TWM536088U - Filtering device - Google Patents

Description

filter

The present invention relates to a filtering device, and more particularly to a filtering device for changing the position of the liquid inlet, thereby preventing the fluid to be filtered from directly impacting the filter element when entering through the liquid inlet to generate various problems.

In recent years, in the electronics industry, fluid materials such as photo resists and UV lacquers are often used. For example, the photoresist can be coated with photoresist on a wafer or a panel to form a photoresist. Membrane, and protective glue can be used to coat products such as optical discs and electronic parts.

At present, in fluids such as photoresists and protective gels, there may be bubbles for various reasons, such as mixing nitrogen, etc. If the fluid mixed with bubbles is coated on a wafer, a panel, etc., it is possible There is a problem of uneven coating, which leads to poor product yield. Therefore, before the fluids are used, the filtering device is used to filter bubbles and impurities.

Please refer to FIG. 1 , which is a schematic diagram of a conventional filtration device. In the figure, the conventional filtering device comprises a housing 100 and a filter cartridge 500. A liquid outlet 200 is arranged on the top of the housing 100, and a liquid inlet 400 is provided at the bottom of the housing 100. The filter element 500 is disposed inside the 100; after the fluid enters through the liquid inlet 400, the filter element 500 can be used to block the bubble A and the impurity in the fluid, and the liquid outlet 200 can be used to output the fluid filtered through the filter element 500. And the bubble A is discharged. However, the conventional filtering device sets the liquid inlet 400 directly below the position of the filter element 500, which will cause the fluid to directly impact the filter element 500 when entering the liquid inlet 400, and allow some of the air bubbles A to accumulate in the filter element. At the bottom of the 500, when the accumulation amount of the bubble A is gradually increased, the bubbles A may be infiltrated into the filter element 500 and discharged from the liquid outlet 200, so that the fluid with the partial bubble A will Affects subsequent processes, which in turn leads to poor product yields.

In addition, due to the configuration of the liquid inlet 400, the treatment liquid directly collides with the bottom of the filter element 500 when entering, which will force the flow direction of the fluid to change (turning left and right) to form a phenomenon of turbulence at the bottom of the overall filter element 500, and then Producing a shear force. If the flow system is a slurry, the particles in the liquid will polymerize with each other to form a variety of gel-like substances, which are likely to cause the filter 500 to be non- The normal blockage seriously affects the use aging of the filter element 500, and it is also easy to have a high penetration probability to affect the product yield through the output of the filter element 500 and the liquid outlet 200, for example, causing wafer scratching and the like.

In view of the above-mentioned problems of the prior art, the purpose of the present invention is to provide a filtering device for changing the position of the liquid inlet, thereby preventing the fluid to be filtered from directly impacting the filter element when entering through the liquid inlet to generate various problems. .

According to the purpose of the present invention, a filtering device is provided, which comprises: a casing, the inside of which forms an accommodating space; an outlet pipe is disposed at a center of the top of the casing; and a liquid inlet pipe is provided At a position below the casing; and a filter element disposed in the accommodating space, one end of the filter element is in contact with the top of the casing, and the center position of the filter element is opposite to the liquid outlet of one of the liquid discharge pipes, and the filter element The other end has a spacing from the bottom of the housing. Wherein, the filter element and the side wall of the casing are spaced apart to form a longitudinal flow passage, and the filter core and the bottom of the casing are spaced apart to form a transverse flow passage, and one of the liquid inlets of the inlet pipe is opposite to the longitudinal flow passage and the lateral flow passage. The area.

Through the above, the present invention mainly changes the position of the liquid inlet, and the original prior art is changed to the side position directly under the filter element, so that the liquid inlet is in the interval formed by the gap between the filter element and the casing. Rather than directly referring to the filter element as in the prior art, when the fluid enters through the liquid inlet, the fluid can be prevented from directly impacting the filter element, which not only prevents the bubbles in the fluid from penetrating into the filter element due to the accumulation, so that the subsequent process is performed. The yield of the product is affected, and the filter element can be prevented from being abnormally blocked due to the turbulence phenomenon, thereby improving the use time of the filter element.

According to the above technical feature, the liquid inlet pipe is preferably disposed at a side position of the bottom of the casing such that the liquid inlet port can face the longitudinal flow path.

According to the above technical feature, the filter device of the present invention further comprises a stopper disposed at the bottom of the housing and spaced apart from the liquid inlet tube by a distance.

According to the above technical features, the filter device of the present invention is suitable for being mounted on a fixed seat, wherein one of the first fixed ends of the fixed seat is connected to the liquid outlet pipe, and one of the second fixed ends of the fixed seat is clamped and fixed in Between the liquid pipe and the stopper.

According to the above technical feature, the liquid inlet tube is preferably disposed at a lowermost position of the side wall of the casing such that the liquid inlet port can face the lateral flow path.

According to the above technical feature, the top end of the liquid discharge pipe is provided with a gasket, and the gasket can prevent the leakage of the fluid from the output of the liquid discharge pipe.

According to the above technical feature, the other end of the inlet pipe connecting casing is provided with a thread to provide a liquid connection pipe screwing and fixing.

According to the above technical features, the filter element can be, for example, a deep layer filter element.

According to the above technical features, the filter element can be, for example, a folded filter element.

According to the above technical features, the filter element can be, for example, a two-layer structure, and the inner layer is preferably a deep layer filter element, and the outer layer is preferably a folded filter element; with the double-layer structure design, the filter element can be greatly increased. Filter the area, which in turn can effectively increase its service life.

In order to understand the technical characteristics, content and advantages of the creation and the effects that can be achieved by the examiner, the author will use the drawings in detail and explain the following in the form of the examples, and the drawings used therein The subject matter is only for the purpose of illustration and supplementary instructions. It is not necessarily the true proportion and precise configuration after the implementation of the original creation. Therefore, the proportions and configuration relationships of the attached drawings should not be interpreted or limited in the actual implementation scope. First described.

Please refer to FIG. 2 and FIG. 3 , which are respectively a first schematic diagram and a second schematic diagram of a first embodiment of the filter device of the present invention. In the figure, the filter device of the present invention mainly comprises a casing 10, an outlet pipe 20 and an inlet pipe 40. The liquid discharge pipe 20 is disposed at a center position of the top of the casing 10; the liquid inlet pipe 40 is disposed at a position below the casing 10, and in the first embodiment, the liquid inlet pipe 40 is disposed at the bottom of the casing 10. The side position, and preferably the other end of the inlet tube connection housing is engraved with a thread 42. Further, the filter device further includes a washer 60 and a stopper 70, wherein the washer 60 is disposed at the opposite end of the discharge tube 20 that engages the housing 10, and the stopper 70 is disposed at the bottom of the housing 10. And spaced apart from the inlet tube 40 by a distance.

Please refer to FIG. 4, which is a third schematic diagram of the first embodiment of the filter device of the present invention. As shown in the figure, an accommodating space 11 is formed in the interior of the casing 10. The accommodating space 11 is provided with a filter element 50, wherein one end of the filter element 50 is in contact with the top of the casing 10, and the filter element 50 The center position is opposite to the liquid outlet 21 of the discharge pipe 20, and the filter element 50 and the side wall of the casing 10 are spaced apart from each other to form a longitudinal flow path 111, and the filter element 50 and the bottom of the casing 10 are spaced apart from each other to form a The transverse flow path 112, the longitudinal flow path 111 and the lateral flow path 112 partially overlap to form an overlapping area B. In a preferred embodiment, the housing 10 may be cylindrical, but not Limited. The main design of the present invention is that the liquid inlet pipe 40 is disposed below the casing 10 near the side edge, so that the liquid inlet port 41 of the liquid inlet pipe 40 can face the overlap region B, more precisely, due to The liquid inlet tube 40 of the first embodiment is disposed at a side position of the bottom of the casing 10, so that the liquid inlet 41 is directed to the longitudinal flow path 111.

Of course, the positional arrangement of the liquid inlet tube 40 is not limited to the one described in the first embodiment. Please refer to FIG. 7 , which is a schematic view of the second embodiment of the filter device of the present invention. In the second embodiment, the present invention reconfigures the inlet tube 40 at the lowest position of the side wall of the housing 10 such that the inlet port 41 can be aligned with the lateral flow path 112. With the arrangement of the first embodiment and the second embodiment, the liquid inlet pipe 40 can be avoided directly under the filter element 50, so that the liquid inlet port 41 can be prevented from directly facing any one of the filter elements 50.

Please refer to FIG. 5 again, which is a fourth schematic diagram of the first embodiment of the filter device of the present invention. As shown, the inlet pipe 40 is provided with one end of the thread 42 to provide a liquid connection pipe 80 for screwing, and since the inlet port 41 has been prevented from being directed to the filter element 50, when the supply port 80 provides fluid, the fluid is supplied. When entering the accommodating space 11 of the casing 10 via the inlet port 41, the fluid will not directly impact the filter element 50, but will flow to the longitudinal flow path 111 and the lateral flow path 112 before entering the filter element 50. In order to complete the filtration process, the fluid and bubbles that have been filtered can be output through the liquid outlet 21.

Please refer to FIG. 6 as a fifth schematic diagram of the first embodiment of the filter device of the present invention. As shown in the figure, in order to maintain the stability of the filter device of the present invention, the filter device can be mounted on a fixing base 90, wherein one of the first fixed ends 91 of the fixing base 90 is fixedly connected. The liquid tube 20, and one of the second fixed ends 92 of the fixing base 90 is clamped and fixed between the interval formed by the liquid inlet tube 40 and the stopper 70. Wherein, since the top end of the liquid discharge pipe 20 is provided with the gasket 60, when the top end of the liquid discharge pipe 20 is engaged with the fixed seat 90, the gasket 60 can be prevented from leaking out when the fluid is discharged.

In the above embodiments, the filter element 50 used in the present invention is disposable, and the update can be discarded after use, thereby maintaining the clean and clean use site. Please refer to FIG. 8 and FIG. 9 together, which are the first schematic diagram and the second schematic diagram of the structural aspect of the filter element used in the filter device of the present invention. As shown in Fig. 8, the filter element 50 of the filter device of the present invention may be a deep filter element; alternatively, the filter element 50 may be a folded filter element as shown in Fig. 9.

Please refer to Fig. 10 again, which is the third schematic diagram of the structural aspect of the filter element used in the filter device of the present invention. As shown in the figure, the filter element 50 of the present invention can also be designed in a two-layer structure, wherein the inner layer can be a deep filter element and the outer layer can be a folded filter element; through the structural design, the outer folded filter element can greatly increase the overall The filter area of the filter element 50, when the fluid enters, first contacts the large-area folded filter element to first capture large particles of impurities through the folded filter element, and then penetrates the inner layer of the deep layer filter to condense the fluid. Glue-type impurities are effectively trapped, thereby not only achieving good filtration results, but also effectively increasing the aging of the filter element 50, so that the user does not have to frequently stop for replacement. Wherein, the folded filter element of the outer layer has a function of greatly reducing the pressure difference (ie, the impedance to the fluid) of the whole filter element 50, and the overall pressure difference is low, and the service life of the filter element 50 can be prolonged.

In summary, mainly, the creation changes the position of the liquid inlet of the filtering device, so that the liquid inlet is not positive for the filter element, so that the fluid does not directly impact when entering the housing from the liquid inlet. The filter element can obtain the following effects: 1. The fluid is changed from the side feeding, so that the bubbles in the fluid can rise directly to the top of the housing space of the housing and periodically discharge through the liquid outlet, so that some bubbles in the fluid are allowed. It no longer accumulates on the bottom of the filter element due to the impact, thereby avoiding problems such as poor penetration of the fluid, which may affect the yield of the product caused by subsequent processes. 2. When the fluid enters, it will not form a spoiler at the bottom of the filter element, thereby avoiding the generation of shear stress. Even if the flow system is a slurry, there is no need to worry that the particles in the liquid will polymerize with each other to form a gel-type substance. In addition, not only can the probability of abnormal plugging of the filter element be effectively reduced, but also the use time of the filter element can be improved, and the problem that the particles penetrate the filter element and damage the semiconductor components of the subsequent process can be avoided.

Looking at the above, it can be seen that under the previous technology, this creation has indeed achieved the desired effect, and it is not easy for people who are familiar with the art to think about it. Moreover, this creation has not been disclosed before the application, and it has Progressive and practical, it has been in line with the patent application requirements, and the patent application is filed according to law. You are requested to approve the patent application for this piece to encourage creation.

The embodiments described above are only for explaining the technical idea and characteristics of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement them according to the scope of the patent. That is, the equivalent changes or modifications made by the people in accordance with the spirit revealed by this creation should still be covered by the scope of the patent of this creation.

100, 10‧‧‧ shell
200, 21‧‧‧ liquid outlet
400, 41‧‧‧ inlet port
500, 50‧‧‧ filter
11‧‧‧ accommodating space
111‧‧‧ longitudinal flow path
112‧‧‧lateral flow path
20‧‧‧Draining tube
40‧‧‧Inlet tube
42‧‧‧Thread
60‧‧‧Washers
70‧‧‧stops
80‧‧‧Supply takeover
90‧‧‧ fixed seat
91‧‧‧First fixed end
92‧‧‧Second fixed end
A‧‧‧ bubble
B‧‧‧Overlap area

Figure 1 is a schematic view of a conventional filtration device. Fig. 2 is a first schematic view of a first embodiment of the filter device of the present invention. Figure 3 is a second schematic view of a first embodiment of the filter device of the present invention. Figure 4 is a third schematic view of the first embodiment of the filter device of the present invention. Figure 5 is a fourth schematic view of the first embodiment of the filter device of the present invention. Figure 6 is a fifth schematic view of the first embodiment of the filter device of the present invention. Figure 7 is a schematic view of a second embodiment of the filter device of the present invention. Fig. 8 is a first schematic view showing the structural form of the filter element used in the filter device of the present invention. Figure 9 is a second schematic view of the structural aspect of the filter element used in the filter device of the present invention. Fig. 10 is a third schematic view showing the structural form of the filter element used in the filter device of the present invention.

10‧‧‧shell

11‧‧‧ accommodating space

111‧‧‧ longitudinal flow path

112‧‧‧lateral flow path

20‧‧‧Draining tube

21‧‧‧liquid outlet

40‧‧‧Inlet tube

41‧‧‧Inlet

50‧‧‧ filter

60‧‧‧Washers

70‧‧‧stops

B‧‧‧Overlap area

Claims (10)

A filter device comprising: a casing (10) having an accommodating space (11) formed therein; a liquid discharge pipe (20) disposed at a center of the top of the casing (10); The liquid inlet pipe (40) is disposed at a position below the casing (10); and a filter element (50) is disposed in the accommodating space (11), and one end of the filter element (50) is in contact with the The top of the casing (10), and the central position of the filter element (50) is directly opposite to the liquid outlet (21) of the liquid outlet pipe (20), and the other end of the filter element (50) is attached to the casing The bottom of (10) has a spacing; wherein the filter element (50) is spaced apart from the side wall of the casing (10) to form a longitudinal flow path (111), the filter element (50) and the bottom of the casing (10) A lateral flow path (112) is formed at intervals, and one of the liquid inlets (41) is a region where the longitudinal flow path (111) overlaps the lateral flow path (112). The filtering device of claim 1, wherein the liquid inlet tube (40) is disposed at a side position of the bottom of the housing (10) such that the liquid inlet (41) is directly facing the longitudinal flow path ( 111). The filter device of claim 2, further comprising a stop member (70) disposed at a bottom of the housing (10) and spaced apart from the liquid inlet tube (40). The filter device of claim 3 is suitable for being mounted on a fixing base (90), wherein a first fixed end (91) of the fixing base (90) is connected to the liquid discharge pipe (20). A second fixed end (92) of the fixing seat (90) is clamped and fixed between the liquid inlet pipe (40) and the stopper (70). The filtering device of claim 1, wherein the liquid inlet tube (40) is disposed at a lowermost position of a side wall of the housing (10) such that the liquid inlet (41) is directly facing the lateral flow path ( 112). The filtering device of claim 1, wherein a top end of the liquid outlet tube (20) is provided with a gasket (60). The filter device of claim 1, wherein the other end of the inlet pipe (40) connected to the casing (10) is provided with a thread (42) to provide a liquid connection pipe (80). The filter device of claim 1, wherein the filter element (50) is a deep filter element. The filter device of claim 1, wherein the filter element (50) is a folded filter element. The filter device of claim 1, wherein the filter element (50) is a two-layer structure, the inner layer is a deep layer filter element, and the outer layer is a folded filter element.