TWM594142U - Probe card device and its neck-like probe - Google Patents

Abstract

The present invention discloses a probe card device and a neck-like probe. The neck-like probe is elongated and includes a conductive needle body and a ring-shaped insulator. The conductive needle body includes a stroke segment and two end segments respectively extending from both ends of the stroke segment. The stroke section includes two wide sides and two narrow sides, and a long groove extending from one of the two narrow sides to the other is concavely formed on each wide side. The two long grooves are arranged adjacent to each other with a minimum distance, which is 95% to 75% of the maximum distance between the two wide sides. The ring-shaped insulator surrounds the portion where the conductive needle body is formed with two long grooves, and the neck-like probe has a thickness at the part of the ring-shaped insulator disposed on the two long grooves, which is 85% to 115% of the maximum distance.

Description

Probe card device and its neck-like probe

This creation relates to a probe card, in particular to a probe card device and its neck-like probe.

The conductive probe of the existing probe card device includes a conductive needle body and an insulating layer formed at the center of the conductive needle body, and the width and thickness of the conductive needle body are approximately the same, so the entire insulating layer is protruding shape. However, the matching structure between the above-mentioned conductive needle body and the insulating layer of the existing conductive probe has been in operation for some years, and thus it has also impeded the further development and progress of the existing probe card device.

Therefore, the author believes that the above-mentioned defects can be improved. Naite devotes himself to research and cooperates with the application of scientific principles, and finally proposes a original design with reasonable design and effective improvement of the above-mentioned defects.

The embodiment of the present invention is to provide a probe card device and a neck-like probe, which can effectively improve the defects that the existing conductive probe may produce.

This creative embodiment discloses a probe card device, which includes: a first guide plate unit and a second guide plate unit, which are arranged at a distance from each other; and a plurality of neck-like probes, each of which is elongated along its length The direction has a needle length, and a plurality of the neck-like probes pass through the first guide plate unit and the second guide plate unit; wherein, each of the neck-like probes includes: a The conductive needle body includes: a stroke section, which is located between the first guide plate unit and the second guide plate unit and includes two wide sides and two narrow sides, and the stroke section is provided in each The wide side is concavely formed with a long groove extending from one of the narrow sides to the other of the narrow sides; wherein, the two long grooves are arranged adjacent to each other with a minimum distance apart, and the The minimum distance is 95% to 75% of a maximum distance between the two wide sides; and two end sections respectively extending from the first guide plate unit and the A second guide plate unit; and a ring-shaped insulator disposed on the two long grooves of the conductive needle body and on the two narrow sides between the two long grooves ; Wherein, the neck-like probe has a thickness at the portion of the annular insulator provided in the two long grooves, which is 85% to 115% of the maximum distance; wherein, the first The guide plate unit and the second guide plate unit can be diagonally displaced from each other with a displacement distance between 12% and 19% of the needle length, so that the stroke sections of the plurality of neck-like probes It bends in the same direction, and the two inflection points formed by the two wide sides of each of the travel sections are respectively located in the two long grooves.

This creative embodiment also discloses a neck-like probe of a probe card device, which is elongated and includes: a conductive needle body, including: a stroke section, including two wide sides and two narrow sides, and The stroke section is concavely formed on each of the wide side surfaces to form a long groove extending from one of the narrow side surfaces to the other of the narrow side surfaces; wherein, the two long grooves are arranged adjacent to and separated from each other There is a minimum distance, and the minimum distance is 95% to 75% of a maximum distance between the two wide sides; and two end sections are formed from the two ends of the travel section; and one A ring-shaped insulator that surrounds the portion of the conductive needle body where the two long grooves are formed; wherein the neck-like probe has one at the part of the ring-shaped insulator provided on the two long grooves Thickness, which is 85% to 115% of the maximum distance; wherein, the two end sections of the neck-like probe can be subjected to force to make the stroke section curved, and the two Two inflexion points corresponding to the wide sides are respectively located in the two long grooves.

In summary, in the probe card device and the neck-like probe disclosed in the embodiment of the present invention, the conductive needle body is formed with the two long grooves to effectively control the amount of downforce, and can make the The force of the conductive needle body when it is pressed against the object to be measured can be maintained under a preset condition, so that the conductive needle body can be stably pressed against the object to be tested without being damaged.

Furthermore, the neck-like probe can adjust the minimum distance of the conductive needle body to change the reaction force that the neck-like probe can provide when it is stressed, which is beneficial to meet different needs. Furthermore, the neck-like probe effectively maintains its signal transmission effect by controlling the ratio between the minimum distance and the maximum distance.

In addition, the neck-like probe forms two long grooves to effectively reduce the thickness of the annular insulator protruding from the wide side, thereby achieving the effect of protecting the annular insulator (such as: The neck-like probe can effectively prevent the ring-shaped insulator from being scratched by the first guide plate unit during the needle implantation process through the first guide plate unit).

In addition, the conductive needle body is formed with two long grooves, so that the bending part of the neck-like probe can be concentrated on the part where the two long grooves are formed (for example: the inflection point is located in the long groove ), which effectively controls the consistency of the actuation direction of each of the neck-like probes, and enables each of the neck-like probes to work independently during the testing process (eg, against the test object) Without interfering with each other.

In order to understand the characteristics and technical content of this creation, please refer to the following detailed description and drawings of this creation, but these descriptions and drawings are only used to illustrate this creation, not to make any protection to this creation. limit.

The following is a specific specific example to illustrate the implementation of the "probe card device and its neck-like probe" disclosed by this creation, and those skilled in the art can understand the advantages and effects of this creation by the content disclosed in this specification . This creation can be implemented or applied through other different specific embodiments. The details in this specification can also be based on different views and applications, and various modifications and changes can be made without departing from the concept of this creation. In addition, the drawings in this creation are only a schematic illustration, not based on actual size, and are declared in advance. The following embodiments will further describe the relevant technical content of the creation, but the disclosed content is not intended to limit the protection scope of the creation.

It should be understood that although terms such as “first”, “second”, and “third” may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" as used herein may include any combination of any one or more of the associated listed items, depending on the actual situation.

[Example 1]

Please refer to FIG. 1 to FIG. 9, which is the first embodiment of the creation. As shown in FIGS. 1 to 3, this embodiment discloses a probe card device 100, the opposite sides of which can be used to press against a space transformer and a test object (eg, semiconductor wafer) ). The probe card device 100 includes a first guide plate unit 1, a second guide plate unit 2 spaced apart from the first guide plate unit 1, and clamped to the first guide plate unit 1 A spacing plate (not shown) between the second guide plate unit 2 and a plurality of neck-like probes 3 penetrating the first guide plate unit 1 and the second guide plate unit 2.

It should be noted that, in this embodiment, the neck-like probe 3 is described in conjunction with the first guide plate unit 1, the second guide plate unit 2, and the spacer plate, but the creation is not limited to this. For example, in other embodiments not shown in this creation, the neck-like probe 3 may also be applied independently (eg, sold) or used with other components.

In this embodiment, the first guide plate unit 1 includes a plurality of first guide plates 11 (and spacers sandwiched between two adjacent first guide plates 11), and the The second guide plate unit 2 includes a plurality of second guide plates 21 (and spacers sandwiched between two adjacent second guide plates 21). Wherein, a plurality of the first guide plates 11 can be arranged offset from each other, a plurality of the second guide plates 21 can also be arranged offset from each other, and the first guide plate unit 1 can be arranged relative to the second guide plate unit 2 Set misaligned with each other. However, in other embodiments not shown in this creation, the first guide plate unit 1 may also include a first guide plate 11 and the second guide plate unit 2 may include a second guide plate twenty one.

Furthermore, the partition plate may have an annular structure, and the partition plate is sandwiched between the corresponding peripheral parts of the first guide plate unit 1 and the second guide plate unit 2, but the creation is not limited to this. For example, in other embodiments not shown in this creation, the spacer of the probe card device 100 can also be omitted or replaced by other components.

It should be noted that, since the structure of the plurality of neck-like probes 3 is substantially the same in this embodiment, for convenience of description, only the structure of a single neck-like probe 3 is described below, but this creation Not limited to this. For example, in other embodiments not shown in this creation, the structures of the plurality of neck-like probes 3 may also be different.

Furthermore, in order to facilitate the understanding of the structure of the neck-like probe 3, the plurality of first guide plates 11 will be offset from each other, and the plurality of second guide plates 21 will also be offset from each other. The structure of the neck-like probe 3 will be described in the case where the first guide plate unit 1 has not been arranged in a misalignment with respect to the second guide plate unit 2.

As shown in FIGS. 1 to 4, the neck-like probe 3 is elongated and has a needle length L3 along its length direction L, and is perpendicular to the length-direction L of the neck-like probe 3. In this embodiment, any one of the cross sections is shown as a rectangle, but this creation is not limited to this. Wherein, the neck-like probe 3 includes a conductive needle body 31 and a ring-shaped insulator 32 covering the approximate center of the conductive needle body 31; that is, if the material of the conductive needle body is not For insulation, the material is different from the ring-shaped insulator 32 referred to in this embodiment.

The material of the conductive needle body 31 is, for example, a copper alloy or a nickel alloy, and in this embodiment, the conductive needle body 31 has a straight strip shape and an integrally formed structure, but the creation is not limited thereto. Wherein, the conductive needle body 31 includes a stroke segment 311 and two end segments 312 respectively (integrally) extending from both ends of the stroke segment 311, and the stroke segment 311 is located in the first guide Between the plate unit 1 and the second guide plate unit 2, the two end sections 312 respectively pass through the first guide plate unit 1 and the second guide plate unit 2.

The (outer surface) of the travel section 311 includes two wide sides 311a on opposite sides and two narrow sides 311b on opposite sides, and the travel section 311 is on each of the wide sides 311a A recess is formed with a long groove 311c extending from one of the narrow side surfaces 311b to the other of the narrow side surfaces 311b, and the stroke section 311 is not formed in the present embodiment to protrude from the two wide sides Any protruding structure of the side surface 311a and the two narrow side surfaces 311b. That is to say, the stroke section provided with the protruding structure (eg, used to abut the first guide plate unit 1 or the second guide plate unit 2) is not the stroke section 311 referred to in this embodiment.

According to this, the conductive needle body 31 is formed with two long grooves 311c to effectively control the amount of its downward pressure, and the force of the conductive needle body 31 against the object to be measured can be controlled Maintaining under the preset conditions, so that the conductive needle body 31 can be stably pressed without damaging the test object.

Each of the long grooves 311c extends from one of the narrow side surfaces 311b to the other of the narrow side surfaces 311b along a direction perpendicular to the length direction L (such as the horizontal direction in FIG. 2). That is to say, the extending distance (or width) of each of the long grooves 311c is approximately the distance between the two narrow sides 311b. Furthermore, a length L311c of any one of the long grooves 311c in the length direction L is at least 50% of a length L311 of the stroke section 311 in the length direction L. For example, as shown in FIG. 1, the length L311c of the long groove 311c is 45% to 60% of the length L311 of the stroke segment 311; or, as shown in FIG. 7, the length L311c of the long groove 311c It is 80% to 95% of the length L311 of the stroke section 311.

In more detail, the two long grooves 311c are arranged adjacent to each other and separated by a minimum distance Dmin (eg, the distance between the groove bottoms of the two long grooves 311c), and the minimum distance Dmin is two A maximum distance Dmax between the wide sides 311a is 95% to 75%. According to this, the neck-like probe 3 can adjust the minimum distance Dmin of the conductive needle body 31 to change the reaction force that the neck-like probe 3 can provide when the force is applied, thereby facilitating compliance with different Demand. Furthermore, the neck-like probe 3 can effectively maintain its signal transmission effect by controlling the ratio between the minimum distance Dmin and the maximum distance Dmax.

Furthermore, the distance between the two long trenches 311c in FIG. 4 of the present embodiment is described as being tapered along the length direction L and then gradually increased, but this creation is not limited to this. For example, as shown in FIG. 6, the distance between the two long trenches 311c can also be kept equal; or, in other embodiments not shown in this creation, the specific structure of the two long trenches 311c It can be adjusted and changed according to the design requirements.

In addition, as shown in FIG. 3, the two long grooves 311 c of the stroke section 311 are arranged in mirror symmetry in this embodiment, but the creation is not limited to this. For example, in other embodiments not shown in this creation, the two long trenches 311c may also have different depths; or, the two long trenches 311c may have different lengths; or, two The structure of the long trench 311c is different.

In this embodiment, the two wide sides and the two narrow sides of the outer surface of each end section 312 are respectively coplanar with the two wide sides 311a and the two narrow sides 311b of the travel section 311 (That is, in this embodiment, the end section 312 is not formed with any protruding structure protruding from its outer surface), and the structures of the two end sections 312 are all the same rectangular cylinder, but the original Creation is not limited to this. For example, the structure of any of the end sections 312 can also be formed with a protruding structure according to design requirements.

Furthermore, one of the end segments 312 (such as the upper end segment 312 in FIG. 1) is partially located in the perforations (not labeled) of the plurality of first guide plates 11, while the remaining parts pass through the first The guide plate 11, so that it can be fixed by the misalignment of the plurality of first guide plates 11; and the other of the end sections 312 (such as the end section 312 located at the bottom in FIG. 1) is partially located The plurality of second guide plates 21 are penetrated (not marked), and the rest of the second guide plates 21 pass through, so that they can be fixed by the displacement of the plurality of second guide plates 21.

The material of the ring-shaped insulator 32 is, for example, parylene, and the ring-shaped insulator 32 is (equally thick) surrounded by the conductive needle 31 where the two long grooves 311c are formed; In an embodiment, the ring-shaped insulator 32 is disposed on the two long grooves 311c of the conductive needle body 31, and is disposed on the two narrow side surfaces 311b between the two long grooves 311c Part, but this creation is not limited to this.

According to this, the neck-like probe 3 forms two long grooves 311c to effectively reduce the thickness of the ring-shaped insulator 32 protruding beyond the wide side 311a, thereby protecting the ring-shaped insulator 32 Effect (such as: the neck-like probe 3 can effectively prevent the ring-shaped insulator 32 from being scratched by the first guide plate unit 1 during the needle implantation process through the first guide plate unit 1 hurt). In other words, the ring-shaped insulator 32 can fill the two long grooves 311c of the conductive needle body 31, so that the needle shape of the neck-like probe 3 can be substantially straight.

Wherein, the neck-like probe 3 has a thickness T at the portion of the annular insulator 32 provided in the two long trenches 311c, which is 85% to 115% of the maximum distance Dmax. Wherein, the thickness T is preferably 90% to 110% of the maximum distance Dmax; that is, the portions of the ring-shaped insulator 32 provided on the two long trenches 311c may slightly protrude correspondingly The long trench 311c, or completely placed in the corresponding long trench 311c, the present creation is not limited here.

Further, a portion of the annular insulator 32 provided in any one of the long trenches 311c includes a filling portion 321 located in the long trench 311c and opposite sides of the filling portion 321, respectively The two end portions 322, and the two end portions 322 protrude from the corresponding wide side surface 311a to serve as a boundary defining the thickness T. In addition, the other portion of the ring-shaped insulator 32 provided on the two narrow side surfaces 311b is protruded relative to the conductive needle body 31.

In addition, although the structure of the ring-shaped insulator 32 is described above with reference to FIG. 4 of this embodiment, this creation is not limited to this. For example, as shown in FIG. 5, the ring-shaped insulator 32 may further extend from the two end portions 322 to the portion of the wide side surface 311a beside any one of the long grooves 311c; or, as shown in FIG. 6 As shown, the ring-shaped insulator 32 may not extend any one of the long trenches 311c and be coplanar with any one of the wide side surfaces 311a.

The above is a description of the structure of the single neck-like probe 3 when the first guide plate unit 1 has not been misaligned with respect to the second guide plate unit 2, and the following is followed by the first guide plate The unit 1 will be described with respect to the structure of the plurality of neck-like probes 3 when the second guide plate unit 2 is arranged in a misaligned manner.

In more detail, as shown in FIGS. 8 and 9, the first guide plate unit 1 and the second guide plate unit 2 can be between 12% and about 12% of the needle length L3 (eg, FIG. 1) A displacement distance D1 of 19% is diagonally displaced from each other, so that the stroke sections 311 of the plurality of neck-like probes 3 are bent in the same direction, and the two wide sides of each stroke section 311 The two inflexion points P corresponding to 311a are respectively located in the two long grooves 311c, and any two of the neck-like probes 3 are located on the two inversion points P on the same side (eg: In FIG. 9, the two inflection points P) on the upper side of the two neck-like probes 3, the difference between one of the distances DP1 and DP2 from the first guide plate unit 1 is not greater than the needle length 1% of L3 (eg: Figure 1).

According to this, the conductive needle body 31 is formed with two long grooves 311c, so that the bending part of the neck-like probe 3 can be concentrated on the part where the two long grooves 311c are formed (such as: The curve point P is located in the long groove 311c), thereby effectively controlling the consistency of the actuation direction of each of the neck-like probes 3, and making each neck-like probe 3 in the testing process (eg: top Against the object to be measured) can work independently without interfering with each other.

[Example 2]

Please refer to FIG. 10 and FIG. 11, which is the second embodiment of the creation. This embodiment is similar to the above-mentioned first embodiment, so the similarities between the two embodiments will not be repeated, and this embodiment and the first embodiment The differences are roughly explained as follows:

In this embodiment, the stroke section 311 is further concavely formed on each of the narrow side surfaces 311b to form a short groove 311d with two ends respectively connected to the two long grooves 311c; The long trench 311c and the two short trenches 311d together form a rectangular ring-shaped trench. In this embodiment, the two long grooves 311c of the stroke section 311 are arranged in mirror symmetry, and the two short grooves 311d are also arranged in mirror symmetry, but the author is not limited to this. For example, in other embodiments not shown in this creation, the two short trenches 311d may also have different depths; or, the two short trenches 311d may have different lengths; or, The structures of the two short trenches 311d are different.

Furthermore, the ring-shaped insulator 32 is provided in the two long grooves 311c and the two short grooves 311d of the conductive pin body 31. In this embodiment, the ring-shaped insulator 32 is illustrated by not extending any one of the long trenches 311c and being coplanar with any one of the wide sides 311a, but this creation is not limited to this. For example, in other embodiments not shown in this creation, the annular insulator 32 may be formed with an end extending out of the short trench 311d; or alternatively, the annular insulator 32 may be formed from the The end portion further extends to a portion of the narrow side surface 311b beside any of the short grooves 311d.

[Technical effect of this creative example]

In summary, in the probe card device and the neck-like probe disclosed in the present embodiment, the conductive needle body 31 is formed with two long grooves 311c to effectively control the amount of downforce, and The strength of the conductive needle body 31 when it bears against the object to be measured can be maintained under preset conditions, so that the conductive needle body 31 can stably bear against the object to be tested without being damaged.

Furthermore, the neck-like probe 3 can adjust the minimum distance Dmin of the conductive needle body 31 to change the reaction force that the neck-like probe 3 can provide when it is stressed, thereby facilitating compliance with different Demand. Furthermore, the neck-like probe 3 can effectively maintain its signal transmission effect by controlling the ratio between the minimum distance Dmin and the maximum distance Dmax.

In addition, the neck-like probe 3 forms two long grooves 311c to effectively reduce the thickness of the ring-shaped insulator 32 protruding from the wide side 311a, thereby achieving the effect of protecting the ring-shaped insulator 32 (For example, the needle-like probe 3 can effectively prevent the ring-shaped insulator 32 from being scratched by the first guide plate unit 1 during the needle implantation process through the first guide plate unit 1 ).

In addition, by forming the two long grooves 311c in the conductive needle body 31, the bending part of the neck-like probe 3 can be concentrated on the part where the two long grooves 311c are formed during the operation (for example: inversion Point P is located in the long groove 311c), thereby effectively controlling the consistency of the actuation direction of each of the neck-like probes 3, and making each neck-like probe 3 in the testing process (such as: For the object under test) can work independently without interfering with each other.

The content disclosed above is only a preferred and feasible embodiment of this creation, and does not limit the scope of the patent of this creation, so any equivalent technical changes made using this specification and the graphic content are included in the patent scope of this creation. Inside.

100: probe card device 1: The first guide plate unit 11: First guide 2: Second guide plate unit 21: Second guide 3: Neck-like probe 31: Conductive needle body 311: Itinerary 311a: wide side 311b: narrow side 311c: Long groove 311d: short groove 312: end segment 32: Ring insulator 321: Filling Department 322: end L: length direction L3: needle length L311c, L311: length Dmin: minimum distance Dmax: maximum distance T: thickness D1: Displacement distance DP1, DP2: distance P: Recurve point

FIG. 1 is a schematic cross-sectional view of a probe card device according to the first embodiment of the invention.

FIG. 2 is a perspective schematic view of the neck-like probe of the first embodiment of the creation.

3 is a schematic perspective view of the conductive needle body in FIG. 2.

4 is a schematic partial cross-sectional view of FIG. 2 along section line IV-IV.

5 is a schematic cross-sectional view of another aspect of FIG. 4.

6 is a schematic cross-sectional view of another aspect of FIG. 4.

7 is a schematic cross-sectional view of another aspect of the probe card device of the first embodiment of the author.

FIG. 8 is a schematic top view of the probe card device of FIG. 1 when the first guide plate unit and the second guide plate unit are arranged in a misaligned position.

FIG. 9 is a schematic cross-sectional view of the probe card device of FIG. 1 when the first guide plate unit and the second guide plate unit are disposed in a misaligned position.

FIG. 10 is a three-dimensional schematic diagram of a neck-like probe of the second embodiment.

11 is a schematic perspective view of the conductive needle body in FIG. 10.

100: probe card device

1: The first guide plate unit

11: First guide

2: Second guide plate unit

21: Second guide

3: Neck-like probe

31: Conductive needle body

311: Itinerary

311a: wide side

311c: Long groove

312: end segment

32: Ring insulator

321: Filling Department

322: end

L: length direction

DP1, DP2: distance

P: Recurve point

Claims (10)

A probe card device, including: A first guide plate unit and a second guide plate unit, spaced apart from each other; and A plurality of neck-like probes, each of which is elongated and has a needle length along its length, and a plurality of the neck-like probes are passed through the first guide plate unit and the second guide plate unit ; Wherein, each of the neck-like probes includes: A conductive needle body, including: A stroke section, which is located between the first guide plate unit and the second guide plate unit and includes two wide sides and two narrow sides, and the stroke section is formed concavely on each of the wide sides There is a long groove extending from one of the narrow sides to the other of the narrow sides; wherein, the two long grooves are arranged adjacent to each other and separated by a minimum distance, and the minimum distance is two 95% to 75% of a maximum distance between wide sides; and Two end sections extending from the two ends of the travel section through the first guide plate unit and the second guide plate unit; and A ring-shaped insulator provided on the two long grooves of the conductive needle body and on the two narrow sides between the two long grooves; wherein, the neck-like The type probe has a thickness at the portion of the ring-shaped insulator provided in the two long grooves, which is 85% to 115% of the maximum distance; Wherein, the first guide plate unit and the second guide plate unit can be diagonally displaced from each other by a displacement distance between 12% and 19% of the needle length, so that a plurality of the neck-like probes The stroke sections of the needle are bent in the same direction, and the two inflection points respectively formed by the two wide sides of each stroke section are respectively located in the two long grooves. The probe card device according to claim 1, wherein in each of the neck-like probes, the two long grooves of the stroke section are arranged in mirror image symmetry, and each of the long grooves is It extends from one of the narrow sides to the other of the narrow sides in a direction perpendicular to the length direction. The probe card device according to claim 1, wherein when the first guide plate unit and the second guide plate unit are diagonally displaced from each other, any two of the neck-like probes are located on the same side The difference between one of the two recurve points and the first guide plate unit is not more than 1% of the needle length. The probe card device according to claim 1, wherein in each of the neck-like probes, a portion of the ring-shaped insulator of any one of the long grooves, which includes A filling portion in the long groove and two end portions respectively located on opposite sides of the filling portion, and the two end portions protrude from the corresponding wide side to serve as a boundary defining the thickness . The probe card device according to claim 1, wherein in each of the neck-like probes, a length of any one of the long grooves in the length direction is the length of the stroke section At least 50% of a length in the length direction. The probe card device according to claim 1, wherein in each of the neck-like probes, the conductive needle body is in a straight strip shape, and the stroke section is not formed to protrude from two Any protruding structure of the wide side and the two narrow sides. The probe card device according to claim 6, wherein the first guide plate unit includes a plurality of first guide plates, and the second guide plate unit includes a plurality of second guide plates; In the neck-like probe, one of the end sections can be fixed by the misalignment of the plurality of first guide plates, and the other of the end sections can pass the plurality of second guide plates It is fixed in place. A neck-like probe of a probe card device is elongated and includes: A conductive needle body, including: A stroke section includes two wide sides and two narrow sides, and the stroke section is concavely formed on each of the wide sides to form a one extending from one of the narrow sides to the other of the narrow sides A long groove; wherein the two long grooves are arranged adjacent to each other and separated by a minimum distance, and the minimum distance is 95% to 75% of a maximum distance between the two wide sides; and Two end sections formed from the two ends of the travel section; and A ring-shaped insulator that surrounds the portion of the conductive needle body where the two long grooves are formed; wherein the neck-like probe has a portion of the ring-shaped insulator provided on the two long grooves A thickness, which is 85% to 115% of the maximum distance; Wherein, the two end sections of the neck-like probe can be subjected to force to make the travel section curved, and the two inflexion points respectively formed by the two wide sides respectively are located at two Inside the long groove. The neck-like probe according to claim 8, wherein the stroke section is concavely formed on each of the narrow side surfaces to form a short groove with two ends respectively connected to the two long grooves, and the The ring-shaped insulator is disposed on the two long grooves and the two short grooves of the conductive needle body. The neck-like probe according to claim 9, wherein the conductive needle body is in the shape of a straight bar, and the stroke section is not formed with protrusions protruding from the two wide sides and the two narrow sides Any protruding structure; the two long grooves of the stroke section are arranged in mirror symmetry, and the two short grooves are also arranged in mirror symmetry.

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