TWM566203U - System for production of silane with catalyst enhancement and total recycle of byproducts - Google Patents

System for production of silane with catalyst enhancement and total recycle of byproducts Download PDF

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TWM566203U
TWM566203U TW107200233U TW107200233U TWM566203U TW M566203 U TWM566203 U TW M566203U TW 107200233 U TW107200233 U TW 107200233U TW 107200233 U TW107200233 U TW 107200233U TW M566203 U TWM566203 U TW M566203U
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ammonia
methane
reaction
tank
ethane
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TW107200233U
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Chinese (zh)
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謝嵩嶽
李騰智
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台灣特品化學股份有限公司
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Publication of TWM566203U publication Critical patent/TWM566203U/en

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/50Improvements relating to the production of bulk chemicals
    • Y02P20/584Recycling of catalysts

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Abstract

一種觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中:本創作以新開發設計之分離純化系統和技術進行反應生成之矽烷混氣與參與反應之固體原物料的分離,再將矽甲烷由混氣中依其物理特性進行低溫氣液分離,並使用該矽甲烷分餾系統進行矽甲烷中氨原料的回收及矽甲烷的純化和其不純物的移除,而經氣液分離的矽乙烷和氨原料亦以矽乙烷蒸餾系統進行分餾純化,配合已開發的獨特觸媒使用技術進行矽乙烷轉化率的提升,及實施新的投料方式和開發的設備,並將氨回收以再次做為反應原料使用,藉此使矽甲烷及矽乙烷的產能和純化過程穩定。 A catalyst for increasing the formation of decane and the complete recovery of by-product by process, wherein: the separation and purification of the decane mixture generated by the newly developed and designed purification system and technology is separated from the solid raw materials involved in the reaction, and then The methane is separated from the gas by its physical properties at a low temperature gas-liquid separation, and the methane methane fractionation system is used to recover the ammonia raw material in the methane and the purification of the methane and the removal of the impurities, and the gas-liquid separation The ethane and ammonia feedstocks are also fractionated and purified by a cesium ethane distillation system. The enthalpy conversion rate is improved with the unique catalyst technology developed, and new feed methods and equipment are developed, and ammonia is recovered. It is used again as a raw material for the reaction, thereby stabilizing the production capacity and purification process of methane and hydrazine.

Description

觸媒提升矽烷反應生成及其製程副產物全回收的系統 Catalyst to increase the formation of decane reaction and its system by-product recovery

本創作係有關於一種觸媒提升矽烷反應生成及其製程副產物全回收的系統。 This creation is about a system for the catalyst to increase the formation of decane and its complete recovery of by-products.

按,矽鎂合金法為其中一種已知工業化製程,用於生產矽甲烷及矽乙烷等半導體特殊氣體原料的合成方法,習知使用矽鎂合金法進行矽烷的生產,其矽乙烷的反應選擇率過低、且隨高純度矽甲烷生產技術的精進及和成本降低,及反應渣料存置所造成之環境影響的問題和繁複且能源耗損大的處理程序,因此以矽鎂合金法生產矽烷的製程難以符合經濟效益。由此不足之處,改良的矽鎂合金法漸而發展,並提升矽乙烷反應生產上的選擇率、產量及純度,但其反應渣料的處置問題仍然為此矽烷生產方法之阻礙,且生產製程上依然有許多技術相關問題的衍生,如矽烷因製程過程的操作條件及環境而氧化反應生成二氧化矽粉粒或結晶,導致設備效能和生產效率的降低及拆清保養頻率增加。因此本創作欲設計開發的進階生產技術及設備系統,彌補及完善採用改良的矽鎂合金法用於生產矽烷技術及製程上的缺陷,進而發展為完善的高純度矽烷生產方法及系統。 According to the bismuth magnesium alloy method, it is a known industrial process for the synthesis of semiconductor special gas raw materials such as methane and cesium. It is known to use yttrium magnesium alloy method to produce decane and its ethane reaction. The selection rate is too low, and the purity and cost of the high-purity methane production technology are reduced, and the environmental impact caused by the reaction slag storage and the complicated and energy-intensive processing procedures are used to produce decane by the bismuth magnesium alloy method. The process is difficult to meet economic benefits. Therefore, the improved bismuth magnesium alloy method is gradually developed, and the selectivity, yield and purity of the oxirane reaction production are improved, but the disposal problem of the reaction slag is still hindered by the decane production method, and There are still many technical-related problems in the production process. For example, decane is oxidized to form cerium oxide particles or crystals due to the operating conditions and environment of the process, resulting in a decrease in equipment efficiency and production efficiency and an increase in the frequency of cleaning and maintenance. Therefore, this creative design and development of advanced production technology and equipment systems, to make up for and improve the use of improved bismuth magnesium alloy method for the production of decane technology and process defects, and then develop into a perfect high-purity decane production methods and systems.

有鑑於此,本創作人於多年從事相關產品之製造開發與設計經驗,針對上述之目標,詳加設計與審慎評估後,終得一確具實用性之本創作。 In view of this, the creator has been engaged in the manufacturing development and design experience of related products for many years. After detailed design and careful evaluation, the author has finally achieved a practical and practical creation.

本創作所欲解決之技術問題在於針對現有技術存在的上述缺失,提供一種觸媒提升矽烷反應生成及其製程副產物全回收的系統。 The technical problem to be solved by the present invention is to provide a system for the catalyst to increase the formation of decane reaction and the complete recovery of by-product by-products in view of the above-mentioned shortcomings in the prior art.

一矽烷反應系統包括有一矽化鎂吸粉桶、一矽化鎂自動進料裝置、一夾套式反應槽、一冷凝器及一氣動泵,該矽化鎂吸粉桶以無氧狀態存置矽化鎂與觸媒,且該觸媒的混合比例為矽化鎂的15%至30%,而該觸媒由20~50wt%的矽粉與50~80wt%的金屬粉末構成雙金屬複合物,又該矽化鎂自動進料裝置連接於該矽化鎂吸粉桶與該夾套式反應槽之間,且該夾套式反應槽裝設有一攪拌機,而該夾套式反應槽的頂端連接該冷凝器與底端連接該氣動泵,又該夾套式反應槽先投入氯化銨粉料,並進行密閉氮氣置換及真空除氧作業,再導入純氨後控制-30℃冷媒的冷凝形成液態氨,並啟動該攪拌機進行氯化銨與液態氨的預溶,且由該矽化鎂自動進料裝置以固定速率投入矽化鎂與觸媒進入該夾套式反應槽,藉此觸發反應生成矽甲烷與氫氣混氣並經由該冷凝器產出,另以90℃熱媒輔助反應後的液氨與矽乙烷進行蒸煮而經由該冷凝器回收,而反應後的渣料由該氣動泵排出存放於一渣料緩衝槽,一氣液分離槽連接於該冷凝器,並由該氣液分離槽的上端連接一用於存放汽化矽甲烷之矽甲烷暫存槽,且該氣液分離槽連接一用於存放液化矽乙烷與液氨之矽乙烷暫存槽,一矽乙烷蒸餾系統包括有一脫矽乙烷塔、一氨純化塔及一矽乙烷純化塔,該矽乙烷暫存槽連接該脫矽乙烷塔,該脫矽乙烷塔上端連接該氨純化塔,且該脫矽乙烷塔下端連接該矽乙烷純化塔,該脫矽乙烷塔以壓力18~24kg/cm2與溫度25℃至70℃條件將氨分離至該氨純化塔,以及矽乙烷分離至該矽乙烷純化塔,又該氨純化塔以 溫度差分離少量矽甲烷回流至該矽甲烷暫存槽,且該矽乙烷純化塔以溫度30℃至100℃進一步純化該矽乙烷,並將純化矽乙烷儲存於一液化矽乙烷緩衝桶,藉此使矽乙烷的反應選擇率能達到5~25vol%,而該氨純化塔與該矽乙烷純化塔所分離的氨儲存於一液氨緩衝槽。 The monooxane reaction system comprises a magnesium telluride powder suction bucket, a magnesium telluride automatic feeding device, a jacketed reaction tank, a condenser and a pneumatic pump, and the magnesium telluride powder suction bucket stores magnesium telluride and touch in an anaerobic state. The medium, and the mixing ratio of the catalyst is 15% to 30% of magnesium telluride, and the catalyst comprises 20~50wt% of tantalum powder and 50~80wt% of metal powder to form a bimetallic composite, and the magnesium telluride is automatically The feeding device is connected between the magnesium telluride powder suction bucket and the jacketed reaction tank, and the jacketed reaction tank is equipped with a mixer, and the top end of the jacketed reaction tank is connected to the condenser and connected to the bottom end The pneumatic pump, the jacketed reaction tank is first put into ammonium chloride powder, and is subjected to closed nitrogen replacement and vacuum deaeration operation, and then introduced into pure ammonia to control condensation of -30 ° C refrigerant to form liquid ammonia, and start the mixer. Pre-dissolving ammonium chloride and liquid ammonia, and inputting magnesium telluride and catalyst into the jacketed reaction tank at a fixed rate by the magnesium telluride automatic feeding device, thereby triggering reaction to generate methane and hydrogen gas mixture and The condenser produces and is supplemented by a 90°C heat medium. The liquid ammonia and the hydrazine ethane are regenerated and recovered through the condenser, and the slag after the reaction is discharged from the pneumatic pump and stored in a slag buffer tank, and a gas-liquid separation tank is connected to the condenser, and The upper end of the gas-liquid separation tank is connected to a methane temporary storage tank for storing vaporized helium methane, and the gas-liquid separation tank is connected with a temporary storage tank for storing liquefied ethane and liquid ammonia. The alkane distillation system comprises a depurinating ethane column, an ammonia purification column and an ethane purification column, the cesium ethane temporary storage tank is connected to the deuterium ethane column, and the upper end of the deuteration ethane column is connected to the ammonia purification tower And the lower end of the deuterated ethane column is connected to the hydrazine ethane purification tower, and the deuterated ethane column is separated into the ammonia purification tower by a pressure of 18 to 24 kg/cm 2 and a temperature of 25 ° C to 70 ° C, and 矽The ethane is separated into the hydrazine ethane purification tower, and the ammonia purification tower separates a small amount of hydrazine methane to the hydrazine methane storage tank by a temperature difference, and the hydrazine ethane purification tower further purifies the hydrazine at a temperature of 30 ° C to 100 ° C. Ethane, and the purified cesium ethane is stored in a liquefied ethane buffer tank, thereby making 矽Alkoxy the reaction selectivity can reach 5 ~ 25vol%, and the ammonia is separated with the silicon oxide purification column purified liquid ammonia to an ammonia storage column buffer tank.

其中,該冷凝器依序連接有一第二冷凝器與一第三冷凝器,利用各物質沸點溫度不同之物理特性進行初步的矽烷分離,以2~7kg/cm2之定壓依序導入該第二冷凝器以-30℃冷凝進行與該第三冷凝器以-75℃進行冷凝,形成液態矽乙烷及液化氨,以及氣態的矽甲烷和氫氣,並於該氣液分離槽進行分離。 Wherein, the condenser is sequentially connected with a second condenser and a third condenser, and the preliminary decane separation is performed by using physical properties different in boiling temperature of each substance, and the first step is introduced at a constant pressure of 2-7 kg/cm 2 . The second condenser was condensed at -30 ° C to condense with the third condenser at -75 ° C to form liquid helium ethane and liquefied ammonia, and gaseous methane and hydrogen, and separated in the gas-liquid separation tank.

其中,該冷凝器與該第二冷凝器之間裝設有一過濾器,由於該夾套式反應槽於反應過程生成的矽甲烷混氣及反應結束後蒸煮出的氨和矽乙烷,會伴隨少量經壓差氣流所載帶的原物料或渣料粉體,利用該過濾器攔截大於3~100μm的粉粒。 Wherein, a filter is installed between the condenser and the second condenser, and the ammonia and the ethane which are cooked after the reaction is completed due to the methane gas mixture generated during the reaction of the jacketed reaction tank A small amount of raw material or slag powder carried by the differential pressure gas stream is used to intercept particles larger than 3 to 100 μm.

其中,該液化矽乙烷緩衝桶所儲存的矽乙烷可達4N8(99.998%)之純度,於矽乙烷灌充需求時,藉由真空低溫-75℃冷凝使矽乙烷能由該液化矽乙烷緩衝桶充填入至少一鋼瓶中,亦能以相同真空冷凝技術進行小量矽乙烷的純化及微量不純的氣體脫除。 Among them, the liquefied ethane ethane buffer barrel can store 矽 ethane up to 4N8 (99.998%) purity, and the 矽 ethane can be liquefied by vacuum low temperature -75 ° C condensation when 矽 ethane filling demand The 矽 缓冲 buffer tank is filled into at least one cylinder, and the purification of a small amount of ethane and the removal of a trace amount of impure gas can also be performed by the same vacuum condensation technique.

其中,該矽甲烷暫存槽連接有一矽甲烷分餾系統,該矽甲烷分餾系統包括有一矽甲烷回收塔、一矽甲烷分子篩及一矽甲烷純化塔,該矽甲烷回收塔上端連接該矽甲烷分子篩,並由該矽甲烷分子篩連接該矽甲烷純化塔,該矽甲烷回收塔以壓力8~15kg/cm2與變化溫度-60℃~40℃將大部分的氨分餾儲存至該液氨緩衝槽,而分餾出的矽甲烷氣體與少量的氨再由 該3A~5A的矽甲烷分子篩吸附去除氨及其它不純物之氣體,再將矽甲烷導入矽甲烷純化塔並以-160℃至-50℃的低溫將所含的氫氣脫除分離,讓純化矽甲烷儲存於一液化矽甲烷緩衝桶。 The methane methane storage tank is connected with a helium methane fractionation system, and the methane methane fractionation system comprises a helium methane recovery tower, a methane molecular sieve and a methane purification tower, and the methane recovery tower is connected to the methane molecular sieve at the upper end. And the methane methane purification tower is connected to the methane methane purification tower, and the methane recovery tower stores the majority of ammonia in the liquid ammonia buffer tank at a pressure of 8-15 kg/cm 2 and a temperature of -60 ° C to 40 ° C. The fractionated methane gas and a small amount of ammonia are adsorbed by the 3A~5A methane molecular sieve to remove ammonia and other impurities, and the methane is introduced into the methane purification tower and is cooled at a temperature of -160 ° C to -50 ° C. The contained hydrogen is separated and separated, and the purified methane is stored in a liquefied methane buffer tank.

其中,該液化矽甲烷緩衝桶所儲存的矽甲烷可達6N(99.9999%)之純度,且該液化矽甲烷緩衝桶採用內外雙層結構,由該內層存放液化矽甲烷,而該外層呈真空狀並繞設有一環體盤管,利用該環體盤管流通冷媒達-50℃的溫控和壓控,並於需要使用時使用冷媒做為矽甲烷之冷凝,又該液化矽甲烷緩衝桶連接有一汽化器,於矽甲烷灌充需求時,讓矽甲烷導入該汽化器並以-30℃冷媒進行穩定流量之控制輸送至一成品加壓機,並藉由該成品加壓機加壓至100~160kg/cm2的壓力將矽甲烷充填入至少一鋼瓶或至少一槽車中。 Wherein, the enthalpy methane stored in the liquefied methane buffer tank can reach a purity of 6N (99.9999%), and the liquefied methane buffer tank adopts an inner and outer double-layer structure, and the inner layer stores liquefied methane, and the outer layer is vacuumed. A ring coil is arranged around the ring coil, and the temperature and pressure control of the refrigerant flow through the ring coil is up to -50 ° C, and the refrigerant is used as the condensation of helium methane when needed, and the liquefied methane buffer tank A vaporizer is connected to the methane filling requirement, and the methane is introduced into the vaporizer and controlled by a steady flow of -30 ° C refrigerant to a finished press, and pressurized by the finished press to 100~ A pressure of 160 kg/cm 2 fills the methane methane into at least one cylinder or at least one tank car.

其中,該渣料緩衝槽依順序串接有一離心過濾器、一氨水溶液緩衝槽、一氫氧化鎂過濾器及一氨水緩衝桶,且該離心過濾器與該氫氧化鎂過濾器同時連接有一乾燥磨粉裝置,並以該乾燥磨粉裝置連接有一高壓成型製磚系統,排入該渣料緩衝槽之渣料先於該夾套式反應槽內加水攪拌,使部分轉化為難溶之氫氧化鎂固態粉粒及溶於其中之鹽類產物,並在該渣料緩衝槽的不間斷攪拌下將漿狀渣料流入該離心過濾器,利用該離心過濾器的轉旋脫液,使渣料的液態部分流至該氨水溶液緩衝槽,而該固態部分排洩至該乾燥磨粉裝置,又該乾燥磨粉裝置以電加熱配合螺旋攪拌進行固態渣料的加熱乾燥及氨的脫離,並排至該高壓成型製磚系統做為製磚的原料,又該氨水溶液緩衝槽加入氨水,並使溶液中之氯化鎂能反應生成轉化為氯化銨和氫氧化鎂粉粒,再經由該氫氧化鎂過濾器以1~30μm精度 過濾氫氧化鎂粉粒並排洩至該乾燥磨粉裝置,避免固態粉粒進入該氨水緩衝桶,僅將氨水存入該氨水緩衝桶。 Wherein, the slag buffer tank is connected in sequence with a centrifugal filter, an ammonia aqueous solution buffer tank, a magnesium hydroxide filter and an ammonia water buffer tank, and the centrifugal filter and the magnesium hydroxide filter are simultaneously connected to have a dry a grinding device, and a high-pressure forming brick system is connected with the dry milling device, and the slag discharged into the slag buffer tank is firstly converted into insoluble magnesium hydroxide by adding water and stirring in the jacketed reaction tank. a solid powder and a salt product dissolved therein, and flowing the slurry slag into the centrifugal filter under the uninterrupted stirring of the slag buffer tank, and using the centrifugal filter to detach the liquid to make the slag The liquid portion flows to the buffer solution tank of the ammonia aqueous solution, and the solid portion is discharged to the dry milling device, and the dry milling device is heated and dried by the electric heating and the spiral stirring to remove the ammonia and detach the ammonia, and discharged to the high pressure. The forming brick system is used as a raw material for brick making, and the ammonia aqueous solution buffer tank is added with ammonia water, and the magnesium chloride in the solution can be reacted to be converted into ammonium chloride and magnesium hydroxide powder, and then passed through the hydrogen. Magnesium filter accuracy to 1 ~ 30μm The magnesium hydroxide powder particles are filtered and discharged to the dry milling device to prevent the solid powder particles from entering the ammonia water buffer tank, and only the ammonia water is stored in the ammonia water buffer tank.

其中,該氨水緩衝桶連接有一氨分離回收系統,該氨分離回收系統以一氨回收塔連接該氨水緩衝桶,並由該氨回收塔上端連接有一氨精餾塔,又該氨回收塔以0~5kg/cm2的壓力和50℃~145℃的溫度進行氯化銨溶液和氨水溶液的分離,使氨水溶液由該氨回收塔的塔頂排放至該氨精餾塔,並於該氨精餾塔中以-30℃~130℃的溫度進行氨和水的純化分離,且該氨精餾塔於塔頂的純化氨儲入一氨原料桶進行回收利用,而該氨精餾塔於塔底分離的水和微量的氨回流至該氨水緩衝桶,另該氨回收塔由塔底分離出的氯化銨溶液輸送至一多效蒸發系統,透過該多效蒸發系統以120℃~160℃的蒸汽進行加熱,使氯化銨溶液將所含之水分汽化而脫離氯化銨,氯化銨的含水率能低於1wt%,並由一乾燥機回收做為該夾套式反應槽的反應原料使用,而該水汽以一回收水緩衝槽回收提供該夾套式反應槽於反應後的渣料溶劑使用。 Wherein, the ammonia buffer tank is connected with an ammonia separation and recovery system, the ammonia separation and recovery system is connected to the ammonia buffer tank by an ammonia recovery tower, and an ammonia distillation tower is connected to the upper end of the ammonia recovery tower, and the ammonia recovery tower is 0. Separating the ammonium chloride solution and the aqueous ammonia solution at a pressure of 5 kg/cm 2 and a temperature of 50 ° C to 145 ° C, and discharging the aqueous ammonia solution from the top of the ammonia recovery column to the ammonia rectification column, and at the ammonia Purification and separation of ammonia and water at a temperature of -30 ° C to 130 ° C in the distillation column, and the purified ammonia at the top of the ammonia distillation column is stored in an ammonia raw material barrel for recycling, and the ammonia distillation tower is used in the tower. The bottom separated water and trace ammonia are returned to the ammonia buffer tank, and the ammonia recovery tower is sent from the ammonium chloride solution separated from the bottom of the tower to a multi-effect evaporation system, and the multi-effect evaporation system is passed through the multi-effect evaporation system at 120 ° C to 160 ° C. The steam is heated to cause the ammonium chloride solution to vaporize the moisture contained in the ammonium chloride solution, and the ammonium chloride has a water content of less than 1% by weight, and is recovered by a dryer as a reaction of the jacketed reaction tank. The raw material is used, and the water vapor is recovered by a recycled water buffer tank to provide the jacket The reaction tank is used in the slag solvent after the reaction.

其中,該夾套式反應槽於渣料排空後,以氮氣沖吹、抽真空及90℃熱媒的升溫進行該夾套式反應槽之槽內的清理及有效的除水分,以避免水分影響下個反應過程中生成的矽烷與水鹼性環境氧化反應而形成二氧化矽,藉此提高矽烷反應率。 Wherein, after the slag material is emptied, the jacketed reaction tank is cleaned by a nitrogen gas blow, vacuumed, and heated at a temperature of 90 ° C to clean the tank and effectively remove moisture to avoid moisture. It affects the oxidation reaction of decane formed in the next reaction with water to form cerium oxide, thereby increasing the decane reaction rate.

其中,矽烷反應全製程之製程設備皆由複數個尾氣排放管線進行匯集連接一尾氣處理系統,該尾氣處理系統包括有一洗滌塔、一高溫氧化器及一過濾設備,且該尾(廢)氣依含有氨及矽烷氣體之組成分流至該尾氣處理系統的各個階段,該洗滌塔以水進行氨氣的吸附脫除,再將所形成 之氨水導入該氨水溶液緩衝槽做回收,並做為氯化銨鹽類轉化之添加劑,而微量的尾氣則由塔頂排放至該高溫氧化器進行矽烷氣體的破壞,使其轉化為二氧化矽之非危險性物質,再由該尾氣處理系統之過濾設備進行攔截收集。 Wherein, the process equipment of the decane reaction whole process is connected and connected to a tail gas treatment system by a plurality of exhaust gas discharge lines, the tail gas treatment system comprises a washing tower, a high temperature oxidizer and a filtering device, and the tail (waste) gas is The composition containing ammonia and decane gas is branched to each stage of the tail gas treatment system, and the washing tower is adsorbed and removed by water for ammonia gas, and then formed. The ammonia water is introduced into the buffer solution of the ammonia solution for recovery, and is used as an additive for ammonium chloride salt conversion, and a trace amount of tail gas is discharged from the top of the tower to the high temperature oxidizer for destruction of decane gas, thereby converting it into cerium oxide. The non-hazardous substances are then intercepted and collected by the filtering equipment of the exhaust gas treatment system.

本創作的第一主要目的在於,矽烷生產方式採用改良的矽鎂合金法,配合已開發的獨特觸媒使用技術進行矽乙烷轉化率的提升,及實施新的投料方式和開發的設備,以提升原物料的反應率且降低反應系統受固體粉料阻塞問題的影響,並以改良的生產操作技術有效控制及優化矽烷反應生成的環境,以提升矽乙烷的產能。 The first main purpose of this creation is to use a modified bismuth magnesium alloy method for decane production, to improve the conversion of ethane with the unique catalyst technology developed, and to implement new feeding methods and equipment for development. Improve the reaction rate of the raw materials and reduce the impact of the reaction system on the solid powder blockage problem, and effectively control and optimize the environment generated by the decane reaction with improved production operation technology to increase the production capacity of cesium ethane.

本創作的第二主要目的在於,藉由新開發設計之分離純化系統和技術進行反應生成之矽烷混氣與參與反應之固體原物料的分離,再將矽甲烷由混氣中依其物理特性進行低溫氣液分離,並使用該矽甲烷分餾系統進行矽甲烷中氨原料的回收及矽甲烷的純化和其不純物的移除,再以低溫真空方式做為矽甲烷之儲存,而經氣液分離的矽乙烷和氨原料亦以矽乙烷蒸餾系統進行分餾純化,並將氨回收以再次做為反應原料使用,藉此使矽甲烷及矽乙烷的產能和純化過程穩定,且能有效降低生產成本。 The second main purpose of this creation is to separate the decane mixture generated by the reaction and the solid raw material involved in the reaction by the newly developed separation and purification system and technology, and then carry out the methane from the gas mixture according to its physical properties. Low-temperature gas-liquid separation, and the recovery of ammonia raw materials in methane and the purification of methane and its impurities are removed using the methane methane fractionation system, and then stored as methane in a low-temperature vacuum mode, and separated by gas-liquid separation. The ethane and ammonia feedstocks are also fractionated and purified by a hydrazine distillation system, and the ammonia is recovered for use as a reaction raw material, thereby stabilizing the production and purification processes of hydrazine methane and hydrazine ethane, and effectively reducing production. cost.

本創作的第三主要目的在於,反應所產生的渣料於矽烷反應結束後,以添加入水做為溶劑,使部分渣料內含物能轉化為鹽類物質並溶於氨水中,且得以漿狀流體做後續分離回收處置,又採新設計的分離方法,以離心分離技術進行漿狀渣料的固液分離,並使分離後之固態產物經乾燥後做為製磚原料之開發。而液態之流體藉由添加氨,使其轉化反應為可回收之鹽類氨水溶液,再使用蒸餾系統進行氯化銨鹽類溶液、氨和水的分離 純化及回收。氯化銨鹽類溶液則再使用高效蒸發系統進行水分移除的處理和乾燥,而做為矽烷生產反應原料回收使用。藉使得以有效降低渣料存置對於環境的影響和生產成本的耗費。 The third main purpose of the creation is that the slag produced by the reaction is added to the water as a solvent after the end of the decane reaction, so that part of the slag content can be converted into a salt substance and dissolved in the ammonia water, and the slurry can be obtained. The fluid is used for subsequent separation and recovery, and a newly designed separation method is adopted. The solid-liquid separation of the slurry slag is carried out by centrifugal separation technology, and the separated solid product is dried to be used as a brick raw material. The liquid fluid is converted into a recoverable salt aqueous ammonia solution by adding ammonia, and the ammonium chloride salt solution, ammonia and water are separated by using a distillation system. Purification and recovery. The ammonium chloride salt solution is then subjected to moisture removal treatment and drying using a high-efficiency evaporation system, and is recycled as a raw material for the decane production reaction. In order to effectively reduce the environmental impact and production cost of slag storage.

本創作的第四主要目的在於,製程產生之尾(廢)氣經尾氣排放管線統一匯集導入尾氣處理系統,藉由氨吸附移除技術將尾氣中之氨氣吸收移除並回收做鹽類溶液添加液使用,而其它矽烷廢氣則由尾氣處理系統進行氧化反應處理,以轉化為非危險性氣體或渣料做處置,以降低環境之汙染和危害。 The fourth main purpose of this creation is that the tail (waste) gas generated by the process is uniformly integrated into the exhaust gas treatment system through the exhaust gas discharge pipeline, and the ammonia gas in the exhaust gas is absorbed and removed by the ammonia adsorption removal technology and recovered as a salt solution. The addition liquid is used, and other decane waste gas is treated by oxidation treatment of the tail gas treatment system to be converted into non-hazardous gas or slag for disposal to reduce environmental pollution and harm.

其他目的、優點和本創作的新穎特性將從以下詳細的描述與相關的附圖更加顯明。 Other objects, advantages and novel features of the present invention will become more apparent from the detailed description and the accompanying drawings.

〔本創作〕 [this creation]

11‧‧‧矽烷反應系統 11‧‧‧ decane reaction system

111‧‧‧矽化鎂吸粉桶 111‧‧‧Magnesium magnesium powder bucket

112‧‧‧矽化鎂自動進料裝置 112‧‧‧Magnesium telluride automatic feeding device

113‧‧‧夾套式反應槽 113‧‧‧ jacketed reaction tank

114‧‧‧冷凝器 114‧‧‧Condenser

115‧‧‧氣動泵 115‧‧‧Pneumatic pump

116‧‧‧攪拌機 116‧‧‧Mixer

117‧‧‧第二冷凝器 117‧‧‧second condenser

118‧‧‧第三冷凝器 118‧‧‧ Third condenser

119‧‧‧過濾器 119‧‧‧Filter

12‧‧‧氣液分離槽 12‧‧‧ gas-liquid separation tank

13‧‧‧矽乙烷蒸餾系統 13‧‧‧矽ethane distillation system

131‧‧‧脫矽乙烷塔 131‧‧‧Deacetylation tower

132‧‧‧氨純化塔 132‧‧‧Ammonia Purification Tower

133‧‧‧矽乙烷純化塔 133‧‧‧ 矽 ethane purification tower

134‧‧‧液氨緩衝槽 134‧‧‧Liquid ammonia buffer tank

14‧‧‧渣料緩衝槽 14‧‧‧Slag buffer tank

15‧‧‧矽乙烷暫存槽 15‧‧‧ 矽 暂 temporary storage tank

16‧‧‧液化矽乙烷緩衝桶 16‧‧‧ Liquefied ethane buffer bucket

17‧‧‧鋼瓶 17‧‧‧Cylinders

21‧‧‧矽甲烷暫存槽 21‧‧‧矽methane temporary storage tank

22‧‧‧矽甲烷分餾系統 22‧‧‧矽Methane fractionation system

221‧‧‧矽甲烷回收塔 221‧‧‧矽Methane Recovery Tower

222‧‧‧矽甲烷分子篩 222‧‧‧矽Methane molecular sieve

223‧‧‧矽甲烷純化塔 223‧‧‧矽 methane purification tower

23‧‧‧液化矽甲烷緩衝桶 23‧‧‧ Liquefied methane buffer bucket

231‧‧‧汽化器 231‧‧‧Vaporizer

232‧‧‧環體盤管 232‧‧‧ ring coil

24‧‧‧成品加壓機 24‧‧‧Finished Press

25‧‧‧鋼瓶 25‧‧‧Cylinders

26‧‧‧槽車 26‧‧‧ tank truck

31‧‧‧離心過濾器 31‧‧‧ centrifugal filter

32‧‧‧氨水溶液緩衝槽 32‧‧‧Ammonia solution buffer tank

33‧‧‧氫氧化鎂過濾器 33‧‧‧Magnesium hydroxide filter

34‧‧‧氨水緩衝桶 34‧‧‧Ammonia buffer bucket

35‧‧‧乾燥磨粉裝置 35‧‧‧Dry grinding device

351‧‧‧高壓成型製磚系統 351‧‧‧High Pressure Forming Brick System

36‧‧‧氨分離回收系統 36‧‧‧Ammonia Separation and Recovery System

361‧‧‧氨回收塔 361‧‧‧Ammonia recovery tower

362‧‧‧氨精餾塔 362‧‧‧Ammonia distillation tower

37‧‧‧氨原料桶 37‧‧‧Ammonia material barrel

38‧‧‧多效蒸發系統 38‧‧‧Multi-effect evaporation system

381‧‧‧乾燥機 381‧‧‧Dryer

39‧‧‧回收水緩衝槽 39‧‧‧Recycled water buffer tank

41‧‧‧尾氣排放管線 41‧‧‧Exhaust gas discharge pipeline

42‧‧‧尾氣處理系統 42‧‧‧Exhaust gas treatment system

421‧‧‧洗滌塔 421‧‧·washing tower

422‧‧‧高溫氧化器 422‧‧‧High temperature oxidizer

423‧‧‧過濾設備 423‧‧‧Filter equipment

第1圖係本創作矽乙烷製程之結構與流程圖。 The first picture shows the structure and flow chart of the ethane process.

第2圖係本創作矽甲烷製程之結構與流程圖。 Figure 2 is the structure and flow chart of the methane process.

第3圖係本創作液化矽甲烷緩衝槽之結構示意圖。 Fig. 3 is a schematic view showing the structure of the liquefied methane buffer tank of the present invention.

第4圖係本創作渣料回收製程之結構與流程圖。 Figure 4 is the structure and flow chart of the slag recycling process.

第5圖係本創作尾氣回收製程之結構與流程圖。 Figure 5 is the structure and flow chart of the tail gas recovery process of this creation.

為使 貴審查委員對本創作之目的、特徵及功效能夠有更進一步之瞭解與認識,以下茲請配合【圖式簡單說明】詳述如後: In order to enable your review committee to have a better understanding and understanding of the purpose, characteristics and efficacy of this creation, please refer to the following [Simplified Description of the Drawings] for details:

先請由第1圖所示觀之,一種觸媒提升矽烷反應生成及其製程副產物全回收的系統,其包括有:一矽烷反應系統11、一氣液分離槽12 及一矽乙烷蒸餾系統13,一矽烷反應系統11包括有一矽化鎂吸粉桶111、一矽化鎂自動進料裝置112、一夾套式反應槽113、一冷凝器114及一氣動泵115,該矽化鎂吸粉桶111以無氧狀態存置矽化鎂(Mg2Si)與觸媒,其無氧狀態是於填裝密閉後進行抽真空與氮氣置換,且該觸媒的混合比例為矽化鎂的15%至30%,而該觸媒由20~50wt%的矽粉(Si)與50~80wt%的金屬粉末構成雙金屬複合物,其中的金屬粉料可使用鹼金屬族、鹼土金屬族之金屬元素,亦可採用過渡金屬中之金屬元素,如鐵(Fe),或ⅢA~ⅥA族群中之元素等合金,又該矽化鎂自動進料裝置112連接於該矽化鎂吸粉桶111與該夾套式反應槽113之間,且該夾套式反應槽113裝設有一攪拌機116,而該夾套式反應槽113的頂端連接該冷凝器114與底端連接該氣動泵115,又該夾套式反應槽113先投入氯化銨(NH4Cl)粉料,並進行密閉氮氣置換及真空除氧作業,再導入純氨(NH3)後控制-30℃冷媒的冷凝形成液態氨,並啟動該攪拌機116進行氯化銨與液態氨的預溶,使氯化銨溶解於液態氨中而形成氨及氯鹽離子,並維持該攪拌機116的持續運轉至反應結束後槽中的淨空,以避免粉料於反應過程中分散不均勻或因反應而凝固結塊造成阻滯,且由該矽化鎂自動進料裝置112以固定速率投入矽化鎂與觸媒進入該夾套式反應槽113,即矽化鎂和觸媒粉料以0~150kg/h的固定速率,配合流量穩定控制的少許液氨做為承載流體,平均地投入該夾套式反應槽113中與氯化銨進行反應,藉此,可避免矽化鎂粉料與槽中液氨接觸時造成飛濺,而使粉料附著於管線中或槽壁逐漸導致管線的阻塞,矽烷生成之過程屬於放熱反應,故於反應過程須持續以-30℃冷媒進行熱能的移除,以便使反應溫度得以維持,更於反應過程中,液態氨亦會受反應生成之熱能而汽化,並隨生 成之矽烷飄流出該夾套式反應槽113,導致反應率的降低或終止反應的進行,為維持反應過程中液態氨的量,將透過該冷凝器114以-30℃冷媒進行氨氣的冷凝,使其再次液化流回該夾套式反應槽113,藉此觸發反應生成矽甲烷(SiH4)與氫氣(H2)混氣並經由該冷凝器114產出,大部分所產出的矽乙烷因其物理特性與氨的特性相似,故會受該冷凝器114的冷凝而再次液化返回該夾套式反應槽113中,是故於矽烷反應結束後,須將參與反應的液態氨及含於其中的矽乙烷盡可能回收,因此轉換該冷凝器114內之冷媒至90℃的熱媒,使該夾套式反應槽113中的液態氨及矽乙烷能穩定的受蒸煮而升溫汽化,藉此以90℃熱媒輔助反應後的液氨與矽乙烷(Si2H6)進行蒸煮而經由該冷凝器114回收,其中,反應原料的使用比例通常由矽化鎂重量為標準,並以矽化鎂1:氯化銨3~6:液態氨9~12取量,且該反應式為:矽甲烷反應方程式如下(主反應):Mg2Si(s)+4NH4Cl(s)+8NH3(l)→SiH4(g)+2(MgCl2˙6NH3)(s) First, please see the system shown in Figure 1, a catalyst to increase the formation of decane reaction and its system by-product recovery, including: a decane reaction system 11, a gas-liquid separation tank 12 and an ethane distillation system 13. The monooxane reaction system 11 includes a magnesium telluride powder suction drum 111, a magnesium telluride automatic feeding device 112, a jacketed reaction tank 113, a condenser 114, and a pneumatic pump 115. The magnesium telluride powder absorption tank 111 The magnesium oxide (Mg 2 Si) and the catalyst are stored in an anaerobic state, and the anaerobic state is vacuum-filled and nitrogen-substituted after the sealing is sealed, and the mixing ratio of the catalyst is 15% to 30% of the magnesium telluride. The catalyst comprises a bimetallic composite of 20 to 50 wt% of bismuth powder (Si) and 50 to 80 wt% of metal powder, wherein the metal powder may be a metal element of an alkali metal group or an alkaline earth metal group, or may be used. a metal element in the transition metal, such as iron (Fe), or an alloy of elements in the group IIIA to VIA, and the magnesium telluride automatic feeding device 112 is connected to the magnesium telluride powder suction drum 111 and the jacketed reaction tank 113. Between the jacketed reaction tank 113 is equipped with a mixer 116, and the jacket type The top end of the reaction tank 113 is connected to the condenser 114 and connected to the pneumatic pump 115 at the bottom end, and the jacketed reaction tank 113 is first charged with ammonium chloride (NH 4 Cl) powder, and is subjected to closed nitrogen replacement and vacuum deaeration operation. After introducing pure ammonia (NH 3 ), controlling the condensation of the -30 ° C refrigerant to form liquid ammonia, and starting the mixer 116 to pre-dissolve the ammonium chloride and the liquid ammonia, so that the ammonium chloride is dissolved in the liquid ammonia to form ammonia and Chloride salt ion, and maintain the continuous operation of the mixer 116 to the clearance in the tank after the end of the reaction, in order to avoid the uneven dispersion of the powder during the reaction or the solidification and agglomeration caused by the reaction, and the magnesium carbide automatically enters The material device 112 inputs magnesium telluride and the catalyst into the jacketed reaction tank 113 at a fixed rate, that is, the magnesium telluride and the catalyst powder are fixed at a fixed rate of 0 to 150 kg/h, and a small amount of liquid ammonia controlled by the flow rate is used as a load. The fluid is evenly introduced into the jacketed reaction tank 113 to react with ammonium chloride, thereby preventing the magnesium halide powder from splashing when it comes into contact with the liquid ammonia in the tank, and causing the powder to adhere to the pipeline or the tank wall. Gradually lead to blockage of the pipeline, decane generation The process is an exothermic reaction. Therefore, the heat removal of the refrigerant at -30 ° C is continued in the reaction process in order to maintain the reaction temperature. In the course of the reaction, the liquid ammonia is also vaporized by the heat generated by the reaction, and The generated decane floats out of the jacketed reaction tank 113, resulting in a decrease in the reaction rate or a termination of the reaction. In order to maintain the amount of liquid ammonia during the reaction, the ammonia is condensed through the condenser 114 at -30 ° C. Re-liquefying back to the jacketed reaction tank 113, thereby triggering the reaction to form a mixture of helium methane (SiH4) and hydrogen (H 2 ) and producing through the condenser 114, most of the produced Since the physical properties of the alkane are similar to those of ammonia, the condenser 114 is condensed and reliquefied back into the jacketed reaction vessel 113. Therefore, after the completion of the decane reaction, the liquid ammonia and the reaction involved in the reaction are required. The ruthenium ethane therein is recovered as much as possible, so that the refrigerant in the condenser 114 is converted to a heat medium at 90 ° C, so that the liquid ammonia and hydrazine in the jacketed reaction tank 113 can be stably heated and vaporized. With 90°C heat medium The liquid ammonia after the auxiliary reaction is digested with hydrazine ethane (Si 2 H 6 ) and recovered through the condenser 114. The proportion of the reaction raw materials used is usually determined by the weight of magnesium hydride, and magnesium hydride 1: ammonium chloride. 3~6: Liquid ammonia 9~12 is taken, and the reaction formula is: 矽methane reaction equation is as follows (main reaction): Mg 2 Si (s) +4NH 4 Cl (s) +8NH 3(l) →SiH 4 (g) +2 (MgCl 2 ̇6NH 3 ) (s)

矽乙烷反應方程式如下(副反應):2Mg2Si(s)+8NH4Cl(s)+16NH3(l)→Si2H6(g)+4(MgCl2˙6NH3)(s)+H2(g) The enthalpy reaction equation is as follows (side reaction): 2Mg 2 Si (s) +8NH 4 Cl (s) +16NH 3(l) →Si 2 H 6(g) +4(MgCl 2 ̇6NH 3 ) (s) +H 2(g)

而反應後的渣料由該氣動泵115排出存放於一渣料緩衝槽14,排入該渣料緩衝槽14之渣料先於該夾套式反應槽113內加水攪拌,使部分轉化為難溶之氫氧化鎂固態粉粒及溶於其中之鹽類產物,其中,該夾套式反應槽113於渣料排空後,以氮氣沖吹、抽真空及90℃熱媒的升溫進行該夾套式反應槽113之槽內的清理及有效的除水分,以避免水分影響下個反應過程中生成的矽烷與水鹼性環境氧化反應而形成二氧化矽,藉此提高矽烷反應率,一氣液分離槽12連接於該冷凝器114,該冷凝器114依序 連接有一第二冷凝器117與一第三冷凝器118,利用各物質沸點溫度不同之物理特性進行初步的矽烷分離,再以2~7kg/cm2之定壓依序導入該第二冷凝器117以-30℃冷凝進行與該第三冷凝器118以-75℃進行冷凝,即可避免矽乙烷飄散於氣相中再與氣態的矽甲烷和氫氣混合,於該氣液分離設備中進行分離形成液態矽乙烷及液化氨,以及氣態的矽甲烷和氫氣,該冷凝器114與該第二冷凝器117之間裝設有一過濾器119,由於該夾套式反應槽113於反應過程生成的矽甲烷混氣及反應結束後蒸煮出的氨和矽乙烷,會伴隨少量經壓差氣流所載帶的原物料或渣料粉體,利用該過濾器119攔截大於3~100μm的粉粒,由該氣液分離槽12的上端連接一用於存放汽化矽甲烷之矽甲烷暫存槽21,且該氣液分離槽12連接一用於存放液化矽乙烷與液氨之矽乙烷暫存槽15,一矽乙烷蒸餾系統13包括有一脫矽乙烷塔131、一氨純化塔132及一矽乙烷純化塔133,該矽乙烷暫存槽15連接該脫矽乙烷塔131,該脫矽乙烷塔131上端連接該氨純化塔132,且該脫矽乙烷塔131下端連接該矽乙烷純化塔133,該脫矽乙烷塔131以壓力18~24kg/cm2與溫度25℃至70℃條件將氨分離至該氨純化塔132,該分離的液態氨量為58~67wt%,同時將矽乙烷分離至該矽乙烷純化塔133,又該氨純化塔132以溫度差分離少量矽甲烷回流至該矽甲烷暫存槽21,且該矽乙烷純化塔133以溫度30℃至100℃進一步純化該矽乙烷,並將純化矽乙烷儲存於一液化矽乙烷緩衝桶16,藉此使矽乙烷的反應選擇率能達到5~25vol%,該液化矽乙烷緩衝桶16所儲存的矽乙烷可達4N8(99.998%)之純度,於矽乙烷灌充需求時,藉由真空低溫-75℃冷凝使矽乙烷能由該液化矽乙烷緩衝桶16充填入至少一鋼瓶17中,亦能以相同真空冷凝技術進行小量矽乙烷的純化及微量不純的氣體脫 除,而該氨純化塔132與該矽乙烷純化塔133所分離的氨儲存於一液氨緩衝槽134,再透過該液氨緩衝槽134將回收的氨導入該夾套式反應槽113重覆使用,進而有效降低其生產成本。 The slag after the reaction is discharged from the pneumatic pump 115 and stored in a slag buffer tank 14. The slag discharged into the slag buffer tank 14 is stirred with water in the jacketed reaction tank 113 to partially convert it into insoluble solvent. The magnesium hydroxide solid powder and the salt product dissolved therein, wherein the jacketed reaction tank 113 is subjected to nitrogen purge, vacuuming, and temperature rise of the heat medium at 90 ° C after the slag is emptied. The cleaning in the tank of the reaction tank 113 and the effective removal of moisture to prevent moisture from affecting the oxidation reaction of the decane formed in the next reaction with the water alkaline environment to form cerium oxide, thereby increasing the decane reaction rate, a gas-liquid separation The tank 12 is connected to the condenser 114. The condenser 114 is sequentially connected with a second condenser 117 and a third condenser 118. The preliminary decane separation is performed by using physical properties different in boiling temperature of each substance, and then 2 to 7 kg. The constant pressure of /cm 2 is sequentially introduced into the second condenser 117 to condense at -30 ° C and condense with the third condenser 118 at -75 ° C to avoid the enthalpy of ethane dispersed in the gas phase and then in a gaseous state. Mixing methane and hydrogen in the gas-liquid separation device The cells are separated to form liquid helium ethane and liquefied ammonia, and gaseous methane and hydrogen. A filter 119 is disposed between the condenser 114 and the second condenser 117, because the jacketed reaction tank 113 is in the reaction process. The produced methane-methane gas mixture and the ammonia and cesium ethane which are distilled after the reaction is completed are accompanied by a small amount of raw material or slag powder carried by the differential pressure gas stream, and the filter 119 is used to intercept powders larger than 3 to 100 μm. The upper end of the gas-liquid separation tank 12 is connected to a methane temporary storage tank 21 for storing vaporized helium methane, and the gas-liquid separation tank 12 is connected to an ethane for storing liquefied ethane and liquid ammonia. The storage tank 15 comprises a deuterium ethane column 131, an ammonia purification column 132 and an ethane purification column 133. The ethane storage tank 15 is connected to the deuterium ethane column. 131, the upper end of the deuterated ethane column 131 is connected to the ammonia purification column 132, and the lower end of the deuterated ethane column 131 is connected to the oxime ethane purification column 133, and the deuterium ethane column 131 is at a pressure of 18 to 24 kg/cm 2 The ammonia is separated into the ammonia purification column 132 at a temperature of 25 ° C to 70 ° C, and the separated liquid ammonia amount is 58 to 67 wt %. At the same time, the ruthenium ethane is separated into the oxime ethane purification column 133, and the ammonia purification column 132 is separated by a temperature difference to reflux a small amount of hydrazine methane to the hydrazine methane storage tank 21, and the cesium ethane purification column 133 is at a temperature of 30 The oxirane is further purified at a temperature of from ° C to 100 ° C, and the purified oxirane is stored in a liquefied ethane buffer tank 16 , whereby the reaction selectivity of the oxirane can be 5 to 25 vol %, and the liquefied ethane is liquefied. The buffer tank 16 can store 矽 ethane up to 4N8 (99.998%) purity. When 矽 ethane filling demand, 矽 ethane can be liquefied from the liquefied ethane buffer bucket by vacuum low temperature -75 ° C condensation. Filling into at least one cylinder 17 can also purify a small amount of ethane and a trace of impure gas by the same vacuum condensation technique, and the ammonia purification tower 132 and the ethane purification tower 133 are separated from the ammonia storage. The liquid ammonia buffer tank 134 is passed through the liquid ammonia buffer tank 134 to introduce the recovered ammonia into the jacketed reaction tank 113 for repeated use, thereby effectively reducing the production cost.

本創作另一支線進行矽甲烷的純化作業,再請由第2圖所示觀之,該矽甲烷暫存槽21連接有一矽甲烷分餾系統22,該矽甲烷分餾系統22包括有一矽甲烷回收塔221、一矽甲烷分子篩222及一矽甲烷純化塔223,該矽甲烷回收塔221上端連接該矽甲烷分子篩222,並由該矽甲烷分子篩222連接該矽甲烷純化塔223,該矽甲烷回收塔221以壓力8~15kg/cm2與變化溫度-60℃~40℃將大部分的氨分餾儲存至該液氨緩衝槽134,即利用氨為相對較重物質之特性,經分餾後由該矽甲烷回收塔221的塔底產出並輸送至該氨氣緩衝槽134進行回收,又該分離出的矽甲烷氣體仍含有約2~10wt%的少量氨成分,而分餾出的矽甲烷氣體與少量的氨再由該3A~5A的矽甲烷分子篩222吸附去除氨及其它不純物之氣體,其中該矽甲烷分子篩222能進行加熱以提供切換後的抽真空去除吸附物質的再生使用,再將矽甲烷導入矽甲烷純化塔223並以-160℃至-50℃的低溫將所含的氫氣脫除分離,讓純化矽甲烷儲存於一液化矽甲烷緩衝桶23。該液化矽甲烷緩衝桶23所儲存的矽甲烷可達6N(99.9999%)之純度,且該液化矽甲烷緩衝23桶採用內外雙層結構(配合第3圖所示),由該內層存放液化矽甲烷,而該外層呈真空狀並繞設有一環體盤管232,利用該環體盤管232流通冷媒達-50℃的溫控和壓控,並於需要使用時使用冷媒做為矽甲烷之冷凝,又該液化矽甲烷緩衝桶23連接有一汽化器231,於矽甲烷灌充需求時,讓矽甲烷導入該汽化器231並以-30℃冷媒進行穩定流量之控制輸送至一成品加壓機24,並藉由該成品加壓機 24加壓至100~160kg/cm2的壓力將矽甲烷充填入至少一鋼瓶25或至少一槽車26中,藉此有助於進行灌充運送。 Another branch of the present invention performs a purification operation of methane, which is shown in Fig. 2. The methane methane storage tank 21 is connected to a methane fractionation system 22, which includes a helium methane recovery tower. 221, a methane molecular sieve 222 and a methane purification tower 223, the methane recovery column 221 is connected to the methane molecular sieve 222 at the upper end, and the methane purification column 223 is connected to the methane recovery column 223 by the methane molecular sieve 222. The majority of the ammonia is fractionally stored in the liquid ammonia buffer tank 134 at a pressure of 8 to 15 kg/cm 2 and a temperature of -60 ° C to 40 ° C, that is, ammonia is used as a relatively heavy substance, and the methane is fractionated by fractionation. The bottom of the recovery column 221 is produced and sent to the ammonia buffer tank 134 for recovery, and the separated methane gas still contains about 2 to 10% by weight of a small amount of ammonia component, and the fractionated methane gas and a small amount of The ammonia is further adsorbed by the 3A~5A yttrium methane molecular sieve 222 to remove ammonia and other impurities, wherein the yttrium methane molecular sieve 222 can be heated to provide a vacuum after the switching to remove the adsorbed material, and then the yttrium methane is introduced into the 矽. Alkoxy purification column 223 and hydrogen at a low temperature of -160 deg.] C to -50 ℃ contained in the removed separation, purification of silicon so that the liquefied methane is stored in a buffer tub 23 silicon methane. The enthalpy methane stored in the liquefied methane buffer tank 23 can be purified to a purity of 6N (99.9999%), and the liquefied methane buffer 23 barrels adopt an inner and outer double-layer structure (shown in FIG. 3), and the inner layer is stored and liquefied. Methane is methane, and the outer layer is vacuumed and wound around a ring coil 232. The ring coil 232 is used to circulate the refrigerant to a temperature of -50 ° C for temperature control and pressure control, and when used, the refrigerant is used as methane. Condensation, and the liquefied methane buffer tank 23 is connected to a vaporizer 231. When the methane filling requirement is required, the methane is introduced into the vaporizer 231 and controlled by a steady flow of -30 ° C refrigerant to a finished press 24 . And the methane methane is filled into at least one cylinder 25 or at least one tank truck 26 by pressurizing the finished presser 24 to a pressure of 100 to 160 kg/cm 2 , thereby facilitating the filling and transportation.

本創作另一支線進行渣料的回收作業,再請由第4圖所示觀之,該渣料緩衝槽14依順序串接有一離心過濾器31、一氨水溶液緩衝槽32、一氫氧化鎂過濾器33及一氨水緩衝桶34,且該離心過濾器31與該氫氧化鎂過濾器33同時連接有一乾燥磨粉裝置35,並以該乾燥磨粉裝置35連接有一高壓成型製磚系統351,作業時排入該渣料緩衝槽14之渣料先於該夾套式反應槽113內加水攪拌,使部分轉化為難溶之氫氧化鎂固態粉粒及溶於其中之鹽類產物,並在該渣料緩衝槽14的不間斷攪拌下將漿狀渣料流入該離心過濾器31,讓渣料能更有效的與水進行反應生成可溶之鹽類,令生成之固體粉粒能均勻分布且避免沉澱,再利用該離心過濾器31的轉旋脫液,即該離心過濾器31以300~1000rpm的轉速進行渣料的脫液,並以200~400目之濾材進行固態粉料的攔截,使渣料的液態部分流至該氨水溶液緩衝槽32,而該固態渣料於該離心過濾器31形成一適當厚度時,以刮除方式排洩至該乾燥磨粉裝置35,又該乾燥磨粉裝置35以電加熱配合螺旋攪拌進行固態渣料的加熱乾燥及氨的脫離,並排至該高壓成型製磚系統351做為製磚的原料,亦能直接做為排煙脫硫之用劑,又該氨水溶液緩衝槽32加入回收取得的氨水,並使溶液中之氯化鎂能反應生成轉化為氯化銨和氫氧化鎂粉粒,再經由該氫氧化鎂過濾器33以1~30μm精度過濾氫氧化鎂粉粒並排洩至該乾燥磨粉裝置35,而該排洩方式是使用氮氣將粉粒由該該離心過濾器31上吹落,並以其重力將粉粒排放至該乾燥磨粉裝置35,避免固態粉粒進入該氨水緩衝桶34,僅將氨水存入該氨水緩衝桶34。該氨水緩衝桶 34連接有一氨分離回收系統36,該氨分離回收系統36以一氨回收塔361連接該氨水緩衝桶34,並由該氨回收塔361上端連接有一氨精餾塔362,又該氨回收塔361以0~5kg/cm2的壓力和50℃~145℃的溫度進行氯化銨溶液和氨水溶液的分離,所分離的氨水濃度為10~30wt%屬於相對較輕物質,使氨水溶液由該氨回收塔361的塔頂排放至該氨精餾塔362,並於該氨精餾塔362中以-30℃~130℃的溫度進行氨和水的純化分離,所純化的氨能達工業級98%~99%的純度水準,且該氨精餾塔362於塔頂的純化氨儲入一氨原料桶37進行回收利用,而該氨精餾塔362於塔底分離的水和微量的氨回流至該氨水緩衝桶34,另該氨回收塔361由塔底分離出的氯化銨溶液輸送至一多效蒸發系統38,透過該多效蒸發系統38以120℃~160℃的蒸汽進行加熱,使氯化銨溶液將所含之水分汽化而脫離氯化銨,氯化銨的含水率能低於1wt%,並由一乾燥機381回收做為該夾套式反應槽113的反應原料使用,而該水汽以一回收水緩衝槽39回收提供該夾套式反應槽113於反應後的渣料溶劑使用。 Another branch of the present invention performs the recovery operation of the slag material, and as shown in FIG. 4, the slag buffer tank 14 is sequentially connected in series with a centrifugal filter 31, an ammonia aqueous solution buffer tank 32, and a magnesium hydroxide. a filter 33 and an ammonia buffer tank 34, and the centrifugal filter 31 and the magnesium hydroxide filter 33 are simultaneously connected with a dry milling device 35, and a high-pressure forming brick system 351 is connected to the dry milling device 35. The slag discharged into the slag buffer tank 14 during operation is firstly converted into the insoluble magnesium hydroxide solid powder and the salt product dissolved therein by adding water and stirring in the jacketed reaction tank 113, and The slurry slag 14 is flowed into the centrifugal filter 31 without interruption, so that the slag can be more efficiently reacted with water to form a soluble salt, so that the formed solid powder can be uniformly distributed and The sedimentation is avoided, and the centrifugal filter 31 is used for the liquid separation, that is, the centrifugal filter 31 performs the deliquoring of the slag at a rotation speed of 300 to 1000 rpm, and the solid powder is intercepted by a filter medium of 200 to 400 mesh. Flowing the liquid portion of the slag to the aqueous ammonia solution a groove 32, and the solid slag is discharged to the dry milling device 35 in a scraping manner when the centrifugal filter 31 is formed to a suitable thickness, and the dry milling device 35 is electrically heated and spirally stirred for solid slag. The heat drying and the detachment of ammonia are discharged to the high-pressure forming brick making system 351 as a raw material for brick making, and can also be directly used as a desulfurizing agent for exhausting smoke, and the ammonia aqueous buffer tank 32 is added to the recovered ammonia water. The magnesium chloride in the solution can be reacted to form ammonium chloride and magnesium hydroxide powder, and the magnesium hydroxide powder is filtered through the magnesium hydroxide filter 33 with an accuracy of 1 to 30 μm and discharged to the dry milling device 35. And the excretion method is to blow the powder from the centrifugal filter 31 by using nitrogen gas, and discharge the powder particles to the dry milling device 35 by gravity, thereby preventing the solid powder particles from entering the ammonia buffer tank 34, only Ammonia water is stored in the ammonia buffer tank 34. The ammonia buffer tank 34 is connected to an ammonia separation and recovery system 36. The ammonia separation and recovery system 36 is connected to the ammonia buffer tank 34 by an ammonia recovery tower 361, and an ammonia distillation column 362 is connected to the upper end of the ammonia recovery tower 361. The ammonia recovery tower 361 separates the ammonium chloride solution and the ammonia aqueous solution at a pressure of 0 to 5 kg/cm 2 and a temperature of 50 ° C to 145 ° C, and the separated ammonia water concentration is 10 to 30 wt %, which is a relatively light substance, so that ammonia The aqueous solution is discharged from the top of the ammonia recovery column 361 to the ammonia rectification column 362, and the ammonia and water are purified and separated in the ammonia rectification column 362 at a temperature of -30 ° C to 130 ° C. Up to 98% to 99% of the purity level of the industrial grade, and the purified ammonia at the top of the ammonia rectification column 362 is stored in an ammonia raw material tank 37 for recycling, and the ammonia rectification tower 362 is separated from the bottom of the water and A trace amount of ammonia is returned to the ammonia buffer tank 34, and the ammonia recovery column 361 is sent to the poly-effect evaporation system 38 by the ammonium chloride solution separated from the bottom of the column, and is passed through the multi-effect evaporation system 38 at 120 ° C to 160 ° C. The steam is heated to vaporize the water contained in the ammonium chloride solution to remove ammonium chloride, and the ammonium chloride The water rate can be less than 1% by weight, and is recovered by a dryer 381 as a reaction raw material of the jacketed reaction tank 113, and the water vapor is recovered by a recovery water buffer tank 39 to provide the jacketed reaction tank 113 for reaction. After the slag solvent is used.

本創作之尾(廢)氣回收作業,再請由第5圖所示觀之,矽烷反應全製程之製程設備皆由複數個尾氣排放管線41進行匯集連接一尾氣處理系統42,該尾氣處理系統42包括有一洗滌塔421、一高溫氧化器422及一過濾設備423,且該尾(廢)氣依含有氨及矽烷氣體之組成分流至該尾氣處理系統42的各個階段,該洗滌塔421以水進行氨氣的吸附脫除,再將所形成之氨水導入該氨水溶液緩衝槽32做回收,並做為氯化銨鹽類轉化之添加劑,而微量的尾氣則由塔頂排放至該高溫氧化器422進行矽烷氣體的破壞,使其轉化為二氧化矽之非危險性物質,再由該尾氣處理系統42之過濾設備 423進行攔截收集,藉此有效處理尾氣使其以低成本降低對環境的污染。 At the end of the creation (waste) gas recovery operation, please see the picture shown in Figure 5, the process equipment of the decane reaction full process is integrated by a plurality of exhaust gas discharge lines 41 to connect an exhaust gas treatment system 42, the exhaust gas treatment system 42 includes a scrubbing tower 421, a high temperature oxidizer 422, and a filtering device 423, and the tail (waste) gas is split to various stages of the exhaust gas treatment system 42 according to a composition containing ammonia and decane gas, the scrubbing tower 421 being water The ammonia gas is removed by adsorption, and the formed ammonia water is introduced into the ammonia solution buffer tank 32 for recovery, and is used as an additive for ammonium chloride salt conversion, and a trace amount of tail gas is discharged from the top of the tower to the high temperature oxidizer. 422 is subjected to destruction of decane gas to convert it into a non-hazardous substance of cerium oxide, and then the filtering device of the exhaust gas treatment system 42 423 performs interception collection, thereby effectively treating the exhaust gas to reduce environmental pollution at a low cost.

綜上所述,本創作確實已達突破性之結構設計,而具有改良之新型內容,同時又能夠達到產業上之利用性與進步性,且本創作未見於任何刊物,亦具新穎性,當符合專利法相關法條之規定,爰依法提出新型專利申請,懇請 鈞局審查委員授予合法專利權,至為感禱。 In summary, this creation has indeed achieved a breakthrough structural design, and has improved new content, while at the same time achieving industrial use and progress, and this creation is not seen in any publication, but also novel, when In accordance with the provisions of the relevant laws and regulations of the Patent Law, a new type of patent application is filed according to law, and the examination authority of the bureau is required to grant legal patent rights.

唯以上所述者,僅為本創作之一較佳實施例而已,當不能以之限定本創作實施之範圍;即大凡依本新型申請專利範圍所作之均等變化與修飾,皆應仍屬本新型專利涵蓋之範圍內。 Only the above-mentioned ones are only preferred embodiments of the present invention, and the scope of the creation of the present invention cannot be limited thereto; that is, the equal changes and modifications made by the majority of the patent application scope of the present invention should still belong to the present invention. Within the scope of the patent.

Claims (10)

一種觸媒提升矽烷反應生成及其製程副產物全回收的系統,其包括有:一矽烷反應系統,該矽烷反應系統包括有一矽化鎂吸粉桶、一矽化鎂自動進料裝置、一夾套式反應槽、一冷凝器及一氣動泵,該矽化鎂吸粉桶以無氧狀態存置矽化鎂與觸媒,且該觸媒的混合比例為矽化鎂的15%至30%,而該觸媒由20~50wt%的矽粉與50~80wt%的金屬粉末構成雙金屬複合物,又該矽化鎂自動進料裝置連接於該矽化鎂吸粉桶與該夾套式反應槽之間,且該夾套式反應槽裝設有一攪拌機,而該夾套式反應槽的頂端連接該冷凝器與底端連接該氣動泵,又該夾套式反應槽先投入氯化銨粉料,並進行密閉氮氣置換及真空除氧作業,再導入純氨後控制-30℃冷媒的冷凝形成液態氨,並啟動該攪拌機進行氯化銨與液態氨的預溶,且由該矽化鎂自動進料裝置以固定速率投入矽化鎂與觸媒進入該夾套式反應槽,藉此觸發反應生成矽甲烷與氫氣混氣並經由該冷凝器產出,另以90℃熱媒輔助反應後的液氨與矽乙烷進行蒸煮而經由該冷凝器回收,而反應後的渣料由該氣動泵排出存放於一渣料緩衝槽;一氣液分離槽,該氣液分離槽連接於該冷凝器,並由該氣液分離槽的上端連接一用於存放汽化矽甲烷之矽甲烷暫存槽,且該氣液分離槽連接一用於存放液化矽乙烷與液氨之矽乙烷暫存槽;以及一矽乙烷蒸餾系統,該矽乙烷蒸餾系統包括有一脫矽乙烷塔、一氨純化塔及一矽乙烷純化塔,該矽乙烷暫存槽連接該脫矽乙烷塔,該脫矽乙烷塔上端連接該氨純化塔,且該脫矽乙烷塔下端連接該矽乙烷純化塔,該脫矽乙烷塔以壓力18~24kg/cm2與溫度25℃至70℃條件將氨分離至該氨 純化塔,以及矽乙烷分離至該矽乙烷純化塔,又該氨純化塔以溫度差分離少量矽甲烷回流至該矽甲烷暫存槽,且該矽乙烷純化塔以溫度30℃至100℃進一步純化該矽乙烷,並將純化矽乙烷儲存於一液化矽乙烷緩衝桶,藉此使矽乙烷的反應選擇率能達到5~25vol%,而該氨純化塔與該矽乙烷純化塔所分離的氨儲存於一液氨緩衝槽,再透過該液氨緩衝槽將回收的氨導入該夾套式反應槽重覆使用,進而有效降低其生產成本。 A catalyst for increasing the formation of decane and the complete recovery of by-product by-process thereof, comprising: a decane reaction system comprising a magnesium sulphide powder suction bucket, a magnesium telluride automatic feeding device, and a jacketed type a reaction tank, a condenser and a pneumatic pump, wherein the magnesium telluride powder tank stores magnesium telluride and a catalyst in an oxygen-free state, and the mixing ratio of the catalyst is 15% to 30% of magnesium telluride, and the catalyst is composed of 20~50wt% of tantalum powder and 50~80wt% of metal powder form a bimetal composite, and the magnesium telluride automatic feeding device is connected between the magnesium telluride powder sucking barrel and the jacketed reaction tank, and the clip The jacketed reaction tank is equipped with a mixer, and the top end of the jacketed reaction tank is connected to the condenser and the bottom end is connected to the pneumatic pump, and the jacketed reaction tank is first charged with ammonium chloride powder and sealed nitrogen gas is replaced. And vacuum deaeration operation, after introducing pure ammonia, controlling the condensation of -30 °C refrigerant to form liquid ammonia, and starting the mixer to pre-dissolve ammonium chloride and liquid ammonia, and inputting the magnesium telluride automatic feeding device at a fixed rate Magnesium telluride and catalyst enter the jacket a reaction tank, thereby triggering a reaction to generate a mixture of methane and hydrogen, and producing the mixture via the condenser, and further heating the liquid ammonia and the hydrazine ethane after the auxiliary treatment at 90 ° C to recover the reaction through the condenser. The slag is discharged from the pneumatic pump and stored in a slag buffer tank; a gas-liquid separation tank connected to the condenser, and connected to the upper end of the gas-liquid separation tank for storing vaporized methane a methane temporary storage tank, and the gas-liquid separation tank is connected to a sulphur storage tank for storing liquefied ethane and liquid ammonia; and an ethane distillation system including a detachment system a ruthenium ethane column, an ammonia purification column and an ethane purification column, the 矽 ethane temporary storage tank is connected to the deuterium ethane column, the upper end of the deuterium ethane column is connected to the ammonia purification tower, and the detachment The lower end of the alkylene column is connected to the oxime purification tower, and the deuterated ethane column is separated into the ammonia purification tower under the conditions of a pressure of 18 to 24 kg/cm 2 and a temperature of 25 to 70 ° C, and the hydrazine is separated into the hydrazine. An ethane purification tower, and the ammonia purification tower separates a small amount of hydrazine methane to the temperature difference a methane storage tank, and the oxirane purification tower further purifies the ruthenium ethane at a temperature of 30 ° C to 100 ° C, and stores the purified ruthenium ethane in a liquefied ethane buffer tank, thereby reacting the ruthenium ethane The selectivity can be 5~25 vol%, and the ammonia separated from the pyridine purification column is stored in a liquid ammonia buffer tank, and the recovered ammonia is introduced into the jacket reaction through the liquid ammonia buffer tank. The tank is reused, which in turn reduces its production costs. 根據申請專利範圍第1項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,該冷凝器依序連接有一第二冷凝器與一第三冷凝器,利用各物質沸點溫度不同之物理特性進行初步的矽烷分離,以2~7kg/cm2之定壓依序導入該第二冷凝器以-30℃冷凝進行與該第三冷凝器以-75℃進行冷凝,形成液態矽乙烷及液化氨,以及氣態的矽甲烷和氫氣,並於該氣液分離槽進行分離。 The system for raising decane reaction and the total recovery of by-product by process according to the catalyst of claim 1, wherein the condenser is sequentially connected with a second condenser and a third condenser, and the boiling point of each substance is utilized. The physical properties of different temperatures are subjected to preliminary decane separation, and the second condenser is introduced into the second condenser at a constant pressure of 2 to 7 kg/cm 2 to condense at -30 ° C to condense with the third condenser at -75 ° C to form a liquid. Ethane and liquefied ammonia, as well as gaseous methane and hydrogen, are separated in the gas-liquid separation tank. 根據申請專利範圍第2項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,該冷凝器與該第二冷凝器之間裝設有一過濾器,由於該夾套式反應槽於反應過程生成的矽甲烷混氣及反應結束後蒸煮出的氨和矽乙烷,會伴隨少量經壓差氣流所載帶的原物料或渣料粉體,利用該過濾器攔截大於3~100μm的粉粒。 a system for promoting decane reaction formation and full recovery of by-product by-product according to the catalyst of claim 2, wherein a filter is installed between the condenser and the second condenser, due to the jacket type The methane gas mixture generated in the reaction tank during the reaction process and the ammonia and cesium ethane which are distilled after the reaction is completed are accompanied by a small amount of raw material or slag powder carried by the differential pressure gas stream, and the filter is intercepted by more than 3 ~100μm particles. 根據申請專利範圍第1項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,該液化矽乙烷緩衝桶所儲存的矽乙烷可達4N8(99.998%)之純度,於矽乙烷灌充需求時,藉由真空低溫-75℃冷凝使矽乙烷能由該液化矽乙烷緩衝桶充填入至少一鋼瓶中,亦能以相同真空冷凝技術進行小量矽乙烷的純化及微量不純的氣體脫除。 The system for raising decane reaction and the complete recovery of by-product by-product according to the catalyst of the first application of the patent scope, wherein the liquefied ethane ethane buffer tank can store 矽 ethane up to 4N8 (99.998%) purity When the demand for ethane is filled, the condensed ethane can be filled into the at least one cylinder by the liquefied ethane buffer tank by vacuum low-75 ° C condensation, and the same vacuum condensation technology can be used for small amount Purification of the alkane and removal of traces of impure gas. 根據申請專利範圍第1項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,該矽甲烷暫存槽連接有一矽甲烷分餾系統,該矽甲烷分餾系統包括有一矽甲烷回收塔、一矽甲烷分子篩及一矽甲烷純化塔,該矽甲烷回收塔上端連接該矽甲烷分子篩,並由該矽甲烷分子篩連接該矽甲烷純化塔,該矽甲烷回收塔以壓力8~15kg/cm2與變化溫度-60°C~40℃將大部分的氨分餾儲存至該液氨緩衝槽,而分餾出的矽甲烷氣體與少量的氨再由3A~5A的該矽甲烷分子篩吸附去除氨及其它不純物之氣體,再將矽甲烷導入矽甲烷純化塔並以-160℃至-50℃的低溫將所含的氫氣脫除分離,讓純化矽甲烷儲存於一液化矽甲烷緩衝桶。 The system for raising decane reaction and the total recovery of by-product by-product according to the catalyst of claim 1, wherein the methane methane storage tank is connected with a helium methane fractionation system comprising a methane a recovery tower, a methane molecular sieve and a methane purification tower. The upper end of the methane recovery tower is connected to the methane molecular sieve, and the methane methane sieve is connected to the methane purification tower. The methane recovery tower is pressurized at 8-15 kg/ Cm 2 and varying temperature -60 ° C ~ 40 ° C, most of the ammonia is fractionated and stored in the liquid ammonia buffer tank, and the fractionated methane gas and a small amount of ammonia are adsorbed and removed by the 3A~5A methane molecular sieve. And other impurities, the methane is introduced into the methane purification tower and the hydrogen contained is removed at a low temperature of -160 ° C to -50 ° C, and the purified methane is stored in a liquefied methane buffer tank. 根據申請專利範圍第5項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,該液化矽甲烷緩衝桶所儲存的矽甲烷可達6N(99.9999%)之純度,且該液化矽甲烷緩衝桶採用內外雙層結構,由該內層存放液化矽甲烷,而該外層呈真空狀並繞設有一環體盤管,利用該環體盤管流通冷媒達-50℃的溫控和壓控,並於需要使用時使用冷媒做為矽甲烷之冷凝,又該液化矽甲烷緩衝桶連接有一汽化器,於矽甲烷灌充需求時,讓矽甲烷導入該汽化器並以-30℃冷媒進行穩定流量之控制輸送至一成品加壓機,並藉由該成品加壓機加壓至100~160kg/cm2的壓力將矽甲烷充填入至少一鋼瓶或至少一槽車中。 a system for promoting the recovery of decane reaction and the total recovery of by-product by-product according to the catalyst described in claim 5, wherein the enthalpy methane stored in the liquefied methane buffer tank has a purity of 6N (99.9999%), and The liquefied methane buffer tank adopts an inner and outer double-layer structure, and the inner layer stores liquefied methane, and the outer layer is vacuumed and wound around a ring coil, and the circulating coil is used to circulate the refrigerant to a temperature of -50 ° C. Control and pressure control, and use the refrigerant as the condensation of helium methane when needed, and the liquefied methane buffer tank is connected with a vaporizer. When the methane filling demand is required, the methane is introduced into the vaporizer and the refrigerant is -30 ° C. The control of the steady flow is carried out to a finished press, and the methane is filled into at least one cylinder or at least one tank by the pressure of the finished press to 100 to 160 kg/cm 2 . 根據申請專利範圍第1項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,該渣料緩衝槽依順序串接有一離心過濾器、一氨水溶液緩衝槽、一氫氧化鎂過濾器及一氨水緩衝桶,且該離心過濾器與該氫氧化鎂過濾器同時連接有一乾燥磨粉裝置,並以該乾燥磨粉裝置連 接有一高壓成型製磚系統,排入該渣料緩衝槽之渣料先於該夾套式反應槽內加水攪拌,使部分轉化為難溶之氫氧化鎂固態粉粒及溶於其中之鹽類產物,並在該渣料緩衝槽的不間斷攪拌下將漿狀渣料流入該離心過濾器,利用該離心過濾器的轉旋脫液,使渣料的液態部分流至該氨水溶液緩衝槽,而該固態部分排洩至該乾燥磨粉裝置,又該乾燥磨粉裝置以電加熱配合螺旋攪拌進行固態渣料的加熱乾燥及氨的脫離,並排至該高壓成型製磚系統做為製磚的原料,又該氨水溶液緩衝槽加入氨水,並使溶液中之氯化鎂能反應生成轉化為氯化銨和氫氧化鎂粉粒,再經由該氫氧化鎂過濾器以1~30μm精度過濾氫氧化鎂粉粒並排洩至該乾燥磨粉裝置,避免固態粉粒進入該氨水緩衝桶,僅將氨水存入該氨水緩衝桶。 The system for raising decane reaction and the total recovery of by-product by-product according to the catalyst of claim 1, wherein the slag buffer tank is sequentially connected in series with a centrifugal filter, an ammonia solution buffer tank, and a hydrogen solution. a magnesium oxide filter and an ammonia water buffer tank, and the centrifugal filter and the magnesium hydroxide filter are simultaneously connected with a dry milling device, and connected by the dry milling device A high-pressure forming brick system is connected, and the slag discharged into the slag buffer tank is firstly mixed with water in the jacketed reaction tank to be partially converted into insoluble magnesium hydroxide solid powder and a salt product dissolved therein. And flowing the slurry slag into the centrifugal filter under the uninterrupted stirring of the slag buffer tank, and using the centrifugal filter to de-liquidize, the liquid portion of the slag is flowed to the ammonia solution buffer tank, and The solid portion is discharged to the dry milling device, and the dry milling device is heated and dried by the electric heating and spiral stirring to remove the solid slag and the ammonia is removed, and discharged to the high-pressure forming brick system as a raw material for brick making. Further, the ammonia aqueous solution buffer tank is added with ammonia water, and the magnesium chloride in the solution can be reacted to be converted into ammonium chloride and magnesium hydroxide powder, and the magnesium hydroxide powder is filtered by the magnesium hydroxide filter with an accuracy of 1 to 30 μm. Excreted to the dry milling device to prevent solid powder from entering the ammonia buffer tank, and only storing ammonia water into the ammonia buffer tank. 根據申請專利範圍第7項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,該氨水緩衝桶連接有一氨分離回收系統,該氨分離回收系統以一氨回收塔連接該氨水緩衝桶,並由該氨回收塔上端連接有一氨精餾塔,又該氨回收塔以0~5kg/cm2的壓力和50℃~145℃的溫度進行氯化銨溶液和氨水溶液的分離,使氨水溶液由該氨回收塔的塔頂排放至該氨精餾塔,並於該氨精餾塔中以-30℃~130℃的溫度進行氨和水的純化分離,且該氨精餾塔於塔頂的純化氨儲入一氨原料桶進行回收利用,而該氨精餾塔於塔底分離的水和微量的氨回流至該氨水緩衝桶,另該氨回收塔由塔底分離出的氯化銨溶液輸送至一多效蒸發系統,透過該多效蒸發系統以120℃~160℃的蒸汽進行加熱,使氯化銨溶液將所含之水分汽化而脫離氯化銨,氯化銨的含水率能低於1wt%,並由一乾燥機回收做為該夾套式反應槽的反應原料使用,而該水汽以一回收水緩衝槽回收提供 該夾套式反應槽於反應後的渣料溶劑使用。 The system for raising decane reaction and the total recovery of by-product by-product according to the catalyst described in claim 7 wherein the ammonia buffer tank is connected to an ammonia separation recovery system, and the ammonia separation recovery system is connected by an ammonia recovery tower. The ammonia buffer tank is connected with an ammonia rectification tower from the upper end of the ammonia recovery tower, and the ammonia recovery tower carries out the ammonium chloride solution and the ammonia solution at a pressure of 0 to 5 kg/cm 2 and a temperature of 50 ° C to 145 ° C. Separating, discharging an aqueous ammonia solution from the top of the ammonia recovery tower to the ammonia rectification column, and purifying and separating ammonia and water at a temperature of -30 ° C to 130 ° C in the ammonia rectification column, and the ammonia The purified ammonia at the top of the distillation column is stored in an ammonia raw material tank for recycling, and the water and trace ammonia separated by the ammonia distillation column are refluxed to the ammonia water buffer tank, and the ammonia recovery tower is separated from the bottom of the tower. The ammonium chloride solution is sent to a multi-effect evaporation system, and is heated by steam of 120 ° C to 160 ° C through the multi-effect evaporation system, so that the ammonium chloride solution vaporizes the moisture contained in the ammonium chloride solution and is chlorinated. The moisture content of ammonium can be less than 1wt% and is controlled by a dryer The reaction yield as a raw material of the jacket type reaction vessel, and the water vapor recovered to a buffer tank supplies the recovered solvent using a jacketed reaction vessel after the reaction of the slag. 根據申請專利範圍第1項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,該夾套式反應槽於渣料排空後,以氮氣沖吹、抽真空及90℃熱媒的升溫進行該夾套式反應槽之槽內的清理及有效的除水分,以避免水分影響下個反應過程中生成的矽烷與水鹼性環境氧化反應而形成二氧化矽,藉此提高矽烷反應率。 The system for raising decane reaction and the complete recovery of by-product by the catalyst according to the catalyst of the first aspect of the patent application, wherein the jacketed reaction tank is flushed with nitrogen, vacuumed and 90 after the slag is emptied. °C heating of the heat medium to clean the tank in the jacketed reaction tank and effectively remove moisture to prevent moisture from affecting the oxidation reaction between the decane formed in the next reaction and the alkaline environment to form cerium oxide. Increase the decane reaction rate. 根據申請專利範圍第1項所述之觸媒提升矽烷反應生成及其製程副產物全回收的系統,其中,矽烷反應全製程之製程設備皆由複數個尾氣排放管線進行匯集連接一尾氣處理系統,該尾氣處理系統包括有一洗滌塔、一高溫氧化器及一過濾設備,尾(廢)氣依含有氨及矽烷氣體之組成分流至該尾氣處理系統的各個階段,該洗滌塔以水進行氨氣的吸附脫除,再將所形成之氨水導入該氨水溶液緩衝槽做回收,並做為氯化銨鹽類轉化之添加劑,而微量的尾氣則由塔頂排放至該高溫氧化器進行矽烷氣體的破壞,使其轉化為二氧化矽之非危險性物質,再由該尾氣處理系統之過濾設備進行攔截收集。 The system for raising decane reaction and the complete recovery of by-product by process according to the catalyst of the first application of the patent scope, wherein the process equipment of the decane reaction full process is integrated and connected to a tail gas treatment system by a plurality of exhaust gas discharge pipelines. The exhaust gas treatment system comprises a washing tower, a high temperature oxidizer and a filtering device, and the tail (waste) gas is divided into various stages of the tail gas treating system according to a composition containing ammonia and decane gas, and the washing tower carries ammonia gas with water. The adsorption is removed, and the formed ammonia water is introduced into the ammonia solution buffer tank for recovery, and is used as an additive for ammonium chloride salt conversion, and a trace amount of tail gas is discharged from the top of the tower to the high temperature oxidizer for destruction of decane gas. It is converted into a non-hazardous substance of cerium oxide, which is then intercepted and collected by the filtering equipment of the exhaust gas treatment system.
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