TWM541472U - An apparatus for continuously growing large area of graphene transparent conductive film - Google Patents

Description

Device for continuously growing large-area graphene transparent conductive film

The present invention relates to a device for growing a graphene transparent conductive film, and more particularly to a device for continuously growing a large-area graphene transparent conductive film.

The research boom of graphene is that from 2004, Geim et al. used graphite as a multi-layer two-dimensional stacked structure to separate single-layer graphene independently, and measured the physical properties of graphene, and found the conductivity of single-layer graphene in electron conductivity. (200,000 cm ² V ^-1 s ^-1 ), mechanical strength (125 GPa), tensile modulus (1.1 Gpa), specific surface area (2,630 m2g ^-1 ), heat transfer coefficient (5,000 W m ^-1 K ^-1 ), etc. With excellent properties, graphene has become the focus of popular research in recent years.

Conventional techniques currently used to manufacture graphene include mechanical exfoliation, epitaxial growth, chemical vapor deposition (CVD), and chemical exfoliation. Reduction of graphene oxide (RGO), electrochemical exfoliated graphene (EC graphene) and the like. However, in the method of mass production feasibility, the mechanical peeling method cannot precisely control the size and position, and thus the quality of graphene cannot be accurately controlled. However, although the method for reducing graphene oxide can be mass-produced, the preparation process must undergo acid oxidation, resulting in structural damage of graphene and loss of its structure. Excellent physical properties. Among them, the chemical vapor deposition method can grow large-area graphene on the surface of a substrate such as copper metal or nickel, and has the advantages of high crystallinity and transferability of a variety of substrates, so that the value and possibility of the application end are high.

Among the optoelectronic materials, the transparent conductive film is an indispensable material in the photovoltaic element, and the transparent conductive film used in the current photovoltaic products is mostly an indium tin oxide (ITO) film. Considering the shortage of indium ore and soft electronic applications in the future, there are many emerging conductive materials that are rapidly emerging, such as carbon nanotubes, graphene and metal nanowires. Among them, the structure and unique properties of graphene itself are very popular research materials in recent years, and this material has high selectivity for substrate selection, which not only can further enhance the potential of emerging transparent conductive films, but also can be applied to the field of transparent conductive films. More extensive. However, chemical vapor deposition can prepare large-area, high-quality graphene, but it needs to be applied to the high-temperature heat treatment step to about 1000 °C, which hinders the development of mass production process equipment, and if it can be developed with continuous large Area graphene production process equipment will help to significantly reduce the manufacturing cost of graphene transparent conductive film and enhance the competitive advantage of products related to the demand for graphene transparent conductive film.

Therefore, the industry needs to develop a device for continuously growing a large-area graphene transparent conductive film, which can effectively produce a large-area graphene transparent conductive film in a continuous manner, and can reduce the preparation cost of the graphene transparent conductive film. With efficiency and product quality, a large-area graphene transparent conductive film that meets the needs of the industry is prepared.

In view of the above disadvantages of the prior art, the main purpose of the present invention is to provide a continuous growth apparatus for a large area graphene transparent conductive film, integrating a heating unit, a feeding unit, a receiving unit, an atmosphere unit and an electric unit. The slurry unit and the like prepare a large-area graphene transparent conductive film which can be utilized by the industry in an energy-saving and continuous manner.

In order to achieve the above object, according to one aspect of the present invention, a device for continuously growing a large-area graphene transparent conductive film is provided, comprising: a heating unit for heating a substrate; and a feeding unit for using the same Transmitting the wound type substrate into a flat type substrate, wherein the substrate is transferred from the feeding unit to the heating unit; and a receiving unit for transferring the flat type substrate into a roll a wound substrate; an atmosphere unit for controlling the ratio of the flow rate of the incoming gas; a plasma unit for the plasma gas, wherein the carbon source gas passes from the atmosphere unit to the plasma unit Heating unit.

In the above, the heating unit comprises a heating chamber, a heating control system, a graphite temperature equalizing sheet, a graphite blanket holding device, a heating chamber vacuum pump, and a cooling wheel system; the heating unit can be a vacuum High temperature heat treatment furnace (but not limited to this); the heating unit is designed to cover the water layer and the cooling wheel system outside the heating chamber to protect the device from high temperature damage (but not limited to) .

In the above, the feeding unit comprises a feeding cavity, a roll-to-roll feed wheel, a roll-to-roll feed tension control wheel, and a roll-to-roll feed power. Transmission system, a feed guidance detection system, a roll-to-roll feed edge finding device, a feed cavity vacuum pump, a roll-to-roll feed vacuum shut-off valve; a winding type selected for the feed The substrate may be a wound type substrate of various types of metals or alloys, and a selected metal or alloy may be deposited on a wound type substrate of different metal foil materials.

In the above, the receiving unit comprises a receiving cavity, a roll-to-roll receiving wheel, a roll-to-roll receiving tension control wheel, a roll-to-roll receiving power transmission system, and a receiving guide detection. The system, a roll-to-roll receiving edge finding device, a receiving cavity vacuum pump, and a roll-to-roll receiving vacuum interrupting valve.

In the above, the atmosphere unit comprises a process gas system; the atmosphere unit can use a carbonaceous compound gas such as methane (CH ₄ ) or acetylene (C ₂ H ₂ ) as a carbon source gas (but not limited thereto). ), hydrogen (H ₂ ) or a hydrogen-containing compound gas as an activating gas (but not limited thereto), argon (Ar) or an inert gas as a shielding gas (but not limited thereto).

In the above, the plasma unit comprises a plasma power supply.

This creation is mainly based on continuous roll-to-roll high-temperature heat treatment equipment, combined with the outer layer cooling system and cooling wheel device design of the heating unit to create a local high temperature in the inner layer of the heating chamber, thereby avoiding the whole device in a high temperature load state, achieving simplicity and stability. Continuous growth of large area graphene transparent conductive film equipment.

Since the prior art is mostly a batch production device, the productivity of the graphene transparent conductive film cannot be improved, so the graphene transparent conductive film is too expensive. This creation mainly solves the equipment load brought by high-temperature process, and can continuously stabilize the roll-to-roll production of graphene transparent conductive film to achieve the goal of increasing production and reducing cost.

The above summary and the following detailed description and drawings are intended to further illustrate the manner, means and effects of the present invention in achieving its intended purpose. Other purposes and advantages of this creation will be set forth in the following description and illustration.

111‧‧‧heating chamber

112‧‧‧heating the substrate

113‧‧‧ Graphite Membrane

114‧‧‧ graphite blanket insulation device

115‧‧‧heating chamber vacuum pump

116‧‧‧Cooling wheel

121‧‧‧feeding cavity

122‧‧‧Volume-to-roll feed wheel

123‧‧‧Roll-to-roll feed power transmission system

124‧‧‧Volume-to-roll feed tension control wheel

125‧‧‧Feed Guide Detection System

126‧‧‧Volume-to-roll feeding edge finding device

127‧‧‧ Feed chamber vacuum pump

128‧‧‧Volume-to-roll feed vacuum shut-off valve

131‧‧‧ receiving cavity

132‧‧‧Volume-to-reel receiving wheel

133‧‧‧Volume-to-volume receiving power transmission system

134‧‧‧Roll-to-roll receiving tension control wheel

135‧‧‧Receipt guidance detection system

136‧‧‧Volume-to-volume receipt and edge finding device

137‧‧‧ Receiving chamber vacuum pump

138‧‧‧Volume-to-roll receipt vacuum interrupter

141‧‧‧Process Gas System

151‧‧‧Plastic power supply

111‧‧‧heating chamber

The first figure is a schematic diagram of a device for creating a continuous large-area graphene transparent conductive film.

The embodiments of the present invention are described below by way of specific specific examples, and those skilled in the art can readily appreciate the other advantages and effects of the present invention from the disclosure herein.

The technology of the present invention mainly provides a device for continuously growing large-area graphene transparent conductive film. The present invention combines high-temperature heat treatment equipment with an outer layer cooling system and a cooling wheel device by means of modular combination, and the technical means is to utilize The cooling effect of the outer cooling system and the cooling wheel device makes the inner layer of the heating chamber produce local high temperature, which avoids the high temperature load of the whole device. At the same time, the continuous roll-to-roll design of the creation can be applied to the continuous growth of large-area graphite. It is a transparent conductive film with energy saving and mass production benefits.

Please refer to the first figure for a schematic diagram of a continuous large-area graphene transparent conductive film device. As shown in the figure, the present invention provides a continuous large-area graphene transparent conductive film device, comprising: a heating unit, The heating chamber 111, the heating substrate 112, the graphite temperature equalizing sheet 113, the graphite blanket heat insulating device 114, the heating chamber vacuum pump 115, and the cooling wheel 116 may be combined to heat the substrate, wherein In an embodiment, the outer layer of the heating chamber 111 is covered with a water layer to prevent the heating chamber from being overheated, resulting in equipment damage. The heating chamber vacuum pump 115 is used for heating the chamber vacuum suction to achieve the purpose of purifying the atmosphere inside the heating chamber. The cooling wheel 116 is used to prevent the heating chamber from being conducted at a high temperature through the substrate to other units, resulting in failure of other unit functions; a feeding unit, which may include a feeding chamber 121, a roll-to-roll feeding wheel 122, and a roll Feed power transfer system 123 for roll, roll-to-roll feed tension control wheel 124, feed guide detection system 125, roll-to-roll feed edge finding device 126, feed cavity vacuum pump 127, roll-to-roll a feed vacuum interrupting valve 128 for transporting the wound type substrate into a flat type substrate, wherein the substrate is transferred from the feeding unit to the heating unit; wherein the feed guiding detection system 125 is used to cooperate with the roll-to-roll feed power transmission system 123 and the roll-to-roll feed tension control wheel 124 for the purpose of substrate feed tension control and substrate position correction. The roll-to-roll feed edge finding device 126 is used to automatically adjust the feed unilateral alignment. The roll-to-roll feed vacuum interrupting valve 128 is used to replace the substrate reel when the process is normally opened, and can block the atmosphere in the heating chamber from contacting the outside air atmosphere, so the feed chamber can be replaced without waiting for the process heater to cool. The body reel is on the production line. The wound type substrate selected for the feed may be a wound type substrate of various types of metals or alloys, or a selected metal or alloy may be deposited on the wound type substrate of different metal foil materials; The material unit may include a receiving cavity 131, a roll-to-roll receiving wheel 132, a roll-to-roll receiving power transmission system 133, a roll-to-roll receiving tension control wheel 134, a receiving guide detection system 135, a roll-to-roll receiving edge finding device 136, a receiving cavity vacuum pump 137, and a roll-to-roll receiving vacuum interrupting valve 138 for transferring a flat type substrate to a wound type substrate, wherein The substrate is transferred from the heating unit to the receiving unit; wherein the receiving guidance detecting system 135 is configured to cooperate with the roll-to-roll receiving power transmission system 133 and the roll-to-roll receiving tension control wheel 134 Material receiving tension control and substrate position correction. The receipt guiding detection system and the roll-to-roll receiving edge finding device are used to automatically adjust the receipt unilateral alignment. The roll-to-roll receiving vacuum interrupting valve is used to replace the substrate reel when the process is normally opened, and can block the atmosphere in the heating chamber from contacting the outside air atmosphere, so the receiving cavity can be replaced without waiting for the process heater to cool. The reel is re-applied to the production line; an atmosphere unit, which may include a process gas system 141 for controlling the gas flow rate of the gas mass flow into the heating chamber. In the present embodiment, a gas containing a carbonaceous compound such as methane (CH ₄ ) or acetylene (C ₂ H ₂ ) is used as a carbon source gas, hydrogen (H ₂ ) or a hydrogen-containing compound gas as an activation gas, argon. Gas (Ar) or inert gas as a shielding gas; a plasma unit comprising a plasma power supply 151 for plasmaizing the gas, wherein the gas passes through the atmosphere unit A plasma unit to the heating unit.

The device for continuously growing large-area graphene transparent conductive film of the invention combines continuous roll-to-roll high-temperature heat treatment equipment and outer layer cooling The system and the cooling wheel device contribute to the establishment of the graphene transparent conductive film mass production process equipment, in addition to reducing the process cost of the graphene transparent conductive film, and having the advantages of easy process parameter control and gas flow design, thereby improving the transparent conductivity of the graphene. Membrane quality characteristics. The present invention provides a continuous growth apparatus for large-area graphene transparent conductive film, which has the advantages of low cost and high productivity, and has considerable economic improvement in industrial utilization, so that it can be more widely applied in the future.

The above-described embodiments are merely illustrative of the features and functions of the present invention, and are not intended to limit the scope of the technical content of the present invention. Any person skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this creation should be as listed in the scope of the patent application described later.

111‧‧‧heating chamber

112‧‧‧heating the substrate

113‧‧‧ Graphite Membrane

114‧‧‧ graphite blanket insulation device

115‧‧‧heating chamber vacuum pump

116‧‧‧Cooling wheel

121‧‧‧feeding cavity

122‧‧‧Volume-to-roll feed wheel

123‧‧‧Roll-to-roll feed power transmission system

124‧‧‧Volume-to-roll feed tension control wheel

125‧‧‧Feed Guide Detection System

126‧‧‧Volume-to-roll feeding edge finding device

127‧‧‧ Feed chamber vacuum pump

128‧‧‧Volume-to-roll feed vacuum shut-off valve

131‧‧‧ receiving cavity

132‧‧‧Volume-to-reel receiving wheel

133‧‧‧Volume-to-volume receiving power transmission system

134‧‧‧Roll-to-roll receiving tension control wheel

135‧‧‧Receipt guidance detection system

136‧‧‧Volume-to-volume receipt and edge finding device

137‧‧‧ Receiving chamber vacuum pump

138‧‧‧Volume-to-roll receipt vacuum interrupter

141‧‧‧Process Gas System

151‧‧‧Plastic power supply

Claims (10)

A continuous apparatus for growing a large-area graphene transparent conductive film, comprising: a heating unit for heating a substrate; and a feeding unit for conveying the wound type substrate into a flat substrate Wherein the substrate is transferred from the feeding unit to the heating unit; a receiving unit for conveying the flat type substrate to a wound type substrate; an atmosphere unit for controlling a ratio of the flow rate of the gas introduced; and a plasma unit for the plasma gas, wherein the carbon source gas passes from the atmosphere unit to the heating unit. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the heating unit comprises a heating chamber, a heating control system, a graphite uniform temperature sheet, and a graphite blanket insulation. The device, a heating chamber vacuum pump, a cooling wheel system. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the heating unit is a vacuum high-temperature heat treatment furnace. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the heating unit is designed to cover the water layer and the cooling wheel system outside the heating chamber. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the feeding unit comprises a feed cavity, a roll-to-roll feed wheel, and a roll-to-roll feed. Material tension control wheel, a roll-to-roll feed power transmission system, a feed guide detection system, and a roll-to-roll feed Edge-trimming device, a feed chamber vacuum pump, and a roll-to-roll feed vacuum shut-off valve. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the winding type substrate selected from the feed is a pure metal, an alloy or a metal deposited on another metal foil. material. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the receiving unit comprises a receiving cavity, a roll-to-roll receiving wheel, and a roll-to-roll Material tension control wheel, a roll-to-roll receiving power transmission system, a receiving guide detection system, a roll-to-roll receiving edge finding device, a receiving cavity vacuum pump, a roll-to-roll receiving vacuum Interrupt valve. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the atmosphere unit comprises a process gas system. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the carbon source gas system into which the atmosphere unit is introduced is methane (CH ₄ ) or acetylene (C ₂ H ₂ ). The activation gas system introduced into the atmosphere unit is hydrogen (H ₂ ) or a hydrogen-containing compound gas, and the shielding gas system into which the atmosphere unit is passed is argon (Ar) or an inert gas. The apparatus for continuously growing a large-area graphene transparent conductive film according to claim 1, wherein the plasma unit comprises a plasma power supply.