TWM623767U - Gas detecting system - Google Patents

Gas detecting system Download PDF

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TWM623767U
TWM623767U TW110213249U TW110213249U TWM623767U TW M623767 U TWM623767 U TW M623767U TW 110213249 U TW110213249 U TW 110213249U TW 110213249 U TW110213249 U TW 110213249U TW M623767 U TWM623767 U TW M623767U
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detection
gas
unit
target
heating
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郭一男
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沃亞科技股份有限公司
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Abstract

本創作關於一種氣體檢測系統,包括:一進氣管路,供輸入一待測氣體;一加熱單元,連接該進氣管路,供加熱該待測氣體並使該待測氣體中之至少一目標氣體形成至少一檢測目標;及一檢測模組,包括一與該加熱單元連接之檢測單元及一與該檢測單元通聯之處理單元,該檢測單元供檢測該至少一檢測目標之含量並產生至少一檢測訊號,該處理單元可接收該至少一檢測訊號並據以獲得一檢測結果資料;其中,該至少一目標氣體包括有機氯化合物,該至少一檢測目標包括氯化氫。The present invention relates to a gas detection system, including: an intake line for inputting a gas to be tested; a heating unit connected to the intake line for heating the gas to be tested and causing at least one of the gases to be tested The target gas forms at least one detection target; and a detection module includes a detection unit connected with the heating unit and a processing unit in communication with the detection unit, the detection unit is used to detect the content of the at least one detection target and generate at least one detection unit. A detection signal, the processing unit can receive the at least one detection signal and obtain a detection result data accordingly; wherein, the at least one target gas includes organic chlorine compounds, and the at least one detection target includes hydrogen chloride.

Description

氣體檢測系統Gas detection system

本創作係與檢測系統有關,特別是有關於一種氣體檢測系統。This work is related to detection systems, especially a gas detection system.

有機氯化合物常做為工業用溶劑或油漆清除劑等,由於二氯甲烷之沸點低而容易揮發至空氣中,若廢氣排放不慎而造成洩漏,易造成人體之危害。即使二氯甲烷不會在人體內累積,但吸入大量的二氯甲烷會導致暈眩、噁心、末梢麻木或刺痛;吸入少量的二氯甲烷則會造成注意力降低,增加作業時之危險性,因而有必要監測二氯甲烷之環境濃度。Organochlorine compounds are often used as industrial solvents or paint scavengers, etc. Due to the low boiling point of methylene chloride, it is easy to volatilize into the air. If the waste gas is discharged carelessly, it will cause leakage, which will easily cause harm to the human body. Even if methylene chloride does not accumulate in the human body, inhaling a large amount of methylene chloride can cause dizziness, nausea, peripheral numbness or tingling; inhaling a small amount of methylene chloride can reduce concentration and increase the risk of work. , so it is necessary to monitor the ambient concentration of dichloromethane.

然而,習知之有機氯化合物檢測方法,舉例但不限,以氣相層析質譜儀進行分析,雖可有效達成定性及定量之目的,但操作費時且耗費成本,無法即時採樣並檢測環境中之有機氯化合物之環境濃度;若藉由萃取或光離子化等方式進行檢測,則易受其他揮發性氣體影響而導致低準確率,且不利於低濃度之檢測,存在亟待改善之缺弊。However, the conventional method for detecting organochlorine compounds, for example, but not limited to, uses gas chromatography mass spectrometer for analysis, although it can effectively achieve the purpose of qualitative and quantitative, but the operation is time-consuming and costly, and it is impossible to immediately sample and detect the The environmental concentration of organochlorine compounds; if detected by extraction or photoionization, it is easily affected by other volatile gases, resulting in low accuracy, and is not conducive to the detection of low concentrations. There are shortcomings that need to be improved.

因此,有必要提供一種新穎且具有進步性之氣體檢測系統,以解決上述之問題。Therefore, it is necessary to provide a novel and progressive gas detection system to solve the above problems.

本創作之主要目的在於提供一種氣體檢測系統,可供快速採樣並檢測環境中之有機氯化合物,檢測效率佳且準確率高。The main purpose of this creation is to provide a gas detection system that can quickly sample and detect organochlorine compounds in the environment, with good detection efficiency and high accuracy.

為達成上述目的,本創作提供一種氣體檢測系統,包括:一進氣管路,供輸入一待測氣體;一加熱單元,連接該進氣管路,供加熱該待測氣體並使該待測氣體中之至少一目標氣體形成至少一檢測目標;及一檢測模組,包括一與該加熱單元連接之檢測單元及一與該檢測單元通聯之處理單元,該檢測單元供檢測該至少一檢測目標之含量並產生至少一檢測訊號,該處理單元可接收該至少一檢測訊號並據以獲得一檢測結果資料;其中,該至少一目標氣體包括有機氯化合物,該至少一檢測目標包括氯化氫。In order to achieve the above-mentioned purpose, the present invention provides a gas detection system, including: an intake line for inputting a gas to be tested; a heating unit, connected to the intake line, for heating the gas to be tested and causing the gas to be tested to be heated. At least one target gas in the gas forms at least one detection target; and a detection module includes a detection unit connected with the heating unit and a processing unit in communication with the detection unit, the detection unit is used for detecting the at least one detection target and generate at least one detection signal, the processing unit can receive the at least one detection signal and obtain a detection result data accordingly; wherein, the at least one target gas includes organic chlorine compounds, and the at least one detection target includes hydrogen chloride.

以下僅以實施例說明本創作可能之實施態樣,然並非用以限制本創作所欲保護之範疇,合先敘明。The following examples only illustrate the possible implementation of this creation, but are not intended to limit the scope of protection of this creation, and will be described first.

請參考圖1至3,其顯示本創作之一較佳實施例,本創作之氣體檢測系統1包括一進氣管路10、一加熱單元20及一檢測模組30。Please refer to FIGS. 1 to 3 , which show a preferred embodiment of the present invention. The gas detection system 1 of the present invention includes an intake line 10 , a heating unit 20 and a detection module 30 .

該進氣管路10供輸入一待測氣體;該加熱單元20連接該進氣管路10,該加熱單元20供加熱該待測氣體並使該待測氣體中之至少一目標氣體形成至少一檢測目標;該檢測模組30包括一與該加熱單元20連接之檢測單元31及一與該檢測單元31通聯之處理單元32,該檢測單元31供檢測該至少一檢測目標之含量並產生至少一檢測訊號,該處理單元32可接收該至少一檢測訊號並據以獲得一檢測結果資料;其中,該至少一目標氣體包括有機氯化合物,該至少一檢測目標包括氯化氫。藉此,可達到快速採樣、檢測環境中之有機氯化合物濃度之目的。The intake line 10 is used for inputting a gas to be tested; the heating unit 20 is connected to the intake line 10 , and the heating unit 20 heats the gas to be tested and makes at least one target gas in the gas to be tested form at least one target gas. detection target; the detection module 30 includes a detection unit 31 connected with the heating unit 20 and a processing unit 32 in communication with the detection unit 31, the detection unit 31 is used to detect the content of the at least one detection target and generate at least one For the detection signal, the processing unit 32 can receive the at least one detection signal and obtain a detection result data accordingly; wherein, the at least one target gas includes organic chlorine compounds, and the at least one detection target includes hydrogen chloride. In this way, the purpose of rapid sampling and detection of the concentration of organochlorine compounds in the environment can be achieved.

該加熱單元20之一加熱溫度不低於700℃,使該至少一目標氣體充分熱解出該至少一檢測目標,增加檢測之靈敏度。由於其他干擾氣體並不會形成相同之檢測目標,即使該至少一目標氣體之濃度介於0ppb至20ppb的低濃度範圍亦可有效檢出而不易受該些干擾氣體之影響。較佳地,該進氣管路10另設有一採樣泵11,該採樣泵11控制該進氣管路10之進流量不小於1.0L/min,確保進氣量充足以供熱解後之進樣檢測。A heating temperature of the heating unit 20 is not lower than 700° C., so that the at least one target gas is sufficiently pyrolyzed to obtain the at least one detection target, thereby increasing the detection sensitivity. Since other interfering gases do not form the same detection target, even if the concentration of the at least one target gas is in the low concentration range of 0ppb to 20ppb, it can be effectively detected and is not easily affected by the interfering gases. Preferably, the intake line 10 is further provided with a sampling pump 11, and the sampling pump 11 controls the intake flow of the intake line 10 to be no less than 1.0 L/min, to ensure that the intake volume is sufficient for the process after pyrolysis. sample detection.

進一步說,該檢測單元31包括一供輸入該至少一檢測目標之檢測腔311、一檢測光源312及一與該檢測光源312相對地設置於該檢測腔311二側之光偵測器313,該檢測光源312之光可穿過該至少一檢測目標並形成一投射至該光偵測器313之待測光,該光偵測器313接收該待測光並產生該至少一檢測訊號。該檢測模組30另包括一連接於該加熱單元20及該檢測單元31之間之流量調節閥33,該處理單元32可控制該流量調節閥33,藉以控制進樣流速及流量。該檢測模組30另包括一可供外部操作之操作顯示介面34,該操作顯示介面34與該處理單元32通聯且可顯示該檢測結果資料。該檢測結果資料可例如但不限為與該至少一目標氣體之含量相關之數值、與該至少一檢測目標之含量相關之數值、經該處理單元32判讀後產生之文字提示、警示燈號等,便於操作及檢視檢測結果。於本實施例中,該檢測模組30為一偏軸集成腔光譜雷射分析儀,可立即且快速地得到該至少一檢測目標之含量,檢測效率佳。然,該檢測模組30亦可依需求選用其他分析儀。Further, the detection unit 31 includes a detection cavity 311 for inputting the at least one detection target, a detection light source 312 and a photodetector 313 disposed on both sides of the detection cavity 311 opposite to the detection light source 312 . The light of the detection light source 312 can pass through the at least one detection target and form a light to be measured projected to the light detector 313 , and the light detector 313 receives the light to be measured and generates the at least one detection signal. The detection module 30 further includes a flow control valve 33 connected between the heating unit 20 and the detection unit 31 , and the processing unit 32 can control the flow control valve 33 to control the flow rate and flow of the sample. The detection module 30 further includes an operation display interface 34 for external operation. The operation display interface 34 communicates with the processing unit 32 and can display the detection result data. The detection result data can be, for example, but not limited to, a value related to the content of the at least one target gas, a value related to the content of the at least one detection target, a text prompt generated by the processing unit 32 after interpretation, a warning light, etc. , easy to operate and check the test results. In this embodiment, the detection module 30 is an off-axis integrated cavity spectroscopic laser analyzer, which can obtain the content of the at least one detection target immediately and quickly, with good detection efficiency. Of course, the detection module 30 can also use other analyzers as required.

該氣體檢測系統另包括一可連接於該進氣管路10之稀釋校正器40,該稀釋校正器40供輸入一含有已知濃度之該目標氣體的標準氣體及一稀釋氣體,該稀釋校正器40混合該標準氣體及該稀釋氣體為至少一校正氣體並輸出至該檢測單元31,該檢測單元31檢測該至少一校正氣體並產生至少一校正訊號,該處理單元32接收該至少一校正訊號並據以校正該至少一檢測訊號,增加檢測結果之精確性。較佳地,該進氣管路10另設有一位於該採樣泵11及該稀釋校正器之間之分歧管路12,該分歧管路12例如設有一旁通閥以供排出過量之該至少一校正氣體;該稀釋校正器40可控制該至少一校正氣體之輸出流量大於該採樣泵11之採樣流量,藉以確保進入該加熱單元20之該待測氣體皆為該至少一校正氣體,進而降低外部氣體之干擾、增加檢測之準確率。The gas detection system further includes a dilution corrector 40 which can be connected to the intake pipeline 10. The dilution corrector 40 is used for inputting a standard gas containing the target gas with a known concentration and a dilution gas. The dilution corrector 40 Mix the standard gas and the dilution gas into at least one calibration gas and output it to the detection unit 31, the detection unit 31 detects the at least one calibration gas and generates at least one calibration signal, and the processing unit 32 receives the at least one calibration signal and Accordingly, the at least one detection signal is corrected to increase the accuracy of the detection result. Preferably, the intake pipeline 10 is further provided with a branch pipeline 12 between the sampling pump 11 and the dilution corrector, and the branch pipeline 12 is provided with a bypass valve for discharging the excess of the at least one. Calibration gas; the dilution calibration device 40 can control the output flow rate of the at least one calibration gas to be greater than the sampling flow rate of the sampling pump 11, so as to ensure that the gas to be tested entering the heating unit 20 is the at least one calibration gas, thereby reducing the external Gas interference, increase detection accuracy.

配合參考圖3,本創作另提供一種如前所述之氣體檢測系統之檢測方法,包括下列步驟:採樣S1:輸入該待測氣體至該加熱單元20;分解S2:加熱該待測氣體並使該至少一目標氣體形成該至少一檢測目標;檢測S3:輸入該至少一檢測目標至該檢測單元31並藉由該檢測單元31獲得該至少一檢測訊號;及獲得結果S4:該處理單元32依據該至少一檢測訊號獲得該檢測結果資料。藉由上述方法,可透過檢測該至少一檢測目標之含量而推算出該至少一目標氣體之含量,使難以量測之該至少一目標氣體可被快速且精準地採樣、檢測。Referring to FIG. 3 , the present invention further provides a detection method for the gas detection system as described above, which includes the following steps: sampling S1 : inputting the gas to be detected into the heating unit 20 ; decomposition S2 : heating the gas to be detected and making it The at least one target gas forms the at least one detection target; detection S3: input the at least one detection target to the detection unit 31 and obtain the at least one detection signal by the detection unit 31; and obtain a result S4: the processing unit 32 according to The at least one detection signal obtains the detection result data. With the above method, the content of the at least one target gas can be calculated by detecting the content of the at least one detection target, so that the at least one target gas that is difficult to measure can be quickly and accurately sampled and detected.

該檢測方法另包括下列步驟:輸入複數具有相異含量之該至少一目標氣體的已知氣體以獲得複數反應結果,並依據該複數反應結果定義複數含量指標;及該處理單元32另依據該檢測訊號與該複數含量指標之對應結果獲得該檢測結果資料,藉此可建立該複數含量指標以準確、快速獲得該檢測結果資料。The detection method further includes the following steps: inputting a plurality of known gases with different contents of the at least one target gas to obtain a plurality of reaction results, and defining a plurality of content indicators according to the plurality of reaction results; and the processing unit 32 further according to the detection The detection result data is obtained by the corresponding result between the signal and the multiple content index, whereby the multiple content index can be established to obtain the detection result data accurately and quickly.

要特別說明的是,前述之有機氯化合物可例如包括二氯甲烷、二氯乙烯等含氯有機化合物,亦可為任何其他經加熱分解後可生成氯化氫之氣體。以下茲以該複數已知氣體進一步進行試驗,驗證本創作用於有機氯化合物氣體檢測之可行性。配合參考圖4,X軸表示該稀釋校正器輸入該進氣管路10之二氯甲烷濃度,Y軸表示經由該氣體檢測系統測得之氯化氫濃度;該採樣泵11控制該進氣管路10之進流量為1.5L/min,該加熱溫度為850℃。由圖4可清楚得知,在30ppb(該稀釋校正器可輸出之最低濃度)至1000ppb之二氯甲烷濃度範圍內,輸入該進氣管路10之二氯甲烷濃度與經由該氣體檢測系統測得之氯化氫濃度呈現良好的線性應答趨勢,R2值大於0.999而具有量測之可行性。鑒於一般無塵室或作業空間之二氯甲烷濃度多介於0ppb至20ppb之間,因此更分別探討該氣體檢測系統對於二氯甲烷於低級距濃度變化(分別為1ppb、3ppb及5ppb之)時之靈敏度,由圖5至圖7可得知,該氣體檢測系統及其檢測方法對於低濃度及低級距濃度變化之二氯甲烷仍能保持良好的線性應答趨勢,靈敏度及準確率佳,可實現二氯甲烷氣體之即時採樣及檢測。It should be noted that the aforementioned organochlorine compounds may include, for example, chlorine-containing organic compounds such as dichloromethane and dichloroethylene, or any other gas that can generate hydrogen chloride after being decomposed by heating. Hereinafter, further experiments are carried out with the plural known gases to verify the feasibility of this creation for the detection of organic chlorine compounds. With reference to FIG. 4 , the X-axis represents the dichloromethane concentration input by the dilution corrector into the intake line 10 , the Y-axis represents the hydrogen chloride concentration measured by the gas detection system; the sampling pump 11 controls the intake line 10 The inflow rate was 1.5 L/min, and the heating temperature was 850°C. It can be clearly seen from Fig. 4 that, in the range of dichloromethane concentration from 30ppb (the lowest concentration that the dilution corrector can output) to 1000ppb, the dichloromethane concentration input into the intake line 10 and the gas detection system measured The concentration of hydrogen chloride obtained shows a good linear response trend, and the R2 value is greater than 0.999, which is feasible for measurement. Since the concentration of methylene chloride in a general clean room or work space is usually between 0ppb and 20ppb, it is necessary to discuss the effect of the gas detection system on the change of methylene chloride in low-level concentration (respectively 1ppb, 3ppb and 5ppb). As can be seen from Figure 5 to Figure 7, the gas detection system and its detection method can still maintain a good linear response trend for dichloromethane with low concentration and low-level concentration changes, and the sensitivity and accuracy are good. Immediate sampling and detection of methylene chloride gas.

10:進氣管路 11:採樣泵 12:分歧管路 20:加熱單元 30:檢測模組 31:檢測單元 311:檢測腔 312:檢測光源 313:光偵測器 32:處理單元 33:流量調節閥 34:操作顯示介面 40:稀釋校正器 S1~S4:步驟 10: Intake pipeline 11: Sampling pump 12: branch pipeline 20: Heating unit 30: Detection module 31: Detection unit 311: Detection cavity 312: Detect light source 313: Light detector 32: Processing unit 33: Flow control valve 34: Operation display interface 40: Dilution Corrector S1~S4: Steps

圖1為本創作一較佳實施例之結構配置示意圖。 圖2為本創作一較佳實施例之結構方塊圖。 圖3為本創作一較佳實施例之流程方塊圖。 圖4為本創作一較佳實施例於30ppb至1000ppb之二氯甲烷濃度範圍內之趨勢圖。 圖5為本創作一較佳實施例於二氯甲烷濃度變化級距為1ppb之趨勢圖。 圖6為本創作一較佳實施例於二氯甲烷濃度變化級距為3ppb之趨勢圖。 圖7為本創作一較佳實施例於二氯甲烷濃度變化級距為5ppb之趨勢圖。 FIG. 1 is a schematic diagram of the structure and configuration of a preferred embodiment of the invention. FIG. 2 is a structural block diagram of a preferred embodiment of the creation. FIG. 3 is a block diagram of a flow chart of a preferred embodiment of the creation. FIG. 4 is a trend diagram of a preferred embodiment of the creation of a dichloromethane concentration range of 30 ppb to 1000 ppb. FIG. 5 is a trend diagram of a preferred embodiment of the creation when the concentration of dichloromethane changes with a step interval of 1 ppb. FIG. 6 is a trend diagram of a preferred embodiment of the creation when the concentration of dichloromethane changes with a step interval of 3 ppb. FIG. 7 is a trend diagram of a preferred embodiment of the creation when the concentration of dichloromethane changes with a step interval of 5 ppb.

10:進氣管路 10: Intake pipeline

11:採樣泵 11: Sampling pump

12:分歧管路 12: branch pipeline

20:加熱單元 20: Heating unit

30:檢測模組 30: Detection module

311:檢測腔 311: Detection cavity

312:檢測光源 312: Detect light source

313:光偵測器 313: Light detector

33:流量調節閥 33: Flow control valve

40:稀釋校正器 40: Dilution Corrector

Claims (8)

一種氣體檢測系統,包括: 一進氣管路,供輸入一待測氣體; 一加熱單元,連接該進氣管路,供加熱該待測氣體並使該待測氣體中之至少一目標氣體形成至少一檢測目標;及 一檢測模組,包括一與該加熱單元連接之檢測單元及一與該檢測單元通聯之處理單元,該檢測單元供檢測該至少一檢測目標之含量並產生至少一檢測訊號,該處理單元可接收該至少一檢測訊號並據以獲得一檢測結果資料; 其中,該至少一目標氣體包括有機氯化合物,該至少一檢測目標包括氯化氫。 A gas detection system comprising: an inlet pipeline for inputting a gas to be measured; a heating unit, connected to the air inlet pipeline, for heating the gas to be tested and making at least one target gas in the gas to be tested form at least one detection target; and A detection module includes a detection unit connected with the heating unit and a processing unit in communication with the detection unit, the detection unit is used to detect the content of the at least one detection target and generate at least one detection signal, and the processing unit can receive the at least one detection signal and obtain a detection result data accordingly; Wherein, the at least one target gas includes organic chlorine compounds, and the at least one detection target includes hydrogen chloride. 如請求項1所述的氣體檢測系統,其中該加熱單元之一加熱溫度不低於700℃。The gas detection system according to claim 1, wherein the heating temperature of one of the heating units is not lower than 700°C. 如請求項1所述的氣體檢測系統,其中該進氣管路另設有一採樣泵,該採樣泵控制該進氣管路之進流量不小於1.0L/min。The gas detection system according to claim 1, wherein the intake pipeline is further provided with a sampling pump, and the sampling pump controls the intake flow of the intake pipeline to be no less than 1.0 L/min. 如請求項1所述的氣體檢測系統,其中該檢測模組另包括一連接於該加熱單元及該檢測單元之間之流量調節閥,該處理單元可控制該流量調節閥。The gas detection system according to claim 1, wherein the detection module further comprises a flow regulating valve connected between the heating unit and the detection unit, and the processing unit can control the flow regulating valve. 如請求項1所述的氣體檢測系統,另包括一可連接於該進氣管路之稀釋校正器,其中該稀釋校正器供輸入一含有已知濃度之該目標氣體的標準氣體及一稀釋氣體,該稀釋校正器混合該標準氣體及該稀釋氣體為至少一校正氣體並輸出至該檢測單元,該檢測單元檢測該至少一校正氣體並產生至少一校正訊號,該處理單元接收該至少一校正訊號並據以校正該至少一檢測訊號。The gas detection system according to claim 1, further comprising a dilution corrector connectable to the intake pipeline, wherein the dilution corrector is used for inputting a standard gas containing the target gas of known concentration and a dilution gas , the dilution calibrator mixes the standard gas and the dilution gas into at least one calibration gas and outputs it to the detection unit, the detection unit detects the at least one calibration gas and generates at least one calibration signal, and the processing unit receives the at least one calibration signal and correct the at least one detection signal accordingly. 如請求項5所述的氣體檢測系統,其中該進氣管路另設有一採樣泵及一位於該採樣泵及該稀釋校正器之間之分歧管路,該分歧管路供排出過量之該至少一校正氣體。The gas detection system of claim 5, wherein the intake pipeline is further provided with a sampling pump and a branch pipeline between the sampling pump and the dilution corrector, and the branch pipeline is used to discharge the excess of the at least a calibration gas. 如請求項1所述的氣體檢測系統,其中該檢測模組為一偏軸集成腔光譜雷射分析儀。The gas detection system according to claim 1, wherein the detection module is an off-axis integrated cavity spectroscopic laser analyzer. 如請求項6所述的氣體檢測系統,其中該加熱單元之一加熱溫度不低於700℃;該進氣管路另設有一採樣泵,該採樣泵控制該進氣管路之進流量不小於1.0L/min;該檢測模組另包括一連接於該加熱單元及該檢測單元之間之流量調節閥,該處理單元可控制該流量調節閥;該檢測模組另包括一可供外部操作之操作顯示介面,該操作顯示介面與該處理單元通聯且可顯示該檢測結果資料;該檢測單元包括一供輸入該至少一檢測目標之檢測腔、一檢測光源及一與該檢測光源相對地設置於該檢測腔二側之光偵測器,該檢測光源之光可穿過該至少一檢測目標並形成一投射至該光偵測器之待測光,該光偵測器接收該待測光並產生該至少一檢測訊號;該檢測模組為一偏軸集成腔光譜雷射分析儀;及該至少一目標氣體之濃度介於0ppb至20ppb。The gas detection system according to claim 6, wherein the heating temperature of one of the heating units is not lower than 700°C; the intake pipeline is further provided with a sampling pump, and the sampling pump controls the intake flow of the intake pipeline to be no less than 700°C. 1.0L/min; the detection module further includes a flow regulating valve connected between the heating unit and the detection unit, the processing unit can control the flow regulating valve; the detection module further includes a an operation display interface, which communicates with the processing unit and can display the detection result data; the detection unit includes a detection cavity for inputting the at least one detection target, a detection light source, and a detection light source opposite to the detection light source. The light detectors on the two sides of the detection cavity, the light of the detection light source can pass through the at least one detection target and form a light to be measured projected to the light detector, and the light detector receives the light to be measured and generates the light to be measured at least one detection signal; the detection module is an off-axis integrated cavity spectroscopic laser analyzer; and the concentration of the at least one target gas ranges from 0ppb to 20ppb.
TW110213249U 2021-11-10 2021-11-10 Gas detecting system TWM623767U (en)

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