TWM587820U - Semiconductor level alignment device - Google Patents

Abstract

The present invention relates to a semiconductor level calibration device. The main structure includes a calibration frame, and the calibration frame includes a positioning surface provided on a jig, and a measurement vertically disposed on one side of the positioning surface. Surface, the measuring surface is provided with a plurality of level sensors for adjusting the level of the loading door of the equipment, and each of the horizontal sensors is provided with at least one battery part, and the measuring surface is provided on the measuring surface. A plurality of level sensors are provided for adjusting the position of the loading port of the device. With the above structure, when the user combines the calibration frame with the device, the user does not need to connect an external power source or tap the power on the device, and can be powered by the battery section intuitively and quickly, allowing the level sensor and position The quasi-sensor performs the measurement.

Description

Semiconductor level correction device

The present invention provides a semiconductor level correction device, in particular a semiconductor level correction device with a simple structure and convenient operation, which can be directly powered by a built-in power supply for measurement and correction.

In accordance with the progress of semiconductor technology, semiconductor processes have also evolved rapidly, including high integration of components, miniaturization of circuits, and large wafers. However, it is necessary to manage small dust in a clean room. For cost and technology, It is difficult in every respect.

In terms of large wafers, wafer-containing containers, such as FOUP (Front-Opening Unified Pod), have a vertical surface on one side of the FOUP that has the ability to open and close and close the load port door. The loading door is defined on the container mounting table and has a load port corresponding to the door opening and closing mechanism of the wafer storage container, so that the loading port can be opened and closed in a state close to the loading door. When the door is open, the handling robot performs the handling of wafers in an Equipment Front End Module (EFEM) equipped with a loading port. The opening formed on the loading door is configured to be just included in the outer wall portion of the front module of the device with the loading port. Therefore, when the loading door is to be operated in an open state, the door opening and closing machine can be operated.

However, during the above-mentioned automated operation, the wafer storage container and the loading port of the front-end module of the device need to be highly accurate in the alignment process. Therefore, multiple sets of precision sensors must be used in conjunction to return position information. It is provided for users to adjust, and the power source of the precision sensor generally needs to be powered externally, whether it is a cable to an irrelevant power supply device (such as a socket), or a cable connected to the front-end module of the device to tap the power and perform the action Before, the power line of each precision sensor must be electrically connected to the designated position one by one, which is quite inconvenient in use, and it will take a lot of time to act on the electrical connection. Even after the connection is completed, the multiple power lines are exposed to the outside, which may cause the external appearance of the device to be poor, and may cause collisions and pulls, which may affect the normal operation of the device and increase the risk of safety issues.

Therefore, how to solve the above-mentioned problems and shortcomings, that is, where the creators of the new model and related manufacturers engaged in this industry are eager to study and improve.

Therefore, in view of the above-mentioned shortcomings, the creator of this new model collects relevant information, evaluates and considers from various parties, and uses the experience accumulated in this industry for many years. Through continuous trial and error, he began to design such a simple structure and easy operation , A new patentee of a semiconductor level correction device that can directly measure and correct with a built-in power supply.

The main purpose of the new model is to provide at least one battery section directly in the horizontal sensor, using the battery section as a built-in power source, saving the operation time of the external power source, increasing the convenience of operation, and thereby preventing the power line from being exposed, affecting aesthetics and safety. .

In order to achieve the above-mentioned object, the main structure of the novel model includes: a calibration frame including a positioning surface provided on the jig, and a measurement frame vertically disposed on one side of the positioning surface, and a plurality of measurement frames provided on the measurement The horizontal sensors for adjusting the level of the loading door of the equipment on the surface, a plurality of battery units provided in each of the horizontal sensors, and a plurality of positions of the loading ports provided on the measuring surface for adjusting the equipment Level sensor.

使用者 When the user uses the new model to calibrate the load port door and load port, the positioning surface of the calibration frame is directly set on the fixture of the device, and then the measurement surface is used first. The level sensor of the device interferes with the loading door of the device to measure and correct the level of the loading door. Then, the level sensor on the measuring surface is combined with the loading port of the device to use the level sensor. Adjust the upper, lower, left, and right positions of the loading port to the precise position to adjust the relative positions of the loading door, the loading port, and the fixture to the positioning. In particular, during the measurement process, the power source required by the level sensor is directly supplied by its internal battery unit, without the need to connect an external power supply with a power line, so the user can simply, quickly and conveniently complete the calibration action.

With the above-mentioned technology, the inconvenience of the time-consuming additional connection of an external power supply existing in the loading port of the front-end module of the conventional equipment, and the aesthetic and safety problems derived from the exposed power cord can be breakthrough, and the practical progress of the above advantages can be achieved. Sex.

1.1a‧‧‧correction frame

11, 11a‧‧‧ positioning surface

111, 111a‧‧‧ Positioning Department

12‧‧‧ measuring surface

13a‧‧‧Auxiliary positioning parts

131a‧‧‧guide slope

132a‧‧‧Perforated section

2‧‧‧level sensor

21‧‧‧ digital pointer

22‧‧‧Display

3‧‧‧ Battery Department

4‧‧‧ level sensor

41‧‧‧Combination

42‧‧‧ scale pointer

43‧‧‧ pointer display

5‧‧‧ Equipment

51‧‧‧Jig

511‧‧‧ positioning protrusion

52‧‧‧ Loading door

53‧‧‧loading port

54‧‧‧Guide

The first figure is a perspective view of a preferred embodiment of the present invention.

The second figure is a perspective perspective view of a horizontal sensor according to a preferred embodiment of the present invention.

The third figure is a perspective view of a level sensor according to a preferred embodiment of the present invention.

The fourth figure is a schematic diagram of fixture positioning according to a preferred embodiment of the present invention.

The fifth figure is a schematic diagram of the loading door correction according to the preferred embodiment of the present invention.

The sixth diagram is a schematic diagram (1) of loading port correction according to the preferred embodiment of the present invention.

The seventh diagram is a schematic diagram (two) of loading port correction according to a preferred embodiment of the present invention.

The eighth figure is a schematic structural diagram of yet another preferred embodiment of the present invention.

In order to achieve the above-mentioned purpose and effect, the technical means and structure adopted by the present invention are described in detail below with reference to the features and functions of the preferred embodiment of the present invention.

Please refer to the first to fourth figures, which are three-dimensional perspective views of the preferred embodiment of the present invention to the positioning diagram of the jig. It can be clearly seen from the figure that the new system includes: a calibration frame 1, which contains There is a positioning surface 11 provided on the jig 51, and a measuring surface 12 disposed vertically on one side of the positioning surface 11; a plurality of positioning portions 111 defined on the positioning surface 11; a plurality of definitions on the jig 51 The positioning protrusions 511 corresponding to each of the positioning portions 111 above; a plurality of level sensors 2 provided on the measuring surface 12 are used to adjust the level of the loading door 52 of the equipment 5 and each of the levels The sensor 2 has a digital pointer 21 and a display portion 22 electrically connected to the digital pointer 21; a plurality of battery portions 3 respectively provided in each of the horizontal sensors 2; and a plurality of provided on the measuring surface The level sensor 4 on 12 is for adjusting the position of the loading port 53 of the device 5, and each of the level sensors 4 has a joint portion 41 and a plurality of resists on the joint portion 41. A scale pointer 42 and a pointer indicator 43 that cooperates with the scale pointer 42.

With the above description, you can understand the structure of this technology, and according to the corresponding cooperation of this structure, you can achieve the advantages of simple structure, convenient operation, and direct measurement and calibration using the built-in power supply. Detailed explanation Will be described below.

Please also refer to the first to seventh figures, which are the perspective view of the preferred embodiment of the present invention to the loading port correction diagram (two). When the above components are assembled, it can be clearly seen from the figure The calibration frame 1 of the new model is calibrated with a device 5 by simulating the positioning structure of a wafer cassette, and the device 5 is implemented by a wafer loader.

In actual operation, the positioning surface 11 of the calibration frame 1 needs to be first set on the jig 51 of the device 5, so the positioning convex portion 511 on the jig 51 is firstly used (a circular convex cylindrical shape is used as the embodiment) Example) Positioning the positioning portion 111 coupled to the positioning surface 11 (a circular hole is used as an example in this embodiment), In addition, the positioning convex portion 511 and the positioning portion 111 of this embodiment form a triangular plane on the fixture 51 and the positioning surface 11, respectively. When the positioning surface 11 is flat against the surface of the fixture 51, sliding or rotation can be avoided (such as (Figure 4).

Then, the guide device 54 of the device 5 is used as an example (in this embodiment, a slide rail is used as an example, and it can also be driven by a power element such as a motor or a screw) to drive the fixture 51 so that the fixture 51 and the calibration frame 1 go to the loading door together. 52, and when the horizontal sensor 2 on the measuring surface 12 abuts the loading door 52 of the device 5, the shrinkage of the digital pointer 21 is reflected on the display section 22 to determine the loading door 52 and the amount. Measuring the level of the surface 12. Specifically, the number of the horizontal sensors 2 in this embodiment is four, and they are respectively disposed at the four corners of the measuring surface 12. When the measuring surface 12 is close to the loading door 52, if the loading door 52 and the measuring surface 12 are In the non-parallel state, only the digital pointers 21 of one or two horizontal sensors 2 will touch the loading door 52 (as shown in the fifth figure) at the same time, and then continue to move the measuring surface 12 to make four horizontal sensing The digital pointers 21 of the device 2 all touch the loading door 52. At this time, the numerical difference reflected by the display portion 22 in each horizontal sensor 2 (the left and right difference of 0.2 mm is used as an example) can be calculated. The deflection direction and deflection amount of the loading door 52 allow the user to adjust the angle of the loading door 52 so that the measurement surface 12 and the loading door 52 are in a parallel state.

Next, as shown in the sixth and seventh figures of the reference, continue to move the calibration frame 1 so that the level sensor 4 on the measurement surface 12 is combined with the loading port 53 of the device 5 to use the level sensing The device 4 adjusts the upper, lower, left, and right positions of the loading port 53 to an accurate position, thereby adjusting the relative positions of the loading door 52, the loading port 53, and the jig 51 to positioning. Specifically, when the level sensor 4 and the loading port 53 are combined, the coupling portion 41 of the level sensor 4 (corresponds to the shape of the loading port 53 on the device 5 such as a Latch Key or R-Pin, and acts as a pair The implementation of the standard pin) will first contact the loading port 53. At this time, if the loading port 53 has a positional deviation of up, down, left and right, it will directly reflect on the gauge pointer 42 on the outside of the joint portion 41. According to this embodiment, In other words, there are four gauge pointers 42 on the joint 41 of each quasi-sensor 4 on the upper, lower, left, and right sides, and the loading port 53 is offset 0.02 mm to the left as an example. In the quasi-sensor 4, the scale pointer 42 on the left side of the joint portion 41 is compressed, and its compression amount is reflected in the pointer indicator portion 43, while the scale pointer 42 on the right side is due to the loading port 53 Offset and separated from the loading port 53. Based on the above values, the user can accurately adjust the position of the loading port 53. The level sensor 2 or the level sensor 4 is a dial indicator, and the measurement accuracy is at least 10 ^-3 mm. As for the container for wafer storage, the accuracy is very high.

It is worth mentioning that during the above measurement process, the power source of the level sensor 2 is directly The battery part 3 is supplied by the unit, and the power source required by the level sensor 4 is also directly achieved by the internal gear linkage. Therefore, the level sensor 2 and the level sensor 4 do not need to be connected to the outside by a power line. Power supply, so users can simply, quickly and conveniently complete the calibration action, saving time when connecting the power line, and because no power line is exposed, the overall appearance is more concise, while avoiding collision or pulling problems during operation, and Increase operational safety.

Please also refer to the eighth figure at the same time, which is a schematic structural diagram of another preferred embodiment of the present invention. As can be clearly seen from the figure, this embodiment is similar to the above embodiment, and only includes a plurality of An auxiliary positioning member 13a on each positioning portion 111a, and each of the auxiliary positioning members 13a defines two symmetrically formed guide slopes 131a, and a perforated portion formed between the guide slopes 131a and communicating with the positioning portion 111a. 132a. With this, when the user combines the correction frame 1a with the fixture of the device, the auxiliary positioning piece 13a has a long structure, which can increase the positioning tolerance range of the positioning convex portion, and the guiding inclined surface 131a is rendered. The recessed left and right inclined surfaces can guide the positioning convex portion to the center of the auxiliary positioning member 13a, and then guide the positioning convex portion into the perforated portion 132a, and the perforated portion 132a and the positioning portion 111a communicate with each other, so it can help users to quickly and easily The combination of the positioning convex portion and the positioning portion 111a is completed, and the friction between the positioning convex portion and the positioning surface 11a is reduced, thereby increasing its service life.

However, the above description is only the preferred embodiment of the new model, and it does not limit the patent scope of the new model. Therefore, all simple modifications and equivalent structural changes made by using the new model's description and diagram contents should be the same. It is included in the patent scope of this new model and is conferred to Chen Ming.

In summary, when the new level calibration device of the semiconductor is used, it can really achieve its efficacy and purpose. Therefore, the new type is a new type with excellent practicability. In order to meet the application requirements of the new type of patent, it is proposed according to law. I hope that the review committee will grant the new model as soon as possible to protect the hard work of the creator. If there is any suspicion in the review bureau of the Bureau, please follow the letter and instruct the creator to cooperate with all efforts and feel good.

Claims (7)

A semiconductor level correction device mainly includes: a correction frame body including a positioning surface provided on a jig, and a measurement surface vertically disposed on one side of the positioning surface; a plurality of which are set on the quantity The level sensors on the measuring surface are the level of the loading door for the adjustment equipment; a plurality of the battery sections are provided in each of the level sensors; and the level sensing is provided on the measuring surface. Device, which is the position of the loading port for adjusting equipment. The semiconductor level correction device according to item 1 of the scope of the patent application, wherein the positioning surface has a plurality of positioning portions, and the jig has positioning projections corresponding to each of the positioning portions. According to the semiconductor level correction device described in item 2 of the scope of patent application, each of the positioning portions has an auxiliary positioning member. According to the semiconductor level correction device described in item 3 of the scope of patent application, wherein each of the auxiliary positioning members is defined with two symmetrically formed guide slopes, and a guide formed between the guide slopes and communicating with the positioning portion. Perforated section. The semiconductor level correction device according to item 1 of the scope of the patent application, wherein each of the horizontal sensors has a digital pointer and a display portion electrically connected to the digital pointer. The semiconductor level correction device according to item 1 of the scope of patent application, wherein each of the level sensors has a joint portion, and a plurality of gauge pointers resisting the joint portion, and one and the same amount The pointer of the watch is equipped with the pointer indicating part of the cooperative action. The level correction device for a semiconductor as described in item 1 of the scope of patent application, wherein the level sensor or the level sensor is a dial indicator.