TWM596759U - Trichlorosilane generator - Google Patents

Abstract

The trichlorosilane production equipment provided by this creation can recycle and reuse the incompletely reacted silicon tetrachloride material and hydrogen material in the reaction tank to reduce the waste of materials, and can also react the incompletely reacted metallurgical grade silicon material in the reaction tank Precipitation, and to avoid the output pipe of the reaction product from being blocked by metallurgical grade silicon material that has not completely reacted in the reaction tank, thereby increasing the service life of the trichlorosilane production equipment. In addition, in this creation, the secondary products in the reaction product can be precipitated to leave the main product of trichlorosilane, thereby improving the purity of the product of trichlorosilane.

Description

Trichlorosilane production equipment

This creation is a trichlorosilane production equipment. In detail, it is a trichlorosilane production equipment that can remove solid metal waste and silica powder.

According to the existing trichlorosilane production equipment and methods, metallurgical grade silicon materials (silicon content above 90%, also known as MGS), hydrogen material (H ₂ ) and silicon tetrachloride material (SiCl ₄ ) are generally separated Placed in the reaction tank, the reaction formula is Si+2H ₂ +3SiCl ₄ →4SiHCl ₃ to generate trichlorosilane (SiHCl ₃ ). Since the metallurgical grade silicon material contains other non-silicon-containing materials that will also participate in the reaction, so In addition to the formation of trichlorosilane, secondary products such as heavy or light boilers are also produced, and metallurgical grade silicon materials, hydrogen materials, and silicon tetrachloride materials that have not completely reacted in the reaction tank are often accompanied by the generated three Chlorosilane and by-products leave the reaction tank and enter the output pipeline, which may cause the waste of incompletely reacted silicon tetrachloride material and hydrogen material, the output pipeline is blocked by metallurgical grade silicon material, and the product is mixed The liquid mixture of by-products affects the purity. These issues are problems that often occur in existing trichlorosilane production equipment. This not only increases the maintenance cost of the reaction tank and output pipeline of the trichlorosilane production equipment, and cannot be recycled. Incomplete The silicon tetrachloride material and the hydrogen material that leave the hydrochlorination reaction tank after the reaction can reduce the purity of the product of trichlorosilane due to the separation of secondary products and trichlorosilane without related equipment.

Therefore, how to provide a trichlorosilane production equipment to solve the above problems has become a technical issue that the industry is eager to challenge and overcome.

In view of the above-mentioned shortcomings of the prior art, the present invention provides a trichlorosilane production equipment, including: a reaction tank, the reaction tank has a space in the tank, the space in the tank provides the introduction of a metallurgical grade silicon material, a hydrogen Material and a silicon tetrachloride material, and the introduced metallurgical-grade silicon material and the hydrogen material react with the silicon tetrachloride material to form a reaction product; an output pipeline, the output pipeline is connected to the tank Space to output a first two fluids from the space in the tank, wherein the first two fluids contain the reaction product part, the metallurgical grade silicon material part, the hydrogen material part and the silicon tetrachloride Part of the material, and the reaction product includes a trichlorosilane and a primary product; a first fluid separation member, the first fluid separation member communicates with the output line to receive the first two fluids, and to the first The two fluids provide fluid separation, and the first two fluids are separated into a second seven fluid and a second three fluid, wherein the second seven fluid includes a portion of the metallurgical grade silicon material; a first fluid processing member, The first fluid processing member communicates with the first fluid separation member to receive the second three fluids, and provides hydrogen recovery for the second three fluids, and recovers a portion of the hydrogen material in the second three fluids to generate a A third fluid; a second fluid separation member, the second fluid separation member communicates with the first fluid processing member to receive the third fluid, and provides fluid separation for the third fluid, and the third fluid Four fluids separate a fourth fluid and a fourth fluid; a second fluid processing member, the second fluid processing member communicates with the second fluid separation member to receive the fourth fluid and the fourth fluid Five fluids provide silicon tetrachloride recovery, and recover a portion of the silicon tetrachloride material in the fourth five fluids to generate a finished product of the fifth and sixth fluids and the trichlorosilane; and a third fluid processing member, The third fluid treatment member communicates the second fluid separation member and the second fluid treatment member respectively to receive the fourth and sixth fluids and the fifth and sixth fluids, and provides the fourth and sixth fluids and the fifth and sixth fluids Silicon tetrachloride is recovered, and the portions of the silicon tetrachloride material in the fourth and sixth fluids and the fifth and sixth fluids are recovered to generate a sixth and seventh fluids, wherein the sixth and seventh fluids include the fourth and sixth fluids The fluid and the part of the secondary product in the fifth and sixth fluids; and a trichlorosilane finished product tank, the trichlorosilane finished product tank E is provided to contain the trichlorosilane finished product.

Optionally, for the aforementioned trichlorosilane production equipment, it further includes a solid waste treatment member connected to the first fluid separation member to provide collection treatment for the solid waste in the second seven fluids The solid waste treatment member also communicates with the third fluid treatment member to provide collection treatment for the solid waste in the sixth and seventh fluids.

Optionally, for the aforementioned trichlorosilane production equipment, wherein the second fluid treatment member has a first stage precipitation member and a second stage precipitation member, the first stage precipitation member receives the fourth fifth A fluid to provide a portion of the forty-fifth fluid with a first boiling point of the secondary product and a staged precipitated fluid; the second stage secondary product precipitation member receives the staged precipitated fluid to provide the staged precipitated fluid A part of the secondary product having a second boiling point generates a 58th fluid and the finished product of trichlorosilane, wherein the first boiling point and the second boiling point are different to purify the finished product of trichlorosilane.

Optionally, for the aforementioned trichlorosilane production equipment, wherein the first-stage precipitation component includes a recovery tower that receives a portion of the silicon tetrachloride material in the fourth to fifth fluid to provide The recovery of silicon tetrachloride, and recovering the portion of the secondary product with the first boiling point to generate the fifth and sixth fluids, the recovery tower is connected to the third fluid processing member to introduce the fifth and sixth fluids into the first Three fluid handling components.

Optionally, for the aforementioned trichlorosilane production equipment, further comprising an exhaust gas treatment member, the exhaust gas treatment member communicates with the second fluid treatment member to receive the fifth fluid, and provides acid to the fifth fluid Alkali neutralization to produce exhaust gas that meets emission standards; the exhaust gas treatment member also communicates with the solid waste treatment member to receive the exhaust gas from the solid waste treatment member and provide acid-base neutralization to the exhaust gas from the solid waste treatment member To produce exhaust gas that meets emission standards.

Optionally, for the aforementioned trichlorosilane production equipment, a silicon tetrachloride material recovery member is further included. The silicon tetrachloride material recovery member communicates the space in the tank with the second fluid treatment member to The part of the silicon tetrachloride material in the fourth fluid and the part of the silicon tetrachloride of the secondary product of the first boiling point are introduced into the space in the tank for reuse, and participate in the reaction in the space in the tank to generate the reaction Product; the silicon tetrachloride material recovery member also communicates with the space in the tank and the third fluid processing member to introduce the portion of the silicon tetrachloride material in the fourth and sixth fluids and the fifth and sixth fluids into the tank The inner space is reused, and participates in the reaction in the space in the tank to generate the reaction product.

Optionally, for the aforementioned trichlorosilane production equipment, wherein the first fluid treatment member has a hydrogen recovery member, the hydrogen recovery member respectively communicates the space in the tank with the first fluid separation member to The recovered part of the hydrogen material in the second and third fluids is introduced into the space in the tank for reuse, and participates in the reaction in the space in the tank to generate the reaction product.

Optionally, for the aforementioned trichlorosilane generating equipment, it further includes a pre-heating member that pre-heats the hydrogen material and the silicon tetrachloride material, so that the hydrogen material introduced into the space in the tank and The silicon tetrachloride material meets a predetermined reaction temperature.

Optionally, for the aforementioned trichlorosilane generating equipment, it further includes a pre-pressurizing member that pre-pressurizes the hydrogen material and the silicon tetrachloride material so that the lead-in to the space in the tank The hydrogen material and the silicon tetrachloride material meet a predetermined reaction pressure.

Optionally, for the aforementioned trichlorosilane generating apparatus, wherein the first fluid processing member has a crystalline member that converts a part of the cooling crystallization of the secondary product in the second three fluid into a solid .

Optionally, for the aforementioned trichlorosilane production equipment, wherein the first fluid separation member and the second fluid separation member are centrifugal separators.

Compared with the prior art, the trichlorosilane production equipment provided by this work uses the silicon tetrachloride recovery member and the hydrogen recovery member to recover and reuse the incompletely reacted silicon tetrachloride material and hydrogen material in the reaction tank. The waste of materials, and the centrifugal separator is used to separate the metallurgical grade silicon material that has not completed the reaction in the reaction tank from the reaction product, so as to avoid the output pipe of the reaction product from being blocked by the metallurgical grade silicon material that has not completely reacted in the reaction tank Therefore, the service life of trichlorosilane production equipment can be increased. In addition, in this creation, the secondary products in the reaction product can also be precipitated to purify the main product of trichlorosilane, thereby improving the purity of the product of trichlorosilane.

The following content will be combined with the drawings to illustrate the technical content of the creation by specific specific embodiments. Those familiar with this technology can easily understand other advantages and effects of the creation by the content disclosed in this specification. This creation can also be implemented or applied by other different specific embodiments. Various details in this manual can also be based on different views and applications, without making any changes and modifications without departing from the spirit of this creation. In particular, the proportional relationships and relative positions of the various elements in the drawings are for exemplary purposes only, and do not represent the actual status of the implementation of this creation.

For the technical idea of the creation of trichlorosilane production equipment, please refer to the disclosure of FIGS. 1 to 3 together.

As shown in FIG. 1, the trichlorosilane production equipment of the present creation includes: a reaction tank 1, an output line 12, a first fluid separation member 2, a first fluid treatment member 3, a second fluid separation member 4, a second fluid The processing member 5, the third fluid processing member 6, and the trichlorosilane finished product tank E.

Specifically, the reaction tank 1 has a space 11 in the tank. As shown in FIGS. 1 to 3, the reaction tank 1 is, for example, a hydrochlorination reaction tank, and the space 11 in the tank provides metallurgical grade silicon materials and hydrogen materials. And silicon tetrachloride material, so that the introduced metallurgical-grade silicon material, hydrogen material and silicon tetrachloride material can react in the space 11 of the tank to generate a first secondary fluid F12 containing the reaction product. The output pipeline 12 communicates with the space 11 in the tank to output the first two fluids F12 from the space 11 in the tank. It should be noted that the materials in the space 11 in the tank may not fully react (that is, some materials in the space 11 in the tank will not participate in the reaction), so the first two fluids F12 output from the space 11 in the tank contain reaction products It also has solid materials such as metallurgical grade silicon materials and other hydrogen materials and silicon tetrachloride materials and other gaseous materials that have not completely reacted in the space 11 in the tank. In addition, in an embodiment of the present invention, the reaction product includes trichlorosilane (ie, the main product) and a secondary product, wherein the secondary product has a weight including aluminum trichloride (AlCl3), titanium tetrachloride (TiCl4), etc. Boilers and light boilers including hydrochloric acid (HCl).

In this creation, the first fluid separation member 2 is, for example, a cyclone separator. As shown in FIGS. 2 and 3, the first fluid separation member 2 communicates with the output line 12 to receive the first two fluids F12, and then One or two fluids F12 provide fluid separation, and separate the first two fluids F12 into the second seven fluids F27 and the second three fluids F23, wherein the second seven fluids F27 have metallurgical grade silicon materials that have not completely reacted in the space 11 in the tank And other solid materials, and the second three-fluid F23 has a gas material such as a portion containing the reaction product and a portion of the hydrogen material in the tank space 11 that has not completely reacted, and a portion of the silicon tetrachloride material. Therefore, the first fluid is separated The member 2 is a centrifugal separator that can provide separation of the solid material from the gas material.

The first fluid processing member 3 includes a hydrogen recovery member 31 and a crystallizing member 32. As shown in FIGS. 2 and 3, the hydrogen recovery member 31 includes a degassing tank that communicates the space 11 in the tank with the first fluid separation member 2 respectively. In order to receive the second three-fluid F23 and then separate (remove) the hydrogen of the second three-fluid F23 to provide hydrogen recovery, and then pass through the crystallization of the crystallization member 32 to generate a third four-fluid F34, the second three-fluid F23 The recovered part of the hydrogen material in is introduced into the space 11 in the tank for reuse, and the reactants generated by the reaction in the space 11 in the tank are reduced to reduce the waste of hydrogen material.

For the crystallization member 32, specifically, the crystallization member 32 includes, for example, a stirred crystallization drum, which mainly liquefies the gas material in the second and third fluids F23 into a liquid material containing a plurality of different melting point components by cooling and cooling. When the temperature of the crystallization stirring barrel is continuously lowered and cooled below the melting point of a component in the liquid, the component will crystallize and solidify from the liquid material. For example, when the temperature of the stirring crystallization barrel is lower than the melting point of the reboil in the secondary product , The part of the reboil in the secondary product of the liquid material liquefied by the second and third fluids F23 will crystallize and solidify to form the third and fourth fluids F34, where the third and fourth fluids F34 contain the reboilers and metallurgical grade silicon Solid materials such as parts and liquid materials such as trichlorosilane parts, silicon tetrachloride parts and light-boiling parts in secondary products.

The second fluid separation member 4 is, for example, a cyclone separator. As shown in FIGS. 2 and 3, the second fluid separation member 4 communicates with the first fluid processing member 3 to receive the third and fourth fluids F34. F34 provides fluid separation, and separates the third and fourth fluids F34 into the fourth and fifth fluids F45 and the fourth and sixth fluids F46. In an embodiment, the fourth and fifth fluids F45 include a portion of trichlorosilane and a portion of silicon tetrachloride The liquid materials such as the light boilers in the secondary products, and the fourth and sixth fluids F46 contain solid materials such as the heavy boilers in the secondary products and the metallurgical grade silicon. Therefore, optionally, the second The fluid separation member 4 is a centrifugal separator that can separate the liquid material from the solid material.

In addition, the second fluid processing member 5 is a material that separates different components in the fourth fluid F45 by, for example, distillation. As shown in FIGS. 2 and 3, the second fluid processing member 5 includes the first-stage precipitation member 51 and the first Second stage precipitation member 52. Specifically, the first-stage precipitation member 51 communicates with the second fluid separation member 4 to receive the fourth and fifth fluids F45, and then to provide silicon tetrachloride recovery to the fourth and fifth fluids F45 to recover the fourth and fifth fluids F45 In addition to the part of the silicon tetrachloride material, as shown in FIG. 3, the first stage precipitation member 51 may include a reboil separation tower (for example, a distillation tower capable of separating reboil) to precipitate the fourth The part of the five-fluid F45 having a by-product with a first boiling point and the stage precipitation fluid F5, wherein the part with the first-boiling point of the by-product includes a liquid material such as a heavy boiler, and the stage precipitation fluid F5 contains trichlorosilane With light boilers and other gas materials. As shown in FIGS. 2 and 3, the first-stage precipitation member 51 may further include a recovery tower 511, wherein the recovery tower 511 receives a portion of the silicon tetrachloride material in the fourth and fifth fluids F45 to provide silicon tetrachloride It is recovered, and a portion of the secondary product having the first boiling point is precipitated to generate the fifth and sixth fluids F56. In addition, the recovery tower 511 communicates with the third fluid processing member 6 to introduce the fifth and sixth fluids F56 into the third fluid processing member 6.

As shown in FIG. 3, the second stage precipitation member 52 may include a light boiler separation tower (e.g., a distillation tower capable of separating light boilers) connected to the first stage precipitation member 51, thereby receiving the stage precipitation fluid F5, thereby providing In the precipitation stage, a part of the secondary product with a second boiling point in the fluid F5 is precipitated to produce a finished product of the fifth fluid F58 and trichlorosilane, and the secondary product part with the second boiling point contains a gas material such as a light boiler. In addition, it should be noted that the trichlorosilane finished product tank E is connected to the second stage precipitation member 52 to receive the trichlorosilane finished product generated by the second stage precipitation member 52 and provide accommodation.

In other words, when the temperature of the material reaches the melting point or boiling point, the solid can be liquefied into a liquid or the liquid can be vaporized into a gas. Therefore, if the temperature of the fluid is changed, materials with different melting points or boiling points of the fluid can be precipitated. Therefore, the first stage precipitation member 51 A portion of the fourth-fifth fluid F45 having a secondary product with a first boiling point (for example, a reboil) can be precipitated, and the second-stage precipitation member 52 can separate a portion of the secondary product with a second boiling point in the fluid F5 ( For example, light boilers are precipitated, wherein the first boiling point and the second boiling point are different, so that the finished product of trichlorosilane can be purified.

Correspondingly, the trichlorosilane production equipment of the present invention further includes a third fluid processing member 6, as shown in FIG. 3, the third fluid processing member 6 is, for example, a heavy boiler collection barrel containing a steam heating member SH, which are respectively The second fluid separation member 4 and the second fluid treatment member 5 are connected to receive the fourth and sixth fluids F46 and F56, respectively, and the fourth and sixth fluids F46 and F56 are respectively controlled by the steam heating member SH Heating, so that the temperature of the fourth hexafluid F46 and the fifth hexafluid F56 reaches the boiling point of the silicon tetrachloride material, so that part of the silicon hexachloride material in the fourth hexafluid F46 and the fifth hexafluid F56 is vaporized and precipitated, In order to provide a part of the recovered silicon tetrachloride material, the ungasified parts of the fourth and sixth fluids F46 and F56 become the sixth and seventh fluids F67, wherein the sixth and seventh fluids F67 include the fourth and sixth fluids The part of the reboiled product of the secondary products in F46 and F56.

In this creation, the trichlorosilane production equipment also includes a silicon tetrachloride material recovery member 9, as shown in FIGS. 2 and 3, the silicon tetrachloride material recovery member 9 includes, for example, a silicon tetrachloride recovery tank, and can The space 11 in the tank is communicated with the second fluid processing member 5 to introduce a part of the silicon tetrachloride material recovered in the fourth fluid F45 into the space 11 in the tank for reuse, and participate in the reaction generation in the space 11 in the tank The reaction product can reduce the waste of silicon tetrachloride material. In addition, the silicon tetrachloride material recovery member 9 can also communicate the space 11 in the tank with the third fluid treatment member 6 to introduce part of the recovered silicon tetrachloride material in the fourth and sixth fluids F46 and F56 The space 11 in the tank is reused, and participates in the reaction in the space 11 in the tank to generate a reaction product, so that the waste of silicon tetrachloride material can be reduced. It is also worth mentioning that, as shown in Figures 2 and 3, the trichlorosilane production equipment of this creation also has a condenser C and a pump P1. The condenser C can condense and liquefy the recovered silicon tetrachloride material and pump Pu P1 can provide pressure to introduce liquefied silicon tetrachloride material into the space 11 in the tank for reuse.

As shown in FIG. 1, in the present creation, the trichlorosilane production equipment further includes a solid waste treatment member 7. The solid waste treatment member 7 is respectively connected to the first fluid separation member 2 and the third fluid treatment member 6 to separate the second Solid waste in Seven Fluids F27 (including solid materials such as metallurgical grade silicon materials that have not completely reacted in the space 11 in the tank) and solid waste in Sixth Seventh Fluids F67 (including fourth and sixth fluids F46 and Fifth Sixth) The portion of the reboil of the secondary product in fluid F56 provides collection.

In addition, optionally, as shown in FIGS. 2 and 3, the solid waste treatment member 7 includes a solid waste collection barrel and a solid waste receiving barrel having a steam heating member SH, and the solid waste receiving barrel can be stirred with a stirrer. Waste, and steam heating is provided by the steam heating member SH, so that the solid waste in the solid waste receiving barrel releases corrosive and acidic chlorosilane waste gas, and then, nitrogen gas is passed into the solid waste receiving barrel to force the chlorosilane waste gas After leaving the solid waste receiving barrel, the solid waste in the solid waste receiving barrel is sent to the solid waste collection barrel for collection.

In this creation, the trichlorosilane production equipment also includes an exhaust gas treatment member 8. As shown in FIG. 1, the exhaust gas treatment member 8 is connected to the solid waste treatment member 7 to receive the corrosive and acidic chlorosilane waste gas and corrode it. Exhaust gas such as acidic chlorosilane provides acid-base neutralization to make the exhaust gas meet emission standards. In addition, the exhaust gas treatment member 8 can also communicate with the second fluid treatment member 5 to receive the exhaust gas in the fifth eighth fluid F58 and provide acid-base neutralization to the corrosive acidic exhaust gas in the fifth eighth fluid F58, so that Exhaust gas meets emission standards.

Optionally, in the present creation, the trichlorosilane production equipment further includes a pre-pressing member P and a pre-heating member H. As shown in FIGS. 2 and 3, the pre-pressurizing member P includes, for example, a pump P1 for silicon tetrachloride material and a hydrogen compressor P2 for hydrogen material. The hydrogen material and silicon tetrachloride can be prepressurized. Materials, so that the hydrogen material introduced into the space 11 of the tank and the silicon tetrachloride material meet the predetermined reaction pressure, thereby improving the production efficiency of trichlorosilane (ie, increasing the conversion rate of trichlorosilane). Preferably, the predetermined reaction pressure is between 20-30 kg/cm ² .

The preheating member H is a preheating hydrogen material and silicon tetrachloride material, so that the hydrogen material and silicon tetrachloride material introduced into the space 11 of the tank conform to a predetermined reaction temperature, thereby improving the generation efficiency of trichlorosilane (ie, enhancing trichlorosilane Conversion rate). Preferably, as shown in FIGS. 2 and 3, the preheating member H system includes, for example, a silicon tetrachloride preheater and an electrothermal exchanger, wherein the silicon tetrachloride preheater system includes, for example, a steam heating member SH , By steam heating of the steam heating member SH, the liquid silicon tetrachloride material reaches the boiling point and is vaporized, and then, the hydrogen material and the vaporized silicon tetrachloride material are heated by an electric heat exchanger to meet the predetermined reaction temperature .

To sum up, this creative department provides a trichlorosilane production equipment, which recovers and reuses the incompletely reacted silicon tetrachloride material and hydrogen material in the reaction tank through the silicon tetrachloride recovery member and the hydrogen recovery member to reduce the reaction Waste of incompletely reacted material in the tank. In addition, through the fluid separation member, the metallurgical grade silicon material that has not completely reacted in the reaction tank is separated from the reaction product, and the output pipe of the reaction product is prevented from being blocked by the metallurgical grade silicon material that has not completely reacted in the reaction tank. , Can increase the service life of trichlorosilane production equipment, but also reduce the maintenance cost of removing clogged output pipelines. In addition, this work also uses fluid processing components to separate the secondary products in the reaction products to purify the main product of trichlorosilane, thereby increasing the purity of trichlorosilane.

The above-mentioned embodiments are only illustrative of the principles and effects of this creation, and are not intended to limit this creation. Anyone who is familiar with this technology can modify and change the above embodiments without violating the spirit and scope of this creation. Therefore, the scope of protection of the rights of this creation should be as listed in the scope of patent applications for this creation.

1: reaction tank 11: Space in the tank 12: output pipeline 2: The first fluid separation member 3: The first fluid processing member 31: Hydrogen recovery component 32: Crystal components 4: Second fluid separation member 5: Second fluid processing member 511: Recovery tower 51: The first stage precipitation component 52: The second stage precipitation component 6: Third fluid processing member 7: Solid waste treatment components 8: Exhaust gas treatment components 9: Silicon tetrachloride material recycling component C: condenser E: Trichlorosilane finished product tank F12: the first two fluids F23: Second and third fluids F27: Second seven fluid F34: third and fourth fluids F45: the fourth and fifth fluids F46: the fourth and sixth fluids F5: Staged fluid F56: Fifth and sixth fluids F58: Fifth eighth fluid F67: Sixth and seventh fluids H: Pre-heated component P: Pre-pressurized member P1: Pump P2: Hydrogen compressor SH: Steam heating component

Figure 1 is the first system architecture diagram of the original trichlorosilane production equipment.

Figure 2 is the second system architecture diagram of the original trichlorosilane production equipment.

Figure 3 is the third system architecture diagram of the original trichlorosilane production equipment.

1: reaction tank

11: Space in the tank

12: output pipeline

2: The first fluid separation member

3: The first fluid processing member

4: Second fluid separation member

5: Second fluid processing member

6: Third fluid processing member

7: Solid waste treatment components

8: Exhaust gas treatment components

9: Silicon tetrachloride material recycling component

E: Trichlorosilane finished product tank

F12: the first two fluids

F23: Second and third fluids

F27: Second seven fluid

F34: third and fourth fluids

F45: the fourth and fifth fluids

F46: the fourth and sixth fluids

F56: Fifth and sixth fluids

F58: Fifth eighth fluid

F67: Sixth and seventh fluids

H: Pre-heated component

P: Pre-pressurized member

Claims (10)

A trichlorosilane production equipment, including: A reaction tank, the reaction tank has a space in the tank, the space in the tank is provided to introduce a metallurgical grade silicon material, a hydrogen material and a silicon tetrachloride material, and the introduced metallurgical grade silicon material and the hydrogen gas The material reacts with the silicon tetrachloride material to form a reaction product; An output pipeline connecting the space in the tank to output a first two fluids from the space in the tank, wherein the first two fluids contain a part of the reaction product, the metallurgical grade silicon material Part, the hydrogen material part and the silicon tetrachloride material part, and the reaction product includes a trichlorosilane and a primary product; A first fluid separation member, the first fluid separation member communicates with the output line to receive the first two fluids, and provides fluid separation for the first two fluids, and separates the first two fluids to a second Seven fluids and one second three fluids, wherein the second seven fluids contain a portion of the metallurgical grade silicon material; A first fluid processing member, the first fluid processing member communicates with the first fluid separation member to receive the second three fluids, and provides hydrogen recovery for the second three fluids, and recovers the second three fluids Part of the hydrogen material to produce a third fluid; A second fluid separation member, the second fluid separation member communicates with the first fluid treatment member to receive the third fluid, and provides fluid separation for the third fluid, and separates the third fluid Forty-fifth fluid and one forty-sixth fluid; A second fluid processing member, the second fluid processing member communicates with the second fluid separation member to receive the fourth fluid, and provides silicon tetrachloride recovery for the fourth fluid, and recovers the fourth fluid A portion of the silicon tetrachloride material to produce a fifth and sixth fluid and the trichlorosilane finished product; and A third fluid treatment member, the third fluid treatment member is respectively connected to the second fluid separation member and the second fluid treatment member to receive the fourth and sixth fluids and the fifth and sixth fluids, and the fourth and sixth fluids Providing silicon tetrachloride recovery with the fifth and sixth fluids, and recovering portions of the silicon tetrachloride material in the fourth and sixth fluids and the fifth and sixth fluids to generate a sixth and seventh fluids, wherein the sixth Seven fluids include the fourth and sixth fluids and the fifth and sixth fluids in the secondary product; and A trichlorosilane finished product tank, the trichlorosilane finished product tank is provided to contain the trichlorosilane finished product. The trichlorosilane production equipment as described in item 1 of the scope of the patent application further includes a solid waste treatment member connected to the first fluid separation member to provide solid waste in the second seven fluids Collection treatment; the solid waste treatment member also communicates with the third fluid treatment member to provide collection treatment for the solid waste in the sixth and seventh fluids. The trichlorosilane production equipment as described in item 1 of the patent application scope, wherein the second fluid processing member has a first stage precipitation member and a second stage precipitation member, and the first stage precipitation member receives the first stage precipitation member Four or five fluids to provide a portion of the fourth to fifth fluid with a first boiling point of the secondary product and a staged precipitation fluid; the second stage secondary product precipitation member receives the staged fluid to provide the staged precipitation Precipitating a portion of the secondary product with a second boiling point in the fluid to produce a fifth and eighth fluid and the trichlorosilane finished product, wherein the first boiling point and the second boiling point are different to purify the trichlorosilane finished product . The trichlorosilane production equipment as described in item 3 of the patent application scope, wherein the first-stage precipitation member includes a recovery tower that receives a portion of the silicon tetrachloride material in the fourth to fifth fluids In order to provide the recovery of silicon tetrachloride and recover the portion of the secondary product with the first boiling point to generate the fifth and sixth fluids, the recovery tower is connected to the third fluid treatment member to introduce the fifth and sixth fluids In the third fluid processing member. The trichlorosilane production equipment as described in item 3 of the patent application scope further includes an exhaust gas treatment member, the exhaust gas treatment member communicates with the second fluid treatment member to receive the fifth fluid, and the fifth fluid Provide acid-base neutralization to produce exhaust gas that meets emission standards; the exhaust gas treatment member also communicates with the solid waste treatment member to receive the exhaust gas from the solid waste treatment member and provide acid and alkali to the solid waste treatment member Neutralize to produce exhaust gas that meets emission standards. The trichlorosilane production equipment as described in item 1 of the patent application scope further includes a silicon tetrachloride material recovery member, the silicon tetrachloride material recovery member connecting the space in the tank with the second fluid treatment member, The part of the silicon tetrachloride material in the fourth fluid and the part of the silicon tetrachloride of the secondary product of the first boiling point are introduced into the space of the tank for reuse, and participate in the reaction formation in the space of the tank The reaction product; the silicon tetrachloride material recovery member also communicates with the space in the tank and the third fluid treatment member to introduce part of the silicon tetrachloride material in the fourth and sixth fluids and the fifth and sixth fluids The space in the tank is reused, and participates in the reaction in the space in the tank to generate the reaction product. The trichlorosilane production equipment as described in item 1 of the patent application scope, wherein the first fluid treatment member has a hydrogen recovery member, and the hydrogen recovery member separately connects the space in the tank with the first fluid separation member, The recovered part of the hydrogen material in the second and third fluids is introduced into the space in the tank for reuse, and participates in the reaction in the space in the tank to generate the reaction product. The trichlorosilane production equipment as described in item 1 of the patent application scope further includes a pre-heating member that pre-heats the hydrogen material and the silicon tetrachloride material so that the hydrogen gas introduced into the space in the tank The material and the silicon tetrachloride material meet a predetermined reaction temperature. The trichlorosilane production equipment as described in item 1 of the scope of the patent application further includes a pre-pressurizing member that pre-pressurizes the hydrogen material and the silicon tetrachloride material to be introduced into the space in the tank The hydrogen material and the silicon tetrachloride material meet a predetermined reaction pressure. The trichlorosilane production device as described in item 1 of the patent application scope, wherein the first fluid processing member has a crystalline member that converts a part of the secondary product in the second three fluid to cooling crystallization Into a solid; the first fluid separation member and the second fluid separation member are centrifugal separators.

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