TWM570526U - Continuous Caro's acid decomposition and recycling equipment - Google Patents

Abstract

A continuous caroacid decomposition recovery equipment. The continuous caroline decomposition recovery apparatus comprises a catalyst storage tank, a reaction decomposition tank, a heat exchanger, and a liquid product storage tank. The reaction decomposition tank comprises a caroic acid input, a catalyst input, a tank, a liquid product output, and a gaseous product output. Enter the caroic acid at the caroic acid input. The reaction catalyst is input to the catalyst input. The caroic acid is decomposed in the tank by a reaction catalyst to form a liquid product containing sulfuric acid and a gaseous product containing oxygen. The liquid product output outputs a liquid product. The gaseous product output outputs a gaseous product. The liquid product is thermally exchanged with Caroic acid in a heat exchanger. The liquid product storage tank stores the liquid product. Thereby, rapid and continuous decomposition can be achieved, and the liquid product can be recycled and reused.

Description

Continuous caroline decomposition and recovery equipment

The present invention relates to the field of waste treatment, and in particular to a continuous carroic acid decomposition and recovery device.

In recent years, with the development of the optoelectronics and semiconductor industries, in order to remove organic substances (resistance residues) on the surface of wafers or glass substrates, high concentration sulfuric acid (H ₂ SO ₄ ) is usually mixed with aqueous hydrogen peroxide solution (H ₂ O ₂ ). Caroic acid (chemical formula: H ₂ SO ₅ , also known as peroxymonosulfuric acid) is used. Caroic acid is a strong acid and has oxidizing properties. It can rapidly destroy the carbon-hydrogen bond of organic matter at high temperature. In addition to the use of photoresist, it can also be used to remove toxic cyanide, etching, decolorization and deodorization. Wait for processing.

However, the used caroic acid still has a relatively high acidity and strong oxidizing property, and cannot be decomposed by itself in a short time. Inadvertent contact with a part of organic matter (eg, ether or ketone) during disposal or collection may result in personal injury or detrimental explosive substances (eg, peroxyacetone). Therefore, the potential factors of the safety hazard are implied.

According to the creators, in the prior art, the direct heating method or the dosing neutralization method is used to treat the remaining caroic acid. However, the heating neutralization process requires a considerable amount of energy. The dosing neutralization method requires a large amount of a drug, for example, sodium hydroxide or sodium hydrogen sulfite, and the neutralization reaction generates high heat and is highly dangerous. In addition, precipitates and salts remaining in this manner are also inferior in purity and cannot be directly recycled, resulting in waste of cost.

In order to solve the aforementioned problems, a continuous carroic acid decomposition recovery apparatus is provided herein. The continuous caroline decomposition recovery apparatus comprises a catalyst storage tank, a reaction decomposition tank, a heat exchanger, and a liquid product storage tank.

The catalyst storage tank stores the reaction catalyst. The reaction decomposition tank comprises a caroic acid input, a catalyst input, a tank, a liquid product output, and a gaseous product output. The caroic acid input is used to input caroic acid. The catalyst input is connected to a catalyst storage tank for inputting a reaction catalyst. The tank is connected to the caroic acid input end and the catalyst input end, and the caroic acid is decomposed by the reaction catalyst to a liquid product containing sulfuric acid and a gaseous product containing oxygen. The liquid product output is connected to the tank to output the liquid product. The gaseous product output is connected to the tank and the gaseous product is output.

The heat exchanger comprises a first flow channel and a second flow channel, the first flow channel is connected to the caramate input end, and the second flow channel is connected to the liquid product output end, so that the liquid product exchanges heat with the caroic acid. The liquid product storage tank is connected to the second flow path to store the liquid product.

In some embodiments, the continuous caroacid decomposition recovery apparatus further includes a heating element, a thermometer, and a controller. The heating element is disposed between the input end of the caroic acid and the first flow path of the heat exchanger for heating the caroic acid to be introduced into the reaction decomposition tank. The thermometer is disposed between the input of the caroic acid and the heater, and measures the temperature of the caroic acid to be input into the reaction decomposition tank, and outputs a temperature signal. The controller is electrically connected to the thermometer and the heating element and receives the temperature signal. If the temperature signal indicates that the temperature of the caroic acid is lower than the reaction temperature, an actuation signal is generated to actuate the heating element to heat the caroic acid until the reaction temperature.

In some embodiments, further, the thermometer is a temperature probe and the heating element is an electrothermal heater.

In some embodiments, the continuous caroic acid decomposition recovery apparatus further includes a second thermometer and a cooling device. The second thermometer is disposed between the liquid product storage tank and the second flow path, measures the temperature of the liquid product flowing out of the second flow path, and sends a second temperature signal to the control unit, when the second temperature control signal indicates a liquid product When the temperature is higher than the critical temperature, the controller sends a trigger signal. The cooling device is disposed between the liquid product storage tank and the second flow channel, and is actuated by the trigger signal to cool the liquid product. Further, in some embodiments, wherein the cooling device is a chiller or a cooling water tower.

In some embodiments, the continuous carolysis decomposition recovery apparatus further includes a concentration detector and a flow control valve. The concentration detector is disposed at the input of the caroic acid and electrically connected to the controller. The caroic acid concentration detector detects the concentration of the caroic acid and generates a concentration signal and transmits it to the controller. The flow control valve is disposed at the input end of the catalyst and electrically connected to the controller. The controller controls the opening of the flow control valve according to the concentration signal to control the flow rate of the reaction catalyst. Further, in some embodiments, the controller controls the concentration of the reaction catalyst in the tank to be from 30 to 400 ppm.

In some embodiments, the continuous caroacid decomposition recovery apparatus further includes a flow control pump and a flow meter. The flow control pump is connected to the first flow path of the heat exchanger and electrically connected to the controller. The flow meter sets the flow control between the pump and the first flow path, and is electrically connected to the controller. The flow meter detects the flow of the caroic acid flowing into the first flow channel, and sends a flow signal, the controller receives the flow signal, and controls the flow control pump according to the flow signal to adjust the flow of the caroic acid into the first flow channel. .

In some embodiments, a stirrer is further disposed in the tank.

In some embodiments, the gaseous product output is more connected to a gas purification device.

In some embodiments, the first flow path and the second flow path are separated from each other by a heat conductive material.

In summary, the continuous caroic acid decomposition and recovery equipment utilizes a reaction catalyst to continuously and rapidly decompose the reaction, decompose the caroic acid, and apply the heat of reaction to perform heat exchange, accelerate the reaction rate, and reduce the energy. Waste. In addition, the product can be collected and reused after recovery and refining, thereby reducing costs.

The detailed features and advantages of the present invention are described in detail below in the embodiments, which are sufficient to enable any skilled artisan to understand the technical contents of the present invention and implement it according to the contents, the scope of the patent application and the drawings. Anyone familiar with the relevant art can easily understand the purpose and advantages of this creation.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a block diagram showing a first embodiment of a continuous caroic acid decomposition recovery apparatus. As shown in FIG. 1, the continuous caroline decomposition recovery apparatus 1 includes a catalyst storage tank 10, a reaction decomposition tank 20, a heat exchanger 30, and a liquid product storage tank 40.

The catalyst storage tank 10 stores the reaction catalyst C. The reaction decomposition tank 20 comprises a caroic acid input 21, a catalyst input 22, a tank 23, a liquid product output 24, and a gaseous product output 25. The caroic acid input 21 is used to input the caroic acid A1. Here, the caroic acid A1 may be from the pipeline input of the factory side of the factory, or may be from a storage tank in which the caroic acid A1 is stored in advance. The catalyst input terminal 22 is connected to the catalyst storage tank 10 for inputting the reaction catalyst C. The tank body 23 is connected to the caroic acid input end 21 and the catalyst input end 22, and the caroic acid A1 is decomposed by the reaction catalyst C into a liquid product A2 containing sulfuric acid and a gaseous product G containing oxygen. The liquid product output 24 is connected to the tank 23 to output the liquid product A2. The gaseous product output G is connected to the tank 23 to output gaseous products.

The heat exchanger 30 comprises a first flow channel 31 connected to a caramate input end 21 and a second flow channel 33 connected to a liquid product output end 24. The liquid product storage tank 40 is connected to the second flow path 33 to store the liquid product A2. In other words, the caroic acid A1 to be subjected to the decomposition reaction passes through the heat exchanger 30 and then enters the reaction decomposition tank 20, and the liquid product A2 is first stored through the heat exchanger 30. In some embodiments, the first flow channel 31 and the second flow channel 33 are separated from each other by a heat conductive, acid corrosion resistant material such as polytetrafluoroethylene engineering plastic or ceramic, thereby making the liquid product A2 and caroic acid. A1 performs heat exchange.

For example, the caroic acid A1 from the pipeline of the factory side is generally at room temperature, and after decomposition reaction, the liquid product A2 produced is generally about 120 ° C, and the two respectively pass through the heat exchanger 30 in different inflow directions. The first flow path 31 and the second flow path 33, the caroic acid A1 to be subjected to the decomposition reaction, first passes through the heat exchanger 30, and can be raised to about 75 to 90 ° C and then enter the reaction decomposition tank 20. The liquid product A2 can be cooled to about 40 to 80 ° C, preferably to 50 to 60 ° C, and stored in the liquid product storage tank 40.

Again, referring to Figure 1, the gaseous product output 25 is further connected to a gas purification device 50, such as a scrubber or the like, whereby the gaseous product G containing oxygen can remove the acid gas therein and then discharge it to the atmosphere to reduce the environment. The impact.

In this embodiment, the reaction catalyst C is a liquid transition metal salt, for example, cobalt chloride, cobalt sulfate, copper sulfate, nickel sulfate, barium chloride, barium chloride, sodium chlorate, potassium chloroplatinate, More than one of potassium molybdate, sodium molybdate, ferrous sulfate, ferric chloride, manganese chloride, vanadium chloride, vanadium sulfate, sodium tungstate, calcium tungstate, and barium sulfate. The concentration of the reaction catalyst C added to the tank 23 is from 30 to 400 ppm, preferably from 50 to 300 ppm. The actual adjustment can be made based on the actual sulfuric acid, the ratio of hydrogen peroxide, and the concentration of the caroic acid A1.

2 is a block diagram showing a second embodiment of a continuous caroline decomposition and recovery apparatus. As shown in FIG. 2, the continuous caroline decomposition recovery apparatus 1 includes a catalyst storage tank 10, a reaction decomposition tank 20, a heat exchanger 30, a liquid product storage tank 40, a gas purifying device 50, a first thermometer 61, and a second thermometer. 63. Controller 70, heating device 81 and cooling device 83.

In addition to the tank in the reaction decomposition tank 20, the agitator 26 is further added to make the mixing of the caroic acid A1 and the reaction catalyst C more uniform to accelerate the decomposition reaction. The other catalyst storage tank 10, the reaction decomposition tank 20, the heat exchanger 30, the liquid product storage tank 40, and the gas purifying device 50 are substantially the same as those of the first embodiment. I will not repeat them here.

In the second embodiment, the first thermometer 61, the second thermometer 63, the controller 70, the heating device 81, and the cooling device 83 are for accurately controlling the temperature entering the decomposition reaction tank 20, and entering the liquid product storage tank 40. temperature.

The heating device 81 is disposed between the caroic acid input end 21 and the first flow path 31 of the heat exchanger 30 for heating the caroic acid A1 to be introduced into the reaction decomposition tank 20. The first thermometer 61 is disposed between the caroic acid input end 21 and the output end of the heating device 81, measures the temperature of the caroic acid A1 to be input to the reaction decomposition tank 20, and outputs a first temperature signal T1. The controller 70 is electrically connected to the first thermometer 61 and the heating element 81 to receive the first temperature signal T1. If the first temperature signal T1 indicates that the temperature of the caroic acid A1 is lower than the reaction temperature, for example, 90° C., the actuation signal E1 is generated. The heating element 81 is actuated. After the heating element 81 receives the actuation signal E1, the caroic acid A1 is heated until the reaction temperature. Here, the first thermometer 61 may be a temperature probe, and the heating element 81 may be an electrothermal heater. Therefore, the temperature of the caroic acid A1 entering the reaction decomposition tank 20 each time can be ensured by the first thermometer 61, the controller 70, and the heating element 81. Further, the continuous caroic acid decomposition recovery device 1 further includes a control valve 85, which is disposed at the caroic acid input end 21 and electrically connected to the controller 70, and the controller 70 displays the carro at the first temperature signal T1. When the temperature of the acid A1 is higher than the reaction temperature, the first control signal E3 is generated, and the control valve 87 is opened to allow the caroic acid A1 to pass into the reaction decomposition tank 20.

The second thermometer 63 is disposed between the liquid product storage tank 40 and the second flow path 33. The second thermometer 63 measures the temperature of the liquid product A2 flowing out of the second flow path 33, and sends a second temperature signal T2 to the control unit. 70. When the second temperature signal T2 indicates that the temperature of the liquid product A2 is higher than the critical temperature, for example, 50 ° C, the controller issues a trigger signal E2. The cooling device 83 is disposed between the liquid product storage tank 40 and the second flow path 33, and is electrically connected to the controller 70, and is actuated by the trigger signal E2 to cool the liquid product A2. Here, the cooling device 83 can be implemented as a chiller. Therefore, through the second thermometer 63, the controller 70 and the cooling device 83, the temperature of the liquid product A2 entering the liquid product storage tank 40 can be ensured each time, thereby avoiding the excessive temperature in the liquid product A2, thereby causing personnel Hazard or damage to the liquid product storage tank 40.

Referring again to FIG. 2, the continuous caroacid decomposition recovery device further includes a concentration detector 65 and a flow control valve 87. The concentration detector 65 is disposed at the caroic acid input end 21 and electrically connected to the controller 70. The concentration detector 65 detects the concentration of the caroic acid A1 and generates a concentration signal S and transmits it to the controller 70. The flow control valve 87 is disposed at the catalyst input end 21 and electrically connected to the controller 70. The controller 70 generates a second control signal E4 to control the opening of the flow control valve 87 according to the concentration signal S to control the flow rate of the reaction catalyst C. Further, the controller 70 controls the concentration of the reaction catalyst C in the tank 23 to be 30 to 400 ppm, preferably, the concentration is 50 to 300 ppm. However, this is merely an example. Actually, the flow rate and concentration of the catalyst C entering the tank 23 can be adjusted depending on the concentration and temperature of the caroic acid A1.

Referring to FIG. 2, the continuous caroline decomposition recovery apparatus 1 may further include a flow control pump 91 and a flow meter 93. The flow control pump 91 is connected to the first flow path 31 of the heat exchanger 30 and is electrically connected to the controller 70. The flow meter 93 is disposed between the flow control pump 91 and the first flow path 31, detects the flow rate of the caroic acid A1 that is introduced into the first flow path 31, and emits a flow rate signal F. The controller 70 receives the flow rate signal F, and controls the flow control pump 91 according to the flow rate signal F to adjust the flow rate of the caroic acid A1 that is introduced into the first flow path 31. Therefore, the controller 70 can control the reaction in the decomposition reaction tank 30 according to the concentration and temperature of the caroic acid A1, thereby maintaining the stability of the reaction in the decomposition reaction tank 30, avoiding a sudden rise in concentration or temperature, and causing decomposition reaction. Damage to the tank 30 and the danger of personnel.

In summary, the continuous caroacid decomposition recovery apparatus 1 utilizes the reaction catalyst C to carry out a continuous and rapid decomposition reaction, decomposes the caroic acid A1, and applies the reaction heat to perform heat exchange to accelerate the reaction rate. At the same time reduce energy waste. In addition, the liquid product A2 containing sulfuric acid can be collected and applied to a process with a lower precision requirement, or returned to the plant area after being recovered and refined into concentrated sulfuric acid, thereby reducing the cost and reducing the impact on the environment.

Through the above detailed description, it can fully demonstrate that the purpose and effect of this creation are both progressive and highly exploitable, fully comply with the patent requirements, and apply in accordance with the law. The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. That is, all the changes and modifications made in accordance with the scope of this patent should belong to the scope of this creation patent. I would like to ask your review committee to give a clear understanding and pray for it. It is the prayer.

1‧‧‧Continuous Caroic Acid Decomposition and Recycling Equipment

10‧‧‧ Catalyst storage tank

20‧‧‧Reaction Decomposition Tank

21‧‧‧Caroic acid input

22‧‧‧ Catalyst input

23‧‧‧

24‧‧‧ liquid product output

25‧‧‧Gaseous product output

26‧‧‧Agitator

30‧‧‧ heat exchanger

31‧‧‧First runner

33‧‧‧Second runner

40‧‧‧Liquid product storage tank

50‧‧‧ gas purification device

61‧‧‧First thermometer

63‧‧‧Second thermometer

65‧‧‧ concentration detector

70‧‧‧ Controller

81‧‧‧ heating device

83‧‧‧Cooling device

85‧‧‧Control valve

87‧‧‧Flow control valve

91‧‧‧Flow Control Pump

93‧‧‧ Flowmeter

A1‧‧‧Caroic acid

A2‧‧‧ liquid product

C‧‧‧Reaction catalyst

E1‧‧‧ actuation signal

E2‧‧‧ trigger signal

E3‧‧‧First control signal

E4‧‧‧second control signal

F‧‧‧Flow signal

S‧‧‧ concentration signal

T2‧‧‧ second temperature signal

G‧‧‧Gaseous products

T1‧‧‧ first temperature signal

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a block diagram showing a first embodiment of a continuous caroic acid decomposition recovery apparatus. 2 is a block diagram showing a second embodiment of a continuous caroline decomposition and recovery apparatus.

Claims (11)

A continuous caroic acid decomposition recovery device comprises: a catalyst storage tank for storing a reaction catalyst; a reaction decomposition tank comprising: a caroic acid input end for inputting a caroic acid; a catalyst input end, connecting The catalyst storage tank is used for inputting the reaction catalyst; a tank body is connected to the input end of the caroic acid and the catalyst input end, and the caroic acid is decomposed by the reaction catalyst into a liquid product containing sulfuric acid and containing oxygen. a gaseous product; a liquid product output connected to the tank to output the liquid product; and a gaseous product output connected to the tank to output the gaseous product; a heat exchanger comprising a first flow passage And a second flow channel connecting the carroic acid input end, the second flow channel connecting the liquid product output end to exchange heat between the liquid product and the caroic acid; and a liquid product storage tank And connecting the second flow path to store the liquid product. The continuous caroic acid decomposition and recovery device of claim 1, further comprising: a heating element disposed between the input end of the caroic acid and the first flow path for heating to enter the reaction decomposition tank a caramelic acid; a thermometer disposed at the input end of the caroic acid and the heater, measuring the temperature of the caroic acid to be input into the reaction decomposition tank, and outputting a temperature signal; and a controller, electricity Connecting the thermometer and the heating element to receive the temperature signal. If the temperature signal indicates that the temperature of the caroic acid is lower than a reaction temperature, an activation signal is generated to actuate the heating element to heat the caroic acid until the reaction temperature. The continuous caroic acid decomposition recovery apparatus according to claim 2, wherein the thermometer is a temperature probe, and the heating element is an electrothermal heater. The continuous caroic acid decomposition and recovery device of claim 2, further comprising: a second thermometer disposed between the liquid product storage tank and the second flow path, and electrically connected to the controller, the first The second temperature measures the temperature of the liquid product flowing out of the second flow path, and sends a second temperature signal to the control unit, when the second temperature control indicates that the temperature of the liquid product is higher than a critical temperature, The controller sends a trigger signal; and a cooling device is disposed between the liquid product storage tank and the second flow path, and is electrically connected to the controller, and is actuated by the trigger signal to cool the liquid product . The continuous caroic acid decomposition recovery apparatus according to claim 4, wherein the cooling device is a chiller or a cooling water tower. The continuous caroline decomposition and recovery device of claim 2, further comprising: a concentration detector disposed at the input of the caroic acid and electrically connected to the controller, the concentration detector detecting the a concentration of caroic acid, and a concentration signal is generated and transmitted to the controller; and a flow control valve is disposed at the input end of the catalyst and electrically connected to the controller, and the controller controls the signal according to the concentration signal The flow control valve is opened to control the flow rate of the reaction catalyst. The continuous caroline decomposition recovery apparatus according to claim 6, wherein the controller controls the concentration of the reaction catalyst in the tank to be 30 to 400 ppm. The continuous caroic acid decomposition recovery apparatus according to claim 2, further comprising a flow control pump and a flow meter, the flow control pump being connected to the first flow path of the heat exchanger, and electrically Connecting the controller, the flow meter is disposed between the flow control pump and the first flow path, and is electrically connected to the controller, the flow meter detecting the flow of the caroic acid flowing into the first flow channel, And sending a flow signal, the controller receives the flow signal, and controls the flow control pump according to the flow signal to adjust the flow rate of the caroic acid that is introduced into the first flow path. The continuous caroic acid decomposition recovery apparatus according to claim 1, wherein the tank is further provided with a stirrer. The continuous caroline decomposition recovery apparatus of claim 1, wherein the gaseous product output is further connected to a gas purification device. The continuous caroic acid decomposition recovery apparatus according to claim 1, wherein the first flow path and the second flow path are separated from each other by a heat conductive material.