TWM490576U - System for vacuum leak detection - Google Patents

System for vacuum leak detection

Info

Publication number
TWM490576U
TWM490576U TW103212212U TW103212212U TWM490576U TW M490576 U TWM490576 U TW M490576U TW 103212212 U TW103212212 U TW 103212212U TW 103212212 U TW103212212 U TW 103212212U TW M490576 U TWM490576 U TW M490576U
Authority
TW
Taiwan
Prior art keywords
information
oxygen
vacuum chamber
leak detection
spectrometer
Prior art date
Application number
TW103212212U
Other languages
Chinese (zh)
Inventor
Te-Hsien Kao
Chi-Yao Chuang
Ping-Tsun Wu
Meng-Chun Tsou
Original Assignee
Te-Hsien Kao
Chi-Yao Chuang
Ping-Tsun Wu
Meng-Chun Tsou
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Te-Hsien Kao, Chi-Yao Chuang, Ping-Tsun Wu, Meng-Chun Tsou filed Critical Te-Hsien Kao
Priority to TW103212212U priority Critical patent/TWM490576U/en
Publication of TWM490576U publication Critical patent/TWM490576U/en

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Abstract

A system for vacuum leak detection is applied to a vacuum chamber. The system comprises an oxygen sensor, a spectrometer, and a control unit. The oxygen sensor detects oxygen concentration in the vacuum chamber, thereby outputting a first information related to the oxygen concentration. The spectrometer detects oxygen and nitrogen partial pressures in the vacuum chamber, thereby outputting a second information related to the oxygen and nitrogen partial pressures. The control unit connects to the oxygen sensor and the spectrometer, respectively, to receive the first information and the second information, respectively and determine the leakage degree of the vacuum chamber based on the first information and the second information.
TW103212212U 2014-07-09 2014-07-09 System for vacuum leak detection TWM490576U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103212212U TWM490576U (en) 2014-07-09 2014-07-09 System for vacuum leak detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103212212U TWM490576U (en) 2014-07-09 2014-07-09 System for vacuum leak detection

Publications (1)

Publication Number Publication Date
TWM490576U true TWM490576U (en) 2014-11-21

Family

ID=60626265

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103212212U TWM490576U (en) 2014-07-09 2014-07-09 System for vacuum leak detection

Country Status (1)

Country Link
TW (1) TWM490576U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108614070A (en) * 2016-12-12 2018-10-02 毅泰成科技股份有限公司 Gas concentration analysis system
TWI682155B (en) * 2014-12-11 2020-01-11 日商東京威力科創股份有限公司 Air leakage judgment method, substrate processing device and memory medium
CN111982417A (en) * 2019-05-21 2020-11-24 吴柄村 Leak detection device and leak detection method
CN112639596A (en) * 2018-08-29 2021-04-09 默克专利股份有限公司 Method and device for filling a liquid crystal cell with a medium containing at least one liquid crystal material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI682155B (en) * 2014-12-11 2020-01-11 日商東京威力科創股份有限公司 Air leakage judgment method, substrate processing device and memory medium
CN108614070A (en) * 2016-12-12 2018-10-02 毅泰成科技股份有限公司 Gas concentration analysis system
CN112639596A (en) * 2018-08-29 2021-04-09 默克专利股份有限公司 Method and device for filling a liquid crystal cell with a medium containing at least one liquid crystal material
CN111982417A (en) * 2019-05-21 2020-11-24 吴柄村 Leak detection device and leak detection method

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Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees