TWM572455U - Optical type defect inspection system - Google Patents

Abstract

The present invention provides an optical detection system comprising: an image capture system including a camera for capturing an image from a to-be-detected object; at least one platform for carrying the object to be detected; and a displacement drive a mechanism that drives the camera to move in the X-axis direction and drives the platform or the camera to move in the Y-axis direction; and the platform includes a movable stage that carries a front side of the object to be detected, and a a loading platform carrying a reverse side of the object to be detected, and the optical detection system includes: a turning mechanism, rotating the movable stage to attach the front surface of the object to be detected to the stage, and The camera captures a front image and a reverse image of the object to be detected from the movable stage and the stage, respectively.

Description

Optical flaw detection system

The present invention relates to an optical flaw detection system, and more specifically, the present invention is an optical flaw detection system that can reverse the object to be detected to perform flaw detection on both sides.

Consumer electronics products are light and short, have different sizes, and have more and more customized requirements. Therefore, the same machine must meet various sizes, small quantities, or single size, mass production, and both types of production needs must be balanced. And both sides must be tested.

In order to detect a variety of flaws from the front and back of a to-be-detected object, the conventional optical helium detection system requires a flipping mechanism to perform the flipping action of the object to be detected, and two cameras are separately configured to scan the front side of the object to be detected. The opposite. However, in the conventional optical detection system, the camera of the image capturing system is a component with a high cost proportion in the device. If a camera is separately used to detect the front and back of the object to be detected, the cost of the device will increase significantly. . Therefore, if the present invention can provide an optical sputum detection system that shares a single camera and detects both sides of the object to be detected by multiple motions, the cost can be reduced and the efficiency can be improved, which will have industrial applicability.

The purpose of this creation is to provide a carrying surface with a flipping action and share An optical sputum detection system of an interlaced image capturing system, such that an object to be detected performs a flipping operation on the carrying surface, and the image capturing system interleaves the image to detect the front and back sides of the object to be detected.

In order to achieve the above-mentioned creative purposes, the present invention provides an optical detection system comprising: an image capture system including a camera for capturing images from a to-be-detected object; at least one platform for carrying the image a detecting device; and a displacement driving mechanism for driving the camera to move in the X-axis direction and driving the platform or the camera to move in the Y-axis direction; wherein the platform comprises a movable stage carrying the object to be detected a face up, with a loading platform carrying a reverse side of the object to be detected, and the optical cymbal detection system includes: a flipping mechanism that rotates the movable stage to attach the front surface of the object to be detected The camera is configured to capture a front image and a reverse image of the object to be detected from the movable stage and the stage, respectively.

Wherein, the turning mechanism comprises: a rotating shaft, and the movable stage is fixed to the rotating shaft.

The movable carrier has a thickness larger than the fixed carrier, and the movable carrier has a plurality of air holes for adsorbing the reverse surface of the object to be detected, and the carrier has a plurality of air holes, and the holes have a plurality of air holes. To adsorb the front side of the object to be detected.

In order to achieve the above-mentioned creative purpose, the present invention provides an optical detection system comprising: an image capturing system comprising a camera for capturing an image from a to-be-detected object or another object to be detected; a platform and a second platform respectively for carrying the object to be detected or the other object to be detected; and a displacement driving mechanism for driving the camera to move in the X-axis direction and driving the camera to move in the Y-axis direction Or driving the first platform and the second platform to move in the Y-axis direction respectively; wherein the first platform and the second platform respectively comprise a a moving stage carrying a surface of the object to be detected or the object to be detected facing up, and a loading platform carrying the object to be detected or a reverse side of the other object to be detected, and the optical raft The detecting system includes: at least one turning mechanism, the first platform and the movable stage of the second platform are rotatable, and the front surface of the object to be detected or the other object to be detected is attached to the stage, so that the The camera captures the front and back images of the object to be detected or the other object to be detected from the movable platform and the stage of the first platform and the second platform, respectively.

According to the optical sputum detection system of the present invention, the XY axis displacement driving mechanism is combined, and the carrying platform with the flipping action shares a staggered moving image capturing system to detect the front and back sides of the object to be detected, and when the carrying platform carries a small size to be detected The object can detect the front and back sides of the small-sized object to be detected. If the detection speed and efficiency are increased, the creation system can be configured with multiple Y-axis displacement drive mechanisms to move independently, and the carrier with the flip action shares a staggered moving image. The shooting system can separately detect the front and back sides of the small-sized object to be detected. When it is necessary to detect a large-sized object to be detected, the independent Y-axis movement can be adjusted to the state of the synchronous moving mechanism, so the large size that can be detected is to be detected. The object area can be larger than the small size of the object to be detected moving by the independent Y axis. Thus, the authoring system can simultaneously meet the detection requirements of small and large samples, without additional cost, and then purchase different sizes for different sizes. Size equipment.

1‧‧‧Testables

2‧‧‧ movable stage

21‧‧‧First movable stage

22‧‧‧Second movable stage

3‧‧‧Fixed stage

4‧‧‧Y-axis drive mechanism

41‧‧‧Y1 shaft drive mechanism

42‧‧‧Y2-axis drive mechanism

5‧‧‧ flipping mechanism

6‧‧‧Locking platform

10‧‧‧Image Capture System

11‧‧‧ camera

12‧‧‧ lens

13‧‧‧ polarizer

14‧‧‧beam splitter

15‧‧‧ positive light source

16‧‧‧right light source

17‧‧‧left light source

18‧‧‧X-axis drive mechanism

S‧‧‧ scan start position

E‧‧‧ scan end position

L, R‧‧‧ moving direction

U, U1, U2‧‧‧ loading

D, D1, D2‧‧‧

T‧‧‧ flip direction

B, F‧‧‧ reciprocating direction

The first figure is a system architecture diagram of the first embodiment of the present creation.

The second figure is a system block diagram of the first embodiment of the present creation.

The third figure is a top view of the platform in which the authoring system carries a small size of the object to be tested.

The fourth figure is a side view of the platform carrying the small-sized object to be detected shown in the third figure.

5A to 5C are side views of the platform shown in Fig. 4, wherein the movable stage flips a small size of the object to be detected to the fixed stage.

The sixth figure is a top view of the platform in which the authoring system carries a large size of the object to be tested.

The seventh figure is a side view of the platform carrying the large-sized object to be detected shown in the sixth figure.

8A to 8C are side views of the platform shown in Fig. 4, wherein the movable stage reverses a large size of the object to be detected to the fixed stage.

The ninth figure is a schematic diagram of the movement and direction of a small-sized object to be detected on a reversible platform by the image capturing system in the first embodiment of the authoring system.

The tenth figure is a schematic diagram of the movement and direction of the object to be detected on the two reversible platforms of the image capturing system of the first embodiment of the present creation system.

The eleventh figure is a system architecture diagram of the second embodiment of the present creation.

Figure 12 is a block diagram of the system of the second embodiment of the present creation.

The thirteenth drawing is a schematic diagram showing the movement and direction of the object to be detected on the reversible platform of the image capturing system in the second embodiment of the authoring system.

Figure 14 is a schematic diagram showing the movement and direction of the object to be detected on the two reversible platforms of the image capturing system in the second embodiment of the authoring system.

The fifteenth figure is a schematic diagram of the movement and direction of the large-sized object to be detected on the reversible platform of the image capturing system in the first embodiment of the authoring system.

Figure 16 is a schematic diagram showing the movement and direction of a large-sized object to be detected on a reversible platform by the image capturing system in the second embodiment of the authoring system.

17A to 17D are side views of another turning mechanism of the present creation system, in which the first movable stage and the second movable stage hold and flip an object to be detected.

Referring first to the first and second figures, a system architecture diagram and a system block diagram of the optical pickup detection system of the first embodiment of the present invention are respectively shown. In a first embodiment of the present invention, an optical imaging system includes an image capturing system 10 for detecting a front and back detection image from a to-be-detected object 1 carried by a platform, wherein the platform includes a movable load. The stage 2 carries a face up of the object to be tested 1 and a fixed stage 3, and a reverse side carrying the object to be detected 1 faces upward. The image capturing system 10 includes a camera 11 having a lens 12 that defines an optical path for capturing both front and back sides of a to-be-detected object 1. The object to be detected 1 is exemplified by a circuit board, and a plurality of parts or wirings thereof may be distributed on the front and back sides thereof. In addition, the image capturing system 10 is provided with various auxiliary light sources and optical components for allowing flaws and defects of the object 1 to be detected. The auxiliary light source and the optical component include: a polarizer 13 disposed on the optical path of the camera 11 to filter out the stray light source; a beam splitter 14 disposed on the optical path of the camera 1; and a positive light source 15 coupled to the beam splitter 14 A positive light source for providing the object to be detected 1 is provided for the camera 11 to take a picture; and a left side light source 17 and a right side light source 16 provide the auxiliary light for the detection of the object 1 to be detected.

Continuing to refer to the first and second figures, the optical tweezers detection system further includes: a displacement drive mechanism and a flip mechanism 5. The displacement driving mechanism includes an X-axis driving mechanism 18 and a Y-axis driving mechanism 4, wherein the X-axis driving mechanism 18 drives the camera 11 of the image capturing system 10 to be staggered in the X-axis direction, respectively, and is movable to the platform. The front surface of the object to be detected 1 carried by the stage 2 and the reverse surface of the object to be detected 1 carried by the fixed stage 3 of the platform. The Y-axis driving mechanism 4 simultaneously drives the movable stage 2 and the fixed stage 3 of the platform to move back and forth in the Y-axis direction perpendicular to the X-axis direction, so that the camera 11 of the image capturing system 10 scans and takes the object to be detected 1 Both sides of the test image.

In addition, the turning mechanism 5 includes a rotating shaft and a motor, and the movable stage 2 of the platform is fixedly coupled to the rotating shaft, and the rotating shaft is driven by the motor to rotate the movable stage 2 to make the movable stage 2 The front surface of the object to be detected 1 carried is attached to the mesa of the fixed stage 3. In order to avoid the moving process of the movable stage 2 during the inversion process and the movable stage 2 and the fixed stage 3 moving forward and backward in the Y-axis direction, the movement or falling of the object 1 to be detected is caused, and the movable stage 2 and the fixed stage 3 are fixed. The mesa of the movable stage 2 is configured to adsorb the opposite side of the object to be detected 1 , and the holes of the fixed stage 3 are used to adsorb the front surface of the object to be detected 1 . The equal pores are distributed on the mesa of the movable stage 2 and the fixed stage 3 as shown in the third and sixth figures.

In the first embodiment of the present invention, the optical helium detecting system further includes a loading machine and a blanking machine, which are not shown. The loading machine displaces the object to be detected 1 from the undetected area to the table top of the movable stage 2, so that the air holes of the movable stage 2 adsorb the opposite side of the object to be detected 1. After the flipping mechanism 5 inverts the object to be detected 1 to the fixed stage 3 for detection, the unloading machine shifts the object to be detected 1 to a detected area from the table of the fixed stage 3.

Referring to the third and fourth figures, respectively, a top view and a side view of the platform of the present authoring system carrying a small size of the object to be detected are shown. In a preferred embodiment of the present invention, the platform of the authoring system includes a movable stage 2, a fixed stage 3, and a locking platform 6. The fixed stage 3 is locked to the locking platform 6 , and the movable stage 2 is rotatably disposed on the locking platform 6 . The rotating shaft of the turning mechanism 5 is disposed on the locking platform 6 as a pivot of the movable stage 2, and the rotating shaft is preferably located between the movable stage 2 and the fixed stage 3. The Y-axis drive mechanism 4 of the displacement drive mechanism can simultaneously drive the movable stage 2 of the stage and the fixed stage 3 to move back and forth in the Y-axis direction by driving the lock platform 6.

Please refer to the fifth to fifth C charts, respectively showing the platforms shown in the fourth figure. A side view in which the movable stage 2 inverts a small size of the object to be detected 1 to the fixed stage 3. Referring to the fourth figure at the same time, when the loading machine (not shown) displaces a small size of the object to be detected 1 from the undetected area to the table top of the movable stage 2, the plurality of air holes of the movable stage 2 are adsorbed to be detected. The reverse side of object 1. After the camera 11 of the image capturing system 10 scans the detected image on the front side of the object to be detected 1, the turning mechanism 5 drives the rotating shaft by the motor to rotate the movable stage 2, as shown in FIG. When the front surface of the object to be detected 1 carried by the stage 2 is attached to the table top of the fixed stage 3, as shown in FIG. 5B, the plurality of air holes of the fixed stage 3 first adsorb the front surface of the object to be detected 1, and the movable The plurality of air holes of the stage 2 stop adsorbing the reverse side of the object 1 to be detected. The turning mechanism 5 drives the rotating shaft by the motor to rotate the movable stage 2 to return to the starting position, as shown in FIG. 5C, waiting for the loading machine to shift the next small size to be detected 1 from the undetected area to the movable The table top of the stage 2, and after the camera 11 of the image capturing system 10 scans the detected image on the reverse side of the object to be detected 1, the stocker (not shown) displaces the object to be detected 1 from the table of the fixed stage 3 to A detected area. It should be noted in FIG. B that the thickness of the movable stage 2 should be greater than the thickness of the fixed stage 3 so that the front surface of the object to be detected 1 can be flatly attached to the stage of the fixed stage 3 by rotating the movable stage 2 by 180 degrees. Preferably, the difference in thickness between the two is the thickness of the small-sized object to be detected 1.

Please refer to the sixth and seventh figures, respectively, to show the top view and side view of the platform of the authoring system carrying a large size of the object to be tested. The displacement drive mechanism includes two Y-axis drive mechanisms 41, 42 in response to the detection requirements of the large-sized object to be tested. The optical flaw detection system of the present invention can be combined into a large-size detection platform by a small-size detection platform independently driven by two Y-axis drive mechanisms 41, 42, and the large-size detection platform is driven by two Y-axis drive mechanisms 41, 42 together. . In addition, the difference between the large-size detection platform shown in FIG. 6 and the small-size detection platform shown in FIG. 4 is that the size difference between the movable stage 2 and the fixed stage 3 can respectively carry large and small objects to be detected. sixth The large-size inspection platform shown in the figure comprises a movable stage 2, a fixed stage 3 and a locking platform 6. The fixed stage 3 is locked to the locking platform 6 , and the movable stage 2 is rotatably disposed on the locking platform 6 . The rotating shaft of the turning mechanism 5 is disposed on the locking platform 6 as a pivot of the movable stage 2, and the rotating shaft is preferably located between the movable stage 2 and the fixed stage 3. The two Y-axis driving mechanisms 41, 42 of the displacement driving mechanism jointly drive the locking platform 6, and the movable stage 2 and the fixed stage 3 can be simultaneously driven to move back and forth in the Y-axis direction.

Referring to FIGS. 8A to 8C, respectively, side views of the platform shown in FIG. 7 are displayed, wherein the movable stage 2 inverts a large size of the object to be detected 1 to the fixed stage 3. Referring to the seventh figure at the same time, when the loading machine (not shown) displaces a large size of the object to be detected 1 from the undetected area to the table top of the movable stage 2, the plurality of air holes of the movable stage 2 are adsorbed to be detected. The reverse side of object 1. After the camera 11 of the image capturing system 10 scans the detected image on the front side of the object to be detected 1, the turning mechanism 5 drives the rotating shaft by the motor to rotate the movable stage 2, as shown in FIG. When the front surface of the object to be detected 1 carried by the stage 2 is attached to the surface of the fixed stage 3, as shown in FIG. 8B, the plurality of air holes of the fixed stage 3 first adsorb the front surface of the object to be detected 1, and the movable The plurality of air holes of the stage 2 stop adsorbing the reverse side of the object 1 to be detected. The turning mechanism 5 drives the rotating shaft by the motor to rotate the movable stage 2 to return to the starting position, as shown in FIG. 8C, waiting for the loading machine to displace the next large size to-be-detected object 1 from the undetected area to the movable The table top of the stage 2, and after the camera 11 of the image capturing system 10 scans the detected image on the reverse side of the object to be detected 1, the stocker (not shown) displaces the object to be detected 1 from the table of the fixed stage 3 to A detected area. It should be noted in FIG. 8B that the thickness of the movable stage 2 should be greater than the thickness of the fixed stage 3 so that the front surface of the object 1 can be flattened to the surface of the fixed stage 3 by rotating the movable stage 2 by 180 degrees. Preferably, the difference in thickness between the two is the thickness of the large-sized object to be detected 1.

Please refer to the ninth figure, which is a schematic diagram showing the movement and direction of a small-sized object to be detected on a reversible platform by the image capturing system in the first embodiment of the authoring system. In this embodiment, the X-axis driving mechanism 18 drives the camera of the image capturing system 10 to shift leftward L and rightward in the X-axis direction, and the Y-axis driving mechanism 4 simultaneously drives the movable stage 2 and the fixed load. The table 3 moves in the reciprocating direction of the forward F and the backward B in the Y-axis direction, and the loading machine (not shown) feeds a small size of the object to be detected 1 from the undetected area to the table of the movable stage 2. The turning mechanism 5 drives the movable stage 2 to invert T to turn the object to be inspected 1, and the unloading machine (not shown) removes the detected D to be detected D from the fixed stage 3. The camera of the image capturing system 10 sequentially scans the front image of the object to be detected 1 and the reverse image of the object to be detected, as shown in the following table 1. The flow 4 is followed by the flow 1 cycle.

Please refer to the tenth figure, which is a schematic diagram showing the movement and direction of the object to be detected on the two reversible platforms of the image capturing system of the first embodiment of the present authoring system. In this embodiment, the optical tweezers detection system of the present invention can independently drive the small-size detection platform by two Y-axis driving mechanisms, and the image capturing system interleaves and moves the images between the two platforms to detect the positive of the object to be detected. Anti-two sides. In the tenth diagram, the left shift L and the right shift R in the X-axis direction, the F1 forward in the Y-axis direction, the reciprocating direction of the F2 and the backward shift B1, B2, and the turning mechanism 5 drive the flip T1 of the movable stage 2 , T2, the loading U1, U2 of the loading machine and the blanking D1, D2 of the cutting machine are all as illustrated in the ninth figure. For convenience of explanation, the left side of the tenth figure is the first platform, and the right side is the second platform. The first platform is loaded and unloaded as the first object to be detected, and the second platform is loaded and unloaded as the second object to be detected. The camera of the image capturing system 10 sequentially scans and captures a front image of the first object to be detected, a front image of the second object to be detected, a reverse image of the first object to be detected, and a reverse image of the second object to be detected. , as shown in the following table 2, after the process 8 is followed by the process 1 cycle. A person having ordinary knowledge in the technical field of the present invention can easily change the flow of the second embodiment, and the camera of the image capturing system 10 sequentially scans and captures a front image of the first object to be detected, a reverse image of the first object to be detected, and the a front image of the object to be detected and a reverse image of the second object to be detected.

Please refer to FIG. 11 and FIG. 12 for the system architecture diagram and system block diagram of the second embodiment of the present creation. The first embodiment of the present invention differs from the second embodiment in a displacement drive mechanism comprising an X-axis drive mechanism 18 and a Y-axis drive mechanism 4 for driving the camera 11 of the image capture system 10 together. The X-axis direction and the Y-axis direction move, and the locking platform 6 carrying the movable stage 2 and the fixed stage 3 is fixed.

Please refer to the thirteenth figure, which is a schematic diagram showing the movement and direction of a small-sized object to be detected on a reversible platform by the image capturing system in the second embodiment of the authoring system. In this embodiment, the X-axis driving mechanism 18 and the Y-axis driving mechanism 4 drive the camera of the image capturing system 10 to shift leftward L and rightward in the X-axis direction, and advance F in the Y-axis direction. Reciprocating direction of backward shift B The moving, loading machine (not shown) feeds a small size of the object 1 to the table of the movable stage 2 from an undetected area, and the turning mechanism 5 drives the movable stage 2 to invert T to turn the object to be detected 1 The surface unloading machine (not shown) removes the detected D to be detected D from the fixed stage 3. The camera of the image capturing system 10 sequentially scans and captures the front image of the object to be detected 1 and the reverse image of the object to be detected, as shown in the following table 3. The flow 4 is followed by the flow 1 cycle.

Please refer to the fourteenth figure, which is a schematic diagram showing the movement and direction of the object to be detected on the two reversible platforms of the image capturing system of the second embodiment of the authoring system. In this embodiment, the artificial optical detection system can independently drive the small size detection platform by two Y-axis driving mechanisms, and the image capturing system interleaves and moves the image between the two platforms to detect the positive and negative of the object to be detected. Two sides. The fourteenth figure shows the leftward shift L and the right shift R in the X-axis direction, the reciprocating direction of the forward shift F and the backward shift B in the Y-axis direction, and the flipping mechanism 5 drives the flipping of the movable stage 2 by T1, T2. The loading U1, U2 of the loading machine and the blanking D1, D2 of the unloading machine are as illustrated in Fig. 13. For the sake of explanation, In the fourteenth figure, the left side is the first platform, and the right side is the second platform. The first platform is loaded and unloaded as the first object to be detected, and the second platform is loaded and unloaded as the second object to be detected. The camera of the image capturing system 10 sequentially scans and captures a front image of the first object to be detected, a front image of the second object to be detected, a reverse image of the first object to be detected, and a reverse image of the second object to be detected. The process shown in Table 4 below is followed by the process 1 followed by the process 1 cycle. A person having ordinary knowledge in the technical field of the present invention can easily change the flow of Table 4, and the camera of the image capturing system 10 sequentially scans and captures a front image of the first object to be detected, a reverse image of the first object to be detected, and the a front image of the object to be detected and a reverse image of the second object to be detected.

Please refer to the fifteenth figure, which is a schematic diagram showing the movement and direction of a large-sized object to be detected on a reversible platform by the image capturing system in the first embodiment of the authoring system. In this embodiment, the camera of the image capturing system 10 cannot scan the front side and the back side of the large-sized object to be detected at one time in the Y-axis direction, and must take a plurality of reciprocating motions in the Y-axis direction. Therefore, during the scanning and photographing of the image capturing system 10, the large-sized object to be detected is carried by the movable stage 2 and the fixed stage 3, and the two Y-axis driving mechanisms 41, 42 synchronously reciprocate a plurality of large-scale detection platforms simultaneously. The X-axis drive mechanism 18 drives the camera of the image capture system 10 to be gradually shifted right from the scan start position S to the scan end position E. In addition, the left shift L and the right shift R in the X-axis direction, and the Y-axis The reciprocating direction of the upward F and the backward B, the turning mechanism 5 drives the reversal T of the movable stage 2, the loading U of the loading machine, and the discharging D of the unloading machine, as illustrated in the ninth figure. . The camera of the image capturing system 10 sequentially scans and captures the front image of the object to be detected 1 and the reverse image of the object to be detected, as shown in the following table 5. The flow 4 is followed by the flow 1 cycle.

Please refer to the sixteenth figure, which is a schematic diagram showing the movement and direction of a large-sized object to be detected on a reversible platform by the image capturing system of the second embodiment of the authoring system. In this embodiment, the camera of the image capturing system 10 cannot scan the front side and the back side of the large-sized object to be detected at one time in the Y-axis direction, and must take a plurality of reciprocating motions in the Y-axis direction. Therefore, during the scanning and photographing of the image capturing system 10, the large-sized object to be detected is carried by the movable stage 2 and the fixed stage 3, and the two Y-axis driving mechanisms 41, 42 synchronously reciprocate a plurality of large-scale detection platforms simultaneously. The X-axis drive mechanism 18 drives the camera of the image capture system 10 to be gradually shifted right from the scan start position S to the scan end position E. In addition, the left shift L and the right shift R in the X-axis direction, and the Y-axis direction The reciprocating direction of the forward movement F and the backward movement B, the turning mechanism 5 drives the reverse T of the movable stage 2, the loading U of the loading machine, and the blanking D of the cutting machine, as illustrated in the fifteenth figure. . The camera of the image capturing system 10 sequentially scans and captures the front image of the object to be detected 1 and the reverse image of the object to be detected, as shown in the following table 6. The flow 4 is followed by the flow 1 cycle.

Referring to FIGS. 17A to 17D, a side view of another turning mechanism of the present creation system is shown, and the first movable stage 21 and the second movable stage 22 are held by the first movable stage 21 to flip the object to be detected. In the first and second embodiments of the present invention, the operations of flipping a to-be-detected object as shown in FIGS. 5A to 5C and 8A to 8C may be performed by the 17th A. The figure is replaced by the flipping operation of the other turning mechanism 5 shown in Fig. 17D. In the authoring system shown in FIGS. 17A to 17D, an optical sputum detecting system includes an image capturing system (not shown), from one A to-be-detected object 1 carried by the platform captures the detection images of the front and back sides, wherein the platform includes a first movable stage 21, a front side of the object to be detected 1 facing upward, and a second movable stage 22, A reverse side carrying the object to be detected 1 faces upward. The optical helium detecting system further includes a displacement driving mechanism and a turning mechanism 5. The displacement driving mechanism comprises an X-axis driving mechanism (not shown) and a Y-axis driving mechanism 4, wherein the X-axis driving mechanism drives the camera of the image capturing system to be staggered in the X-axis direction, as shown in the first figure. Aligning the front surface of the object to be detected 1 on the first movable stage 21 and aligning the opposite side of the object 1 to be detected on the second movable stage 22. The Y-axis drive mechanism 4 of the displacement drive mechanism drives the lock platform 6 to move back and forth in the Y-axis direction, and the flip-up mechanism 5 and the first and second movable stages 21, 22 are located on the lock platform 6.

The turning mechanism 5 includes a rotating shaft, a selecting mechanism and a motor, wherein the motor drives the forward and reverse rotation of the rotating shaft, and the selecting mechanism can select the first movable stage 21 or the second movable stage 22 to be coupled to The rotating shaft, or the two movable stages 21, 22 are simultaneously coupled to the rotating shaft, so that the rotating shaft can selectively rotate the first movable stage 21 or the second movable stage 22 or simultaneously rotate the first The second movable stage 21, 22. When the first and second movable stages 21, 22 are not coupled to the rotating shaft, the free rotation of the rotating shaft does not affect the positions of the first and second movable stages 21, 22.

When the turning mechanism 5 performs the turning operation, as shown in FIG. 17A, the selecting mechanism selects the second movable stage 22 to be coupled to the rotating shaft, but the first movable stage 21 is not coupled to the rotating shaft. And the rotation of the rotating shaft is driven by a motor, such as an arrow shown in FIG. 17B, to rotate the second movable stage 22 to be attached to the front surface of the object 1 to be detected. Then, the selection mechanism selects the two stages 21, 22 to be coupled to the rotating shaft at the same time, and the motor rotates the forward rotation of the rotating shaft, as shown in FIG. 17C, to simultaneously rotate the two stages 21, 22 clips. The object to be detected 1 is turned over to the original position of the second movable stage 22. Finally, the selection mechanism selects the first movable stage 21 to be coupled to the rotating shaft, However, the second movable stage 22 is not coupled to the rotating shaft, and the motor is driven to reverse the rotating shaft, such as the arrow shown in FIG. 17D, to rotate the first movable stage 21 to the original position. The operation of inverting the object 1 to be detected from the first movable stage 21 to the second movable stage 22 is completed.

It will be understood by those skilled in the art that the flipping operation by the single movable stage 2 as shown in FIGS. 5A to 5C and the eighth to eighth C diagrams, FIG. The flipping operation shown in Fig. 17D is performed by the two movable stages 21, 22 holding the object 1 to be reversed, so that it is not necessary to provide the air holes for adsorbing the object to be detected 1 on the two stages 21, 22.

Claims (10)

An optical detection system includes: an image capture system including a camera for capturing an image from a to-be-detected object; at least one platform for carrying the object to be detected; and a displacement drive mechanism for driving The camera moves in the X-axis direction and drives the platform or the camera moves in the Y-axis direction; the platform comprises a movable stage, a front side facing the object to be detected, and a stage Holding the reverse side of the object to be detected, and the optical detection system includes: a flipping mechanism, rotating the movable stage to attach the front surface of the object to be detected to the stage, so that the camera respectively A front image and a reverse image of the object to be detected are imaged from the movable stage and the stage. The optical helium detecting system according to claim 1, wherein the turning mechanism comprises: a rotating shaft, and the movable stage is fixed to the rotating shaft. The optical enthalpy detection system of claim 1, wherein the movable stage has a plurality of air holes for adsorbing a reverse side of the object to be detected, and the stage has a plurality of air holes, and the pedestal has a plurality of air holes. The pores serve to adsorb the front side of the object to be detected. The optical pick-up detecting system of claim 1, wherein the platform comprises a locking platform, and the loading platform is fixed to the locking platform, and the movable loading table is rotatably disposed on the locking platform. The optical pickup detection system of claim 1, wherein the displacement drive mechanism comprises an X-axis drive mechanism that drives the camera to move in the X-axis direction to align the movable stage The front side of the object to be detected, and the object to be detected on the stage The opposite. The optical enthalpy detection system of claim 1, comprising: a first platform and at least one second platform, respectively, for carrying the object to be detected or another object to be detected, wherein the first platform Separating the movable platform with the movable platform, the front surface of the object to be detected or the object to be detected is facing upward, and the carrier carrying the object to be detected or a reverse side of the other object to be detected Upward, and the flipping mechanism can rotate the first platform and the movable stage of the second platform to attach the front surface of the object to be detected or the other object to be detected to the stage, so that the camera respectively The front and back images of the object to be detected or the other object to be detected are captured from the movable platform and the stage of the first platform and the second platform. The optical pick-up detecting system of claim 1 or 6, wherein the stage is a fixed stage, and the stage is fixed to a locking platform, and the movable stage is rotatably disposed on the lock Attached to the platform. The optical pick-up detecting system of claim 1 or 6, wherein the loading stage is a second movable stage, and the turning mechanism selectively rotates the movable stage or the second movable stage separately Or rotating the movable stage and the second movable stage together to attach the front surface of the object to be detected to the second movable stage. The optical sputum detection system of claim 6, wherein the camera sequentially captures a front image of the object to be detected, a front image of the other object to be detected, a reverse image of the object to be detected, and the other The reverse image of the object to be detected. The optical detection system of claim 6, wherein the camera sequentially captures a front image of the object to be detected, a reverse image of the object to be detected, a front image of the other object to be detected, and the other The reverse image of the object to be detected.