TWM529273U - Chip package - Google Patents
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- TWM529273U TWM529273U TW105209578U TW105209578U TWM529273U TW M529273 U TWM529273 U TW M529273U TW 105209578 U TW105209578 U TW 105209578U TW 105209578 U TW105209578 U TW 105209578U TW M529273 U TWM529273 U TW M529273U
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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Abstract
Description
本創作係有關於晶片封裝體,特別是具有熱擴散層的晶片封裝體。The present invention relates to a chip package, particularly a chip package having a thermal diffusion layer.
現有的晶片封裝體,例如CPU(中央處理器;Central Processing Unit)或是GPU(圖形處理器;Graphics Processing Unit),其工作時皆會產生大量熱能,因此需要在晶片封裝體上設置散熱裝以冷卻晶片封裝體。一般的散熱系統是藉由,熱傳導之方式將晶片封裝體產生的熱能吸收至散熱系統內,再藉由熱對流的方式將熱能發散至空氣中。為了使晶片封裝體與散熱系統之間的熱傳導效率最佳化,一般散熱系統會配置有一平面,並且能夠與晶片封裝體外表的另一平面貼合,進而通過此接觸面進行熱傳導。The existing chip package, such as a CPU (Central Processing Unit) or a GPU (Graphics Processing Unit), generates a large amount of heat during operation, so it is necessary to provide a heat sink on the chip package. Cool the chip package. The general heat dissipation system absorbs the heat energy generated by the chip package into the heat dissipation system by means of heat conduction, and then radiates the heat energy into the air by means of heat convection. In order to optimize the heat transfer efficiency between the chip package and the heat dissipation system, the heat dissipation system is generally provided with a flat surface and can be bonded to another plane of the outer surface of the wafer package, and heat conduction is performed through the contact surface.
一般而言,晶片並非均勻發熱體,而且通常會存在點發熱的情況,散熱系統與晶片封裝體的接觸面常是偏離發熱點,因此無論如何改良散熱系統,皆無法改善晶片封裝體與散熱系統之間的熱傳導效率。In general, the wafer is not a uniform heating element, and there is usually a point of heat generation. The contact surface between the heat dissipation system and the chip package is often offset from the heating point. Therefore, the chip package and the heat dissipation system cannot be improved anyway by improving the heat dissipation system. The heat transfer efficiency between.
有鑑於此,本創作人遂針對上述現有技術,特潛心研究並配合學理的運用,盡力解決上述之問題點,即成為本創作人改良之目標。In view of this, the creator has made great efforts to solve the above problems by focusing on the above-mentioned prior art, and has devoted himself to the application of the theory, that is, the goal of the creator's improvement.
本創作提供一種具有熱擴散層的晶片封裝體。The present invention provides a chip package having a thermal diffusion layer.
本創作提供一種晶片封裝體,其包含一基板、一晶片、一熱擴散層及一導線。晶片的其中一面貼附在基板的其中一面;熱擴散層覆蓋於晶片的另一面,而且熱擴散層的邊緣延伸至晶片的邊緣,熱擴散層貫穿設置有一缺口。導線通過缺口連接於基板與晶片之間。The present invention provides a chip package including a substrate, a wafer, a thermal diffusion layer, and a wire. One side of the wafer is attached to one side of the substrate; the thermal diffusion layer covers the other side of the wafer, and the edge of the thermal diffusion layer extends to the edge of the wafer, and the thermal diffusion layer is provided with a notch therethrough. The wire is connected between the substrate and the wafer through the gap.
較佳地,熱擴散層之內包含有導熱材料。導熱材料為片狀石墨烯。熱擴散層的其中一面上佈設有黏著劑並且貼附晶片。晶片封裝體更包含一封裝結構,封裝結構包覆晶片。熱擴散層熱連接封裝結構。晶片封裝體更包含覆蓋於熱擴散層的一保護層。缺口自熱擴散層延伸貫穿保護層。Preferably, a thermally conductive material is contained within the thermal diffusion layer. The heat conductive material is flake graphene. An adhesive is disposed on one side of the thermal diffusion layer and the wafer is attached. The chip package further includes a package structure that encapsulates the wafer. The thermal diffusion layer thermally connects the package structure. The chip package further includes a protective layer covering the thermal diffusion layer. The notch extends from the thermal diffusion layer through the protective layer.
本創作的晶片封裝體,其晶片上設設置有片狀石墨烯構成的熱擴散層,因此能夠避免熱能集中而降低晶片封裝體對外的熱傳導效率。其製造方法藉由在裁切第二晶圓形成晶片之前將熱擴散膜貼附至第二晶圓,因此不需要將各熱擴散層分別貼附至各晶片。In the chip package of the present invention, a thermal diffusion layer made of flake graphene is provided on the wafer, so that heat concentration can be avoided and the external heat transfer efficiency of the chip package can be reduced. The manufacturing method attaches the thermal diffusion film to the second wafer before the wafer is formed by cutting the second wafer, so that it is not necessary to attach the respective thermal diffusion layers to the respective wafers.
參閱圖1,本創作之第一實施例提供一種晶片封裝體,其包含一基板100、一晶片200、一熱擴散層300、至少一導線400以及一封裝結構500。Referring to FIG. 1 , a first embodiment of the present invention provides a chip package including a substrate 100 , a wafer 200 , a thermal diffusion layer 300 , at least one wire 400 , and a package structure 500 .
於本實施例中,基板100較佳地為一電路板。晶片200設置在晶片200的基板100的其中一面之上,而且基板100的此面較佳地與晶片200的其中一面相互貼合。In the embodiment, the substrate 100 is preferably a circuit board. The wafer 200 is disposed on one side of the substrate 100 of the wafer 200, and the face of the substrate 100 preferably conforms to one side of the wafer 200.
於本實例中,熱擴散層300較佳地呈薄膜狀,熱擴散層300之內具有導熱材料。導熱材料為片狀石墨烯,片狀石墨烯具有良好的平面熱傳導特性。熱擴散層300的其中一面上較佳地佈設有黏著劑310,並且熱擴散層300能夠藉由黏著劑310貼附於晶片200的另一面而使得熱擴散層300覆蓋於晶片200之上。熱擴散層300的邊緣延伸至晶片200的邊緣,而且熱擴散層300上貫穿開設有至少一缺口301。於本實施例中,熱擴散層300較佳開設有複數缺口301,各缺口301之結構相同。缺口301可以是孔狀,也可以是延伸至熱擴散層300邊緣的缺槽狀,本創作限定其型式。In the present example, the thermal diffusion layer 300 is preferably in the form of a film having a thermally conductive material within the thermal diffusion layer 300. The heat conductive material is flake graphene, and the flake graphene has good planar heat conduction characteristics. One side of the thermal diffusion layer 300 is preferably provided with an adhesive 310, and the thermal diffusion layer 300 can be attached to the other side of the wafer 200 by the adhesive 310 so that the thermal diffusion layer 300 covers the wafer 200. The edge of the thermal diffusion layer 300 extends to the edge of the wafer 200, and at least one notch 301 is formed through the thermal diffusion layer 300. In the embodiment, the thermal diffusion layer 300 is preferably provided with a plurality of notches 301, and the structures of the notches 301 are the same. The notch 301 may be in the shape of a hole or a notch extending to the edge of the thermal diffusion layer 300, and the present invention defines its pattern.
於本實施例中,熱擴散層300的另一面上較佳地貼附有一保護層320,而且缺口301自熱擴散層300延伸貫穿保護層320。In the present embodiment, a protective layer 320 is preferably attached to the other surface of the thermal diffusion layer 300, and the notch 301 extends from the thermal diffusion layer 300 through the protective layer 320.
導線400對應缺口301配置,於本實施例中,本創作的晶片封裝體較佳地包含有對應各缺口301的複數導線400。各導線400的其中一端連接於基板100,導線400的另一端則穿過對應的缺口301連接晶片200,因此藉由該些導線400能夠將晶片200電性連接基板100。The wire 400 is disposed corresponding to the notch 301. In the embodiment, the chip package of the present invention preferably includes a plurality of wires 400 corresponding to the notches 301. One end of each of the wires 400 is connected to the substrate 100, and the other end of the wire 400 is connected to the wafer 200 through the corresponding notch 301. Therefore, the wires 200 can be electrically connected to the substrate 100 by the wires 400.
封裝結構500包覆晶片200藉以保護晶片200,於本實施例中,封裝結構500是模塑成形於基板100上而包覆晶片200,並且同時包覆熱擴散層300而與熱擴散層300熱連接。保護層320能夠避免熱擴散層300中的片狀石墨烯在封裝結構500的模塑成形製程中受損。The package structure 500 covers the wafer 200 to protect the wafer 200. In the embodiment, the package structure 500 is molded on the substrate 100 to coat the wafer 200, and simultaneously coats the thermal diffusion layer 300 and is thermally heated with the thermal diffusion layer 300. connection. The protective layer 320 can prevent the flake graphene in the thermal diffusion layer 300 from being damaged in the molding process of the package structure 500.
參閱圖2,本創作之第二實施例提供一種晶片封裝體,其包含一基板100、一晶片200、一熱擴散層300、至少一導線400以及一封裝結構500。本實施例的晶片封裝體之構造大至如同前述第一實施例,因此相同之處於此不再贅述,本實施例與第一實施例不同之處詳述如後。Referring to FIG. 2 , a second embodiment of the present invention provides a chip package including a substrate 100 , a wafer 200 , a thermal diffusion layer 300 , at least one wire 400 , and a package structure 500 . The configuration of the chip package of the present embodiment is as large as the first embodiment described above, and therefore the same points are not described herein again. The differences between the present embodiment and the first embodiment are described in detail below.
於本實施例中,熱擴散層300上並未設有保護層320。封裝結構500是罩蓋於基板100上的罩殼,而且封裝結構500罩蓋晶片200。熱擴散層300熱連接封裝結構500,熱擴散層300與封裝結構500可以是直接貼附而熱連接或是藉由在熱擴散層300與封裝結構500之間填充導熱介質510(例如導熱膠或導熱墊)而熱連接。In the present embodiment, the protective layer 320 is not disposed on the thermal diffusion layer 300. The package structure 500 is a cover that covers the substrate 100, and the package structure 500 covers the wafer 200. The thermal diffusion layer 300 is thermally connected to the package structure 500. The thermal diffusion layer 300 and the package structure 500 may be directly attached and thermally connected or may be filled with a heat conductive medium 510 (for example, thermal paste or between the thermal diffusion layer 300 and the package structure 500). Thermal pad) and hot connection.
參閱圖3,前述第一實施例中所述的晶片封裝體的製造方法之各步驟分別說明如後:Referring to FIG. 3, the steps of the method for fabricating the chip package described in the foregoing first embodiment are respectively described as follows:
參閱圖3至圖5,於本實施例的步驟a中,首先提供一第二晶圓10以及一熱擴散膜20,並且將熱擴散膜20的其中一面貼附在第二晶圓10的其中一面;Referring to FIG. 3 to FIG. 5, in step a of the embodiment, a second wafer 10 and a thermal diffusion film 20 are first provided, and one side of the thermal diffusion film 20 is attached to the second wafer 10. one side;
參閱圖3及圖6,於接續步驟a的步驟b中,在熱擴散膜20上開設複數缺口301,此步驟中的缺口301較佳地是孔狀,且較佳地可以藉由加工機具直接加工貫穿第二晶圓10及熱擴散膜20以便於加工形成缺口301。Referring to FIG. 3 and FIG. 6, in step b of the subsequent step a, a plurality of notches 301 are formed in the thermal diffusion film 20. The notches 301 in this step are preferably hole-shaped, and preferably can be directly processed by the processing tool. The second wafer 10 and the thermal diffusion film 20 are processed to form a notch 301.
參閱圖3及圖7,於接續步驟b的步驟c中,提供一第二晶圓30。而後在熱擴散膜20的另一面上佈設黏著劑310,並且藉由黏著劑310將此面貼附在第二晶圓30的其中一面上。藉此將熱擴散膜20覆蓋設置於第二晶圓30。Referring to FIG. 3 and FIG. 7, in the step c of the subsequent step b, a second wafer 30 is provided. Then, an adhesive 310 is disposed on the other surface of the thermal diffusion film 20, and the surface is attached to one surface of the second wafer 30 by the adhesive 310. Thereby, the thermal diffusion film 20 is covered and disposed on the second wafer 30.
參閱圖3及圖8,於接續步驟c的步驟d中,對應該些缺口301之位置進行裁切,將第二晶圓30裁切形成複數晶片200,同時也將熱擴散膜20裁切形成貼附在各晶片200的複數熱擴散層300,而且各熱擴散層300分別具有至少一缺口301。依據裁切位置的不同,各熱擴散層300上的缺口301呈現不同的形態,當未裁切到熱擴散膜20上的缺口301時,則各熱擴散層300上的缺口301是孔狀;當裁切到熱擴散膜20上的缺口301時,則各熱擴散層300上的缺口301是延伸至熱擴散層300邊緣的缺槽狀,本創作不限定各熱擴散層300上的缺口301之型式。並且,較佳地同時也將第一晶圓10裁切形成覆蓋於各熱擴散層300上的複數保護層320。Referring to FIG. 3 and FIG. 8 , in step d of the subsequent step c, the positions of the notches 301 are cut, the second wafer 30 is cut to form a plurality of wafers 200, and the thermal diffusion film 20 is also cut. The plurality of thermal diffusion layers 300 are attached to each of the wafers 200, and each of the thermal diffusion layers 300 has at least one notch 301. The notch 301 on each of the thermal diffusion layers 300 has a different shape depending on the cutting position. When the notch 301 on the thermal diffusion film 20 is not cut, the notch 301 on each thermal diffusion layer 300 is in the shape of a hole; When the notch 301 is cut into the thermal diffusion film 20, the notch 301 on each of the thermal diffusion layers 300 is a notch extending to the edge of the thermal diffusion layer 300. The present invention does not limit the notch 301 on each thermal diffusion layer 300. The type. Moreover, it is preferable that the first wafer 10 is also cut to form a plurality of protective layers 320 covering the respective heat diffusion layers 300.
參閱圖3及圖9,於接續步驟d的步驟e中,提供至少一基板100並且將晶片200設置在基板100上,本創作不限定其設置方式,可以將一晶片200設置在一基板100上,也可以將多個晶片200設置在同一基板100上。Referring to FIG. 3 and FIG. 9, in step e of the subsequent step d, at least one substrate 100 is provided and the wafer 200 is disposed on the substrate 100. The present invention does not limit the arrangement thereof, and a wafer 200 can be disposed on a substrate 100. It is also possible to arrange a plurality of wafers 200 on the same substrate 100.
參閱圖3及圖10,於接續步驟e的步驟f中,對應各缺口301而提供複數導線400,將各導線400的一端連接於基板100,並且將各導線400的另一端穿過對應的缺口301連接至晶片200,藉此將晶片200電性連接基板100。Referring to FIG. 3 and FIG. 10, in step f of the subsequent step e, a plurality of wires 400 are provided corresponding to the notches 301, one end of each wire 400 is connected to the substrate 100, and the other end of each wire 400 is passed through a corresponding gap. The 301 is connected to the wafer 200, whereby the wafer 200 is electrically connected to the substrate 100.
參閱圖3及圖1,於接續步驟f的步驟g中,提供一封裝結構500,並且將封裝結構500包覆晶片200。於本實施例中較佳地是將基板100連同晶片200置入模具中將封裝結構500模塑成形於基板100上而包覆晶片200。在模塑製程中,保護層320能夠保護熱擴散層300以避免注入模具的高壓塑料損壞熱擴散層300中的片狀石墨烯之結構。Referring to FIG. 3 and FIG. 1, in a step g following the step f, a package structure 500 is provided, and the package structure 500 is wrapped around the wafer 200. In the present embodiment, the substrate 100 and the wafer 200 are preferably placed in a mold to mold the package structure 500 on the substrate 100 to coat the wafer 200. In the molding process, the protective layer 320 can protect the thermal diffusion layer 300 from the high-pressure plastic injected into the mold to damage the structure of the flake graphene in the thermal diffusion layer 300.
前述第二實施例中所述的晶片封裝體的製造方法,大至如同前述第一實施例的晶片封裝體的製造方法,不同之處詳述如後。The method of manufacturing the chip package described in the foregoing second embodiment is as large as the method of manufacturing the chip package of the first embodiment described above, and the differences are detailed later.
參閱圖3及圖11,於本實施例中,步驟c完成後,可以選擇性地執行步驟h,將第二晶圓10自熱擴散膜20上移除。於接續步驟h的步驟d中,對應該些缺口301之位置進行裁切,將第二晶圓30裁切形成複數晶片200,同時將熱擴散膜20裁切形成貼附在各晶片200的複數熱擴散層300,而且各熱擴散層300分別具有至少一缺口301。Referring to FIG. 3 and FIG. 11 , in the embodiment, after step c is completed, step h may be selectively performed to remove the second wafer 10 from the thermal diffusion film 20 . In the step d following the step h, the positions of the notches 301 are cut, the second wafer 30 is cut to form a plurality of wafers 200, and the thermal diffusion film 20 is cut to form a plurality of wafers 200 attached to each wafer 200. The heat diffusion layer 300, and each of the heat diffusion layers 300 has at least one notch 301.
參閱圖3及圖12,於接續步驟d的步驟e中,提供至少一基板100並且將晶片200設置在基板100上,本創作不限定其設置方式,可以將一晶片200設置在一基板100上,也可以將多個晶片200設置在同一基板100上。Referring to FIG. 3 and FIG. 12, in step e of the subsequent step d, at least one substrate 100 is provided and the wafer 200 is disposed on the substrate 100. The present invention is not limited to the arrangement thereof, and a wafer 200 may be disposed on a substrate 100. It is also possible to arrange a plurality of wafers 200 on the same substrate 100.
參閱圖3及圖13,於接續步驟e的步驟f中,對應各缺口301而提供複數導線400,將各導線400的一端連接於基板100,並且將各導線400的另一端穿過對應的缺口301連接至晶片200,藉此將晶片200電性連接基板100。Referring to FIG. 3 and FIG. 13, in step f of the subsequent step e, a plurality of wires 400 are provided corresponding to the notches 301, one end of each wire 400 is connected to the substrate 100, and the other end of each wire 400 is passed through a corresponding gap. The 301 is connected to the wafer 200, whereby the wafer 200 is electrically connected to the substrate 100.
參閱圖3及圖2,於接續步驟f的步驟g中,提供一封裝結構500,並且將封裝結構500包覆晶片200。於本實施例中,封裝結構500是罩殼之型態,於本步驟中將封裝結構500罩蓋於基板100上而罩蓋晶片200,而且熱擴散層300與封裝結構500可以是直接貼附而熱連接或是藉由在熱擴散層300與封裝結構500之間填充導熱介質510(例如導熱膠或導熱墊)而熱連接。Referring to FIGS. 3 and 2, in a step g following the step f, a package structure 500 is provided, and the package structure 500 is wrapped around the wafer 200. In this embodiment, the package structure 500 is in the form of a cover. In this step, the package structure 500 is covered on the substrate 100 to cover the wafer 200, and the thermal diffusion layer 300 and the package structure 500 may be directly attached. The thermal connection is also thermally connected by filling a thermally conductive medium 510 (eg, a thermally conductive paste or a thermal pad) between the thermal diffusion layer 300 and the package structure 500.
本創作的晶片封裝體,其晶片200上設設置有片狀石墨烯構成的熱擴散層300,因此晶片200之發熱能夠均勻地擴散至整個晶片封裝體,故能夠避免熱能集中而降低晶片封裝體對外的熱傳導效率。In the wafer package of the present invention, the wafer 200 is provided with a thermal diffusion layer 300 made of flake graphene, so that the heat generated by the wafer 200 can be uniformly diffused to the entire chip package, so that the thermal energy concentration can be avoided and the chip package can be reduced. External heat transfer efficiency.
本創作的晶片封裝體的製造方法藉由在裁切第二晶圓30形成晶片200之前將熱擴散膜20貼附至第二晶圓30,因此不需要將各熱擴散層300分別貼附至各晶片200。以此方法製成的熱擴散層300會延伸至各晶片200的邊緣而完全覆蓋晶片200的表面,使得導線400無法連接到晶片200,故需要在熱擴散層300設置缺口301供導線400通過。因此,本創作的晶片封裝體的製造方法更藉由將熱擴散膜20預設在第一晶圓10之手段而能夠一次在複數的熱擴散層300上形成缺口301。In the method of manufacturing the chip package of the present invention, the thermal diffusion film 20 is attached to the second wafer 30 before the wafer 200 is formed by cutting the second wafer 30, so that it is not necessary to attach the respective thermal diffusion layers 300 to Each wafer 200. The thermal diffusion layer 300 formed in this way extends to the edge of each wafer 200 to completely cover the surface of the wafer 200, so that the wire 400 cannot be connected to the wafer 200, so that a gap 301 is required to be provided in the thermal diffusion layer 300 for the wire 400 to pass. Therefore, the manufacturing method of the chip package of the present invention can form the notch 301 on the plurality of thermal diffusion layers 300 at a time by means of presetting the thermal diffusion film 20 on the first wafer 10.
以上所述僅為本創作之較佳實施例,非用以限定本創作之專利範圍,其他運用本創作之專利精神之等效變化,均應俱屬本創作之專利範圍。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of the patents of the present invention. Other equivalent variations of the patent spirit using the present invention are all within the scope of the patent.
10‧‧‧第一晶圓10‧‧‧First wafer
20‧‧‧熱擴散膜20‧‧‧ Thermal diffusion film
30‧‧‧第二晶圓30‧‧‧second wafer
100‧‧‧基板100‧‧‧Substrate
200‧‧‧晶片200‧‧‧ wafer
300‧‧‧熱擴散層300‧‧‧ Thermal diffusion layer
301‧‧‧缺口301‧‧‧ gap
310‧‧‧黏著劑310‧‧‧Adhesive
320‧‧‧保護層320‧‧‧Protective layer
400‧‧‧導線400‧‧‧ wire
500‧‧‧封裝結構500‧‧‧Package structure
510‧‧‧導熱介質510‧‧‧ Thermal medium
圖1係本創作第一實施例之晶片封裝體之示意圖。1 is a schematic view of a chip package of the first embodiment of the present invention.
圖2係本創作第二實施例之晶片封裝體之示意圖。2 is a schematic view of a chip package of the second embodiment of the present invention.
圖3係本創作之晶片封裝體的製造方法之流程圖。3 is a flow chart of a method of fabricating the chip package of the present invention.
圖4至圖7係本創作之晶片封裝體的製造方法之步驟示意圖。4 to 7 are schematic diagrams showing the steps of a method of manufacturing the chip package of the present invention.
圖8至圖10係本創作第一實施例中的晶片封裝體的製造方法之步驟示意圖。8 to 10 are schematic diagrams showing the steps of a method of manufacturing a chip package in the first embodiment of the present invention.
圖11至圖13係本創作第二實施例中的晶片封裝體的製造方法之步驟示意圖。11 to 13 are schematic diagrams showing the steps of a method of manufacturing a chip package in the second embodiment of the present invention.
100‧‧‧基板 100‧‧‧Substrate
200‧‧‧晶片 200‧‧‧ wafer
300‧‧‧熱擴散層 300‧‧‧ Thermal diffusion layer
301‧‧‧缺口 301‧‧‧ gap
310‧‧‧黏著劑 310‧‧‧Adhesive
320‧‧‧保護層 320‧‧‧Protective layer
400‧‧‧導線 400‧‧‧ wire
500‧‧‧封裝結構 500‧‧‧Package structure
Claims (8)
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TW105209578U TWM529273U (en) | 2016-06-24 | 2016-06-24 | Chip package |
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