TWM462952U - Structure of cigs-based solar cells using an anodized substrate with an alkali metal precursor - Google Patents
Structure of cigs-based solar cells using an anodized substrate with an alkali metal precursor Download PDFInfo
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本案係關於一種應用於薄膜太陽能電池之裝置結構,尤指一種應用於薄膜太陽能電池之具鹵化鹼金屬先驅物之陽極處理基板結構。The present invention relates to a device structure applied to a thin film solar cell, and more particularly to an anode-treated substrate structure having a halogenated alkali metal precursor applied to a thin film solar cell.
隨著全球的暖化效應與石化燃料資源逐漸的消耗,新興能源技術的開發,遂而成為人類必須嚴肅面對的問題。而在眾多的新興能源中,又以太陽能電池取代傳統石化燃料能源被視為有效解決問題的方法之一。因為太陽能電池除了取之不盡,用之不竭的優點外,更是一種安靜潔淨無污染的能源,其消耗地球資源極少,且材料開採與加工容易,再加上其發電模組壽命長等優勢,已儼然成為佈局未來的最重要產業。然而現今市場上,太陽能電池的種類眾多,一般而言,單晶矽太陽能電池的光電轉換效率較高,使用年限也比較長,但價格成本昂貴,比較適合於發電廠或交通照明號誌等場所的使用。至於另一類範圍較廣之薄膜太陽能電池,其可選用之材料除了非晶矽外,亦可採用其他,如碲化鎘、砷化鎵銦、砷化鎵等化合物半導體的材料來製作。由於薄膜太陽能電池的能量轉換效率與材料的能隙大小、光吸收係數及載子傳輸特性攸關,因此製造商必須從材料選用、鍍膜方面著手,才可製作出高效率的太陽能電池。With the global warming effect and the gradual consumption of fossil fuel resources, the development of emerging energy technologies has become a serious problem that human beings must face. Among many emerging energy sources, replacing traditional fossil fuel energy with solar cells is regarded as one of the effective ways to solve the problem. In addition to the inexhaustible advantages of solar cells, solar cells are a quiet, clean and pollution-free energy source that consumes little earth resources, and is easy to mine and process materials, plus long life of its power generation modules. The advantage has become the most important industry in the future. However, there are many types of solar cells in the market today. Generally speaking, single crystal germanium solar cells have high photoelectric conversion efficiency and long service life, but they are expensive, and are suitable for power plants or traffic lighting. usage of. As for another wide range of thin film solar cells, the materials which can be selected may be made of other materials such as cadmium telluride, indium gallium arsenide or gallium arsenide, in addition to amorphous germanium. Since the energy conversion efficiency of a thin film solar cell is critical to the material's energy gap, light absorption coefficient, and carrier transport characteristics, manufacturers must start with material selection and coating to produce a highly efficient solar cell.
1977年,美國Maine大學率先研究以銅銦硒 (copper indium selenide,簡稱CIS)三元素組成之材料來製作薄膜太陽能電池,後來為提升轉換效率,演變至使用銅銦鎵硒(copper indium gallium selenide,簡稱CIGS)四元素材料。由於CIGS薄膜太陽電池之光電轉換層厚度能薄至數微米,據此除可降低材料成本,同時還可節省製造時所投入之能源。一旦光電轉換層變薄,CIGS系材料的光吸收能力也會變得相當高。理論上而言,CIGS薄膜太陽能電池之發電效率可高達25~30%,比單晶矽高出許多,而一般商用CIGS模組多可達10~12%。另一方面,CIGS系半導體具有在厚度方向改變其組成就能控制其吸收波長領域的性質,所以若在該組成上下工夫,讓吸收波長領域變廣,那麼自然就能提高太陽能電池的發電效率。再者,CIGS薄膜太陽能電池在光或放射線照射下,具有比矽基太陽能電池更難以劣化的優勢,所以產品壽命較長,更能滿足於太空中使用的需求。此外,CIGS薄膜太陽能電池屬於直接能隙半導體材料,具有良好的光吸收特性,其光吸收係數優於其他太陽能電池。基於前述種種優異的性能,CIGS薄膜太陽能電池遂成為現今業界關注焦點之一。In 1977, the University of Maine in the United States took the lead in researching copper indium and selenium. (copper indium selenide, referred to as CIS) three elements of materials to make thin-film solar cells, and later to improve conversion efficiency, the use of copper indium gallium selenium (CIGS) four-element material. Since the thickness of the photoelectric conversion layer of the CIGS thin film solar cell can be as thin as several micrometers, the material cost can be reduced, and the energy input during manufacturing can be saved. Once the photoelectric conversion layer is thinned, the light absorbing ability of the CIGS-based material also becomes quite high. In theory, the power generation efficiency of CIGS thin-film solar cells can be as high as 25~30%, which is much higher than single crystal germanium, and the average commercial CIGS module can reach 10~12%. On the other hand, CIGS-based semiconductors have the property of controlling the absorption wavelength field by changing the composition in the thickness direction. Therefore, if the composition is used to make the absorption wavelength field wider, the power generation efficiency of the solar cell can naturally be improved. Furthermore, CIGS thin-film solar cells have the advantage of being more difficult to degrade than samar-based solar cells under light or radiation, so the product has a longer life span and is more suitable for use in space. In addition, CIGS thin film solar cells are direct energy gap semiconductor materials with good light absorption characteristics, and their light absorption coefficient is superior to other solar cells. Based on the aforementioned excellent performance, CIGS thin film solar cells have become one of the focuses of the industry today.
請同時參閱第一圖及第二圖,其中第一圖為第一習知技藝之CIGS薄膜太陽能電池結構示意圖,而第二圖為第二習知技藝之CIGS薄膜太陽能電池結構示意圖。如第一圖所示,第一習知技藝之CIGS薄膜太陽能電池,其結構主要包含一玻璃基板11、一背電極12、一CIGS吸收層13、一緩衝層14、一本質氧化層15、一透明導電薄膜16、一抗反射薄膜17以及一外部電極18。由於該玻璃基板11中含有鈉(Sodium,Na)元素,在共蒸鍍製程中,鈉(Sodium,Na)元素會擴散到CIGS吸收層13,進而具有提升太陽能電池轉換效率、增加填充因子(Fill factor)及開路電壓(open-circuit voltage)、增進CIGS導電係數以及減小CIGS 晶粒尺寸等優點。然而,為了達到上述的優勢,關鍵就是鈉的濃度必須控制於一最佳值,若無鈉的摻入將會使太陽能電池效率減少2%~3%。所以針對一些如第二圖所示,採用具無鈉的聚醯亞胺(polyimide,PI)或不銹鋼所製成的無納基板21之第二習知技藝之CIGS薄膜太陽能電池,除了緩衝層24及本質氧化層251、透明導電薄膜252、抗反射薄膜253以及外部電極254之結構與第一習知技藝之CIGS薄膜太陽能電池相同外,還需要在背電極22上再導入先驅層氟化鈉26,才能供給CIGS吸收層23之所需的鈉濃度於最佳值。但是由於鍍在聚醯亞胺或不銹鋼基板之先驅層氟化鈉,在製作完CIGS薄膜太陽能電池後,必須全部消耗完畢,否則這些殘留的先驅氟化鈉在CIGS吸收層與背電極間易形成複合中心(recombination center),而大大將降低太陽能電池之轉換效率。Please refer to the first figure and the second figure at the same time, wherein the first figure is a schematic diagram of the structure of the CIGS thin film solar cell of the first prior art, and the second figure is a schematic diagram of the structure of the CIGS thin film solar cell of the second prior art. As shown in the first figure, the first conventional CIGS thin film solar cell has a structure mainly comprising a glass substrate 11, a back electrode 12, a CIGS absorption layer 13, a buffer layer 14, an intrinsic oxide layer 15, and a The transparent conductive film 16, an anti-reflection film 17, and an external electrode 18. Since the glass substrate 11 contains sodium (Sodium, Na) elements, sodium (Sodium, Na) elements diffuse into the CIGS absorption layer 13 during the co-evaporation process, thereby improving solar cell conversion efficiency and increasing the fill factor (Fill). Factor) and open-circuit voltage, improve CIGS conductivity and reduce CIGS Advantages such as grain size. However, in order to achieve the above advantages, the key is that the concentration of sodium must be controlled to an optimum value. If sodium is not incorporated, the solar cell efficiency will be reduced by 2% to 3%. Therefore, for some CIGS thin film solar cells of the second conventional technique without the sodium substrate 21 made of sodium-free polyimine (PI) or stainless steel, as shown in the second figure, except for the buffer layer 24 The structure of the intrinsic oxide layer 251, the transparent conductive film 252, the anti-reflection film 253, and the external electrode 254 is the same as that of the first conventional CIGS thin film solar cell, and it is also required to introduce the precursor layer sodium fluoride 26 on the back electrode 22. In order to supply the desired sodium concentration of the CIGS absorbing layer 23 to an optimum value. However, due to the sodium fluoride plated on the precursor layer of the polyimide or stainless steel substrate, after the CIGS thin film solar cell is fabricated, it must be completely consumed. Otherwise, the residual precursor sodium fluoride is easily formed between the CIGS absorber layer and the back electrode. The recombination center will greatly reduce the conversion efficiency of solar cells.
然而,在實際應用時,由於CIGS薄膜太陽能電池所採用之基板需具有可撓性,如果採用玻璃基板則需以薄型玻璃為佳,然而薄型玻璃材料成本太高,且容易在製程中破裂或導致刮傷等缺失。而如果採用聚醯亞胺基板,其雖然具可撓性,但相對可耐高溫僅至約300℃,然而,後續的製程,例如CIGS共蒸鍍或濺鍍的製程,溫度高達300℃~500℃,將使得聚醯亞胺基板會因為熱應力而發生翹曲變形,或發生背電極與聚醯亞胺基板產生脫離現象(debonding),因而降低良率,對整個製程相當不利。如果採用可撓性較佳的不銹鋼基板,則因為絕緣性差,在使用的可靠度上易使CIGS薄膜太陽能電池之背電極發生漏電流的嚴重問題。However, in practical applications, since the substrate used in the CIGS thin film solar cell needs to have flexibility, if a glass substrate is used, it is preferable to use a thin glass, but the thin glass material is too expensive and easily broken or caused in the process. Scratches and other missing. However, if a polyimide substrate is used, although it is flexible, it can withstand high temperatures up to about 300 ° C. However, subsequent processes, such as CIGS co-evaporation or sputtering processes, can reach temperatures as high as 300 ° C to 500 ° °C, will cause the polyimide substrate to warp and deform due to thermal stress, or debonding of the back electrode and the polyimide substrate, thereby reducing the yield, which is quite disadvantageous for the entire process. If a stainless steel substrate having a high flexibility is used, the insulation property is poor, and the reliability of the use tends to cause a serious problem of leakage current in the back electrode of the CIGS thin film solar cell.
美國專利案號USP5,626,688則針對前述問題,提出一擴散屏障層概念。請參閱第三圖,其為第三習知技藝之 CIGS薄膜太陽能電池結構示意圖。如第三圖所示,其薄膜太陽能電池結構除具有一玻璃基板31、一背電極32、一CIGS吸收層33、一緩衝層34、本質氧化層351、透明導電薄膜352、抗反射薄膜353以及外部電極354以及等同第二圖之先驅層氟化鈉36外,於玻璃基板31與背電極32間更具有一擴散屏障層37,其由氧化鋁材質所構成。該擴散屏障層雖然可以阻止使用不銹鋼基板之CIGS薄膜太陽能電池發生漏電流的嚴重問題,但不銹鋼基板不含有鈉金屬,無法提供及控制CIGS薄膜太陽能電池所需的鈉含量,實在是不適合用來做為CIGS薄膜太陽能電池之基板。若使用在含鈉之玻璃基板31,該擴散屏障層37會阻絕玻璃內鈉元素擴散進入CIGS吸收層33而影響其長晶外,及會降低其光電轉換效率。但該擴散屏障層37在該玻璃基板31之長成,一般藉由磁控濺鍍之方式達成,故該擴散展障層37之長成品質及功效有限,且製造成本相對較高,因此還是無法滿足品質以及成本上的考量。U.S. Patent No. 5,626,688 proposes a diffusion barrier layer concept for the aforementioned problems. Please refer to the third figure, which is the third conventional skill. Schematic diagram of CIGS thin film solar cell structure. As shown in the third figure, the thin film solar cell structure has a glass substrate 31, a back electrode 32, a CIGS absorber layer 33, a buffer layer 34, an intrinsic oxide layer 351, a transparent conductive film 352, an antireflection film 353, and The external electrode 354 and the precursor layer sodium fluoride 36 equivalent to the second figure have a diffusion barrier layer 37 between the glass substrate 31 and the back electrode 32, which is made of an alumina material. Although the diffusion barrier layer can prevent the serious leakage current of the CIGS thin film solar cell using the stainless steel substrate, the stainless steel substrate does not contain sodium metal, and cannot provide and control the sodium content required for the CIGS thin film solar cell, which is not suitable for use. It is a substrate for CIGS thin film solar cells. If used in the sodium-containing glass substrate 31, the diffusion barrier layer 37 blocks the diffusion of sodium into the CIGS absorber layer 33, which affects the crystal growth and reduces the photoelectric conversion efficiency. However, the diffusion barrier layer 37 is grown on the glass substrate 31, and is generally achieved by magnetron sputtering. Therefore, the diffusion barrier layer 37 has limited quality and efficacy, and the manufacturing cost is relatively high. Unable to meet quality and cost considerations.
簡而言之,習知CIGS薄膜太陽能電池之裝置結構及其製備方法,因受限於其結構及製造流程,例如所採用之基板不論是薄型玻璃基板、聚醯亞胺(polyimide,PI)基板或者不銹鋼基板皆有所缺失,且同時存在著無法有效控制最佳含量之鈉離子導入CIGS吸收層內的最大問題,亦無法同時兼顧生產成本之考量,值得業界與學者們加以研究改進。本案申請人有鑑於習知技藝之缺失,乃經悉心試驗與研究,並一本鍥而不捨之精神,遂而提出一種「薄膜太陽能電池之裝置結構」,藉由揭示一具鹵化鹼金屬先驅物之陽極處理基板結構及其處理流程,除了可以準確控制後續鈉之類鹼金屬導入CIGS吸收層之含量,並可簡化整體CIGS薄膜太陽能電池之製造流程,進而降低生產成本,實為一不可多得之創作。In short, the structure of the conventional CIGS thin film solar cell and its preparation method are limited by its structure and manufacturing process, such as the substrate used, whether it is a thin glass substrate or a polyimide (PI) substrate. Or the stainless steel substrate is missing, and at the same time there is the biggest problem that can not effectively control the optimal content of sodium ions introduced into the CIGS absorption layer, and it is also impossible to consider the production cost at the same time, which is worthy of research and improvement by the industry and scholars. In view of the lack of conventional skills, the applicant of this case, through careful testing and research, and a spirit of perseverance, proposed a "film cell structure for thin-film solar cells" by revealing the anode of a halogenated alkali metal precursor. The substrate structure and its processing flow can not only accurately control the content of the alkali metal introduced into the CIGS absorber layer, but also simplify the manufacturing process of the overall CIGS thin film solar cell, thereby reducing the production cost. .
本段摘述本創作的某些特徵,其他特徵將敍述於後續的段落。本創作藉由附加的申請專利範圍定義,其合併於此段落作為參考。This section summarizes some of the features of this creation, and other features will be described in subsequent paragraphs. This creation is defined by the scope of the appended patent application, which is hereby incorporated by reference.
本案之主要目的為提供一種應用於薄膜太陽能電池之具鹵化鹼金屬先驅物之陽極處理基板結構,透過該結構之導入,以簡單之預處理製程來有效控制CIS/CIGS吸收層之鹼金屬擴散含量,同時避免基板在整體製程中可能帶入CIS/CIGS吸收層之污染,進而達到簡化整體製程,降低生產成本之目的。The main purpose of the present invention is to provide an anode-treated substrate structure with a halogenated alkali metal precursor applied to a thin film solar cell. Through the introduction of the structure, the alkali metal diffusion content of the CIS/CIGS absorption layer can be effectively controlled by a simple pretreatment process. At the same time, the substrate may be prevented from being contaminated by the CIS/CIGS absorption layer in the overall process, thereby simplifying the overall process and reducing the production cost.
為達上述目的,本案之一較佳實施樣態為提供一種應用於薄膜太陽能電池之結構裝置,其結構至少包含一基底層;以及一陽極處理層,形成於該基底層上,並具有複數個孔洞陣列;其中該複數個孔洞內更具有一定量鹵化鹼金屬先驅物,用以控制薄膜之鹼金屬擴散含量。又該陽極處理層係為一陽極氧化鋁(anodic aluminum oxide,AAO),而該複數個孔洞陣列係為具有六邊形(hexagon)孔洞陣列結構之氧化鋁構成,其中該複數個孔洞陣列均具均勻筆直孔道,其孔洞直徑範圍係由14nm到300nm,而空孔分佈的密度範圍則由109 /cm2 到1012 /cm2 。In order to achieve the above object, a preferred embodiment of the present invention provides a structural device for a thin film solar cell, the structure comprising at least a base layer, and an anodized layer formed on the base layer and having a plurality of An array of holes; wherein the plurality of holes further have a quantity of a halogenated alkali metal precursor for controlling the alkali metal diffusion content of the film. The anode treatment layer is an anodic aluminum oxide (AAO), and the plurality of aperture arrays are made of alumina having a hexagonal array structure, wherein the plurality of aperture arrays are The uniform straight channel has a hole diameter ranging from 14 nm to 300 nm, and the hole distribution has a density ranging from 10 9 /cm 2 to 10 12 /cm 2 .
本案得藉由下列圖式與實施例說明,俾得一更清楚之了解。The case can be explained by the following figures and examples, and a clearer understanding is obtained.
11‧‧‧玻璃基板11‧‧‧ glass substrate
12‧‧‧背電極12‧‧‧ Back electrode
13‧‧‧CIGS吸收層13‧‧‧CIGS absorption layer
14‧‧‧緩衝層14‧‧‧buffer layer
15‧‧‧本質氧化層15‧‧‧Nature oxide layer
16‧‧‧透明導電薄膜16‧‧‧Transparent conductive film
17‧‧‧抗反射薄膜17‧‧‧Anti-reflective film
18‧‧‧外部電極18‧‧‧External electrode
21‧‧‧無鈉基板21‧‧‧Sodium-free substrate
22‧‧‧背電極22‧‧‧ Back electrode
23‧‧‧CIGS吸收層23‧‧‧CIGS absorption layer
24‧‧‧緩衝層24‧‧‧buffer layer
251‧‧‧本質氧化層251‧‧‧Nature oxide layer
252‧‧‧透明導電薄膜252‧‧‧Transparent conductive film
253‧‧‧抗反射薄膜253‧‧‧Anti-reflective film
254‧‧‧外部電極254‧‧‧External electrode
26‧‧‧先驅層氟化鈉26‧‧‧ precursor layer sodium fluoride
31‧‧‧玻璃基板31‧‧‧ glass substrate
32‧‧‧背電極32‧‧‧Back electrode
33‧‧‧CIGS吸收層33‧‧‧CIGS absorption layer
34‧‧‧緩衝層34‧‧‧buffer layer
351‧‧‧本質氧化層351‧‧‧Nature oxide layer
352‧‧‧透明導電薄膜352‧‧‧Transparent conductive film
353‧‧‧抗反射薄膜353‧‧‧Anti-reflective film
354‧‧‧外部電極354‧‧‧External electrode
36‧‧‧先驅層氟化鈉36‧‧‧ precursor layer sodium fluoride
37‧‧‧擴散屏障層37‧‧‧Diffusion barrier
40‧‧‧基板結構40‧‧‧Substrate structure
401‧‧‧基底層401‧‧‧ basal layer
402‧‧‧陽極處理層402‧‧‧Anode treatment layer
403‧‧‧孔洞陣列403‧‧‧ hole array
404‧‧‧鹵化鹼金屬先驅物404‧‧‧ Halogenated alkali metal precursors
501‧‧‧基底層501‧‧‧ basal layer
502‧‧‧鋁層502‧‧‧Aluminum layer
503‧‧‧犧牲氧化鋁層503‧‧‧ Sacrificial Alumina Layer
504‧‧‧陽極處理層504‧‧‧Anode treatment layer
505‧‧‧孔洞陣列505‧‧‧ hole array
60‧‧‧基板結構60‧‧‧Substrate structure
601‧‧‧基底層601‧‧‧ basal layer
602‧‧‧陽極處理層602‧‧‧Anode treatment layer
603‧‧‧孔洞陣列603‧‧‧ hole array
604‧‧‧鹵化鹼金屬先驅物604‧‧‧ Halogenated alkali metal precursors
61‧‧‧背電極61‧‧‧ Back electrode
62‧‧‧吸收層62‧‧‧absorbing layer
63‧‧‧緩衝層63‧‧‧buffer layer
641‧‧‧未摻雜氧化鋅層641‧‧‧Undoped zinc oxide layer
642‧‧‧鋁摻雜氧化鋅層642‧‧‧Aluminum doped zinc oxide layer
643‧‧‧氟化鎂層643‧‧‧Magnesium fluoride layer
644‧‧‧鋁鎳合金644‧‧‧Al-nickel alloy
第一圖:其係為第一習知技藝之CIGS薄膜太陽能電池結構示意圖。First: It is a schematic diagram of the structure of a CIGS thin film solar cell of the first prior art.
第二圖:其係為第二習知技藝之CIGS薄膜太陽能電池結構示意圖。Second: It is a schematic diagram of the structure of a CIGS thin film solar cell according to the second conventional technique.
第三圖:其係為第三習知技藝之CIGS薄膜太陽能電池結構示意圖。The third figure is a schematic diagram of the structure of a CIGS thin film solar cell which is the third conventional technique.
第四圖:其係揭示本案一較佳實施例應用於薄膜太陽能電池之具鹵化鹼金屬先驅物之陽極處理基板結構示意圖。FIG. 4 is a schematic view showing the structure of an anode-treated substrate with a halogenated alkali metal precursor applied to a thin film solar cell according to a preferred embodiment of the present invention.
第五圖:其係揭示本案陽極氧化鋁AAO結構之製造流程圖示意圖。Figure 5: It is a schematic diagram showing the manufacturing process of the anodized aluminum AAO structure in this case.
第六圖:其係揭示本案一較佳實施例之CIGS薄膜太陽能電池結構示意圖。Figure 6 is a schematic view showing the structure of a CIGS thin film solar cell according to a preferred embodiment of the present invention.
體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化,其皆不脫離本案的範圍,且其中的說明及圖示在本質上係當作說明之用,而非用以限制本案。Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of
本案係為一種應用於薄膜太陽能電池之具鹵化鹼金屬先驅物之陽極處理基板結構及其製造方法。其主要採用具有多孔性及耐熱性之一基底層,並透過預處理裝置及方法之導入,於後續形成CIS/CIGS吸收層的製程中,使預填入基底層之定量鹵化鹼金屬先驅物擴散至該CIS/CIGS吸收層,進而提供並控制該吸收層中所需之鹼金屬含量;並且藉由基板上之陽極處理層有效阻絕源自該基底層之可能污染源。以下將以實施例進一步說明本案創作之內容,然而可應用本案技術之結構及方法並不限於所提之實施例而已,其他任何適用本案技術之結構及方法,在此皆可併入參考。The present invention relates to an anode-treated substrate structure having a halogenated alkali metal precursor applied to a thin film solar cell and a method of manufacturing the same. It mainly adopts a base layer having porosity and heat resistance, and is introduced through a pretreatment device and a method, and in the subsequent process of forming a CIS/CIGS absorption layer, the quantitative halogenated alkali metal precursor pre-filled into the base layer is diffused. Up to the CIS/CIGS absorber layer, thereby providing and controlling the desired alkali metal content in the absorber layer; and effectively blocking possible sources of contamination from the substrate layer by the anodized layer on the substrate. The contents of the present invention will be further described in the following examples, but the structures and methods in which the present technology can be applied are not limited to the embodiments, and any other structures and methods applicable to the present technology can be incorporated herein by reference.
請參閱第四圖,其係揭示本案較佳實施例應用於薄膜太陽能電池之具鹵化鹼金屬先驅物之陽極處理基板結構。如圖所示,其基板結構40至少包含有一基底層401;以及一陽極處理層402,形成於該基底層401上,並具有複數個孔洞陣列403;其中該複數個孔洞403內更具有一定量鹵化鹼金屬先驅物404,以供應該吸收層中之鹼金屬含量。又該陽極處理層402係為陽極氧化鋁,而該複數個孔洞陣列403係為具有六邊形(hexagon)孔洞陣列結構之氧化鋁構成,其中該複數個孔洞陣列403均具均勻筆直孔道,其孔洞直徑範圍可由14nm到300nm,而空孔分佈的密度範圍則可由109 /cm2 到1012 /cm2 。針對此一結構,其製造方法則至少包含步驟:a)提供一基底層401;b)陽極處理該基底層401表面,以形成一具複數個孔洞陣列403之陽極處理層402;以及c)於該複數個孔洞陣列403中填入一鹵化鹼金屬先驅物404。在實際應用時,該結構之製造可藉由一階段或兩階段之陽極處理而達成,且所填入之鹵化鹼金屬先驅物404係為定量之鹵化鹼金屬先驅物404,以滿足薄膜太陽能電池之CIS/CIGS吸收層所需的鹼金屬含量。Please refer to the fourth figure, which discloses an anode-treated substrate structure of a halogenated alkali metal precursor applied to a thin film solar cell in a preferred embodiment of the present invention. As shown, the substrate structure 40 includes at least one base layer 401; and an anodized layer 402 formed on the base layer 401 and having a plurality of holes 403; wherein the plurality of holes 403 have a certain amount An alkali metal precursor 404 is halogenated to supply the alkali metal content of the absorbent layer. The anode treatment layer 402 is anodized aluminum, and the plurality of aperture arrays 403 are made of alumina having a hexagonal array of holes, wherein the plurality of aperture arrays 403 have uniform straight holes. The pore diameter may range from 14 nm to 300 nm, and the pore distribution may have a density ranging from 10 9 /cm 2 to 10 12 /cm 2 . For the structure, the manufacturing method comprises at least the steps of: a) providing a substrate layer 401; b) anodizing the surface of the substrate layer 401 to form an anode treatment layer 402 having a plurality of aperture arrays 403; and c) The plurality of holes array 403 is filled with a halogenated alkali metal precursor 404. In practical applications, the structure can be fabricated by one-stage or two-stage anode treatment, and the filled alkali metal precursor 404 is a quantitative halogenated alkali metal precursor 404 to satisfy the thin film solar cell. The alkali metal content required for the CIS/CIGS absorber layer.
第五圖(A)-(E)更進一步揭示本案陽極氧化鋁AAO結構之製造流程圖。首先,在一基底層501上形成一高純度(99.9%)鋁層502,如第五圖(A)所示,其中該鋁層502結構在後續製程前必須先於真空度10-3 Pa及550℃中進行退火10小時以去除內部殘留應力並獲致一均質的鋁層表面。接著,該鋁層502在濃度0.35M的草酸(oxalic acid,H2 C2 O4 )溶液中,導入直流電壓(42V,0℃)電鍍12小時,使該鋁層502表面產生電化學反應,進而在該鋁層502表面上再形成一犧牲氧化鋁層503,即如第五圖(B)所示。爾後整個結構置入6.5 wt.%磷酸(H3 PO4 )與2.0 wt.%鉻酸 (H2 CrO4 )之65℃混合溶液中浸置122小時,以使該犧牲氧化鋁層503脫離該鋁層502表面,即如第五圖(C)所示。接著再重覆與前相同之直流電壓(42V,0℃)電鍍24小時,即可獲致如第五圖(D)所示之一陽極處理層504。其中該基底層501為一氧化鋁層,且該陽極處理層504中複數個孔洞陣列505可以濃度1.2M之氯化銅溶液去除內殘留,接著以濃度6 wt.%溫度23℃之磷酸溶液(H3 PO4 )浸蝕2小時,即可移除位於該複數個孔洞陣列505之每一孔洞底部之該陽極處理層504以及部分該鋁層502,以微度擴大每一孔洞的寬度並獲致如第五圖(E)所示之陽極氧化鋁(anodic aluminum oxide,AAO)孔洞陣列結構。至於鹵化鹼金屬先驅物之填置,則可以水溶液形式行之。以氟化鈉(NaF)為例,以25℃、100克之純水加入4.13克之氟化鈉(NaF)即可調配出填置所需之水溶液;又若以氟化鋰(LiF)為例,則其填置所需之水溶液則可以20℃、1公升之純水加入2.7克之氟化鋰(LiF)行之。The fifth (A)-(E) further reveals the manufacturing flow chart of the anodized aluminum AAO structure of the present invention. First, a high-purity (99.9%) aluminum layer 502 is formed on a base layer 501, as shown in FIG. 5(A), wherein the aluminum layer 502 structure must have a vacuum degree of 10 -3 Pa before the subsequent process. Annealing was carried out at 550 ° C for 10 hours to remove internal residual stress and to obtain a homogeneous aluminum layer surface. Next, the aluminum layer 502 was plated with a DC voltage (42 V, 0 ° C) for 12 hours in a solution of 0.35 M oxalic acid (H 2 C 2 O 4 ) to cause an electrochemical reaction on the surface of the aluminum layer 502. Further, a sacrificial aluminum oxide layer 503 is further formed on the surface of the aluminum layer 502, as shown in FIG. 5(B). Thereafter, the entire structure was immersed in a 65 ° C mixed solution of 6.5 wt.% phosphoric acid (H 3 PO 4 ) and 2.0 wt.% of chromic acid (H 2 CrO 4 ) for 122 hours to disengage the sacrificial alumina layer 503. The surface of the aluminum layer 502 is as shown in the fifth figure (C). Then, the same DC voltage (42 V, 0 ° C) as before is electroplated for 24 hours to obtain an anodized layer 504 as shown in Fig. 5 (D). The base layer 501 is an aluminum oxide layer, and the plurality of holes array 505 in the anodized layer 504 can be removed by a copper chloride solution having a concentration of 1.2 M, followed by a phosphoric acid solution having a concentration of 6 wt.% and a temperature of 23 ° C ( H 3 PO 4 ) is etched for 2 hours, and the anode treatment layer 504 and a portion of the aluminum layer 502 located at the bottom of each of the plurality of holes array 505 can be removed to slightly widen the width of each hole and obtain The anodized aluminum oxide (AAO) hole array structure shown in the fifth figure (E). As for the filling of the halogenated alkali metal precursor, it can be carried out in the form of an aqueous solution. Taking sodium fluoride (NaF) as an example, adding 4.13 g of sodium fluoride (NaF) at 25 ° C and 100 g of pure water can prepare the aqueous solution required for filling; if lithium fluoride (LiF) is used as an example, Then, the aqueous solution required for filling can be added to 2.7 g of lithium fluoride (LiF) at 20 ° C, 1 liter of pure water.
當然,本案具鹵化鹼金屬先驅物之陽極處理基板結構並不受限於前述製造方法,更可單以一階段陽極處理行之。其方法係先在一基底層501上形成一鋁層502,如第五圖(A)所示,其中該鋁層502結構在後續製程前必須先行去污、於鹼性溶液中浸蝕,並以蒸餾水洗淨後再行電解拋光,以獲致所需之光滑表層結構。而在電解拋光的過程中,該鋁層502表面必須浸置於濃酸或鹼溶液中數分鐘,以去除其表面因電解而生成之氧化層。同時為保持表面潔淨度,表面必須以蒸餾水清洗再置於氮氣環境保存。接著,將清潔後的鋁層502置入磷酸溶液中,導入直流電壓(100V,0℃,以鉑片作為對電極),使鋁層502表面產生電化學反應,進而在鋁層502表面上形成陽極處理層504,即如第五圖(D)所示。最後整個結構置入飽和的氯化汞溶液去除複數個孔洞陣 列505內殘留。而陽極處理層504中複數個孔洞陣列505之底部則先以蒸餾水洗淨後再浸置於濃度5 wt.%溫度30℃之磷酸溶液中30分鐘即可獲致如第五圖(E)所示之陽極氧化鋁(anodic aluminum oxide,AAO)孔洞陣列結構。依此流程所得之陽極氧化鋁(anodic aluminum oxide,AAO)孔洞陣列其孔洞直徑為110±7 nm;而其孔洞密度則約為1010 ~1011 /cm2 。Of course, the anode-treated substrate structure of the halogenated alkali metal precursor in this case is not limited to the foregoing manufacturing method, and can be performed by a single-stage anode treatment. The method first forms an aluminum layer 502 on a substrate layer 501, as shown in FIG. 5(A), wherein the aluminum layer 502 structure must be decontaminated, etched in an alkaline solution, and etched before the subsequent process. The distilled water is washed and then electropolished to obtain the desired smooth surface structure. In the process of electrolytic polishing, the surface of the aluminum layer 502 must be immersed in a concentrated acid or alkali solution for several minutes to remove the oxide layer formed on the surface by electrolysis. At the same time, in order to maintain the surface cleanliness, the surface must be washed with distilled water and then stored in a nitrogen atmosphere. Next, the cleaned aluminum layer 502 is placed in a phosphoric acid solution, and a direct current voltage (100 V, 0 ° C, with a platinum sheet as a counter electrode) is introduced to cause an electrochemical reaction on the surface of the aluminum layer 502 to form on the surface of the aluminum layer 502. The anodized layer 504 is as shown in the fifth diagram (D). Finally, the entire structure is placed in a saturated solution of mercury chloride to remove residues in the plurality of holes 505. The bottom of the plurality of holes array 505 in the anodized layer 504 is first washed with distilled water and then immersed in a phosphoric acid solution having a concentration of 5 wt.% at 30 ° C for 30 minutes to obtain as shown in the fifth figure (E). Anodized aluminum oxide (AAO) hole array structure. The anodic aluminum oxide (AAO) pore array obtained according to the procedure has a pore diameter of 110±7 nm; and the pore density is about 10 10 10 10 11 /cm 2 .
請參閱第六圖,其係揭示本案較佳實施例之CIGS薄膜太陽能電池結構示意圖。當本案具鹵化鹼金屬先驅物604之陽極處理基板結構60應用於薄膜太陽能電池時,其結構除了依前述方法先行處理之基板結構60包含有一基底層601、一具有複數個孔洞陣列603之陽極處理層602及一填入複數個孔洞603內之鹵化鹼金屬先驅物604外,更包含有一背電極61,形成於該陽極處理層602上;一吸收層62,形成於該背電極61上,並使該鹵化鹼金屬先驅物之鹼金屬可擴散其中;一緩衝層63,形成於該吸收層62上,如第六圖所示。在實際應用時,前述鹵化鹼金屬先驅物604係選自氟化鈉(NaF)、氟化鋰(LiF)、硫化鈉(Na2 S)或硒化鈉(Na2 Se)之一。而在實務製程150微米之基板結構60之陽極處理層602上,該背電極61可以2kW之直流磁控濺鍍(DC magnetron sputtering)來濺鍍鉬金屬,基板溫度控制在300℃,即可形成厚度約500奈米且具雙層鉬結構之背電極61。而該吸收層62則可由銅銦鎵硒(copper indium gallium selenide,CIGS)四元素以多源同時蒸鍍法來生成。若將之細分為三階段蒸鍍程序,銦、鎵及硒元素首先以400℃蒸鍍於該背電極61上,形成約2微米之(銦,鎵)2硒3化合層;接著銅及硒元素加入直接與(銦,鎵)2硒3化合層在560℃的溫度下反應生成富含銅之CIGS層;而第三階段銦、鎵及硒元素再蒸鍍於該CIGS層上,以使其轉變為富含(銦、 鎵)之CIGS組成。然而依前述流程所生成之吸收層62,其整體厚度約為25微米。而在該吸收層62上,接著再將一硫化鎘(CdS)或硫化鋅(ZnS)材質以一化學浸泡沉積法(chemical bath deposition,CBD)及射頻磁控濺鍍法(RF magnetron sputtering)沈積出該緩衝層63,其厚度約為50奈米。隨後緩衝層63上則可由多種組合構成多重層別之透光電極結構,若以70奈米未摻雜氧化鋅層/400奈米鋁摻雜氧化鋅層/100奈米氟化鎂層/2微米鋁鎳合金之透光電極結構為例,其製造流程可先以射頻磁控濺鍍法沈積未摻雜氧化鋅層641於該緩衝層63上;再以射頻磁控濺鍍法沈積鋁摻雜氧化鋅層642於該未摻雜氧化鋅層641上;接著以直流濺鍍法(DC sputtering)沈積氟化鎂層643於該鋁摻雜氧化鋅層642上;最後再以熱蒸鍍法(thermal evaporation)沈積鋁鎳合金644於該氟化鎂層643,即可分別接續形成本質氧化層、透明導電薄膜、抗反射薄膜以及外部電極結構。藉此,本案所揭示之薄膜太陽能電池結構在16平方公分的作動區上,其開路電壓(open-circuit voltage負載無限大時所輸出的最大電壓)可增至689mV,而短路電流(負載為零時所輸出的最大電流)成為30mA/cm2 ,使其轉換效率可達14.5%,而評斷其品質之填充因子(Fill factor)更增至67%,均說明本案薄膜太陽能電池之裝置結構及其製備方法實用性及卓越功效。Please refer to the sixth figure, which is a schematic structural diagram of a CIGS thin film solar cell according to a preferred embodiment of the present invention. When the anode-treated substrate structure 60 having the halogenated alkali metal precursor 604 is applied to a thin film solar cell, the substrate structure 60 having the structure processed in advance according to the foregoing method includes a base layer 601 and an anode treatment having a plurality of holes array 603. The layer 602 and a halogenated alkali metal precursor 604 filled in the plurality of holes 603 further include a back electrode 61 formed on the anode treatment layer 602; an absorption layer 62 is formed on the back electrode 61, and The alkali metal of the halogenated alkali metal precursor may be diffused therein; a buffer layer 63 is formed on the absorption layer 62 as shown in FIG. In practical applications, the aforementioned halogenated alkali metal precursor 604 is selected from one of sodium fluoride (NaF), lithium fluoride (LiF), sodium sulfide (Na 2 S) or sodium selenide (Na 2 Se). On the anode treatment layer 602 of the 150 micron substrate structure 60, the back electrode 61 can be sputtered with molybdenum metal by DC magnetron sputtering of 2 kW, and the substrate temperature is controlled at 300 ° C to form A back electrode 61 having a thickness of about 500 nm and having a two-layer molybdenum structure. The absorbing layer 62 can be formed by a multi-source simultaneous vapor deposition method using four elements of copper indium gallium selenide (CIGS). If it is subdivided into a three-stage evaporation process, indium, gallium and selenium are first vapor deposited on the back electrode 61 at 400 ° C to form a 2 μm (indium, gallium) 2 selenium 3 compound layer; then copper and selenium The element is added directly to the (indium, gallium) 2 selenide 3 compound layer to form a copper-rich CIGS layer at a temperature of 560 ° C; and the third stage of indium, gallium and selenium elements are further evaporated on the CIGS layer, so that It is transformed into a CIGS composition rich in (indium, gallium). However, the absorbent layer 62 produced in accordance with the foregoing process has an overall thickness of about 25 microns. On the absorbing layer 62, a cadmium sulfide (CdS) or zinc sulfide (ZnS) material is further deposited by a chemical bath deposition (CBD) and RF magnetron sputtering. The buffer layer 63 is formed to have a thickness of about 50 nm. Then, the buffer layer 63 can be composed of a plurality of combinations to form a multi-layer transparent electrode structure, if a 70 nm undoped zinc oxide layer/400 nm aluminum doped zinc oxide layer/100 nm magnesium fluoride layer/2 For example, the light-transmissive electrode structure of the micro-aluminum-nickel alloy can be firstly deposited on the buffer layer 63 by RF magnetron sputtering, and then deposited by RF magnetron sputtering. A zinc oxide layer 642 is deposited on the undoped zinc oxide layer 641; then a magnesium fluoride layer 643 is deposited on the aluminum-doped zinc oxide layer 642 by DC sputtering; finally, by thermal evaporation. A thermal nickel is deposited on the magnesium fluoride layer 643 to form an intrinsic oxide layer, a transparent conductive film, an antireflection film, and an external electrode structure, respectively. Therefore, the thin film solar cell structure disclosed in the present invention can increase the open circuit voltage (the maximum voltage output when the open-circuit voltage is infinite) to 689 mV on the 16 square centimeter operating region, and the short circuit current (the load is zero). The maximum current output is 30 mA/cm 2 , which makes the conversion efficiency reach 14.5%, and the fill factor for judging its quality is increased to 67%, indicating the structure of the thin film solar cell and its structure. The preparation method is practical and excellent.
當然,本案之技術所包含的實施例中,薄膜太陽能電池所能採用之基底層不限於上述所舉實施例之鋁或氧化鋁材料而已,其他具有類似性質的多孔性耐熱基材,例如鈦合金材料或者陶瓷材料等,亦包含於本案之技術範圍中。Of course, in the embodiment included in the technology of the present invention, the base layer which the thin film solar cell can employ is not limited to the aluminum or alumina material of the above-mentioned exemplary embodiment, and other porous heat resistant substrates having similar properties, such as titanium alloy. Materials or ceramic materials are also included in the technical scope of this case.
綜上所述,本案提供一種應用於薄膜太陽能電池之具鹵化鹼金屬先驅物之陽極處理基板結構及其製備方法,透過本案裝置結構及方法之導入,可於後續形成CIS/CIGS吸收層的 製程中,使預填入基底層之定量鹵化鹼金屬先驅物擴散至該CIS/CIGS吸收層,以同時滿足CIS/CIGS吸收層所需的鹼金屬含量,並且藉由基板上之陽極處理層有效阻絕源自該基底層之可能污染源,此為習知技藝無法達成之重要功效。本案技術具有實用性、新穎性與進步性,爰依法提出申請。縱使本創作已由上述之實施例詳細敘述而可由熟悉本技藝之人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。In summary, the present invention provides an anode-treated substrate structure with a halogenated alkali metal precursor applied to a thin film solar cell and a preparation method thereof. The introduction of the device structure and method of the present invention can form a CIS/CIGS absorption layer subsequently. During the process, a quantitative halogenated alkali metal precursor pre-filled into the substrate layer is diffused to the CIS/CIGS absorber layer to simultaneously satisfy the alkali metal content required for the CIS/CIGS absorber layer, and is effective by the anode treatment layer on the substrate. Blocking possible sources of contamination from the substrate layer is an important effect that is not possible with conventional techniques. The technology of this case is practical, novel and progressive, and it is submitted in accordance with the law. Even though the present invention has been described in detail by the above-described embodiments, it can be modified by those skilled in the art, and is not intended to be protected by the appended claims.
60‧‧‧基板結構60‧‧‧Substrate structure
601‧‧‧基底層601‧‧‧ basal layer
602‧‧‧陽極處理層602‧‧‧Anode treatment layer
603‧‧‧孔洞陣列603‧‧‧ hole array
604‧‧‧鹵化鹼金屬先驅物604‧‧‧ Halogenated alkali metal precursors
61‧‧‧背電極61‧‧‧ Back electrode
62‧‧‧吸收層62‧‧‧absorbing layer
63‧‧‧緩衝層63‧‧‧buffer layer
641‧‧‧未摻雜氧化鋅層641‧‧‧Undoped zinc oxide layer
642‧‧‧鋁摻雜氧化鋅層642‧‧‧Aluminum doped zinc oxide layer
643‧‧‧氟化鎂層643‧‧‧Magnesium fluoride layer
644‧‧‧鋁鎳合金644‧‧‧Al-nickel alloy
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI488312B (en) * | 2013-12-13 | 2015-06-11 | Nat Univ Chin Yi Technology | Structure and Process of Thin - film Solar Cell Buffer Layer |
TWI488326B (en) * | 2013-12-13 | 2015-06-11 | Nat Univ Chin Yi Technology | Thin film solar cell molybdenum electrode structure |
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Publication number | Priority date | Publication date | Assignee | Title |
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TWI488312B (en) * | 2013-12-13 | 2015-06-11 | Nat Univ Chin Yi Technology | Structure and Process of Thin - film Solar Cell Buffer Layer |
TWI488326B (en) * | 2013-12-13 | 2015-06-11 | Nat Univ Chin Yi Technology | Thin film solar cell molybdenum electrode structure |
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