automatic transportation and storage device for semi-finished semiconductor wafers provided by the novel, which includes a storage device 10 , a transportation device 20 and an operation device 30 . The storage device 10 The interior can be defined as an accommodating space 11, the transportation device 20 is arranged in the storage device 10, wherein the transportation device 20 is not directly connected with the accommodating space 11, in this embodiment, the transportation device 20 is a The type of track presented.

The accommodating space 11 includes a storage area 111, the storage area 111 contains a plurality of storage positions, and the storage positions are arranged at intervals according to the size of a storage box A, so that the storage box A can be put into or removed from the storage box A as required storage bit. The storage box A stores a plurality of semi-finished wafers. Preferably, the storage box A is arranged with a plurality of storage slots, so that the semi-finished wafers can be placed in the storage slots respectively, so as to prevent the storage box A from moving. At the same time, there is a fear of collision between the semi-finished wafers. The accommodating space 11 can maintain an overall environmental condition of the accommodating space 11 such as humidity, temperature or lighting through an environment maintaining device according to the environmental requirements of the semi-finished wafer to be stored.

The storage device 10 includes a door 12 and a transport space 13 . The door 12 is provided on one of the outer side walls of the storage device 10 , so that the accommodating space 11 can be opened through the door 12 and the area outside the storage device 10 Communication allows a user to enter and exit the storage device 10 through the door 12 .

The transportation space 13 is not directly communicated with the accommodating space 11 , and the transportation device 20 is accommodated in the transportation space 13 . The transport space 13 includes a partition 131 , an input port 132 , an output port 133 and a hatch 134 , and the storage device 10 separates the transport space 13 from the accommodating space 11 through the partition 131 . The input port 132 and the output port 133 are respectively pierced through the outer wall of the storage device 10 in the transport space 13 , and the input port 132 and the output port 133 are correspondingly disposed at two end sections of the transport device 20 , This enables the storage box A to enter the transport space 13 from the input port 132 , to be transported via the transport device 20 , and to leave the storage device 10 via the output port 133 .

The partition plate 131 is provided with a pick-up port 1311 , and the hatch 134 is movably disposed at the position of the pick-up port 1311 . Through the opening of the hatch door 134 , the transport space 13 can be connected to the container through the pick-up port 1311 . The space 11 is connected, so that the storage box A can be transferred to the position corresponding to the pick-up port 1311 through the transport device 20, and then moved from the transport space 13 to the accommodating space 11 and the storage area 111 after the hatch is opened. stored in.

The arrangement of the partition 131 enables the transport space 13 to communicate with the accommodating space 11 only through the opening of the hatch 134, thereby avoiding the opportunity of the accommodating space 11 directly contacting the area outside the storage device 10, so that the The accommodating space 11 can not only meet the requirements of high cleanliness, but also can reduce the variable factors of environmental changes in the accommodating space 11, effectively maintain the environmental conditions, and avoid repeated startup of the environmental maintenance equipment and adjustment of the environmental conditions. Reduce resource waste.

In the preferred embodiment of the present invention, the transport space 13 is preferably positioned below the storage area 111 , so that the storage area 111 located above is not easily affected by an air entering from the transport space 13 when the hatch 134 is opened The interference of the accommodating space 11 maintains the better cleanliness of the storage area 111 . The partition 131 can be a transparent plate, so as to facilitate the user to observe the transportation status of the storage box A entering the transportation space 13 and the transportation equipment 20 in real time.

The transport space 13 is laterally arranged at the bottom of one side of the storage device 10, so that the storage box A can be transported horizontally and is not easily tipped over. On the bulkhead 131, and a movement direction of the hatch door 134 opening is vertical movement from top to bottom, so that when the hatch door 134 is opened, the movement direction can further avoid the disturbance of the air, reduce ground dust or It is the possibility that impurities enter the accommodating space 11 from the transporting space 13 .

Please refer to FIG. 5 , the operation device 30 includes an operation interface 31 , a control center 32 and an automatic arm 33 . The operation interface 31 can be separated from the storage device 10 in the form of a computer or directly installed in the storage device 10 Preferably, the operation interface 31 is arranged on the side of the door 12 . The automatic arm 33 is arranged in the accommodating space 11 and can be controlled by the control center 32 Provided with an instruction drive, a user can provide a setting of the control center 32 through the operation interface 31, and then drive the automatic arm 33, and the automatic arm 33 can clamp the storage box A at the extraction port 1311, the container. The storage space 11 or the storage area 111 is moved between the storage areas 111 , so that the automatic conveying and storage device for semi-finished semiconductor wafers provided by the present invention can move the storage box A without the need for the user to enter and exit the storage space 11 , which not only reduces the storage capacity The crisis of space 11 pollution can save unnecessary personnel costs.

The control center 32 includes a monitoring module 321 , a data recording module 322 and a control module 323 which are connected to each other. The monitoring module 321 can monitor the environmental conditions of the accommodating space 11, and generate a monitoring result to transmit to the data recording module 322 and the control module 323; or the monitoring module 321 can be a scanner and Scan a stored data of each storage position in the storage area 111 and record it in the data recording module 322 ; the monitoring module 321 can also be a camera to monitor the transport equipment 20 and the storage box A in the transport space 13 in real time conveying the monitoring result to the data recording module 322 and the control module 323 .

The data recording module 322 stores the monitoring results and the stored data, which facilitates the user to review and ensure detailed records of the data. The monitoring result can record the environmental conditions in the accommodating space and the transportation status of the transportation equipment 20 and the transportation space 13 according to the time point. The storage data may include whether there is the storage box A in each storage position, the storage record of the storage box A, and the data of the semi-finished chips in the storage box A. The data storage module 322 may also record the user's authority. As well as records entering and leaving the storage device 10 .

The control module 323 provides the command to the environment maintenance device, the monitoring module 321 or the automatic arm 33 according to the setting input by the user via the operation interface 31, and the control module 323 can also be connected to the transport The device 20 and the hatch 134 are used to control the conveyance of the transport device 20 and the opening of the hatch 134 according to the settings.

The control module 323 evaluates the monitoring result according to the setting, for example, when the monitoring result of the environmental condition exceeds a data range of the setting, the control module 323 transmits the command to the loop environment maintenance equipment, the environmental equipment adjusts the environmental conditions according to the instruction; or, the control module 323 analyzes the monitoring results of the transportation equipment 20 and the transportation space 13 according to the setting and is abnormal (if there is foreign matter or damage ), the control module transmits a warning message to notify the user, so that the user can monitor the automatic conveying and storage device of the semi-finished semiconductor chip provided by the present invention in real time.

The automatic arm 33 includes an operation center, a gripping device 331 and a detection device 332 . The operation center is connected to the control center 32 . The operation center receives the command from the control module 323 and drives the gripping device 331 and the detection device 332 . At the free end, the automatic arm 33 can grip the storage box A through the gripping device 331 .

The clamping device 331 includes an abutting plate 3311 and two clamping claws 3312 protruding from one opposite side of the abutting plate 3311 . In this embodiment, two clamping claws 3312 are respectively disposed on the upper and lower opposite sides of the abutting plate 3311, so that when the clamping device 331 clamps the storage box A, the two clamping claws 3312 can clamp the storage box A. On the upper and lower sides, the storage box A can be naturally seated on the clamping jaw 3312 located below according to gravity, reducing the mechanical force generated by the automatic arm 33 when clamping.

When the gripping device 331 grips the storage box A, an open end of the gripping device 331 presents an inclined angle with an upward angle, so that the storage box A can abut against the abutment according to the inclined angle The plate 3311 can prevent the semi-finished wafers in the storage box A from falling out when moving.

Preferably, the concave-convex arrangement corresponding to the structure of the storage box A is provided to maintain the stability of the clamping device 331 for clamping the storage box A, or the clamping device 331 may include a movable lock, so that the clamping device 331 can clamp the storage box A. The storage box A can be locked by the movable lock, and the movable lock can be presented by a switchable magnetic mechanism or a snap-on mechanical joint to prevent the storage box A from falling onto the clamping device 331 .

The detection device 332 is disposed on the gripping device 331. When the automatic arm 33 wants to place the storage box A in one of the storage positions or in front of the pick-up port 1311, the detection device 332 is directed to the storage position. Or the pick-up port 1311 executes a detection procedure and generates a detection result, the automatic arm 33 or According to the detection result, the control center 32 determines whether there are other items or other storage boxes A placed in the storage position or the pick-up port. In this embodiment, the detection device 332 uses a laser principle to execute the detection process.

Through the detection device 332, before the automatic arm 33 stores the storage box A, it can be pre-confirmed whether there is another storage box A in the storage position or the retrieval port 1311, so as to ensure that the storage position or the storage box A exists. The clearance of the material port 1311 prevents the storage box A from colliding and causing damage, and the laser principle can be presented in the form of occlusion, reflection or contrast.

Preferably, a scanning password is set near each of the storage positions, and the scanning password is presented in a 2D or RFID manner, and its content package also includes the storage data, on the gripping device 331 or the automatic arm 33 The monitoring module 321 is disposed on the monitoring module 321 , and the monitoring module 321 can correspond to the scanning password, generate the stored data, and record it in the data recording module 322 .

Please refer to FIG. 6 , when the automatic conveying and storage device for semi-finished semiconductor wafers provided by the present invention is to store the storage box A, the steps include:

Step S11 to transport the storage box A: the control center 32 drives the transport device 20 to transport the storage box A to the corresponding door 134 .

Step S12 to open the cabin door 134 : the control center 32 drives the cabin door 134 to open, and evaluates whether there is a free storage space according to the storage data of the data recording module 322 .

Step S13 forms the command: the control center 32 selects the free storage position and forms the command, the control center 32 transmits the command to the operation center, and the command includes the relative position of the free storage in the storage area 111 .

Step S14 Drive the gripping device 331 : the operation center receives the instruction, and drives the gripping device 331 to the extraction port 1311 to grip the storage box A.

Step S15 executes the detection procedure: the operation center drives the automatic arm 33 to move according to the instruction, and makes the gripping device 331 and the storage box A move to the relative position of the storage position, and the detection device 332 executes the detection The detection program is used to generate the detection result to the operation center.

Step S16 determines the detection result: the operation center receives the detection result and determines whether there is another storage box A in the storage position, if not, the operation center drives the clamping device 331 to store the storage box A; if there is , the operation center immediately suspends the movement of the automatic arm 33 , and transmits an abnormal message to the control center 32 , and executes step S17 .

Step S17 Stop action: when the control center 32 receives the abnormal message, it immediately stops storing the instruction of the storage box A, marks the abnormal message on the stored data of the data recording module 322, and then transmits the warning message To the user, the user can monitor the automatic conveying and storage device of the semi-finished semiconductor wafer provided by the present invention in real time.

Through the cooperation of the detection device 332 and the operation center, it is possible to pre-confirm whether there is another storage box A or a foreign object in the storage position or the pick-up port 1311 before the storage box A is stored, so as to ensure the storage position. Or the removal port 1311 is clear to prevent the storage box A from being damaged due to collision. Further, judging the detection result is not limited to be executed by the operation center, and the control center 32 can also be used for judgment.

When the detection device 332 executes the detection procedure, the monitoring module 321 scans the scanning password and sends the scanning result back to the control center 32, which can simultaneously confirm that the gripping device 331 has moved to the storage position Whether the relative position of the file matches the command, and after storing the storage box A, update the stored data of the data recording module 322.

When the control center 32 receives the abnormal message, and immediately stops storing the instruction of the storage box A, the control center 32 can then return to the step S2 to evaluate whether there is any The free storage bit is selected, and the free storage bit is selected to form the second command, so that the automatic arm can complete the storage step according to the second command

On the contrary, please refer to FIG. 7 , when the automatic transportation and storage device for semi-finished semiconductor wafers provided by the present invention intends to move the storage box A to one of the storage positions to the pick-up port 1311 , the steps include:

Step S21 forms the command: the control center 32 transmits the command to the operation center, and the command includes the storage position where the storage box A to be moved is located.

Step S22 drives the gripping device 331 and generates the scanning result: the operation center receives the instruction, and drives the gripping device 331 to the relative position of the storage position, the monitoring module 321 scans the scanning password, and scans the scanning The result is sent back to the control center 32 .

Step S23 confirms the command: the control center 32 confirms whether the relative position of the gripping device 331 moved to the storage position is consistent with the command, if so, the gripping device 331 grips the storage box A on the storage position; No, the control center 32 stops the instruction, marks the abnormal message on the stored data of the data logging module 322, and then transmits the warning message to the user.

10: Storage Devices

12: Open the door

13: Transport space

133: output port

30: Operating equipment

31: Operation interface

Claims (10)

An automatic conveying and storage device for semi-finished semiconductor wafers, which includes a storage device and an operation device, the interior of the storage device can be defined with an accommodating space including more than one storage position and a pick-up port, and the operation device includes a A control center and an automatic arm, the automatic arm is driven by the control center to move between the pick-up port and the accommodating space, the automatic arm includes a detection device and a gripping device, wherein the operating device executes a The step of storing the storage box to the idle storage position includes: the control center selects the idle storage position according to a storage data, and forms an instruction; the automatic arm receives the instruction and moves the gripping device and the storage box to For the relative position of the storage position, the detection device executes a detection procedure to generate a detection result; the automatic arm or the control center judges whether there is another storage box in the storage position according to the detection result; if not, the The gripping device stores the storage box in the storage position; if there is, immediately suspends the movement of the automatic arm, and transmits an abnormal message to the control center; and the control center receives the abnormal message, immediately stops the instruction, and stores the data in the mark the exception message. According to the automatic transportation and storage device for semi-finished semiconductor wafers as described in claim 1, after the control center receives the abnormal message, the control center selects the second free storage position according to the storage data, and forms the instruction to transmit to the The automatic arm repeats the steps of storing the storage box to the free storage position by the operating device. According to the automatic transportation and storage device for semi-finished semiconductor wafers as claimed in claim 2, the detection device utilizes a laser principle to execute the detection process, and the laser principle can be presented in an interrupting type, a reflection type or a contrast type. . According to the automatic transportation and storage device for semi-finished semiconductor wafers as described in claim 3, a scanning password is provided near each storage position, and the scanning password is presented in a 2D or RFID manner, and its content includes the storage data. According to the automatic conveying and storage device for semi-finished semiconductor wafers as described in claim 4, a monitoring module is arranged on the gripping device or the automatic arm, and the monitoring module scans each of the scanning passwords to generate the stored data record in the control center. The automatic conveying and storage device for semi-finished semiconductor wafers as claimed in claim 5, wherein the step of removing the storage box from the storage position by the operating device comprises: the control center transmits the instruction to the automatic arm, the instruction including the moving The storage position where the storage box is located; the automatic arm drives the gripping device to the relative position of the storage position, the monitoring module scans the scanning password near the storage position, and returns a scan result to the control and the control center confirms whether the stored data presented in the scanning result is consistent with the instruction, if so, the gripping device grips the storage box on the storage position; if not, the control center stops the instruction, and in The abnormal message is marked on the stored data. According to the automatic transportation and storage device for semi-finished semiconductor wafers according to claim 6, the storage data includes whether there is the storage box in each of the storage positions, the contents of the storage box, and the storage record of the storage box. According to the automatic transportation and storage device for semi-finished semiconductor wafers as claimed in claim 7, the operation device includes an operation interface, the operation interface provides a setting of the control center, and the control center gives the command to the automatic arm through the setting. The automatic conveying and storage device for semi-finished semiconductor wafers as claimed in claim 8, wherein the automatic arm comprises an operation center, and the detection device is arranged on the gripping device, and the operation The center receives the instruction from the control center, and drives the gripping device and the detection device, the automatic arm receives the detection result through the operation center, and determines whether there is another storage box in the storage position, if not , the operation center drives the gripping device to store the storage box; if there is, the operation center immediately suspends the movement of the automatic arm, and transmits the abnormal message to the control center. According to the automatic transportation and storage device for semi-finished semiconductor wafers as claimed in claim 9, the control center transmits a warning message notification when marking the abnormal message.

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