TWM608183U - Gas discharge structure of clean room - Google Patents

Abstract

This creation is related to a clean room exhaust structure, which is mainly installed at the exhaust port of the clean room. It includes a substrate covering the suction end of the exhaust port, and a power source is erected under the substrate. The power source drives a vortex fan, and connects the vortex fan to a controller that can sense the exhaust pressure of the vortex fan and the air pressure inside the clean room; The fluid pressure sensing is used to detect and control the speed of the vortex fan, and it can also be monitored remotely via communication transmission to achieve the control of maintaining a clean environment in the clean room, thereby improving the yield of precision processes.

Description

Clean room exhaust structure

This creation is related to a clean room exhaust structure, especially a kind of control that can maintain a clean environment in the clean room, thereby improving the yield of the precision manufacturing process.

According to, a clean room refers to a clean room that removes dust particles and other pollutants in the air within the space, and obtains a fairly clean environment. That is to say: there are very few dust particles in this environment. Clean rooms are widely used in industries that are particularly sensitive to environmental pollution, such as semiconductor production, biochemical technology, biotechnology, precision machinery, pharmaceuticals, and operating rooms in hospitals.

Generally, the operating procedure of a conventional clean room requires a floor with ventilation holes at an appropriate height from the ground. The underside of the roof must be assembled into light steel frames with bones, and then placed on the frames of the light steel frames. Place the ceiling and precision filter. The air is sucked from under the floor by the air conditioner to circulate the air. After passing through a primary filter, it is sent to the space formed by the ceiling and floor panels, and filtered by the precision filter on the ceiling. After the dust, it is sent to the clean room, and then exhausted by the under-floor air conditioner to form a circulation effect. However, it is found that the front-disc circulating air flow system is sent into the clean room through various precision filters, and the better the vertical laminar flow in the clean room, the better the cleanliness of the room.

The air conditioner with the above structure adopts an axial fan, and the operation of the fan is controlled by current monitoring, but the above method often leads to the lack of many rows: for example, the axial fan generates turbulent flow, which makes the clean room space unable to achieve the best The cleanliness of the current control will cause the fan to be damaged, but the current continues to flow, and it is impossible to detect and control the exhaust state, resulting in a reduction in the cleanliness of the clean room space. Therefore, it is not ideal in use.

The reason is that the creators, based on the spirit of excellence and many years of rich experience in design, development and actual production in the related industry, provide a clean room exhaust structure in order to achieve the purpose of better practical value.

The main purpose of this creation is to provide a clean room exhaust structure, especially a control that can maintain the clean environment of the clean room, thereby improving the yield rate of the precision manufacturing process.

The main purpose and effect of the exhaust structure of the clean room in this creation are achieved by the following specific technical means:

It is mainly installed at the exhaust port of the clean room. It includes a base plate covering the suction end of the exhaust port. A power source is installed under the base plate. The power source drives a vortex fan and allows all The vortex fan is connected to a controller, and the controller can sense the exhaust pressure of the vortex fan and the air pressure inside the clean room; thereby, the vortex fan is detected and controlled by the fluid pressure sensing in the controller. The rotation speed of the fan can also be monitored remotely via communication to achieve the control of maintaining a clean environment in the clean room, thereby improving the yield of the precision manufacturing process.

In a preferred embodiment of the clean room exhaust structure of the invention, the controller further includes a control unit, a power supply, a speed controller and a display unit.

In a preferred embodiment of the clean room exhaust structure of the invention, the control unit is connected to receive the data sensed by the fluid pressure difference sensing unit, and the power supply is connected to the control unit, and the rotation speed is controlled. One end of the device is connected to the control unit, and the other end is connected to the power source. The display unit is connected to the control unit to display the rotation speed, the pressure difference value and the running light signal.

In a preferred embodiment of the clean room exhaust structure of the invention, a communication transmission unit is further provided in the controller, and the communication transmission unit is connected to the control unit for controlling the detected pressure difference value and rotation speed Wait for information to be transmitted to remote monitoring.

In order to have a more complete and clear disclosure of the technical content, the purpose of the creation and the effects achieved in this creation, we will explain them in detail below, and please refer to the figures and figure numbers disclosed together:

First of all, please refer to the first and second figures of the three-dimensional exploded and cross-sectional schematic diagram of the clean room exhaust structure of this creation. It is mainly installed at the suction end of the exhaust port under the floor of the clean room (1). Structure (2), the exhaust structure (2) includes:

A base plate (21) corresponding to the suction end of the exhaust port, an exhaust hole (211) is provided in the center of the base plate (21), and a plurality of brackets are grouped under the base plate (21) Rod (212);

A power source (22) is correspondingly installed under the base plate (21) and set through the bracket rod (212) group. The power source (22) is arranged correspondingly to the output shaft end and drives an eddy current fan (23), the suction port of the vortex fan (23) corresponds to the exhaust hole (211) of the base plate (21);

A controller (24) is connected to the power source (22). The controller (24) includes a fluid pressure difference sensing unit (241), and the fluid pressure difference sensing unit (241) has Two terminals (2411), one terminal (2411) is connected to a detection tube (242), one end of the detection tube (242) is introduced into the vortex fan (23) through the exhaust hole (211) of the base plate (21) The suction port of the vortex fan (23) is used to sense the exhaust pressure of the suction air volume of the vortex fan (23), and the other terminal (2411) is connected to sense the gas pressure in the internal space of the clean room (1), and the controller (24) ) The rotation speed of the power source (22) is controlled by calculating the value of the fluid pressure difference between the clean room (1) and the exhaust of the vortex fan (23).

Please refer to the first to third pictures. When the clean room exhaust structure of this creative is used and assembled, it is based on the size of the clean room (1) and the corresponding installation number of exhaust structures (2). Each exhaust structure Structure (2) corresponds to a controller (24), the controller (24) further includes a control unit (243), a power supply (244), a speed controller (245) and a display unit (246) ), wherein the control unit (243) is connected to receive the data sensed by the fluid pressure difference sensing unit (241), calculates the fluid pressure difference and transmits control signals, and the power supply (244) is connected to the The control unit (243) and supplies the power required by the controller (24). One end of the speed controller (245) is connected to the control unit (243), and the other end is connected to the power source (22). The speed controller (245) receives the control signal of the control unit (243) to control the speed of the power source (22), and the display unit (246) is connected to the control unit (243) to display the speed and pressure. Difference value and running light signal.

In actual use, the operation of the clean room (1) is an air circulation system that introduces clean air from the outside, and then outputs the internal air for filtration. When the original exhaust structure (2) is activated, the power The source (22) drives the vortex fan (23) to rotate, and the air inside the clean room (1) is taken out from the suction end of the exhaust port under the floor, that is, the air is exhausted from the center of the base plate (21) The hole (211) is drawn out through the suction port of the vortex fan (23), and is led out from the discharge end of the exhaust port for filtering; however. While drawing out air, the detection tube (242) of the fluid pressure difference sensing unit (241) correspondingly senses the exhaust pressure of the suction air volume of the vortex fan (23), and at the same time senses the clean room ( 1) The gas pressure in the internal space allows the fluid pressure difference sensing unit (241) to transmit the sensed data to the control unit (243) for calculation, and the value of the pressure difference between the two can be known. When the gas pressure inside the dust chamber (1) is greater than or equal to the exhaust pressure of the vortex fan (23), the control unit (243) controls the speed controller (245) so that the speed controller (245) ) Output a high-speed signal to the power source (22) to accelerate the power source (22); conversely, when the gas pressure inside the clean room (1) is less than or equal to the exhaust pressure of the vortex fan (23) At this time, the control unit (243) controls the speed controller (245) so that the speed controller (245) outputs a low speed signal to the power source (22), so that the power source (22) Slow operation; in this way, the gas flow rate and filtering effect of the clean room (1) can be maintained in the best state, so as to maintain the control of the clean environment of the clean room (1), thereby improving the yield of the precision process.

Further, the display unit (246) of the controller (24) can display the control data of the clean environment of the clean room (1), such as the speed, the pressure difference value and the running light signal, which can be monitored by the management and control personnel; in addition, it can A communication transmission unit (247) is further provided in the controller (24), and the communication transmission unit (247) is connected to the control unit (243) to transmit the detected pressure difference value, speed control and other information To the remote end, the function of monitoring the clean room (1) from the remote end has been achieved.

The foregoing embodiments or drawings do not limit the structure of this creation, and any appropriate changes or modifications by those with ordinary knowledge in the technical field should be regarded as not departing from the scope of the patent of this creation.

Based on the above, the use and implementation description of this creation shows that compared with the existing technical means, this creation mainly has the following advantages:

1. The clean room exhaust structure of this creation uses the fluid pressure difference value as the control of the speed of the vortex fan. On the one hand, it can achieve the control of maintaining the clean environment of the clean room, and on the other hand, it can also protect the service life of the vortex fan. .

2. The clean room exhaust structure of this creation is the same as above. When the cleanliness of the clean room environment is improved, the yield of the precision manufacturing process will also be improved.

3. The clean room exhaust structure of this creation can transmit the detected pressure difference value, speed control and other information to the remote through communication transmission, so that it can monitor the clean room through the remote, and achieve the effect of convenient monitoring.

In summary, this creative embodiment can indeed achieve the expected use effect, and the specific structure disclosed by it has not been seen in similar products, nor has it been disclosed before the application. It has fully complied with the provisions and requirements of the Patent Law. , Yan submits an application for a new type patent in accordance with the law, and asks for favors for examination and grants a quasi-patent, which is really convenient.

1: Clean room

2: Exhaust structure

21: substrate

211: Vent

212: bracket rod

22: power source

23: vortex fan

24: Controller

241: Fluid pressure difference sensing unit

2411: Terminal

242: detection tube

243: Control Unit

244: power supply

245: Speed controller

246: display unit

247: Communication transmission unit

Figure 1: An exploded schematic diagram of the three-dimensional appearance of this creation.

Figure 2: A schematic sectional view of the assembly of this creation.

Figure 3: Schematic diagram of this creation block.

2: Exhaust structure

21: substrate

211: Vent

212: bracket rod

22: power source

23: vortex fan

24: Controller

2411: Terminal

242: detection tube

246: display unit

Claims (3)

A clean room exhaust structure, which is mainly installed with an exhaust structure at the suction end of the exhaust port under the floor of the clean room, and the exhaust structure includes: A substrate corresponding to the suction end of the exhaust port, an exhaust hole is provided in the center of the substrate, and a plurality of support rods are grouped under the substrate; A power source is correspondingly installed under the base plate and set through the bracket rod group. The power source is arranged at the end of the vertical shaft and drives a vortex fan. The suction port of the vortex fan corresponds to the The substrate exhaust hole; A controller is connected to the power source. The controller includes a fluid pressure difference sensing unit. The fluid pressure difference sensing unit has two terminals. One terminal is connected to a detection tube. The detection tube One end is introduced into the suction port of the vortex fan from the exhaust hole of the substrate to sense the exhaust pressure of the vortex fan inhaling the air volume, and the other terminal is connected to sense the gas pressure in the inner space of the clean room. The controller controls the rotation speed of the power source by calculating the value of the fluid pressure difference between the clean room space and the exhaust of the vortex fan. The clean room exhaust structure according to claim 1, wherein the controller further includes a control unit, a power supply, a speed controller, and a display unit, wherein: The control unit is connected to receive the data sensed by the fluid pressure difference sensing unit, calculates the fluid pressure difference, and transmits control signals, and the power supply is connected to the control unit and supplies power required by the controller One end of the speed controller is connected to the control unit, and the other end is connected to the power source. The speed controller receives a control signal from the control unit to control the speed of the power source, and the display unit is connected to the control The unit is used to display the speed, the differential pressure value and the running light. The clean room exhaust structure according to claim 2, wherein the controller further includes a communication transmission unit, and the communication transmission unit is connected to the control unit to transmit the detected pressure difference value and speed control information To the far end.

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