TWM488102U - 晶圓盒緩衝體之組合結構 - Google Patents

晶圓盒緩衝體之組合結構 Download PDF

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Publication number
TWM488102U
TWM488102U TW103210337U TW103210337U TWM488102U TW M488102 U TWM488102 U TW M488102U TW 103210337 U TW103210337 U TW 103210337U TW 103210337 U TW103210337 U TW 103210337U TW M488102 U TWM488102 U TW M488102U
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TW
Taiwan
Prior art keywords
buffer
wafer cassette
combination structure
periphery
buffer body
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TW103210337U
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English (en)
Inventor
Chang-Jia Lai
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Yeuh Tai Ind Co Ltd
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Application filed by Yeuh Tai Ind Co Ltd filed Critical Yeuh Tai Ind Co Ltd
Priority to TW103210337U priority Critical patent/TWM488102U/zh
Publication of TWM488102U publication Critical patent/TWM488102U/zh

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Claims (5)

  1. 一晶圓盒緩衝體之組合結構,包括:一緩衝體,係以緩衝材料成型為具有相對一晶圓盒底部的一承接槽,而於緩衝體四周邊向外凸設複數個緩衝臂;以及一緩衝上蓋,係以緩衝材料成型為具有相對一晶圓盒上端蓋體的一限位套槽,而於緩衝上蓋四周邊向外凸設複數個緩衝臂;俾由緩衝體該承接槽套組於晶圓盒底部,而緩衝上蓋由該限位套槽套組於晶圓盒上端蓋體,而相對組成晶圓盒的保護緩衝結構。
  2. 如請求項1所述之晶圓盒緩衝體之組合結構,其中該緩衝體於底部向下凸設複數個緩衝腳柱,而承接槽進一步設有相對晶圓盒底部支撐腳的套腳槽,且於四周邊各緩衝臂之間進一步凸設有提供握持的凸耳部。
  3. 如請求項1所述之晶圓盒緩衝體之組合結構,其中該緩衝上蓋於上表面凸設複數個緩衝頂部,而於四周邊各緩衝臂之間進一步凸設有提供握持的凸耳部。
  4. 如請求項1所述之晶圓盒緩衝體之組合結構,其中該承接槽槽及限位套槽的中央部位形成一透孔,而限位套槽的透孔的中央設有一補強桿。
  5. 如請求項1所述之晶圓盒緩衝體之組合結構,其中該緩衝材料係為保麗龍。
TW103210337U 2014-06-12 2014-06-12 晶圓盒緩衝體之組合結構 TWM488102U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103210337U TWM488102U (zh) 2014-06-12 2014-06-12 晶圓盒緩衝體之組合結構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103210337U TWM488102U (zh) 2014-06-12 2014-06-12 晶圓盒緩衝體之組合結構

Publications (1)

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TWM488102U true TWM488102U (zh) 2014-10-11

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TW103210337U TWM488102U (zh) 2014-06-12 2014-06-12 晶圓盒緩衝體之組合結構

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI643285B (zh) * 2018-03-06 2018-12-01 段睿紘 緩衝器結構
TWI673215B (zh) * 2016-12-22 2019-10-01 日商Sumco股份有限公司 緩衝材

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI673215B (zh) * 2016-12-22 2019-10-01 日商Sumco股份有限公司 緩衝材
TWI643285B (zh) * 2018-03-06 2018-12-01 段睿紘 緩衝器結構

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