TWM615964U - Sensing electrode - Google Patents

Sensing electrode Download PDF

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TWM615964U
TWM615964U TW110204081U TW110204081U TWM615964U TW M615964 U TWM615964 U TW M615964U TW 110204081 U TW110204081 U TW 110204081U TW 110204081 U TW110204081 U TW 110204081U TW M615964 U TWM615964 U TW M615964U
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Taiwan
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electrode
conductive
sensing
sleeve
outer sleeve
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TW110204081U
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Chinese (zh)
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陳志聖
陳佳麟
王舜民
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財團法人金屬工業研究發展中心
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Publication of TWM615964U publication Critical patent/TWM615964U/en

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Abstract

A sensing electrode includes a first electrode assembly, a second electrode assembly and a sealing component. The first electrode assembly includes an inner tubular body and a reference electrode mounted in the inner tubular body, and the second electrode assembly includes an outer tubular body and a working electrode mounted in the outer tubular body. The first electrode assembly is mounted in the outer tubular body. The sealing component is located between the inner and outer tubular bodies and provided to prevent etching solution from seeping into the outer tubular body and prevent electrolyte in the inner tubular body from seeping out. Accordingly, the sensing electrode has better stability and service life.

Description

感測電極Sensing electrode

本創作關於一種感測電極,特別是一種用以量測氧化還原電位之感測電極。This creation is about a sensing electrode, especially a sensing electrode for measuring the oxidation-reduction potential.

於印刷電路板製程中,溼製程佔總製程70%以上,包含蝕刻及水洗步驟,以硫酸/雙氧水蝕刻液系統為例,雙氧水濃度為蝕刻製程之重要參數,控制不當會造成線路蝕刻不均,而經由雙氧水的氧化還原電位可間接得知雙氧水濃度變化,即時監控雙氧水的氧化還原電位有助於控制雙氧水濃度,提高蝕刻穩定性。In the printed circuit board manufacturing process, the wet process accounts for more than 70% of the total process, including etching and washing steps. Taking the sulfuric acid/hydrogen peroxide etching solution system as an example, the concentration of hydrogen peroxide is an important parameter of the etching process. Improper control will cause uneven etching of the circuit. The oxidation-reduction potential of hydrogen peroxide can indirectly know the change of hydrogen peroxide concentration. Real-time monitoring of the oxidation-reduction potential of hydrogen peroxide can help control the hydrogen peroxide concentration and improve etching stability.

一體成形的氧化還原電位量測電極雖然可避免蝕刻液腐蝕電極,但當電極損毀或老化時,不易修繕且容易造成量測偏差,反之,非一體成形的氧化還原電位量測電極可更換電極或添加電解質,但蝕刻液可能滲入量測電極內部,縮短使用壽命。Although the integrally formed oxidation-reduction potential measuring electrode can prevent the etching solution from corroding the electrode, when the electrode is damaged or aging, it is not easy to repair and easily cause measurement deviation. On the contrary, the non-integrated oxidation-reduction potential measuring electrode can replace the electrode or Add electrolyte, but the etching solution may penetrate into the measuring electrode and shorten the service life.

本創作之目的在於提供一種感測電極,該感測電極包含一第一電極組件、一第二電極組件、一第一密封件及一蓋體,該第一電極組件具有一內套管、一參考電極及一離子傳導件,該參考電極設置於該內套管中,該內套管用以容納一電解質,該離子傳導件穿設並凸出於該內套管之一感測端,該第二電極組件具有一外套管及一工作電極,該工作電極設置於該外套管中,且該工作電極之一顯露端顯露於該外套管之一感測端,該第一電極組件設置於該外套管中,該外套管具有一第一穿孔,該第一穿孔位於該外套管之該感測端,該第一密封件位於該內套管之該感測端及該外套管之該感測端之間,該離子傳導件穿設於該第一密封件,該第一穿孔顯露該離子傳導件,該蓋體罩蓋該內套管之一導電端。The purpose of this creation is to provide a sensing electrode, the sensing electrode includes a first electrode assembly, a second electrode assembly, a first sealing member and a cover, the first electrode assembly has an inner sleeve, a A reference electrode and an ion conductive member, the reference electrode is disposed in the inner sleeve, the inner sleeve is used for accommodating an electrolyte, the ion conductive member penetrates and protrudes from a sensing end of the inner sleeve, the first The two electrode assembly has an outer sleeve and a working electrode, the working electrode is arranged in the outer sleeve, and one of the exposed ends of the working electrode is exposed on a sensing end of the outer sleeve, and the first electrode assembly is arranged on the outer sleeve In the tube, the outer sleeve has a first perforation, the first perforation is located at the sensing end of the outer sleeve, and the first seal is located at the sensing end of the inner sleeve and the sensing end of the outer sleeve In between, the ion conductive member penetrates the first sealing member, the first through hole exposes the ion conductive member, and the cover body covers a conductive end of the inner sleeve.

本創作之該第一密封件位於該內套管及該外套管之間,用以防止蝕刻液滲入該外套管,因此該參考電極不會接觸到蝕刻液,可避免蝕刻液損害該參考電極而造成量測偏差,且該第一密封件可防止該電解質外漏,提高該感測電極之穩定性及使用壽命。The first sealing member of this invention is located between the inner sleeve and the outer sleeve to prevent the etching solution from penetrating into the outer sleeve. Therefore, the reference electrode will not come into contact with the etching solution, which can prevent the etching solution from damaging the reference electrode. This results in measurement deviation, and the first sealing member can prevent the electrolyte from leaking out, and improve the stability and service life of the sensing electrode.

請參閱第1圖,本創作揭露一種感測電極A,其可用以量測待測物之氧化還原電位(oxidation reduction potential, ORP),舉例來說,該感測電極A設置於印刷電路板廠之化學微蝕刻槽中,用以連續性監控硫酸/雙氧水系列蝕刻液之氧化能力,藉此判斷雙氧水濃度變化,以利於即時調整蝕刻參數,但本創作不以此為限,該感測電極A可用以量測其他待測物之氧化還原電位。 Please refer to Figure 1. This creation discloses a sensing electrode A, which can be used to measure the oxidation reduction potential (ORP) of the object under test. For example, the sensing electrode A is set in a printed circuit board factory The chemical micro-etching tank is used to continuously monitor the oxidation ability of the sulfuric acid/hydrogen peroxide series etching solution to determine the change of the hydrogen peroxide concentration to facilitate real-time adjustment of the etching parameters, but this creation is not limited to this, the sensing electrode A It can be used to measure the redox potential of other analytes.

請參閱第1圖,其為本創作之第一實施例,該感測電極A具有一第一電極組件100,該第一電極組件100具有一內套管110、一參考電極120及一離子傳導件130,該內套管110用以容納一電解質E,其兩端分別為一感測端111及一導電端112,該參考電極120設置於該內套管110中,可為銀-氯化銀電極、飽和甘汞電極或標準氫電極,該離子傳導件130穿設於該內套管110並凸出於該感測端111。 Please refer to Figure 1, which is the first embodiment of the creation. The sensing electrode A has a first electrode assembly 100. The first electrode assembly 100 has an inner sleeve 110, a reference electrode 120, and an ion conduction. The inner sleeve 110 is used to contain an electrolyte E. The two ends of the inner sleeve 110 are respectively a sensing end 111 and a conductive end 112. The reference electrode 120 is arranged in the inner sleeve 110 and may be silver-chlorinated. A silver electrode, a saturated calomel electrode, or a standard hydrogen electrode, the ion conductive member 130 penetrates the inner sleeve 110 and protrudes from the sensing end 111.

較佳地,該離子傳導件130之材質為一多孔性陶瓷材料,更佳地,該離子傳導件130之材質為具多孔性之一矽氧化物或一金屬氧化物,其中該金屬氧化物可為單一金屬氧化物、二元金屬氧化物或多元金屬氧化物,含有由鉑(Pt)、金(Au)、鈀(Pd)、銀(Ag)、銥(Ir)、鈦(Ti)、釕(Ru)、銠(Rh)及鋨(Os)所組成群組中至少一金屬材料。 Preferably, the material of the ion conductive member 130 is a porous ceramic material, and more preferably, the material of the ion conductive member 130 is a porous silicon oxide or a metal oxide, wherein the metal oxide It can be a single metal oxide, binary metal oxide or multiple metal oxide, containing platinum (Pt), gold (Au), palladium (Pd), silver (Ag), iridium (Ir), titanium (Ti), At least one metal material in the group consisting of ruthenium (Ru), rhodium (Rh) and osmium (Os).

請參閱第1圖,在本實施例中,該內套管110具有一內管110a及一外管110b,該內管110a及該外管110b皆用以容納該電解質E,該參考電極120設置於該內管110a中,該內管110a設置於該外管110b中,且該離子傳導件130具有一內側傳導部130a及一外側傳導部130b,該內側傳導部130a穿設於該內管110a,該外側傳導部130b穿設並凸出於該外管110b,因此本實施例之該第一電極組件100為一雙鹽橋系統。 Please refer to Figure 1. In this embodiment, the inner sleeve 110 has an inner tube 110a and an outer tube 110b. The inner tube 110a and the outer tube 110b are both used to contain the electrolyte E, and the reference electrode 120 is provided In the inner tube 110a, the inner tube 110a is disposed in the outer tube 110b, and the ion conductive member 130 has an inner conductive portion 130a and an outer conductive portion 130b, and the inner conductive portion 130a penetrates the inner tube 110a The outer conductive portion 130b penetrates and protrudes from the outer tube 110b, so the first electrode assembly 100 of this embodiment is a double salt bridge system.

該電解質E可為液態或膠狀,且可選自於氯化鉀、氯化鈉、氯化氫、三氯化鐵或二氯化鐵,在本實施例中,該參考電極120及該離子傳導件130係浸泡於氯化鉀溶液中,使用者可根據不同需求,添加或更換該內套管110中的該電解質E。 The electrolyte E can be liquid or gel, and can be selected from potassium chloride, sodium chloride, hydrogen chloride, iron trichloride or iron dichloride. In this embodiment, the reference electrode 120 and the ion conductive member 130 is immersed in potassium chloride solution. The user can add or replace the electrolyte E in the inner sleeve 110 according to different needs.

請參閱第1圖,該感測電極A另具有一第二電極組件200,該第二電極組件200具有一外套管210及一工作電極220,該外套管210之兩端分別為一感測端211及一導電端212,該工作電極220設置於該外套管210中,且該工作電極220之一顯露端221顯露於該外套管210之該感測端211,在本實施例中,該工作電極220之該顯露端221凸出於該外套管210之該感測端211,於氧化還原電位量測過程中,該工作電極220之該顯露端221接觸蝕刻液。 Please refer to Figure 1, the sensing electrode A further has a second electrode assembly 200, the second electrode assembly 200 has an outer sleeve 210 and a working electrode 220, the two ends of the outer sleeve 210 are respectively a sensing end 211 and a conductive end 212. The working electrode 220 is disposed in the outer sleeve 210, and an exposed end 221 of the working electrode 220 is exposed on the sensing end 211 of the outer sleeve 210. In this embodiment, the working electrode 220 The exposed end 221 of the electrode 220 protrudes from the sensing end 211 of the outer sleeve 210. During the oxidation-reduction potential measurement process, the exposed end 221 of the working electrode 220 contacts the etching solution.

該工作電極220之材質可為單一金屬材料、二元金屬材料或三元金屬材料,較佳地,該工作電極220之材質選自由鉑(Pt)、金(Au)、鈀(Pd)、銀(Ag)、銥(Ir)、鈦(Ti)、釕(Ru)、銠(Rh)及鋨(Os)所組成群組中至少一金屬材料,且該工作電極220為線狀或條狀結構,其直徑介於0.01mm及3mm之間,長度介於10mm及150mm之間。 The material of the working electrode 220 can be a single metal material, a binary metal material or a ternary metal material. Preferably, the material of the working electrode 220 is selected from platinum (Pt), gold (Au), palladium (Pd), silver At least one metal material in the group consisting of (Ag), iridium (Ir), titanium (Ti), ruthenium (Ru), rhodium (Rh) and osmium (Os), and the working electrode 220 has a linear or striped structure , Its diameter is between 0.01mm and 3mm, and its length is between 10mm and 150mm.

使用該感測電極A量測蝕刻液之氧化還原電位時,該外套管210之該感測端211會直接接觸蝕刻液,因此該外套管210之材質選自具有良好耐化學腐蝕性之高分子材料為佳,例如:高密度聚乙烯(HDPE)、低密度聚乙烯(LDPE)、線性低密度聚乙烯(Linear LDPE)、聚丙烯(PP)、聚氯乙烯(PVC)、聚偏氟乙烯(PVDF)、聚醚醚酮(PEEK)、聚四氟乙烯(PTFE)、聚縮醛(POM)、酚醛樹脂(PF)、聚碳酸酯(PC)、丙烯腈-丁二烯-苯乙烯(ABS)、尼龍66(Nylon 66)、聚甲基丙烯酸甲酯(PMMA)或聚苯硫醚(PPS),以避免蝕刻液腐蝕該外套管210而滲入該感測電極A。 When the sensing electrode A is used to measure the oxidation-reduction potential of the etching solution, the sensing end 211 of the outer tube 210 will directly contact the etching solution. Therefore, the material of the outer tube 210 is selected from polymers with good chemical resistance The material is better, such as: high density polyethylene (HDPE), low density polyethylene (LDPE), linear low density polyethylene (Linear LDPE), polypropylene (PP), polyvinyl chloride (PVC), polyvinylidene fluoride ( PVDF), polyether ether ketone (PEEK), polytetrafluoroethylene (PTFE), polyacetal (POM), phenolic resin (PF), polycarbonate (PC), acrylonitrile-butadiene-styrene (ABS) ), nylon 66 (Nylon 66), polymethyl methacrylate (PMMA) or polyphenylene sulfide (PPS) to prevent the etching solution from corroding the outer sleeve 210 and penetrating the sensing electrode A.

請參閱第1圖,該感測電極A另具有一蓋體300及一第一密封件400,該第一密封件400設置於該外套管210中,將該第一電極組件100設置於該第二電極組件200之該外套管210後,該第一密封件400位於該內套管110之該感測端111 及該外套管210之該感測端211之間,該外套管210具有一第一穿孔213,該第一穿孔213位於該感測端211,凸出於該內套管110之該離子傳導件130穿設於該第一密封件400,且該第一穿孔213顯露該離子傳導件130,接著將該蓋體300罩蓋於該內套管110之該導電端112,以密封該內套管110,該蓋體300可保護位於該內套管110中的該參考電極120,亦可防止該電解質E外漏,此外,移除該蓋體300後即可更換、修繕或清潔該參考電極120,亦可補充或更換該內套管110中的該電解質E。 Please refer to Figure 1, the sensing electrode A further has a cover 300 and a first sealing member 400, the first sealing member 400 is disposed in the outer sleeve 210, the first electrode assembly 100 is disposed on the first After the outer sleeve 210 of the second electrode assembly 200, the first sealing member 400 is located at the sensing end 111 of the inner sleeve 110 And the sensing end 211 of the outer sleeve 210, the outer sleeve 210 has a first through hole 213 located at the sensing end 211 and protruding from the ion conducting member of the inner sleeve 110 130 penetrates the first sealing member 400, and the first through hole 213 exposes the ion conductive member 130, and then covers the cover 300 on the conductive end 112 of the inner sleeve 110 to seal the inner sleeve 110. The cover 300 can protect the reference electrode 120 located in the inner sleeve 110 and prevent the electrolyte E from leaking. In addition, the reference electrode 120 can be replaced, repaired or cleaned after the cover 300 is removed. , The electrolyte E in the inner sleeve 110 can also be supplemented or replaced.

請參閱第1圖,該第一電極組件100設置於該外套管210後,該內套管110之該導電端112凸出於該外套管210之該導電端212,該蓋體300固定於該內套管110之該導電端112時會向下壓迫該內套管110,使該第一密封件400被夾持於該內套管110之該感測端111及該外套管210之該感測端211之間,藉此密封該外套管210之該第一穿孔213,以避免蝕刻液從該第一穿孔213滲入該外套管210中,此外,該第一密封件400同時可防止該內套管110中的該電解質E外漏。 Please refer to Figure 1, the first electrode assembly 100 is disposed after the outer sleeve 210, the conductive end 112 of the inner sleeve 110 protrudes from the conductive end 212 of the outer sleeve 210, and the cover 300 is fixed to the outer sleeve 210. When the conductive end 112 of the inner sleeve 110 presses the inner sleeve 110 downwards, the first seal 400 is clamped on the sensing end 111 of the inner sleeve 110 and the sensing end of the outer sleeve 210 Between the measuring ends 211, the first perforation 213 of the outer sleeve 210 is sealed to prevent the etching liquid from penetrating into the outer sleeve 210 from the first perforation 213. In addition, the first sealing member 400 can also prevent the inner The electrolyte E in the sleeve 110 leaks out.

在本實施例中,該蓋體300具有一凹槽310,該凹槽310內具有一內螺紋(圖未繪出),該內套管110之該導電端112具有一外螺紋(圖未繪出),該內螺紋及該外螺紋彼此嚙合,該蓋體300鎖固於該內套管110之該導電端112。 In this embodiment, the cover 300 has a groove 310 with an internal thread (not shown in the figure), and the conductive end 112 of the inner sleeve 110 has an external thread (not shown in the figure). Out), the internal thread and the external thread are engaged with each other, and the cover 300 is locked to the conductive end 112 of the inner sleeve 110.

較佳地,該第一電極組件100設置於該外套管210時,凸出於該外管110b之該外側傳導部130b依序穿設於該第一密封件400及該外套管210之該第一穿孔213,且該第一穿孔213顯露該外側傳導部130b,因此於氧化還原電位量測過程中,該外側傳導部130b會接觸蝕刻液,在本實施例中,該外側傳導部130b凸出於該第一穿孔213。 Preferably, when the first electrode assembly 100 is disposed on the outer tube 210, the outer conductive portion 130b protruding from the outer tube 110b is sequentially penetrated through the first sealing member 400 and the second outer tube 210 A perforation 213, and the first perforation 213 exposes the outer conductive portion 130b. Therefore, during the oxidation-reduction potential measurement process, the outer conductive portion 130b will contact the etching solution. In this embodiment, the outer conductive portion 130b protrudes In the first perforation 213.

請參閱第1圖,較佳地,該外套管210另具有一第二穿孔214,該第二穿孔214位於該外套管210之該導電端212,該感測電極A另具有一第二密封件 500,該第二密封件500設置於該第二穿孔214,該內套管110穿設於該第二密封件500以設置於該外套管210內,該第二密封件500被夾持於該內套管110之該導電端112及該外套管210之該導電端212之間,防止該電解液E外漏及蝕刻液從該第二穿孔214滲入該感測電極A中。 Please refer to Figure 1. Preferably, the outer sleeve 210 further has a second through hole 214 located at the conductive end 212 of the outer sleeve 210, and the sensing electrode A further has a second sealing element 500, the second sealing member 500 is disposed in the second through hole 214, the inner sleeve 110 is passed through the second sealing member 500 to be disposed in the outer sleeve 210, and the second sealing member 500 is clamped in the Between the conductive end 112 of the inner sleeve 110 and the conductive end 212 of the outer sleeve 210, the leakage of the electrolyte E and the penetration of the etching solution into the sensing electrode A from the second through hole 214 are prevented.

請參閱第1圖,較佳地,該外套管210另具有一第三穿孔215,該第三穿孔215位於該外套管210之該感測端211,且位於該第一穿孔213外側,該感測電極A另具有一第三密封件600,該第三密封件600設置於該第三穿孔215,該工作電極220之該顯露端221穿設於該第三密封件600,且該第三穿孔215顯露該顯露端221,在本實施例中,該工作電極220之該顯露端221凸出於該第三穿孔215,該第三密封件600用以密封該第三穿孔215,以避免蝕刻液經由該第三穿孔215滲入該感測電極A中。 Please refer to Figure 1. Preferably, the outer sleeve 210 further has a third perforation 215. The third perforation 215 is located at the sensing end 211 of the outer sleeve 210 and is located outside the first perforation 213. The sensing The measuring electrode A further has a third sealing member 600, the third sealing member 600 is disposed in the third through hole 215, the exposed end 221 of the working electrode 220 is penetrated through the third sealing member 600, and the third through hole 215 exposes the exposed end 221. In this embodiment, the exposed end 221 of the working electrode 220 protrudes from the third through hole 215. The third sealing member 600 is used to seal the third through hole 215 to avoid etching liquid. It penetrates into the sensing electrode A through the third through hole 215.

在本實施例中,該第一密封件400、該第二密封件500及該第三密封件600皆為密封環(O-ring),其材質為耐腐蝕之材料,因此可避免蝕刻液腐蝕該些密封件而滲入該外套管210中,在其他實施例中,該第一密封件400、該第二密封件500及該第三密封件600可為密封膠或其他密封材料。 In this embodiment, the first sealing element 400, the second sealing element 500, and the third sealing element 600 are all O-rings, which are made of corrosion-resistant materials, so that corrosion by etching liquids can be avoided The sealing elements penetrate into the outer sleeve 210. In other embodiments, the first sealing element 400, the second sealing element 500, and the third sealing element 600 may be sealants or other sealing materials.

請參閱第1圖,該感測電極A另具有一第一導電件700,該第一導電件700設置於該蓋體300,當該蓋體300罩蓋該內套管110之該導電端112時,該參考電極120電性連接該第一導電件700,該第一導電件700用以電性連接一外部電子元件,該外部電子元件為電壓或電流量測設備,如有效電壓表(effective voltmeter)或恆電位儀(potentiostat),較佳地,該第一電極組件100另具有一第一連接埠140,該第一連接埠140設置於該內套管110之該導電端112,該第一導電件700設置於該蓋體300之該凹槽310內,當該蓋體300鎖固於該內套管110之該導電 端112時,該第一導電件700接觸該第一連接埠140,該參考電極120藉由該第一連接埠140電性連接該第一導電件700。 Please refer to FIG. 1, the sensing electrode A further has a first conductive member 700, the first conductive member 700 is disposed on the cover 300, when the cover 300 covers the conductive end 112 of the inner sleeve 110 At this time, the reference electrode 120 is electrically connected to the first conductive member 700, and the first conductive member 700 is used to electrically connect an external electronic component. The external electronic component is a voltage or current measuring device, such as an effective voltmeter (effective voltmeter). voltmeter) or potentiostat. Preferably, the first electrode assembly 100 further has a first connection port 140, the first connection port 140 is disposed at the conductive end 112 of the inner sleeve 110, and the A conductive element 700 is disposed in the groove 310 of the cover 300, when the cover 300 is locked to the conductive part of the inner sleeve 110 At the end 112, the first conductive element 700 contacts the first connection port 140, and the reference electrode 120 is electrically connected to the first conductive element 700 through the first connection port 140.

請參閱第1圖,該第二電極組件200另具有一第二連接埠230,該第二連接埠230設置於該外套管210之該導電端212,該工作電極220藉由該第二連接埠230電性連接該外部電子元件,在本實施例中,該工作電極220之一端連接該第二連接埠230,該工作電極220之另一端即為該顯露端221,凸出於該外套管210之該第三穿孔215。 Please refer to Figure 1, the second electrode assembly 200 further has a second connection port 230, the second connection port 230 is disposed on the conductive end 212 of the outer tube 210, the working electrode 220 through the second connection port 230 is electrically connected to the external electronic component. In this embodiment, one end of the working electrode 220 is connected to the second connection port 230, and the other end of the working electrode 220 is the exposed end 221, which protrudes from the outer sleeve 210 The third perforation 215.

在本實施例中,該參考電極120之電化學訊號經由該第一連接埠140、該第一導電件700及一引線輸出至該外部電子元件,該工作電極220之電化學訊號經由該第二連接埠230及另一引線輸出至該外部電子元件,該外部電子元件藉由該參考電極120及該工作電極220之電位差計算蝕刻液之氧化還原電位。 In this embodiment, the electrochemical signal of the reference electrode 120 is output to the external electronic component through the first connection port 140, the first conductive member 700 and a lead wire, and the electrochemical signal of the working electrode 220 is outputted through the second The connection port 230 and the other lead are output to the external electronic component, and the external electronic component calculates the oxidation-reduction potential of the etching solution based on the potential difference between the reference electrode 120 and the working electrode 220.

請參閱第2圖,其為本創作之第二實施例,與第一實施例之差異在於該工作電極220插設於該外套管210之一管壁210a內,避免該工作電極220接觸空氣後氧化,可延長該工作電極220使用效期。 Please refer to Figure 2, which is the second embodiment of the creation. The difference from the first embodiment is that the working electrode 220 is inserted into a tube wall 210a of the outer sleeve 210 to prevent the working electrode 220 from contacting air. Oxidation can prolong the service life of the working electrode 220.

請參閱第2圖,在本實施例中,該感測電極A另具有一第二導電件800,該第二導電件800設置於該外套管210之該導電端212,當該蓋體300罩蓋該內套管110之該導電端111時,位於該蓋體300之該第一導電件700電性連接該參考電極120及該第二導電件800,該第二導電件800用以電性連接該外部電子元件,該參考電極120之電化學訊號經由該第一連接埠140、該第一導電件700、該第二導電件800及一引線輸出至該外部電子元件,較佳地,該第一導電件700及該第二導電件800分別為一彈簧導電端子。 Please refer to Figure 2. In this embodiment, the sensing electrode A further has a second conductive member 800, which is disposed on the conductive end 212 of the outer sleeve 210, when the cover 300 is covered When the conductive end 111 of the inner sleeve 110 is covered, the first conductive member 700 located in the cover 300 is electrically connected to the reference electrode 120 and the second conductive member 800, and the second conductive member 800 is used for electrical Connected to the external electronic component, the electrochemical signal of the reference electrode 120 is output to the external electronic component through the first connection port 140, the first conductive member 700, the second conductive member 800, and a lead wire. Preferably, the The first conductive member 700 and the second conductive member 800 are respectively a spring conductive terminal.

該第一電極組件100設置於該外套管210中,因此該參考電極120不 會接觸到蝕刻液,可增加該參考電極120之使用效期,避免蝕刻液損壞該參考電極120而造成量測偏差,此外,位於該內套管110及該外套管210之間的該第一密封件400可防止蝕刻液滲入該外套管210,亦可防止該電解質E外漏,因此可保護該參考電極120及該工作電極220,以提高該感測電極A之穩定性及使用壽命。 The first electrode assembly 100 is disposed in the outer sleeve 210, so the reference electrode 120 is not Will come into contact with the etching solution, which can increase the useful life of the reference electrode 120, avoiding the etching solution damaging the reference electrode 120 and causing measurement deviation. In addition, the first tube located between the inner sleeve 110 and the outer sleeve 210 The sealing member 400 can prevent the etching solution from penetrating into the outer sleeve 210, and can also prevent the electrolyte E from leaking, so that the reference electrode 120 and the working electrode 220 can be protected to improve the stability and service life of the sensing electrode A.

本創作之保護範圍當視後附之申請專利範圍所界定者為準,任何熟知此項技藝者,在不脫離本創作之精神和範圍內所作之任何變化與修改,均屬於本創作之保護範圍。 The scope of protection of this creation shall be subject to the scope of the attached patent application. Any change and modification made by anyone who is familiar with this technique without departing from the spirit and scope of this creation shall belong to the scope of protection of this creation. .

100:第一電極組件 100: The first electrode assembly

110:內套管 110: inner casing

110a:內管 110a: inner tube

110b:外管 110b: Outer tube

111:感測端 111: sensing end

112:導電端 112: conductive terminal

120:參考電極 120: Reference electrode

130:離子傳導件 130: Ion Conductor

130a:內側傳導部 130a: inner conductive part

130b:外側傳導部 130b: Outer conduction part

140:第一連接埠 140: The first port

200:第二電極組件 200: second electrode assembly

210:外套管 210: Outer tube

210a:管壁 210a: pipe wall

211:感測端 211: sensing end

212:導電端 212: Conductive terminal

213:第一穿孔 213: The first perforation

214:第二穿孔 214: second perforation

215:第三穿孔 215: Third Piercing

220:工作電極 220: working electrode

221:顯露端 221: Revealing End

230:第二連接埠 230: second port

300:蓋體 300: cover

310:凹槽 310: Groove

400:第一密封件 500:第二密封件 600:第三密封件 700:第一導電件 800:第二導電件 A:感測電極 E:電解質 400: The first seal 500: second seal 600: third seal 700: The first conductive piece 800: second conductive part A: Sensing electrode E: Electrolyte

第1圖:依據本創作之第一實施例,一種感測電極之剖視圖。 第2圖:依據本創作之第二實施例,一種感測電極之剖視圖。 Figure 1: According to the first embodiment of this creation, a cross-sectional view of a sensing electrode. Figure 2: According to the second embodiment of the invention, a cross-sectional view of a sensing electrode.

100:第一電極組件 100: The first electrode assembly

110:內套管 110: inner casing

110a:內管 110a: inner tube

110b:外管 110b: Outer tube

111:感測端 111: sensing end

112:導電端 112: conductive terminal

120:參考電極 120: Reference electrode

130:離子傳導件 130: Ion Conductor

130a:內側傳導部 130a: inner conductive part

130b:外側傳導部 130b: Outer conduction part

140:第一連接埠 140: The first port

200:第二電極組件 200: second electrode assembly

210:外套管 210: Outer tube

211:感測端 211: sensing end

212:導電端 212: Conductive terminal

213:第一穿孔 213: The first perforation

214:第二穿孔 214: second perforation

215:第三穿孔 215: Third Piercing

220:工作電極 220: working electrode

221:顯露端 221: Revealing End

230:第二連接埠 230: second port

300:蓋體 300: cover

310:凹槽 310: Groove

400:第一密封件 400: The first seal

500:第二密封件 500: second seal

600:第三密封件 600: third seal

700:第一導電件 700: The first conductive piece

A:感測電極 A: Sensing electrode

E:電解質 E: Electrolyte

Claims (18)

一種感測電極,其包含: 一第一電極組件,具有一內套管、一參考電極及一離子傳導件,該參考電極設置於該內套管中,該內套管用以容納一電解質,該離子傳導件穿設並凸出於該內套管之一感測端; 一第二電極組件,具有一外套管及一工作電極,該工作電極設置於該外套管中,且該工作電極之一顯露端顯露於該外套管之一感測端,該第一電極組件設置於該外套管中,該外套管具有一第一穿孔,該第一穿孔位於該外套管之該感測端; 一第一密封件,位於該內套管之該感測端及該外套管之該感測端之間,該離子傳導件穿設於該第一密封件,該第一穿孔顯露該離子傳導件;以及 一蓋體,罩蓋該內套管之一導電端。 A sensing electrode, which comprises: A first electrode assembly having an inner sleeve, a reference electrode, and an ion conductive member. The reference electrode is disposed in the inner sleeve, the inner sleeve is used to contain an electrolyte, and the ion conductive member penetrates and protrudes At one of the sensing ends of the inner sleeve; A second electrode assembly has an outer sleeve and a working electrode, the working electrode is arranged in the outer sleeve, and an exposed end of the working electrode is exposed on a sensing end of the outer sleeve, and the first electrode assembly is arranged In the outer sleeve, the outer sleeve has a first perforation, and the first perforation is located at the sensing end of the outer sleeve; A first sealing element is located between the sensing end of the inner sleeve and the sensing end of the outer sleeve, the ion conducting element passes through the first sealing element, and the first through hole reveals the ion conducting element ;as well as A cover body covers one conductive end of the inner sleeve. 如請求項1之感測電極,其中該內套管之該導電端凸出於該外套管之一導電端,該蓋體固定於該內套管之該導電端,使該第一密封件被夾持於該內套管之該感測端及該外套管之該感測端之間。Such as the sensing electrode of claim 1, wherein the conductive end of the inner sleeve protrudes from a conductive end of the outer sleeve, and the cover is fixed to the conductive end of the inner sleeve so that the first sealing member is It is clamped between the sensing end of the inner sleeve and the sensing end of the outer sleeve. 如請求項2之感測電極,其中該蓋體具有一凹槽,該凹槽具有一內螺紋,該內套管之該導電端具有一外螺紋,該內螺紋及該外螺紋彼此嚙合。Such as the sensing electrode of claim 2, wherein the cover has a groove, the groove has an internal thread, the conductive end of the inner sleeve has an external thread, and the internal thread and the external thread are engaged with each other. 如請求項1之感測電極,其另包含一第一導電件,該第一導電件設置於該蓋體,當該蓋體罩蓋該內套管之該導電端時,該參考電極電性連接該第一導電件,該第一導電件用以電性連接一外部電子元件。For example, the sensing electrode of claim 1, which further includes a first conductive element, the first conductive element is disposed on the cover, and when the cover covers the conductive end of the inner sleeve, the reference electrode is electrically conductive The first conductive member is connected, and the first conductive member is used to electrically connect an external electronic component. 如請求項4之感測電極,其中該第一電極組件另具有一第一連接埠,該第一連接埠設置於該內套管之該導電端,該參考電極藉由該第一連接埠電性連接該第一導電件。For example, the sensing electrode of claim 4, wherein the first electrode assembly further has a first connection port disposed on the conductive end of the inner sleeve, and the reference electrode is electrically connected through the first connection port The first conductive member is sexually connected. 如請求項1之感測電極,其另包含一第一導電件及一第二導電件,該第一導電件設置於該蓋體,該第二導電件設置於該外套管之該導電端,當該蓋體罩蓋該內套管之該導電端時,該第一導電件電性連接該參考電極及該第二導電件,該第二導電件用以電性連接一外部電子元件。For example, the sensing electrode of claim 1, which further includes a first conductive member and a second conductive member, the first conductive member is disposed on the cover, and the second conductive member is disposed on the conductive end of the outer tube, When the cover body covers the conductive end of the inner sleeve, the first conductive member is electrically connected to the reference electrode and the second conductive member, and the second conductive member is used to electrically connect an external electronic component. 如請求項6之感測電極,其中該第一導電件及該第二導電件分別為一彈簧導電端子。Such as the sensing electrode of claim 6, wherein the first conductive member and the second conductive member are respectively a spring conductive terminal. 如請求項1之感測電極,其中該內套管具有一內管及一外管,該內管及該外管用以容納該電解質,該參考電極設置於該內管中,該內管設置於該外管中,該離子傳導件具有一內側傳導部及一外側傳導部,該內側傳導部穿設於該內管,該外側傳導部穿設於該外管、該第一密封件及該外套管之該第一穿孔,該第一穿孔顯露該外側傳導部。Such as the sensing electrode of claim 1, wherein the inner sleeve has an inner tube and an outer tube, the inner tube and the outer tube are used to contain the electrolyte, the reference electrode is arranged in the inner tube, and the inner tube is arranged in In the outer tube, the ion conductive member has an inner conductive portion and an outer conductive portion, the inner conductive portion penetrates the inner tube, and the outer conductive portion penetrates the outer tube, the first sealing member, and the outer jacket The first perforation of the tube, the first perforation reveals the outer conductive part. 如請求項1之感測電極,其中該第二電極組件另具有一第二連接埠,該第二連接埠設置於該外套管之該導電端,該工作電極藉由該第二連接埠電性連接一外部電子元件。For example, the sensing electrode of claim 1, wherein the second electrode assembly further has a second connection port disposed on the conductive end of the outer sleeve, and the working electrode is electrically connected through the second connection port Connect an external electronic component. 如請求項1之感測電極,其中該工作電極插設於該外套管之一管壁內。Such as the sensing electrode of claim 1, wherein the working electrode is inserted in a tube wall of the outer sleeve. 如請求項1之感測電極,其另包含一第二密封件,該外套管另具有一第二穿孔,該第二穿孔位於該外套管之一導電端,該第二密封件設置於該第二穿孔,該內套管穿設於該第二密封件,使該第二密封件被夾持於該內套管之該導電端及該外套管之該導電端之間。For example, the sensing electrode of claim 1, which further includes a second sealing element, the outer sleeve further has a second perforation, the second perforation is located at a conductive end of the outer sleeve, and the second sealing element is disposed on the first Two perforations, the inner sleeve passes through the second sealing element, so that the second sealing element is clamped between the conductive end of the inner sleeve and the conductive end of the outer sleeve. 如請求項1之感測電極,其另包含一第三密封件,該外套管另具有一第三穿孔,該第三穿孔位於該外套管之該感測端,該第三密封件設置於該第三穿孔,該工作電極之該顯露端穿設於該第三密封件,該第三穿孔顯露該顯露端。 For example, the sensing electrode of claim 1, which further includes a third sealing element, the outer sleeve further has a third perforation, the third perforation is located at the sensing end of the outer sleeve, and the third sealing element is disposed on the outer sleeve. The third perforation, the exposed end of the working electrode passes through the third sealing member, and the third perforation exposes the exposed end. 如請求項1之感測電極,其中該參考電極為一銀-氯化銀電極、一飽和甘汞電極或一標準氫電極。 Such as the sensing electrode of claim 1, wherein the reference electrode is a silver-silver chloride electrode, a saturated calomel electrode or a standard hydrogen electrode. 如請求項1之感測電極,其中該工作電極之材質選自由鉑(Pt)、金(Au)、鈀(Pd)、銀(Ag)、銥(Ir)、鈦(Ti)、釕(Ru)、銠(Rh)及鋨(Os)所組成群組中至少一金屬材料。 Such as the sensing electrode of claim 1, wherein the material of the working electrode is selected from platinum (Pt), gold (Au), palladium (Pd), silver (Ag), iridium (Ir), titanium (Ti), ruthenium (Ru) ), at least one metal material in the group consisting of rhodium (Rh) and osmium (Os). 如請求項1之感測電極,其中該離子傳導件之材質為一多孔性陶瓷材料。 Such as the sensing electrode of claim 1, wherein the material of the ion conductive member is a porous ceramic material. 如請求項15之感測電極,其中該離子傳導件之材質為一矽氧化物或一金屬氧化物,該金屬氧化物含有由鉑(Pt)、金(Au)、鈀(Pd)、銀(Ag)、銥(Ir)、鈦(Ti)、釕(Ru)、銠(Rh)及鋨(Os)所組成群組中至少一金屬材料。 For example, the sensing electrode of claim 15, wherein the material of the ion conductive member is a silicon oxide or a metal oxide, and the metal oxide contains platinum (Pt), gold (Au), palladium (Pd), silver ( At least one metal material in the group consisting of Ag), iridium (Ir), titanium (Ti), ruthenium (Ru), rhodium (Rh), and osmium (Os). 如請求項1之感測電極,其中該外套管之材質為高密度聚乙烯(HDPE)、低密度聚乙烯(LDPE)、線性低密度聚乙烯(LinearLDPE)、聚丙烯(PP)、聚氯乙烯(PVC)、聚偏氟乙烯(PVDF)、聚醚醚酮(PEEK)、聚四氟乙烯(PTFE)、聚縮醛(POM)、酚醛樹脂(PF)、聚碳酸酯(PC)、丙烯腈-丁二烯-苯乙烯(ABS)、尼龍66(Nylon 66)、聚甲基丙烯酸甲酯(PMMA)或聚苯硫醚(PPS)。 Such as the sensing electrode of claim 1, wherein the outer tube is made of high-density polyethylene (HDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LinearLDPE), polypropylene (PP), polyvinyl chloride (PVC), polyvinylidene fluoride (PVDF), polyether ether ketone (PEEK), polytetrafluoroethylene (PTFE), polyacetal (POM), phenolic resin (PF), polycarbonate (PC), acrylonitrile -Butadiene-styrene (ABS), nylon 66 (Nylon 66), polymethyl methacrylate (PMMA) or polyphenylene sulfide (PPS). 如請求項1之感測電極,其中該電解質為液態或膠狀之氯化鉀、氯化鈉、氯化氫、三氯化鐵或二氯化鐵。 Such as the sensing electrode of claim 1, wherein the electrolyte is potassium chloride, sodium chloride, hydrogen chloride, iron trichloride or iron dichloride in liquid or gel form.
TW110204081U 2021-04-14 2021-04-14 Sensing electrode TWM615964U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI781587B (en) * 2021-04-14 2022-10-21 財團法人金屬工業研究發展中心 Sensing electrode
WO2023186095A1 (en) * 2022-03-31 2023-10-05 深圳迈瑞生物医疗电子股份有限公司 Biochemical analyzer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI781587B (en) * 2021-04-14 2022-10-21 財團法人金屬工業研究發展中心 Sensing electrode
WO2023186095A1 (en) * 2022-03-31 2023-10-05 深圳迈瑞生物医疗电子股份有限公司 Biochemical analyzer

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