TWM494036U - Ultrasonic cleaning device - Google Patents
Ultrasonic cleaning device Download PDFInfo
- Publication number
- TWM494036U TWM494036U TW103215356U TW103215356U TWM494036U TW M494036 U TWM494036 U TW M494036U TW 103215356 U TW103215356 U TW 103215356U TW 103215356 U TW103215356 U TW 103215356U TW M494036 U TWM494036 U TW M494036U
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- drive shaft
- cleaning device
- brush body
- ultrasonic
- ultrasonic cleaning
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Description
本創作係與清潔裝置有關,特別是一種超音波清潔裝置,其適用於板材之清潔作業。This creation is related to cleaning devices, in particular an ultrasonic cleaning device, which is suitable for the cleaning of sheets.
按,對於板材而言,如晶圓或玻璃基板,一般的清洗過程包含有乾式及濕式。對於乾式清洗而言,係透過紫外光(UV light)照射板材使得附著於板材的有機物質可以與氧反應產生一氧化碳、二氧化碳或水汽飄散置空氣中而去除。而對於濕式清洗,主要係利用刷子搭配純水或洗劑,除去板材上的微粒汙染、有機物汙染和離子汙染等問題。其原理係利用刷子進行板材清洗,可讓刷毛將表面附著的微粒刷除。然而,無論是毛刷如何配置,對於板材仍存汙染殘存的問題。Press, for sheet metal, such as wafer or glass substrate, the general cleaning process includes dry and wet. For dry cleaning, the plate is irradiated with ultraviolet light (UV light) so that the organic matter attached to the plate can be removed by reacting with oxygen to generate carbon monoxide, carbon dioxide or water vapor in the air. For wet cleaning, the main purpose is to use a brush with pure water or a lotion to remove particulate contamination, organic contamination and ionic contamination on the board. The principle is to use a brush for the cleaning of the board, which allows the bristles to remove the particles attached to the surface. However, no matter how the brush is configured, there is still a problem of residual contamination of the board.
有鑑於此,本創作之主要目的係改善上述板材汙染殘存的問題,而提供一種超音波清潔裝置。In view of this, the main purpose of the present invention is to improve the residual problem of the above-mentioned plate pollution, and to provide an ultrasonic cleaning device.
本創作提供一種超音波清潔裝置,包括一驅動軸,係受外力驅動旋轉;一刷體係固接該驅動軸,而受該驅動軸驅使轉動;以及一超音波產生器,係連接該驅動軸,該超音波產生器係產生超音波並傳遞超音波 至該驅動軸,再由該驅動軸將超音波傳遞至該刷體。The present invention provides an ultrasonic cleaning device including a drive shaft that is driven to rotate by an external force; a brush system that fixes the drive shaft and is driven to rotate by the drive shaft; and an ultrasonic generator that connects the drive shaft, The ultrasonic generator generates ultrasonic waves and transmits ultrasonic waves To the drive shaft, the drive shaft transmits ultrasonic waves to the brush body.
藉由,本創作中驅動軸驅動刷體進行板材清潔,加上超音波產生器產生超音波傳遞至刷體,可以增強刷體對於板材的清潔效果。In this creation, the drive shaft drives the brush body to clean the plate, and the ultrasonic generator generates ultrasonic waves transmitted to the brush body, which can enhance the cleaning effect of the brush body on the plate.
11‧‧‧驅動軸11‧‧‧Drive shaft
12‧‧‧刷體12‧‧‧ brush body
121‧‧‧孔洞121‧‧‧ hole
13‧‧‧超音波產生器13‧‧‧Supersonic generator
第1圖係本創作第一實施例之立體示意圖。Fig. 1 is a perspective view showing the first embodiment of the present creation.
第2圖係本創作第一實施例之示意圖。Figure 2 is a schematic view of the first embodiment of the present creation.
第3圖係本創作第二實施例之示意圖。Figure 3 is a schematic view of a second embodiment of the present creation.
第4圖係本創作第三實施例之示意圖。Figure 4 is a schematic view of a third embodiment of the present creation.
請參閱第1、2圖,本創作第一實施例所提供的超音波清潔裝置,包括:一驅動軸11、一刷體12和一超音波產生器13。Please refer to the first and second figures. The ultrasonic cleaning device provided in the first embodiment of the present invention comprises: a driving shaft 11, a brush body 12 and an ultrasonic generator 13.
該驅動軸11,呈圓柱狀。該驅動軸11,係受外力驅動旋轉,如馬達驅動。The drive shaft 11 has a cylindrical shape. The drive shaft 11 is driven to rotate by an external force, such as a motor drive.
該刷體12係固接該驅動軸11,而受該驅動軸11驅使轉動。須說明的是,在本實施例中,該刷體12係套設在該驅動軸11上,並沿著該驅動軸11設置。The brush body 12 is fixed to the drive shaft 11 and is driven to rotate by the drive shaft 11. It should be noted that, in this embodiment, the brush body 12 is sleeved on the drive shaft 11 and disposed along the drive shaft 11 .
該超音波產生器13,係連接該驅動軸11,該超音波產生器13係產生超音波並傳遞超音波至該驅動軸11,再由該驅動軸11將超音波傳遞至該刷體12。The ultrasonic generator 13 is connected to the drive shaft 11, and the ultrasonic generator 13 generates ultrasonic waves and transmits ultrasonic waves to the drive shaft 11, and the ultrasonic waves are transmitted from the drive shaft 11 to the brush body 12.
除此之外,請參閱的3圖,本創作第二實施例所提供的超音 波清潔裝置,與第一實施例不同的是,該刷體12係由撓性材料製作而成,如塑膠、橡膠、海綿或布料等,而該刷體12之外表面分佈多數孔洞121。在使用時,被該刷體12所移除的板材表面雜質可進入各孔洞121而增強板材清潔的效果。In addition, please refer to the 3 figure, the supersonic provided by the second embodiment of the present creation The wave cleaning device is different from the first embodiment in that the brush body 12 is made of a flexible material such as plastic, rubber, sponge or cloth, and a plurality of holes 121 are arranged on the outer surface of the brush body 12. In use, the surface impurities of the sheet removed by the brush body 12 can enter the holes 121 to enhance the cleaning effect of the sheet.
再來,請參閱第4圖,本創作第三實施例所提供的超音波清潔裝置,其中該刷體12,係固接該驅動軸11一端,而受該驅動軸11驅動旋轉。Referring to FIG. 4, the ultrasonic cleaning device of the third embodiment of the present invention, wherein the brush body 12 is fixed to one end of the drive shaft 11 and is driven to rotate by the drive shaft 11.
於進行清洗板材作業時,本創作提供之超音波清潔裝置,其驅動軸11係驅動該刷體12旋轉,該刷體12接觸板材後進行清洗作業。該超音波產生器13產生超音波,該超音波產生器13係產生超音波並傳遞超音波至該驅動軸11,再由該驅動軸11將超音波傳遞至該刷體12。藉此,本創作中驅動軸11驅動刷體12進行板材清潔,加上超音波產生器產生超音波傳遞至刷體12,可以增強刷體12對於板材的清潔效果,以減少板材汙染殘存的問題。In the ultrasonic cleaning device provided by the present invention, the drive shaft 11 drives the brush body 12 to rotate, and the brush body 12 contacts the plate to perform the cleaning operation. The ultrasonic generator 13 generates ultrasonic waves, and the ultrasonic generator 13 generates ultrasonic waves and transmits ultrasonic waves to the drive shaft 11, and the ultrasonic waves are transmitted from the drive shaft 11 to the brush body 12. Therefore, in the present invention, the driving shaft 11 drives the brush body 12 to clean the plate, and the ultrasonic generator generates ultrasonic waves to be transmitted to the brush body 12, which can enhance the cleaning effect of the brush body 12 on the plate material, thereby reducing the problem of residual plate pollution. .
11‧‧‧驅動軸11‧‧‧Drive shaft
12‧‧‧刷體12‧‧‧ brush body
13‧‧‧超音波產生器13‧‧‧Supersonic generator
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103215356U TWM494036U (en) | 2014-08-27 | 2014-08-27 | Ultrasonic cleaning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103215356U TWM494036U (en) | 2014-08-27 | 2014-08-27 | Ultrasonic cleaning device |
Publications (1)
Publication Number | Publication Date |
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TWM494036U true TWM494036U (en) | 2015-01-21 |
Family
ID=52784312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW103215356U TWM494036U (en) | 2014-08-27 | 2014-08-27 | Ultrasonic cleaning device |
Country Status (1)
Country | Link |
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TW (1) | TWM494036U (en) |
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2014
- 2014-08-27 TW TW103215356U patent/TWM494036U/en not_active IP Right Cessation
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MM4K | Annulment or lapse of a utility model due to non-payment of fees |