TWM462852U - Structure device using prism combination for micro-shift measurement device - Google Patents

Description

结构Combination of structural devices for small displacement measurement

This creator is a structural device for measuring the displacement of a cymbal combination, especially by improving the intensity of the light source, combining the structure of the focusing and reflecting device with the cymbal, and matching the signal detecting device designed by itself to enhance the object to be tested. Perform a measurement of the resolution of a small angle or displacement.

Conventionally, a right-angled cymbal 1 is only a lens of an isosceles triangle (such as the first and second figures), and the right angle 稜鏡 1 is fixed to the rotating platform 12 having the driver 11 by design because of the need to adjust the angle. The right angle 稜鏡 structure is often used in a small angle and small displacement measuring device, the small angle and small displacement measuring device comprises: a light source 2, which can emit a linear polarized light source; a beam splitter 21, can The light source generates reflected light 211 and transmitted light 212; a constant angle 稜鏡1, on which an oblique angle is placed with the object 13 to be tested, and the right angle 稜鏡1 is transmitted through the light-transmissive light 212 to enter the right angle 稜鏡1, passing through a right angle Side to The concave side is deflected and reflected to the other right angle side; the second depolarization plates 22, 23, the first depolarization plate 22 is for the transmitted light 212 of the right angle 稜鏡1, and the second depolarization plate 23 is for the spectroscope The reflected light 211 of 21 is incident; the second photodetectors 24 and 25, the first and second photodetectors 24 and 25 respectively transmit the transmitted light 212 and the reflected light 211 of the first and second depolarization plates 24 and 25, respectively. And converting into the first reference telecommunications and the first test telecommunications and the second reference telecommunications and the second test telecommunications generated after rotating the right angle 稜鏡1; a lock-in amplifier 26, capable of detecting the telecommunication difference between the first and second test telecommunications; And a computer 27, can calculate the phase change of the first and second test telecommunications, and obtain the rotation angle and direction.

In operation, the object to be tested 13 is first placed on the oblique side of the right angle 稜鏡1, and the object to be tested 13 can rotate synchronously with the right angle 稜鏡1; the light source 2 is directed toward the beam splitter 21 to form the reflected light 211 and The transmitted light 212, the transmitted light 212 can be directed to the object to be tested 13; the first reference signal is obtained, and the reflected light 211 passes through the second depolarization plate 23 and then enters the second photodetector 25 to obtain the first Referring to the telecommunication; obtaining the first test telecommunication, the transmitted light 212 is first injected perpendicularly into the right angle 稜鏡1, and after a full reflection of the recession, the right angle 稜鏡1 is another right angle Edge, then reflected to the first depolarization plate 22, and enters the first photodetector 24 to obtain the first test telecommunication of the two-edge optical phase difference of the object to be tested; focusing to obtain the second reference telecommunication and the second test telecommunication , that is, the right angle 稜鏡 1 rotates a small angle, according to the third and fourth steps to obtain the second test telecommunication of the second reference telecommunication and the boundary of the object 13 with the optical phase difference; detecting the phase difference, the first and second reference telecommunication The test telecommunication is connected to the lock-in amplifier 26 to amplify and detect the change amount of the phase; the displacement amount and the rotation angle are calculated, and the lock-in amplifier 26 detects the change of the phase, and the telecommunication is measured by the computer 27, Calculate the rotation angle and direction of the right angle 稜鏡12, and know the rotation angle, displacement amount, gap and height difference of the object to be tested 13.

The above-mentioned right angle 稜鏡1 adopts a decay total reflection, so that the first and second test signals of the two-edge optical phase difference of the object to be tested 13 are not sufficiently obvious, and thus the resolution of the telecommunications is affected.

The reason is that this creator feels that the above-mentioned deficiency can be improved. He is devoted to research and cooperates with the application of theory, and finally proposes a reasonable design and effectively improves the above-mentioned deficiency.

The main purpose of this creation is to provide a way to enhance the control of the source light. Long 稜鏡 combines structural devices for small displacement measurement. The utility model is characterized in that a single light meter is arranged between the light source and the first beam splitter, and the deflection angle and the score of the different surfaces are used to analyze the spectrum of the first incident light to obtain different wavelength light sources, and more in the single light meter and A polarizing device is disposed between the first beam splitters to control the size of the first incident light, and an iris is arranged between the polarizing device and the first beam splitter to enable the first incident light to have a contraction capability, as the size of the first incident light source can be controlled. Adjust to the appropriate wavelength.

The secondary purpose of this creation is to select a structure device that uses a focusing reflection device to increase the change in the intensity value of the light at both edges of the object to be tested and to perform a small displacement measurement. The focus reflection device comprises a microscope objective, a mirror opposite to the microscope objective, an actuator fixed to the mirror after changing the position of the mirror, and a displacement probe for detecting the position of the mirror; the focus reflection The device allows the photodetector to detect changes in the intensity values of the light at both edges of the object to be tested.

Another object of the present invention is to use a 稜鏡-combination structure to improve the resolution of the analyte to be combined and to perform a micro-displacement measurement. The cymbal combination structure comprises: two right angle 稜鏡, two rotating platforms, and a half wave plate; the half wave plate is placed between the two opposite first and second right angle ;; for easy adjustment, the first rotation A second rotating platform is arranged on the platform, and corresponding first and second right angles are respectively fixed on the first and second rotating platforms, even if the oblique edges of the first and second right angles are opposite.

The second purpose of this creation is to design a structural device that combines small displacement measurements. The utility model comprises a light source, a first beam splitter, a chirp combination structure, a second beam splitter, a first amplifier, a second amplifier, a signal processing device, a data acquisition device, and a personal computer. Using a light source and a single light meter, To obtain different wavelength light sources, and then send them into the 稜鏡 composite structure, and set the incident angle of the 稜鏡 composite structure to the resonance angle as the initial angle, and the light emitted by the single illuminator is first passed by the first beam splitter. Through the focusing and reflecting device, the reflected light is reflected into the 稜鏡 composite structure. After the 稜鏡 combined structure, after passing through the polarizing beam splitter, the reflected light is the later S-polarized light, and the light is from the first line. a photodetector that takes out the telecommunications of the two edge lights and the P-polarized light that the second beam splitter penetrates. The light is taken by the second linear photodetector, and the telecommunications of the two edge lights are taken out, and the obtained signal is sent. The first amplifier is used to amplify the telecommunications, and the obtained first signal is sent to the second differential amplifier to amplify the telecommunications, and the second telecommunications is obtained, and the first and second telecommunications are sent to the signal processing device for noise filtering, and the signal is captured by the signal. The device is converted into a network bit and then sent to a personal computer. After the operation, a small displacement can be obtained. When inputting at different wavelengths, the signal intensity difference has a significant change to the small displacement.

In order to enable your review committee to have a deep understanding of the shape, structure, function and function of this creation, an example is given and the drawings are introduced to explain the creation in detail. However, the drawings are for reference and explanation only, not Used to limit this creation.

Please also refer to the fourth figure, which is a schematic diagram of a structural device for performing micro-displacement measurement. The micro-displacement measuring device sequentially includes at least one light source 3, a first beam splitter 31, and a focus counter. The illuminating device 32, the cymbal assembly 33, a second beam splitter 34, a first photodetector 35, a second photodetector 36, a first amplifier 37, a second amplifier 38, a signal The processing device 39, a data capturing device 40, and a computer 41. The light source 3 is the first incident light 30; the first beam splitter 31 receives the first incident light 30 to generate the first transmitted light 301; and the focusing and reflecting device 32 reflects the first transmitted light 301 to the first beam splitter 31. On one side, the first refracted light 302 is sent to the 稜鏡 composite structure 33; the 稜鏡 composite structure 33 receives the first refracted light 302, and projects the object to be tested (not shown) placed on the 稜鏡 composite structure 33, and produces The second refracting light 303 is received by the second beam splitter 34, and the second refracting light 303 is projected by the 稜鏡 combining structure 33 to generate the third refracted light 304 and the second transmitted light 305, and is distributed to the first a photodetector 35 and a second photodetector 36; the first photodetector 35 receives the third refracted light produced by the second dichroic mirror 34, and generates a sample to be measured on the 稜鏡 composite structure 33 ( The intensity change value of the two edge lights is converted into the reference telecommunication at the left and right edge positions; the second linear photodetector 36 receives the second transmitted light generated by the second beam splitter 34 to generate the measurement. The intensity change value of the light at both edges of the object to be tested on the combined structure 33 is converted into a test telecommunication at the left and right edge positions; A first amplifier 37 amplifies system, measured with reference to the measured position of the right edge telecommunications right edge position of the object to be detected on the photodetector 35, two Trial telecommunications; the second amplifier 38 amplifies the left edge position reference telecommunication and the left edge position test telecommunication of the object to be tested measured on the first and second photodetectors 35, 36; the signal processing device 39 transmits the signal line (Fig. And receiving and filtering the first and second amplifiers 37 and 38 to generate the reference telecommunication and the test telecommunication noise at the left and right edge positions of the object to be tested; the data acquisition device 40 is to generate the object to be tested by the signal processing device 39. The reference telecommunications and test telecommunications at the right edge position are converted into network bit data and transmitted to the personal computer 41 through its internal program operation; through the implementation of the present invention, the resolution of the micro angle or displacement of the object to be measured can be improved.

The focus reflection device 32 includes a microscope objective 321 , a mirror 322 opposite to the microscope objective 321 , an actuator 323 fixed to the mirror 322 to change the position of the mirror 322 , and a detection mirror The 322 position displacement probe 324; the focus reflection device 32 allows the first and second photodetectors 35, 36 to detect changes in the intensity values of the light at both edges of the object to be tested.

The foregoing cymbal combination structure 33 includes: two right angle 稜鏡331, 332, two rotation platforms 333, 334, and a half wave plate 335; the half wave plate 335 is placed in two opposite first and second right angles 稜鏡In order to facilitate adjustment, a second rotating platform 334 is disposed on the first rotating platform 333, and correspondingly fixed on the first and second rotating platforms 333 and 334 respectively. The first and second right angles 331 and 332 are opposite to each other even if the first and second right angles 331 and 332 are opposite sides.

Furthermore, a light meter 311 is disposed between the light source 3 and the first beam splitter 31, and the spectrum of the first incident light 30 is analyzed by using the deflection angle and the score of the different surfaces to obtain different wavelengths of light; A polarizing device 312 is disposed between the meter 311 and the first beam splitter 31 to control the size of the first incident light; and an iris 313 is disposed between the polarizing device 312 and the first beam splitter 31 to enable the first incident light 30 to have a contraction capability. The size of the first incident light 30 is controlled to be adjusted to an appropriate wavelength source.

Secondly, the second beam splitter 33 is preferably a polarizing beam splitter; the first and second light detectors 35, 36 are preferably linear light detectors; the computer comprises a desktop computer, a notebook computer, Any of a tablet and a mobile phone.

Please continue to refer to the fifth figure, which is a schematic diagram showing the relationship between the two edge photoelectric aberrations and the focusing displacement of the focusing device by the light source of the present invention; the figure shows that the light source of the embodiment is 250 watts selected (numerical aperture NA= 0.85) The diameter of the microscope objective is D = 4.93 mm and the focal length f = 2.9 mm, and the difference in telecommunication strength when the input wavelength is different (the edge of the object to be measured produces two edge photoelectric aberration (telecommunication intensity)) to the small displacement (△Z) (focusing device focus shift) has a significant change, especially for the wavelength 650nm change slope; if the numerical analysis method to simulate the resolution (Resolution) and its map (as shown in Figure 6 - first refracted light The relationship between the resolution of the input 稜鏡 combination structure and the focus displacement of the focusing device is clearly shown. When the wavelength is 650 nm, the resolution can reach 1.08 nm or more.

In summary, this creation combines a structural device for micro-displacement measurement, using a light source and a single-light meter to obtain different wavelengths of light, and then feeding it into a 稜鏡-combination structure to set the incident angle of the 稜鏡 composite structure. For the resonance angle, as the initial angle, the first incident light emitted by the single illuminator is first passed by the first beam splitter, and then passed through a focusing and reflecting device to reflect the reflected light into the 稜鏡 composite structure, and then through the second After the beam splitter of the beam splitter, the second refracted light is the later S-polarized light, the light is taken out by the first linear light detector, and the second transmitted light of the second beam splitter is generated. Polarized light, the polarized light is taken out by the first and second photodetectors, and the obtained first and second telecommunication are sent to the first and second differential amplifiers to amplify the telecommunication, and the first is obtained. Second telecommunications, the signal processing device is sent to filter the noise, and the data acquisition device converts the reference and test telecommunications into network bit data for computer operation, and can obtain a small displacement after the operation, so that the input can be input at different wavelengths. There are obvious difference in signal intensity small displacement The change, in order to enhance its resolution, it can be seen that this creation is a rare new creative product, very novel and progressive, fully in line with the application requirements of the new patent, apply for the patent law, please Detailed investigation and grant of patents in this case to protect the rights of creators.

However, the above description is only a preferred implementation of the present invention. The examples are not limited to the scope of the patent of the creation. Therefore, the equivalent structural changes that are made by using the manual and the contents of the creation are all included in the creation. Within the scope of the agreement, Chen Ming.

Convention:

1‧‧‧right angle

11‧‧‧ Drive

12‧‧‧Rotating platform

13‧‧‧Test object

2‧‧‧Light source

21‧‧‧beam splitter

211‧‧‧ reflected light

212‧‧‧transmitted light

13‧‧‧Test object

22, 23 ‧ ‧ solution plate

24, 25‧‧‧Photodetector

26‧‧‧Lock-in amplifier

27‧‧‧ computer

This creation:

3‧‧‧Light source

30‧‧‧First incident light

301‧‧‧first transmitted light

302‧‧‧First refracted light

303‧‧‧second refracted light

304‧‧‧ Third refracted light

305‧‧‧second transmitted light

31‧‧‧First Beamsplitter

311‧‧‧ single light meter

312‧‧‧ polarizing device

313‧‧‧Iris

32‧‧‧Focus reflection device

321‧‧‧Microscope objective

322‧‧‧Mirror

323‧‧‧Actuator

324‧‧‧displacement probe

33‧‧‧稜鏡Combination structure

331, 332‧‧‧ right angle 稜鏡

333, 334‧‧‧ rotating platform

335‧‧‧Half wave plate

34‧‧‧Second beam splitter

35‧‧‧First photodetector

36‧‧‧Second light detector

37‧‧‧First amplifier

38‧‧‧Second amplifier

39‧‧‧Signal processing unit

40‧‧‧Information acquisition device

41‧‧‧ computer

The first figure is a plan view of a conventional right angle 稜鏡 and a rotating platform.

The second figure is a side view of the first figure.

The third figure is a conventional right angle 稜鏡 implemented on a small angle and small displacement measuring device.

The fourth figure is a structural device for the combination of small displacement measurement.

The fifth figure is a schematic diagram of the relationship between the two edge optical signal difference and the focusing displacement of the focusing device by the light source of the present invention.

The sixth picture is the analysis of the first refracted light entering the 稜鏡 combination structure of this creation. The relationship between the degree and the focus displacement of the focusing device.

3‧‧‧Light source

30‧‧‧First incident light

301‧‧‧first transmitted light

302‧‧‧First refracted light

303‧‧‧second refracted light

304‧‧‧ Third refracted light

305‧‧‧second transmitted light

31‧‧‧First Beamsplitter

311‧‧‧ single light meter

312‧‧‧ polarizing device

313‧‧‧Iris

32‧‧‧Focus reflection device

321‧‧‧Microscope objective

322‧‧‧Mirror

323‧‧‧Actuator

324‧‧‧displacement probe

33‧‧‧稜鏡Combination structure

331, 332‧‧‧ right angle 稜鏡

333, 334‧‧‧ rotating platform

335‧‧‧Half wave plate

34‧‧‧Second beam splitter

35‧‧‧First photodetector

36‧‧‧Second light detector

37‧‧‧First amplifier

38‧‧‧Second amplifier

39‧‧‧Signal processing unit

40‧‧‧Information acquisition device

41‧‧‧ computer

Claims (7)

A structural device for performing micro-displacement measurement, comprising at least: a light source, which is a first incident light; a first beam splitter, which receives the first incident light to generate a first transmitted light; and a focusing and reflecting device The first transmitted light is reflected to the other side of the first beam splitter to generate a first refracted light to be sent to the 稜鏡 composite structure; a 稜鏡 combined structure, which receives the first refracted light, and the projection is placed on the 稜鏡 combination Structurally measuring the object and producing second refracted light; a second beam splitter receiving the second refracted light projected by the 稜鏡 composite structure through the object to be tested to produce the third refracted light and the second transmitted light The light is distributed to the first photodetector and the second photodetector; a first photodetector receives the third refracted light produced by the second spectroscope to generate a measurement onto the 稜鏡 composite structure The intensity change value of the light at both edges of the object to be tested is converted into a reference telecommunication at the left and right edge positions; and a second photodetector receives the output from the second beam splitter. The second transmitted light generates a test telecommunication that measures the intensity change of the light at both edges of the object to be tested on the 稜鏡 composite structure, and converts into a test telecommunication at the left and right edge positions; a first amplifier that amplifies the first and second photodetectors The test telecommunications of the right edge of the object to be tested and the test telecommunications of the right edge position; a second amplifier that amplifies the reference telecommunications of the left edge position of the object to be tested measured on the first and second photodetectors Test telecommunications with the left edge position; a signal processing device that receives and filters the first and second amplifiers to generate the reference telecommunications and test telecommunications noise at the left and right edge positions of the object to be tested through the signal line; and a data packet The device is connected to the computer through the signal line, and receives and converts the reference telecommunication and the test telecommunication at the left and right edge positions of the object to be tested generated by the signal processing device into the network bit data through the internal program operation. A structural device for performing micro-displacement measurement according to the first aspect of the patent application, wherein a single-light meter is disposed between the light source and the first beam splitter. A structural device for performing micro-displacement measurement according to the second aspect of the patent application, wherein a polarizing device is disposed between the single-light meter and the first beam splitter. A structural device for performing minute displacement measurement according to the third aspect of the patent application, wherein an iris is disposed between the polarizing device and the first beam splitter. The structural device for performing micro-displacement measurement according to the first aspect of the patent application, wherein the second dichroic mirror is preferably a polarizing beam splitter. The structural device for performing micro-displacement measurement according to the first aspect of the patent application, wherein the first and second photodetectors are preferably linear photodetectors. The structural device for performing micro-displacement measurement according to the first aspect of the patent application, wherein the computer comprises any one of a desktop computer, a notebook computer, a tablet computer and a mobile phone.