TWM490695U - Electrostatic actuator - Google Patents
Electrostatic actuatorInfo
- Publication number
- TWM490695U TWM490695U TW103210271U TW103210271U TWM490695U TW M490695 U TWM490695 U TW M490695U TW 103210271 U TW103210271 U TW 103210271U TW 103210271 U TW103210271 U TW 103210271U TW M490695 U TWM490695 U TW M490695U
- Authority
- TW
- Taiwan
- Prior art keywords
- stationary
- movable
- electrode
- electrostatic actuator
- light
- Prior art date
Links
Abstract
An electrostatic actuator is described. The electrostatic actuator includes a stationary member, a movable member, a light-received portion and an insulating portion. The stationary member has a stationary electrode and the movable member attached to the stationary member has a movable electrode. An interval distance is between the movable electrode and the stationary electrode to make a relative motion between the movable member and the stationary member based on the interval distance. The light-received portion is disposed on the movable member for receiving the light beam from the external light source. The insulating portion is disposed on the movable member for electrically insulating the movable electrode from the light-received portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103210271U TWM490695U (en) | 2014-06-11 | 2014-06-11 | Electrostatic actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103210271U TWM490695U (en) | 2014-06-11 | 2014-06-11 | Electrostatic actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
TWM490695U true TWM490695U (en) | 2014-11-21 |
Family
ID=60627200
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103210271U TWM490695U (en) | 2014-06-11 | 2014-06-11 | Electrostatic actuator |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWM490695U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI621582B (en) * | 2015-08-14 | 2018-04-21 | 先進微系統科技股份有限公司 | Comb-shaped actuator |
CN108710138A (en) * | 2018-01-29 | 2018-10-26 | 上海思致汽车工程技术有限公司 | A kind of broad field laser radar system based on MEMS |
-
2014
- 2014-06-11 TW TW103210271U patent/TWM490695U/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI621582B (en) * | 2015-08-14 | 2018-04-21 | 先進微系統科技股份有限公司 | Comb-shaped actuator |
US10680535B2 (en) | 2015-08-14 | 2020-06-09 | Opus Microsystems Corporation | Comb-drive actuator |
CN108710138A (en) * | 2018-01-29 | 2018-10-26 | 上海思致汽车工程技术有限公司 | A kind of broad field laser radar system based on MEMS |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4K | Annulment or lapse of a utility model due to non-payment of fees |