TWM496702U - Flow control valve - Google Patents

Description

Flow control valve

This creation relates to a valve member, and in particular to a flow control valve that greatly simplifies the overall composition of the structure and reduces the risk of contamination with a relatively more active and reliable means.

In order to avoid foreign matter pollution, most semiconductor materials such as photomasks or wafers are placed in the box and kept from being stored in the storage space to prevent oxidation or contamination of the materials during storage. An inert gas such as a non-oxidizing gas or an Xtra Clean Dry Air (XCDA) is filled, and it is preferable to repeatedly fill the inert gas for a period of time to ensure the environmental quality in the casing.

It is known that a reticle storage device for storing semiconductor materials such as a reticle or a wafer can be presented in a machine type as shown in the first figure, and a similar reticle storage device is basically provided with an inert gas for introduction. The inflatable disk 21 serves as a mechanical structure for carrying the reticle 10, and a cover 22 for opening corresponding to the inflatable disk 21 is additionally provided to cover the reticle 10 on the inflatable disk 21, so that the hood 22 and the inflatable disk are provided. 21 constitutes a storage space for storing the reticle 10.

The inflator 21 is connected to the gas source 24 at the distal end through the high pressure line 23, so that the inert gas is introduced into the storage space above the inflator 21 via the high pressure line 23; the storage space must be maintained as much as possible. In super The clean environment quality, the traditional method is that after the switch (valve) of the gas source 24 is turned on, the inert gas is continuously input into the storage space. Even in the state in which the casing 22 of the reticle storage device has been opened, the inert gas is continuously released through the high-pressure line 23, resulting in continuous loss of the inert gas, resulting in great waste.

However, at present, there are many conventional flow control valves that are controlled or driven by external power, electric power, magnets or springs. Because the components to be integrated are relatively complicated and complicated, not only the appearance of all components is relatively easy to clean, but also It is easy to accumulate dust; in addition, the more components included in the overall flow control valve, the easier it is to generate pollution sources such as particles or dust during the operation.

Therefore, how to provide a flow control valve with a relatively simple composition structure and a drive structure integrated in the same mechanical structure body, has long been an industry and academic application for equipment that needs to be maintained in an ultra-clean environment. The subject that the world wants to solve.

The main purpose of this creation is to provide a flow control valve that greatly simplifies the overall composition structure and reduces pollution risks with a relatively more active and reliable means.

The flow control valve of the present invention basically comprises: a valve body, which is a block-shaped structure forming an accommodating chamber therein, and the accommodating chamber is connected with an outer side surface of the valve body to form an assembly port, and the valve body is The outer side surface is further provided with an air inlet port communicating with the accommodating chamber, and an air outlet port communicating with the accommodating chamber; a shaft seat fixed at the assembly port of the valve body, the shaft seat running through the body a shaft hole communicating with the chamber; a float ball is disposed in the receiving chamber in such a manner as to be reciprocally displaceable in the receiving chamber, a gap between the float ball and the inner wall of the accommodating chamber is formed for the passage of the gas; a push rod is disposed at a shaft hole of the shaft seat in a manner of being relatively displaceable with the shaft seat, the push rod One end and deep into the accommodating chamber for contacting the floating ball; and the air inlet interface is connected to the accommodating chamber at the other end of the accommodating chamber with respect to the assembly opening; the air outlet interface is The position of the floating ball is communicated with the accommodating chamber, and the air outlet interface and the position of the air inlet interface communicating with the accommodating chamber have a moving stroke for the floating ball to enter.

The flow control valve of the present invention, when in use, is a type in which the push rod extends out of one end of the valve body into the stroke of the operating component of the application device, and the valve body is fixed on the structural body of the application device end, and the plurality of high voltages are transmitted through The pipeline is respectively connected between the inlet port of the valve body and the gas source head, and is connected between the outlet port of the valve body and the application device; the entire flow control valve does not need to be additionally installed with other control components, and can be subjected to the application device end. The flow control effect of the operating component pushing the gas into the application device through the air outlet interface, the overall flow control valve structure is greatly simplified, and the risk of pollution can be reduced by a relatively active and reliable means.

Further, the push rod is provided with a threaded section opposite to the end of the valve body, and a cap is screwed to the threaded section.

Further, the push rod is provided with a threaded section opposite to the end of the valve body, a cap is screwed to the threaded section, and a positioning nut is provided for restricting the rotation of the cap.

Further, the flow control valve is provided with at least one airtight gasket between the shaft seat and the valve body.

The valve body system is provided with an internal thread in the inner ring of the assembly port, and the shaft The outer periphery of the seat is provided with an external thread for screwing the internal thread of the assembly port.

The valve body system is provided with a plurality of assembly holes on the side of the valve assembly.

The valve body system is respectively provided at the air inlet interface and the air outlet interface with a pipe joint protruding from the outer side surface thereof.

The flow control valve is connected to a high pressure pipeline at an inlet port of the valve body, and a flow meter is disposed at the high pressure pipeline.

The flow control valve disclosed in the present invention can be controlled by the operating parts of the application device without the need to additionally install other control components, thereby generating a flow control effect of the gas entering the application device, and not only the composition of the overall flow control valve It has been greatly simplified, and is particularly suitable for applications such as photomask storage devices that need to be maintained in an ultra-clean environment, to prevent contamination of the applied device or device by a relatively active and reliable means.

[Prior technology]

10‧‧‧Photomask

21‧‧‧Inflatable tray

22‧‧‧Cover

23‧‧‧High pressure pipeline

24‧‧‧ gas source

[This creation]

30‧‧‧Flow control valve

31‧‧‧ valve body

311‧‧‧ housing room

312‧‧‧ Assembly port

313‧‧‧Intake interface

314‧‧‧Exhaust interface

315‧‧‧ internal thread

316‧‧‧ Assembly holes

317‧‧‧ pipe joint

318‧‧‧ pipe joint

32‧‧‧ shaft seat

321‧‧‧Axis hole

322‧‧‧ External thread

33‧‧‧Floating ball

34‧‧‧Put

341‧‧‧ thread section

35‧‧‧Airtight gasket

36‧‧‧Cap

361‧‧‧ Positioning nut

37‧‧‧High pressure pipeline

38‧‧‧ Flowmeter

The first figure is a schematic structural view of a conventional reticle storage device.

The second figure is a configuration reference diagram for the flow control valve used in this creation.

The third figure is an exploded view of the flow control valve of the first embodiment of the present invention.

The fourth drawing is a structural sectional view of the flow control valve of the first embodiment of the present invention in an unactuated state.

The fifth drawing is a structural sectional view of the flow control valve of the first embodiment of the present invention when it is actuated.

The sixth figure is a schematic diagram of the gas supply state of the application device when the flow control valve of the first embodiment of the present invention is actuated.

The seventh drawing is a structural sectional view of the flow control valve of the second embodiment of the present invention in an unactuated state.

The eighth drawing is a structural sectional view of the flow control valve of the second embodiment of the present invention after adjusting the position of the cap.

The ninth drawing is a structural sectional view of the flow control valve of the second embodiment of the present invention when it is actuated.

The tenth figure is a configuration reference diagram of the flow control valve used in another embodiment of the present invention.

As shown in the second figure, this creation mainly provides a device or device that is particularly suitable for maintaining the quality of an ultra-clean environment, such as a photomask storage device, to prevent the applied device or device from being subjected to a relatively active and reliable means. For the contaminated flow control valve 30, please refer to the second to fourth figures. The flow control valve 30 of the present invention basically comprises: a valve body 31, a shaft seat 32, a float ball 33, and a push. The valve body 31 is a block structure in which an accommodating chamber 311 is formed, and the accommodating chamber 311 is connected to an outer side surface of the valve body 31 to form an assembly port 312. An air inlet port 313 communicating with the accommodating chamber 311 and an air outlet port 314 communicating with the accommodating chamber 311 are further disposed on the outer side surface.

The shaft seat 32 is fixed to the assembly port 312 of the valve body 31. The shaft seat 32 extends through a shaft hole 321 communicating with the receiving chamber 311. The body flow control valve 30 is provided with at least one airtight gasket 35 between the shaft seat 32 and the valve body 31 to increase the adhesion between the shaft seat 32 and the valve body 31. In this embodiment, The valve body 31 is provided with an internal thread 315 in the inner circumference of the assembly opening 312. The outer periphery of the shaft base 32 is provided with an external thread 322 for screwing with the internal thread 315 of the assembly opening 312. The screwing is fixed to the assembly opening 312.

The floating ball 33 is disposed in the accommodating chamber 311 so as to be reciprocally displaceable in the accommodating chamber 311. The floating ball 33 and the inner wall of the accommodating chamber 311 form a gap through which the gas can pass. In practice, the float 33 can be fabricated from metal, plastic or rubber.

The push rod 34 is disposed at a shaft hole 321 of the shaft base 32 in a manner of being relatively displaceable with the shaft base 32. One end of the push rod 34 extends into the receiving chamber 311 for the float ball 33. The contact is used to cooperate with the linkage effect of changing the position of the push float 33.

The air inlet port 313 is connected to the accommodating chamber 311 at the other end of the accommodating chamber 311. The air outlet 314 is at a position that can be blocked by the floating ball 33 and is accommodated. The chamber 311 is in communication, and the outlet port 314 and the position of the air inlet port 313 communicating with the accommodating chamber 311 have a moving stroke for the float ball 33 to enter.

In principle, the flow control valve 30 of the present invention, when in use, extends the operating member of the application device (such as the reticle storage device shown) with one end of the push rod 34 extending out of the valve body 31 (as shown) The cover 22 is in the form of stroke, and the valve body 31 is fixed to the structural body of the application device end (as shown in the lower portion of the inflatable disk 21), and is connected to the intake of the valve body 31 through the plurality of high-pressure pipes 23, respectively. The interface 313 is connected between the gas source 24 and the outlet port 314 of the valve body 31 and the application device.

As shown in the second figure, the entire flow control valve 30 is in the state in which the push rod 34 and the float ball 33 are in the intake pressure state in a state where the push rod 34 is not pushed by the operating member (cabin cover 22) of the application device end. Next, at a position where the air outlet interface 314 can be shielded (as shown in the fourth figure), the restriction gas is released through the air outlet interface 314 to avoid gas loss.

And, when the operating component (the hatch 22) of the application device reaches the predetermined stroke to the positioning as shown in the sixth figure, the push rod 34 is pushed or pressed by the operating component (the cover 22) of the application device toward the valve. The internal direction of the body 31 is displaced, as shown in the fifth and sixth figures, thereby changing the position of the float ball 33, so that the gas can flow into the application device through the air outlet interface 314 to achieve a flow control effect that can be slightly moved with the application device.

In particular, the composition of the overall flow control valve can be greatly simplified, and the flow control effect of whether the gas can enter the application device can be generated by pushing the operating component of the application device without additional control components. Relatively more active and reliable means to reduce the risk of pollution.

In addition, when the flow control valve of the present invention is implemented, the valve body 31 can be integrally formed by a metal block or a plastic block; in the embodiment, the valve body 31 is provided with the assembly port 312. The outer side surface is provided with a plurality of mounting holes 316, and further, at the air inlet port 313 and the air outlet port 314, a pipe joint 317, 318 opposite to the outer side surface thereof is respectively provided to make the appearance of the entire flow control valve 30 The shape is more harmonic, helping to prevent dust from accumulating.

As shown in the third and seventh figures, in the specific implementation of the flow control valve of the present invention, the push rod 34 can be further provided with a threaded section 341 relative to the end of the valve body 31, and A screw cap 36 is screwed into the threaded portion 341 to quickly adjust the degree of the push rod 34 into the valve body 31 by rotating the cap 36. (as shown in Figure 8).

Therefore, the aperture design of the air outlet interface 314 can be matched with the adjustment of the push rod 34 into the valve body 31 to achieve the function of adjusting the maximum air output of the flow control valve 30 as shown in FIG. Of course, a screw portion 341 is disposed at a rear end of the push rod 34 opposite to the valve body 31, and a cap 36 is screwed to the screw portion 341. A positioning nut 361 for restricting rotation of the cap 36 may be further threaded at the threaded portion 341 to securely secure the cap 36 in the adjusted position.

It is worth mentioning that the flow control valve 30 of the present invention is in a different structure. The integral flow control valve 30 can be pre-exposed to the intake port of the valve body 31 when it is shipped from the factory. A high pressure line 37 is connected to the 313, and a flow meter 38 is disposed at the high pressure line 37 to obtain a flow control valve 30 incorporating a flow display function.

Specifically, the flow control valve disclosed in the present invention can be controlled by the operating component of the application device without the need to additionally install other control components, thereby generating a flow control effect of the gas entering the application device, not only the overall flow control The valve structure is greatly simplified, and is particularly suitable for applications such as reticle storage devices that need to be maintained in an ultra-clean environment, to prevent contamination of the applied device or device by a relatively active and reliable means.

The technical content and technical features of the present invention have been disclosed above, but those skilled in the art may still make various substitutions and modifications based on the disclosure of the present invention without departing from the spirit of the present invention. Therefore, the scope of the present invention is not limited to the embodiments disclosed, but includes various alternatives and modifications that do not depart from the present invention and are covered by the following claims.

30‧‧‧Flow control valve

31‧‧‧ valve body

311‧‧‧ housing room

312‧‧‧ Assembly port

313‧‧‧Intake interface

314‧‧‧Exhaust interface

315‧‧‧ internal thread

317‧‧‧ pipe joint

318‧‧‧ pipe joint

32‧‧‧ shaft seat

321‧‧‧Axis hole

322‧‧‧ External thread

33‧‧‧Floating ball

34‧‧‧Put

341‧‧‧ thread section

35‧‧‧Airtight gasket

36‧‧‧Cap

Claims (8)

A flow control valve comprises: a valve body, which is a block-shaped structure forming an accommodating chamber therein, the accommodating chamber is connected with an outer side surface of the valve body to form an assembly port, and the outer side of the valve body is separately provided An air inlet port communicating with the accommodating chamber, and an air outlet port communicating with the accommodating chamber; a shaft seat fixed at an assembly port of the valve body, the shaft seat extending through a communication port a shaft hole; a float ball is disposed in the accommodating chamber in a manner of reciprocating displacement in the accommodating chamber, and a gap between the floating ball and the inner wall of the accommodating chamber for allowing gas to pass; a push rod, Passing through the shaft hole of the shaft seat in a manner of relative displacement with the shaft seat, one end of the push rod penetrates into the receiving chamber to be in contact with the floating ball; and the air inlet interface is connected to The accommodating chamber communicates with the accommodating chamber with respect to the other end of the assembly port; the air outlet interface communicates with the accommodating chamber at a position shieldable by the floating ball, and the air outlet interface and the air inlet interface The middle of the position where the accommodating chamber communicates has a moving stroke for the float to enter. The flow control valve of claim 1, wherein the push rod is provided with a threaded portion opposite to the end of the valve body, and a cap is screwed to the threaded portion. The flow control valve of claim 1, wherein the push rod is provided with a threaded portion opposite to the end of the valve body, and a cap is screwed at the screw portion, and A positioning nut for restricting rotation of the cap. The flow control valve of claim 1, wherein the flow control valve is lined with at least one airtight gasket between the shaft seat and the valve body. Flow control as described in any one of claims 1 to 4 a valve, wherein the valve system is provided with an internal thread in an inner ring of the assembly port, and an outer thread of the screw seat is provided on a periphery of the shaft seat. The flow control valve according to any one of claims 1 to 4, wherein the valve body system is provided with a plurality of assembly holes on a side thereof outside the assembly port. The flow control valve according to any one of claims 1 to 4, wherein the valve system is respectively provided at the air inlet interface and the air outlet interface with a relatively protruding outer side surface thereof Pipe joints. The flow control valve according to any one of claims 1 to 4, wherein the flow control valve is connected to a high pressure line at an intake port of the valve body, at the high pressure line A flow meter is provided.