TWM525836U - Magnetic conductance soft mold core and manufacturing system thereof - Google Patents

Description

Magnetic permeability soft mold and its manufacturing system

The present invention relates to a magnetic soft mold and a manufacturing system thereof, and more particularly to a magnetic soft mold core and a manufacturing system thereof for use in imprinting.

The nanoimprint lithography technology is not limited by the physical limitations of optical lithography, and the nano-pattern can be quickly produced on a large-sized enamel wafer at a low cost, and is a highly attractive nano-manufacturing technology. The nanoimprint lithography technology can be mainly divided into four types: hot pressing type, light hardening type, soft lithography type and laser assisted direct embossing type. When using nanoimprint technology, it is basically necessary to use different molds and etch barrier layers, and the mold part must first use the method of focusing ion beam or electron beam to make the nano-level geometric pattern and structure on the mold. . Nano imprint technology can be applied to the process, optical, mechanical and biochemical fields of semiconductor components. For example, in the display technology, the nano-imprinting technology and the use of liquid crystal as an imprinting coating to produce a liquid crystal alignment film can be obtained in the imprinting mold in addition to the same surface strip groove as the general coating. Achieve the effect of molecular self-discharge. When forming a molded article by hot press forming or nanoimprinting, the factors of pressure and mold forming surface are important. When the pressure control is poor or the strength of the mold forming surface is insufficient, the finished product of poor quality is often embossed.

In order to improve the above problems, the inventor of this case, through careful research and a perseverance spirit, finally created the "Magnetic Guided Soft Mould and Its Manufacturing System" in this case.

One of the objectives of the present invention is to provide a magnetic permeability soft mold and a manufacturing system thereof, which use a surface modification process to bond a magnetic conductive layer and a strengthening reinforcing layer to a template to achieve a replica forming surface of the reinforced template and magnetic imprinting. efficacy.

The first concept of the present invention is to provide a magnetically conductive soft mold core comprising a forming layer, a strengthening reinforcing layer, a cladding layer and a magnetic conductive layer. The forming layer has an initial replica forming surface and a first contact surface; the strengthening reinforcing layer is disposed on the initial replica forming surface through a first surface modification process to form a replica forming surface; the cladding layer has a second contact surface The magnetically permeable layer is coupled between the first contact surface and the second contact surface via a second surface modification process.

The second concept of the present invention is to provide a manufacturing system for a magnetically conductive soft mold, comprising the steps of: providing a reinforcing reinforcing layer on an initial replica forming surface of a forming layer through a first surface modification process; After a second surface modification process, a magnetic conductive layer is bonded between a first contact surface of the forming layer and a second contact surface of a cladding layer.

100‧‧‧Magnetic soft mold

31‧‧‧ Forming layer

311 ‧ ‧ initial copy forming surface

312‧‧‧ first contact surface

32‧‧‧Strengthening reinforcement

321‧‧‧Replicating the forming surface

33‧‧‧Cladding

111‧‧‧Second contact surface

112‧‧‧heat conduction device

1121‧‧‧ convection tube

34‧‧‧ magnetically conductive layer

35‧‧‧plastic body

36‧‧‧ Template

361‧‧‧Replicating the forming surface

37‧‧‧Magnetization source

371‧‧‧Electromagnet

200‧‧‧Application system of magnetic soft mold

The first figure is a schematic exploded view of the magnetic permeability soft mold core according to the first embodiment of the present invention; and the second figure: a schematic diagram of the application system of the magnetic permeability soft mold core according to the second embodiment of the present invention.

In order to clarify the magnetic flux soft mold and its manufacturing system as described in the present invention, several preferred embodiments are described below.

Please refer to the first figure, which is a schematic diagram of the magnetic permeability soft mold of the first embodiment of the present invention. Exploded map. As shown, the magnetic soft mold core 100 includes a shaping layer 31, a reinforcing reinforcing layer 32, a cladding layer 33 and a magnetic conductive layer 34, and the magnetic guiding mold 100 is used, for example, for an imprint process. .

The forming layer 31 has an initial replica forming surface 311 and a first contact surface 312, wherein the initial replica forming surface 311 can be prepared by various methods including, for example, X-ray deep electroforming molding technology (LIGA technology), excimer laser power Molding technology, gray-scale reticle lithography electroforming technology or electron beam direct writing technology. The material of the forming layer 31 may be a polydimethyl siloxane (PDMS) material, a quartz material, a polymer material or a metal material, etc.; when the material of the forming layer 31 is transparent, the material is selected from the material selected from the group consisting of A SU8 photoresist material or a PMMA material, etc.

The reinforcing reinforcing layer 32 is disposed on the initial replica forming surface 311 via a first surface modification process to form a replica forming surface 321 for forming a moldable body (not shown). Common plastic body materials include thermoplastic materials, thermosetting materials or photocurable materials, etc. For example, PMMA (Poly (methyl methacrylate)) material is one of thermoplastic materials. When the material properties of the reinforcing reinforcing layer 32 and the forming layer 31 are different, there is a case where the reinforcing reinforcing layer 32 and the forming layer 31 are difficult to bond or are not firmly bonded, and thus the reinforcing reinforcing layer 32 is placed on the initial replica forming surface 311. Previously, the first surface modification process may be performed on the first replication molding surface 311. For example, a surface modification agent may be used to perform a hydrophobic modification on the initial replication molding surface 311, in addition to hydrophobic modification. The initial replication molding surface 311 is subjected to a modification process such as hardness, wear resistance, and adhesion. In this embodiment, the reinforcing reinforcing layer 32 is disposed on the initial replica forming surface 311 by using at least one of an evaporation process, a sputtering process, and a coating process, wherein the commonly used coating process is a spin coating process.

The reinforcing reinforcing layer 32 is provided on the initial replica forming surface 311, so that the replica forming surface 321 can have a high hardness, a large elastic modulus, and a machinability. The material of the reinforcing reinforcing layer 32 that can be used includes a magnetic conductive material; in order to achieve high hardness, the hardness of the material of the reinforcing reinforcing layer 32 is large. The hardness of the material of the forming layer 31; in order to achieve a large elastic modulus, the elastic modulus of the material of the reinforcing reinforcing layer 32 is larger than the elastic modulus of the material of the forming layer 31.

The cladding layer 33 has a second contact surface 111 and the material of the cladding layer 33 can be a PDMS material, a quartz material, a polymer material or a metal material, or the like. The magnetic conductive layer 34 is coupled between the first contact surface 312 and the second contact surface 111 via a second surface modification process; and the magnetic conductive layer 34 may have a flat shape, a curved shape, a wave shape, a porous shape or Other shapes; the material of the magnetic conductive layer 34 includes a soft magnetic material or a permanent magnetic material, and the magnetic conductive layer 34 may also be a composite of a magnetic conductive material and other materials. When the material properties of the magnetic conductive layer 34 and the shaping layer 31 or the cladding layer 33 are different, there is a difficulty in bonding or bonding between the magnetic conductive layer 34 and the shaping layer 31 or between the magnetic conductive layer 34 and the cladding layer 33. The second surface modification process may be performed on the first contact surface 312 and the second contact surface 111 before the magnetic conductive layer 34 is bonded between the first contact surface 312 and the second contact surface 111. For example, A hydrophobic modification is performed on the first contact surface 312 and the second contact surface 111 by using a surface modifying agent. In addition to the hydrophobic modification, the first contact surface 312 and the second contact surface 111 may be respectively implemented. Hardening, wear and adhesion and other modification processes. In this embodiment, the magnetic conductive layer 34 is bonded between the first contact surface 312 and the second contact surface 111 by at least one of an evaporation process, a sputtering process and a coating process.

In the first figure, a heat conducting device 112 for heating or cooling is provided in the cladding layer 33, and the heat conducting device 112 includes at least one pair of flow tubes 1121 that carry heat into or out of the magnetic permeability as the fluid passes through the convection tube 1121. Soft mold kernel 100. In order to meet the requirements of the transparent imprint process, the cladding layer 33, the magnetic conductive layer 34, the shaping layer 31 and the reinforcing reinforcing layer 32 respectively have at least one material, and the material is selected and the area distribution of the material is controlled to make the magnetic permeability soft. The mold core 100 is partially permeable to light.

Please refer to the second figure, which is the application of the magnetic permeability soft mold in the second embodiment of the present invention. System schematic. As shown, the magnetic soft mold core application system 200 includes a magnetic soft mold core 100, a plastic body 35, a template 36 and a magnetization source 37, wherein the magnetic soft mold core 100 includes a shaping layer 31, A reinforcing layer 32, a cladding layer 33 and a magnetically permeable layer 34 are provided. The template 36 has a replication forming surface 361, and the plastic body 35 is formed between the replication molding surface 321 and the replication molding surface 361; the magnetization source 37 is disposed in the template 36 and includes, for example, at least one electromagnet 371, the magnetic permeability layer 34 Cooperating with the magnetization source 37 to generate an active magnetic force distribution FA1; when the reinforcing reinforcing layer 32 includes a magnetic conductive material, the magnetic conductive layer 34 and the strengthening reinforcing layer 32 cooperate with the magnetization source 37 to generate an active magnetic force distribution FA1.

The magnetic soft mold application system 200 can be applied to the nanoimprint technology of hot pressing type, light hardening type, soft lithography type and laser assisted direct imprint type. In the application system of the hot-press type magnetic permeability soft mold, the material of the plastic body 35 may be a thermoplastic material or a thermosetting material, and the material of the reinforcing reinforcing layer 32 may be, for example, nickel metal, polymer, tantalum or two. The ruthenium oxide or the like is formed by applying a pressure between the replication molding surface 321 and the replication molding surface 361 by the action magnetic force distribution FA1.

In the application system of the photohardenable magnetic soft mold, the plastic body 35 is made of a photocurable material; the magnetic soft mold 100 includes at least one light transmitting portion (not shown), wherein an ultraviolet light passes through the light. The portion and the replica forming surface 321 are reached to the moldable body 35, and the plastic body 35 is molded by the application of the magnetic force distribution FA1 to assist the pressing.

In the application system of the soft lithography magnetic permeability soft mold, the material of the plastic body 35 is, for example, a gold foil on the replica forming surface 361; the material of the reinforcing reinforcing layer 32 is, for example, a soft polydimethyl group. The oxime (PDMS), and the replication molding surface 321 is adhered to the organic polymer thiol (Thiol), and the gold foil is formed by the micro-pressure of the magnetic force distribution FA1.

In the application system of laser-assisted direct-imprinted magnetic permeability soft mold, plastic body 35 The material is, for example, bismuth (Si), copper (Cu) or tantalum carbide (SiC) on the surface of the replica forming surface 361; the magnetic soft mold core 100 includes at least one light transmitting portion (not shown) in which softening A quasi-molecular laser light of the plastic body 35 passes through the light transmitting portion and the replica forming surface 321 to reach the moldable body 35, and is directly embossed by the working magnetic force distribution FA1 to shape the plastic body 35.

Next, a manufacturing system of the magnetic permeability soft mold 100 according to the present invention will be described in the first drawing, which comprises the following steps: a first surface modification process is performed, and an initial reinforcement forming of the reinforcing reinforcing layer 32 on a forming layer 31 is performed. And a second surface modification process is coupled between a first contact surface 312 of the shaping layer 31 and a second contact surface 111 of a cladding layer 33 via a second surface modification process.

In summary, the magnetic permeability soft mold and its manufacturing system in this case can indeed achieve the effect set by the invention concept. The above descriptions are only the preferred embodiments of the present invention. Any equivalent modifications or variations made by those skilled in the art of the present invention should be included in the scope of the following patent application.

100‧‧‧Magnetic soft mold

31‧‧‧ Forming layer

311 ‧ ‧ initial copy forming surface

312‧‧‧ first contact surface

32‧‧‧Strengthening reinforcement

321‧‧‧Replicating the forming surface

33‧‧‧Cladding

111‧‧‧Second contact surface

112‧‧‧heat conduction device

1121‧‧‧ convection tube

34‧‧‧ magnetically conductive layer

Claims (19)

A magnetically conductive soft mold core comprising: a forming layer having an initial replica forming surface and a first contact surface; and a reinforcing reinforcing layer disposed on the initial replica forming surface through a first surface modification process to form a replica forming surface; a cladding layer having a second contact surface; and a magnetically conductive layer coupled between the first contact surface and the second contact surface via a second surface modification process. For example, the magnetic permeability soft mold kernel of claim 1 is used for an imprint process. The magnetic permeability soft mold core according to claim 1, wherein the forming layer is made of a light transmissive material. The magnetic permeability soft mold core according to claim 3, wherein the material of the forming layer is selected from one of a SU8 photoresist material and a PMMA material. The magnetic permeability soft mold core according to claim 1, wherein the material of the reinforcing reinforcing layer comprises a magnetic conductive material. The magnetic permeability soft mold core according to claim 1, wherein the elastic modulus of the reinforcing reinforcing layer material is greater than the elastic modulus of the material of the forming layer. For example, the magnetic permeability soft mold core of claim 1 is characterized in that the hardness of the reinforcing reinforcing layer material is greater than the hardness of the forming layer material. The magnetic permeability soft mold core according to claim 1, wherein the material of the coating layer is selected from one of a PDMS material, a polymer material and a metal material. The magnetic permeability soft mold core according to claim 1, wherein the first surface modification process is to perform a hydrophobic modification on the initial replication forming surface. The magnetically conductive soft mold core according to claim 1, wherein the strengthening reinforcing layer is disposed on the initial replica forming surface through at least one of an evaporation process, a sputtering process and a coating process. Such as the magnetic permeability soft mold kernel of claim 10, wherein the coating The process is a spin coating process. The magnetically conductive soft mold core according to claim 1, wherein the second surface modification process is performed on the first contact surface and the second contact surface to perform a hydrophobic modification. The magnetic permeability soft mold core according to claim 1, wherein the magnetic conductive layer is further bonded to the first contact surface and the first through a vapor deposition process, a sputtering process and a coating process. Between the two contact faces. The magnetic permeability soft mold core according to claim 1, wherein the magnetic conductive layer material comprises one of a soft magnetic material and a permanent magnetic material. The magnetic permeability soft mold core according to claim 1 further includes a heat conducting device, and the heat conducting device is disposed in the coating layer. The magnetic permeability soft mold core according to claim 15 , wherein the heat conducting device further comprises at least one pair of flow tubes. The magnetic permeability soft mold core according to claim 1, further comprising at least one light transmitting portion, wherein an ultraviolet light passes through the light transmitting portion and the replica forming surface. The magnetic permeability soft mold core according to claim 1, wherein the replica forming surface further shapes a plastic body having a PMMA material. The magnetic permeability soft mold core according to claim 1, wherein the magnetic conductive layer cooperates with a magnetization source to generate an active magnetic force distribution.