TWM490695U - Electrostatic actuator - Google Patents

Electrostatic actuator

Info

Publication number
TWM490695U
TWM490695U TW103210271U TW103210271U TWM490695U TW M490695 U TWM490695 U TW M490695U TW 103210271 U TW103210271 U TW 103210271U TW 103210271 U TW103210271 U TW 103210271U TW M490695 U TWM490695 U TW M490695U
Authority
TW
Taiwan
Prior art keywords
stationary
movable
electrode
electrostatic actuator
light
Prior art date
Application number
TW103210271U
Other languages
Chinese (zh)
Inventor
Chang-Li Hung
Ta-Wei Lin
Original Assignee
Opus Microsystems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Opus Microsystems Corp filed Critical Opus Microsystems Corp
Priority to TW103210271U priority Critical patent/TWM490695U/en
Publication of TWM490695U publication Critical patent/TWM490695U/en

Links

Abstract

An electrostatic actuator is described. The electrostatic actuator includes a stationary member, a movable member, a light-received portion and an insulating portion. The stationary member has a stationary electrode and the movable member attached to the stationary member has a movable electrode. An interval distance is between the movable electrode and the stationary electrode to make a relative motion between the movable member and the stationary member based on the interval distance. The light-received portion is disposed on the movable member for receiving the light beam from the external light source. The insulating portion is disposed on the movable member for electrically insulating the movable electrode from the light-received portion.
TW103210271U 2014-06-11 2014-06-11 Electrostatic actuator TWM490695U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103210271U TWM490695U (en) 2014-06-11 2014-06-11 Electrostatic actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103210271U TWM490695U (en) 2014-06-11 2014-06-11 Electrostatic actuator

Publications (1)

Publication Number Publication Date
TWM490695U true TWM490695U (en) 2014-11-21

Family

ID=60627200

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103210271U TWM490695U (en) 2014-06-11 2014-06-11 Electrostatic actuator

Country Status (1)

Country Link
TW (1) TWM490695U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI621582B (en) * 2015-08-14 2018-04-21 先進微系統科技股份有限公司 Comb-shaped actuator
CN108710138A (en) * 2018-01-29 2018-10-26 上海思致汽车工程技术有限公司 A kind of broad field laser radar system based on MEMS

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI621582B (en) * 2015-08-14 2018-04-21 先進微系統科技股份有限公司 Comb-shaped actuator
US10680535B2 (en) 2015-08-14 2020-06-09 Opus Microsystems Corporation Comb-drive actuator
CN108710138A (en) * 2018-01-29 2018-10-26 上海思致汽车工程技术有限公司 A kind of broad field laser radar system based on MEMS

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Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees