TWM549851U - Pressure control module - Google Patents
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- TWM549851U TWM549851U TW106205590U TW106205590U TWM549851U TW M549851 U TWM549851 U TW M549851U TW 106205590 U TW106205590 U TW 106205590U TW 106205590 U TW106205590 U TW 106205590U TW M549851 U TWM549851 U TW M549851U
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Description
本創作係有關一種氣體輸送設備，特別是關於一種控制氣體壓力及流量供應穩定的壓力控制模組(Pressure Control Module)。This creation relates to a gas delivery device, and more particularly to a pressure control module (Pressure Control Module) that controls gas pressure and flow supply stability.
在半導體製程中，大部分的製程都需要各種不同氣體的供應，所以在半導體的製程設備中，皆需要有氣體輸送設備來傳輸所需要的製程氣體(processing gases)。傳統氣體輸送設備係將儲存有製程氣體的鋼瓶放置於氣瓶櫃(gas cabinet)10內，如圖1所示，再透過管線12將氣體輸送至現場附近的多閥箱(Valve Manifold Box，VMB)14，經由多閥箱14的分配與輸送，將相關的製程氣體輸送至使用端機台16中以便進行相關製程。In semiconductor manufacturing, most processes require a variety of different gas supplies, so in semiconductor process equipment, gas delivery equipment is required to transport the required processing gases. The conventional gas delivery device places a cylinder containing the process gas in a gas cabinet 10, as shown in Fig. 1, and then delivers the gas through the line 12 to a multi-valve box near the site (Valve Manifold Box, VMB). 14), through the dispensing and delivery of the multi-valve tank 14, the associated process gas is delivered to the end machine 16 for related processes.
一般氣瓶櫃10內部至少包含有兩支以上的鋼瓶(圖中未示)，當製程在運作的過程中，一氣瓶櫃10只有一支鋼瓶參與製程的運作，另一支鋼瓶則為待命的狀態；當運作中的鋼瓶內氣體用光時，需要更換為由待命中的鋼瓶來供應製程中所需的氣體，然而此種鋼瓶的更換，會導致後端的多閥箱14的氣源壓力值出現過大的波幅，而使正在使用端機台16上進行運作的產品成為瑕疵品，導致不良率的提升，而影響品質及產能。Generally, the interior of the gas cylinder cabinet 10 contains at least two cylinders (not shown). When the process is in operation, only one cylinder of the gas cylinder cabinet 10 participates in the process, and the other cylinder is on standby. State; when the gas in the working cylinder is used up, it needs to be replaced by the cylinder to be supplied to supply the gas required in the process. However, the replacement of the cylinder will result in the pressure value of the multi-valve 14 at the rear end. Excessive volatility has occurred, and products that are being operated on the end machine 16 have become defective products, resulting in an increase in the defect rate, which affects quality and productivity.
為了解決上述問題，本創作目的之一係提供一種壓力控制模組，提供後端機台平穩的供氣壓力，以解決傳統因更換鋼瓶而造成的氣源壓力波幅過大的問題，具有降低產品的不良率，以提升品質及產能的優點。In order to solve the above problems, one of the purposes of the present invention is to provide a pressure control module that provides a smooth supply pressure of the rear end machine to solve the problem of excessive pressure fluctuation of the gas source caused by the replacement of the steel cylinder, and has a product reduction. Bad rate to improve the quality and productivity.
為了達到上述目的，本創作一實施例壓力控制模組設置於至少一氣瓶櫃及至少一後端機台之間，氣瓶櫃包含至少一氣源，且氣源提供一氣體，壓力控制模組包含：至少一質流控制器(Mass Flow Controller；MFC)；一集氣桶，通過質流控制器與氣源流體連通，且儲存氣體於集氣桶內，集氣桶並經由至少一氣體管路連接至後端機台，使後端機台運作所需之氣體取自於集氣桶；一壓力偵測元件，連接於集氣桶，以偵測集氣桶之一內部壓力；以及一控制模組，電性連接壓力偵測元件及質流控制器，以依據內部壓力發送一電訊號至質流控制器，質流控制器依據電信號控制氣源之氣體進入集氣桶內部的流量，使集氣桶內部所儲存之氣體的壓力維持在一壓力範圍內。In order to achieve the above object, the pressure control module of the present embodiment is disposed between at least one gas cylinder cabinet and at least one rear end machine. The gas cylinder cabinet includes at least one gas source, and the gas source provides a gas, and the pressure control module The method includes: at least one mass flow controller (MFC); a gas collection barrel, is in fluid communication with the gas source through the mass flow controller, and stores the gas in the gas collection barrel, and the gas collection barrel passes through at least one gas tube The road is connected to the back end machine, so that the gas required for the operation of the back end machine is taken from the gas collecting barrel; a pressure detecting element is connected to the gas collecting barrel to detect the internal pressure of one of the gas collecting barrels; The control module is electrically connected to the pressure detecting component and the mass flow controller to send an electrical signal to the mass flow controller according to the internal pressure, and the mass flow controller controls the flow of the gas of the gas source into the gas collecting bucket according to the electrical signal. The pressure of the gas stored inside the gas collection barrel is maintained within a pressure range.
於一實施例中，氣源係為一氣體鋼瓶，且集氣桶的氣體儲存量大於一氣體鋼瓶的氣體儲存量。又集氣桶內部所儲存之氣體依據後端機台的需求而經由氣體管路輸出至後端機台。In one embodiment, the gas source is a gas cylinder, and the gas storage capacity of the gas collection barrel is greater than the gas storage capacity of a gas cylinder. The gas stored inside the gas collecting barrel is output to the rear end machine via the gas pipeline according to the demand of the rear end machine.
於一實施例中，後端機台係包含至少一多閥箱，多閥箱經由氣體管路與集氣桶流體連通，多閥箱接收來自集氣桶內部所儲存之氣體，且將氣體分配及輸送至至少一使用端機台。In an embodiment, the back end machine system includes at least one multi-valve box, the multi-valve box is in fluid communication with the gas collecting barrel via a gas pipeline, and the multi-valve box receives the gas stored from the inside of the gas collecting barrel, and distributes the gas And transported to at least one use end machine.
於一實施例中，後端機台係包含至少一特氣介面閥箱(Gas Interface box，GIB)及至少一多閥箱，特氣介面閥箱及多閥箱流體連通，且特氣介面閥箱經由氣體管路與集氣桶流體連通，特氣介面閥箱接收來自集氣桶內部所儲存之氣體，將氣體輸送至多閥箱，以經由多閥箱將氣體分配及輸送至至少一使用端機台。In one embodiment, the back end machine system includes at least one gas interface box (GIB) and at least one multi-valve box, the special gas interface valve box and the multi-valve box are in fluid communication, and the special gas interface valve The tank is in fluid communication with the gas collecting barrel via a gas pipeline, and the special gas interface valve box receives the gas stored inside the gas collecting barrel, and delivers the gas to the multi-valve box to distribute and deliver the gas to the at least one use end via the multi-valve box Machine.
圖2所示為本創作一實施例壓力控制模組之示意圖，如圖所示，一壓力控制模組20設置於一氣瓶櫃22及後端機台24之間，氣瓶櫃22包含一氣源(圖中未示)，氣源常用者為一氣體鋼瓶，以提供一氣體；後端機台24包含有至少一多閥箱26及多台使用端機台28。2 is a schematic view of a pressure control module according to an embodiment of the present invention. As shown, a pressure control module 20 is disposed between a gas cylinder cabinet 22 and a rear end machine 24, and the gas cylinder cabinet 22 includes a gas. The source (not shown), the gas source is commonly used as a gas cylinder to provide a gas; the rear end machine 24 includes at least one multi-valve box 26 and a plurality of end stations 28 for use.
壓力控制模組20包含至少一質流控制器(Mass Flow Controller；MFC)，於一實施例中，如圖2所示，壓力控制模組20係包含二組質流控制器30、30’，而在壓力控制模組20運作的過程中，係使用其中一組質流控制器30進行流量的控制，另一組質流控制器30’則作為備用；一集氣桶(Buffer tube)32通過質流控制器30、30’與氣源連通，且儲存來自氣源之氣體，又集氣桶32並經由一氣體管路34連接至後端機台24的多閥箱26，多閥箱26接收來自集氣桶32內部所儲存之氣體，且將氣體分配及輸送至多台使用端機台28。於一實施例中，集氣桶32的氣體儲存量係大於單一氣體鋼瓶的氣體儲存量，例如集氣桶32的氣體儲存量係為後端機台使用需求量的2倍、3倍或4倍；一壓力偵測元件36連接於集氣桶32，用以偵測集氣桶32之內部壓力；以及一控制模組38電性連接於壓力偵測元件36及質流控制器30、30’。The pressure control module 20 includes at least one mass flow controller (MFC). In one embodiment, as shown in FIG. 2, the pressure control module 20 includes two sets of mass flow controllers 30, 30'. During the operation of the pressure control module 20, one of the mass flow controllers 30 is used for flow control, and the other set of mass flow controllers 30' is used as a backup; a collector tube 32 is passed. The mass flow controllers 30, 30' are in communication with the gas source and store the gas from the gas source, and the gas collection drum 32 is connected to the multi-valve tank 26 of the rear end machine 24 via a gas line 34, the multi-valve tank 26 The gas stored inside the gas collection drum 32 is received, and the gas is distributed and delivered to a plurality of use end machines 28. In one embodiment, the gas storage capacity of the gas collection drum 32 is greater than the gas storage capacity of the single gas cylinder. For example, the gas storage capacity of the gas collection drum 32 is twice, 3 times or 4 times the usage requirement of the rear end machine. A pressure detecting element 36 is connected to the gas collecting barrel 32 for detecting the internal pressure of the gas collecting barrel 32; and a control module 38 is electrically connected to the pressure detecting element 36 and the mass flow controller 30, 30 '.
接續上述說明，集氣桶32內部所儲存之氣體依據後端機台24的需求而經由氣體管路34輸出至後端機台24，而隨著集氣桶32供應氣體予後端機台24，集氣桶32內部之氣體的壓力有所變動，壓力偵測元件36將所偵測之內部壓力值傳送至控制模組38，控制模組38依據此內部壓力值發送一電訊號至目前運作所使用之質流控制器30或質流控制器30’，則此質流控制器30或質流控制器30’依據電信號調整內部之一閥的開口度來控制氣源之氣體進入集氣桶32內部的流量，使集氣桶32內部所儲存之氣體的壓力維持在一壓力範圍內。於一實施例中，當集氣桶32內部所儲存之氣體因短時間大量輸出至後端機台24，導致氣體剩餘量較低而使得集氣桶42內部的壓力值下降很大時，則控制模組38將調整質流控制器30或質流控制器30’之閥的開口度變大，例如100%的開口度，以藉由進入集氣桶32內部之氣體流量的提升而短時間內將氣源之氣體補充入集氣桶32內部；當集氣桶32內部的壓力值下降較少時，則控制模組38調整質流控制器30或質流控制器30’之閥的開口度變小，例如10%的開口度，以適時的補充氣體予集氣桶32，如此使得集氣桶32的氣體皆會在一固定時間內被來自氣源的氣體補足，使集氣桶32內部之所儲存之氣體的壓力維持在一壓力範圍內。Following the above description, the gas stored in the gas collection drum 32 is output to the rear end machine 24 via the gas line 34 according to the demand of the rear end machine 24, and the gas is supplied to the rear end machine 24 along with the gas collection tank 32. The pressure of the gas inside the gas collecting barrel 32 is changed, and the pressure detecting component 36 transmits the detected internal pressure value to the control module 38. The control module 38 sends a signal to the current operation according to the internal pressure value. When the mass flow controller 30 or the mass flow controller 30' is used, the mass flow controller 30 or the mass flow controller 30' adjusts the opening degree of one of the internal valves according to the electric signal to control the gas of the gas source to enter the gas collecting bucket. The internal flow rate of 32 maintains the pressure of the gas stored inside the gas collection cylinder 32 within a pressure range. In an embodiment, when the gas stored inside the gas collecting barrel 32 is output to the rear end machine 24 in a short time, the residual amount of gas is low, and the pressure value inside the gas collecting barrel 42 is greatly decreased. The control module 38 increases the opening degree of the valve that adjusts the mass flow controller 30 or the mass flow controller 30', for example, 100% of the opening degree, so as to be short-time by the increase of the gas flow rate entering the inside of the gas collection barrel 32. The gas of the gas source is replenished into the interior of the gas collecting bucket 32; when the pressure value inside the gas collecting bucket 32 drops less, the control module 38 adjusts the opening of the valve of the mass flow controller 30 or the mass flow controller 30'. The degree becomes small, for example, 10% of the opening degree, and the gas is supplied to the gas collecting barrel 32 in a timely manner, so that the gas of the gas collecting barrel 32 is replenished by the gas from the gas source in a fixed time, so that the gas collecting barrel 32 is made up. The pressure of the stored gas inside is maintained within a pressure range.
圖3所示為本創作又一實施例壓力控制模組之示意圖，如圖3所示，一壓力控制模組20係設置於二組氣瓶櫃22、22’及後端機台24之間，於一實施例中，後端機台24包含一特氣界面閥箱40、二組多閥箱26、26’及多台使用端機台28，且氣體隔離箱40與多閥箱26、26’之間流體連通。FIG. 3 is a schematic diagram of a pressure control module according to still another embodiment of the present invention. As shown in FIG. 3, a pressure control module 20 is disposed between two sets of gas cylinder cabinets 22, 22' and a rear end machine 24. In an embodiment, the rear end machine 24 includes a special air interface valve box 40, two sets of multi-valve boxes 26, 26', and a plurality of used end machines 28, and the gas isolation box 40 and the multi-valve box 26, Fluid connection between 26'.
接續上述說明，壓力控制模組20包含集氣桶32、壓力偵測元件36、控制模組38及質流控制器30、30’，每一組氣瓶櫃22、22’的氣源係與二組質流控制器30、30’流體連通，且同一氣瓶櫃22、22’流體連通的二組質流控制器30、30’其中一組係為備用的；集氣桶32通過質流控制器30或質流控制器30’與氣源連通，且儲存來自氣源之氣體，又集氣桶32並經由一氣體管路34連接至後端機台24之氣體隔離箱40，氣體隔離箱40接收來自集氣桶32內部所儲存之氣體，並依據需求將氣體輸送至多閥箱26、26’，以經由多閥箱26、26’將氣體分配及輸送至至少一使用端機台28。壓力偵測元件36連接於集氣桶32，用以偵測集氣桶32之內部壓力；控制模組38電性連接於壓力偵測元件36及質流控制器30、30’，以依據內部壓力發送一電訊號至目前運作所使用之質流控制器30或質流控制器30’，質流控制器30或質流控制器30’依據該電信號控制該氣源之該氣體進入集氣桶32內部的流量，使集氣桶32內部之所儲存之氣體的壓力維持在一壓力範圍內。Following the above description, the pressure control module 20 includes a gas collection barrel 32, a pressure detecting element 36, a control module 38, and a mass flow controller 30, 30'. The gas source of each group of gas cylinders 22, 22' The two sets of mass flow controllers 30, 30' are in fluid communication, and one of the two sets of mass flow controllers 30, 30' that are in fluid communication with the same gas cylinder cabinet 22, 22' is reserved; the gas collection tank 32 passes through the mass flow The controller 30 or the mass flow controller 30' is in communication with the gas source, and stores the gas from the gas source, and the gas collection barrel 32 is connected to the gas isolation box 40 of the rear end machine 24 via a gas line 34, and the gas is isolated. The tank 40 receives the gas stored from inside the gas collection drum 32 and delivers the gas to the multi-valve tanks 26, 26' as needed to distribute and deliver the gas to the at least one end station 28 via the multi-valve tanks 26, 26'. . The pressure detecting component 36 is connected to the gas collecting barrel 32 for detecting the internal pressure of the gas collecting bucket 32. The control module 38 is electrically connected to the pressure detecting component 36 and the mass flow controller 30, 30' to be internal. The pressure sends a signal to the mass flow controller 30 or the mass flow controller 30' used by the current operation, and the mass flow controller 30 or the mass flow controller 30' controls the gas of the gas source to enter the gas collection according to the electric signal. The flow inside the tub 32 maintains the pressure of the stored gas inside the trap 32 within a pressure range.
在本創作中，壓力控制模組之集氣桶內部的氣體壓力值長時間而言維持在一壓力範圍內，亦即集氣桶內的氣體儲存量長時間而言係隨時維持固定的，因此集氣桶可不斷地的提供後端機台平穩的供氣壓力，當氣瓶櫃之氣源停止斷送(例如換鋼瓶)時，後端機台仍可得到穩定的氣源供應，解決了傳統因更換鋼瓶而造成的氣源壓力波幅過大的問題。因此本創作壓力控制模組可提供後端機台穩定的氣源需求，降低產品的不良率，達成品質提升、產能提升及品質穩定的目標。In this creation, the gas pressure value inside the gas collecting barrel of the pressure control module is maintained within a pressure range for a long time, that is, the gas storage amount in the gas collecting barrel is maintained at a fixed time for a long time, so The gas collection bucket can continuously provide a stable supply pressure of the rear end machine. When the gas source of the gas cylinder cabinet stops being cut (for example, changing the steel cylinder), the rear end machine can still obtain a stable gas supply, which solves the traditional The problem of excessive pressure fluctuation of the air source caused by the replacement of the cylinder. Therefore, the creation of the pressure control module can provide stable gas source requirements for the back-end machine, reduce the defect rate of the product, and achieve the goal of quality improvement, productivity improvement and quality stability.
以上所述之實施例僅係為說明本創作之技術思想及特點，其目的在使熟習此項技藝之人士能夠瞭解本創作之內容並據以實施，當不能以之限定本創作之專利範圍，即大凡依本創作所揭示之精神所作之均等變化或修飾，仍應涵蓋在本創作之專利範圍內。The embodiments described above are only for explaining the technical idea and characteristics of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement them according to the scope of the patent. That is, the equivalent changes or modifications made by the people in accordance with the spirit revealed by this creation should still be covered by the scope of the patent of this creation.
10‧‧‧氣瓶櫃
12‧‧‧管線
14‧‧‧多閥箱
16‧‧‧使用端機台
20‧‧‧壓力控制模組
22、22’‧‧‧氣瓶櫃
24‧‧‧後端機台
26、26’‧‧‧多閥箱
28‧‧‧使用端機台
30、30’‧‧‧質流控制器
32‧‧‧集氣桶
34‧‧‧氣體管路
36‧‧‧壓力偵測元件
38‧‧‧控制模組
40‧‧‧特氣界面閥箱10‧‧‧ gas cabinet
12‧‧‧ pipeline
14‧‧‧Multiple valve box
16‧‧‧Using the end machine
20‧‧‧ Pressure Control Module
22, 22'‧‧‧ gas cabinet
24‧‧‧ back end machine
26, 26'‧‧‧Multiple valve box
28‧‧‧Using the end machine
30, 30'‧‧‧Flow Controller
32‧‧‧ gas collection barrel
34‧‧‧ gas pipeline
36‧‧‧ Pressure detecting components
38‧‧‧Control module
40‧‧‧Special air interface valve box
圖1所示為傳統一種氣體輸送設備示意圖。 圖2所示為本創作一實施例壓力控制模組之示意圖。 圖3所示為本創作又一實施例壓力控制模組之示意圖。Figure 1 shows a schematic view of a conventional gas delivery device. FIG. 2 is a schematic diagram of a pressure control module according to an embodiment of the present invention. FIG. 3 is a schematic diagram of a pressure control module according to still another embodiment of the present invention.
20‧‧‧壓力控制模組 20‧‧‧ Pressure Control Module
22‧‧‧氣瓶櫃 22‧‧‧ gas cabinet
24‧‧‧後端機台 24‧‧‧ back end machine
26‧‧‧多閥箱 26‧‧‧Multiple valve box
28‧‧‧使用端機台 28‧‧‧Using the end machine
30、30’‧‧‧質流控制器 30, 30’‧‧‧Quality Flow Controller
32‧‧‧集氣桶 32‧‧‧ gas collection barrel
34‧‧‧氣體管路 34‧‧‧ gas pipeline
36‧‧‧壓力偵測元件 36‧‧‧ Pressure detecting components
38‧‧‧控制模組 38‧‧‧Control module
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| TW106205590U TWM549851U (en) | 2017-04-21 | 2017-04-21 | Pressure control module |
| CN201720538766.4U CN206738942U (en) | 2017-04-21 | 2017-05-16 | Pressure control module |
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| TW106205590U TWM549851U (en) | 2017-04-21 | 2017-04-21 | Pressure control module |
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| TWM549851U true TWM549851U (en) | 2017-10-01 |
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| CN (1) | CN206738942U (en) |
| TW (1) | TWM549851U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI809498B (en) * | 2020-09-18 | 2023-07-21 | 美商慧盛材料美國責任有限公司 | Material supply system and method of substantially reducing pressure variation of gas dispensed from a gas supply and dispensing system |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110657346A (en) * | 2018-06-29 | 2020-01-07 | 涂宏彬 | Gas delivery system and method |
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2017
- 2017-04-21 TW TW106205590U patent/TWM549851U/en unknown
- 2017-05-16 CN CN201720538766.4U patent/CN206738942U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI809498B (en) * | 2020-09-18 | 2023-07-21 | 美商慧盛材料美國責任有限公司 | Material supply system and method of substantially reducing pressure variation of gas dispensed from a gas supply and dispensing system |
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| CN206738942U (en) | 2017-12-12 |
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