TWM447388U - Energy-saving heater for reusing waste hot gas of thermal treatment equipment - Google Patents

Energy-saving heater for reusing waste hot gas of thermal treatment equipment Download PDF

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Publication number
TWM447388U
TWM447388U TW101221120U TW101221120U TWM447388U TW M447388 U TWM447388 U TW M447388U TW 101221120 U TW101221120 U TW 101221120U TW 101221120 U TW101221120 U TW 101221120U TW M447388 U TWM447388 U TW M447388U
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Taiwan
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heat
energy
heat treatment
preheating section
disposed
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TW101221120U
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Chinese (zh)
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Bo-Hua Zeng
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Young Chen Ind Co Ltd
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Priority to TW101221120U priority Critical patent/TWM447388U/en
Publication of TWM447388U publication Critical patent/TWM447388U/en

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  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)

Description

熱處理設備廢熱氣再利用之節能式加熱裝置Energy-saving heating device for recycling waste heat of heat treatment equipment

本創作係關於一種熱處理設備廢熱氣再利用之節能加熱裝置,尤指一種可利用廢熱回收再利用於對導熱介質進行加熱,將導熱介質用於清洗金屬工件表面髒污與油脂,以達到節約電熱能之目的的熱處理廢熱氣再利用之節能裝置。The present invention relates to an energy-saving heating device for recycling waste heat of a heat treatment equipment, in particular to a waste heat recovery and reuse for heating a heat-conductive medium, and the heat-conducting medium is used for cleaning the surface of the metal workpiece to remove dirt and grease to save electric heat. Energy-saving device for heat treatment waste heat recovery for energy purposes.

為能提高如螺絲、螺栓、螺帽或鐵釘等金屬工件的機械性能或防止銹蝕之情形,通常會對金屬工件進行熱處理或表面處理作業。In order to improve the mechanical properties of metal workpieces such as screws, bolts, nuts or nails or to prevent rust, metal workpieces are usually heat treated or surface treated.

以黑化防銹處理為例,即係透過一種連續式熱處理設備對金屬工件於熱處理製程中進行表面黑化防銹的處理,以下就該熱處理設備及其前置作業作一詳細說明,首先,該流程係以一自動送料機將加工成型後的金屬工件送入前脫脂洗淨槽內進行表面去脂程序,並於去除附著於金屬工件表面的潤滑油後以一鼓風機吹乾,此時即完成淬火處理的前置作業,接著將金屬工件送入熱處理設備前端的淬火區中進行加熱(約攝氏820度至900度之間),並同時注入甲醇及丙烷等氣體以防止金屬工件表面脫碳,後續再以油淬方式對金屬工件進行急速冷卻(淬火)以使其產生硬化反應,然後再將金屬工件輸送至加熱後脫脂洗淨槽內進行油脂清洗作業並以鼓風機吹乾,最後才送入回火區中進行金屬工件回火處理,且藉由室溫使金屬工件緩慢地被冷卻下來。Taking the blackening anti-rust treatment as an example, the surface blackening and anti-rust treatment of the metal workpiece in the heat treatment process is carried out through a continuous heat treatment device. The following is a detailed description of the heat treatment equipment and its pre-operation. First, In the process, the processed metal workpiece is sent to the front degreasing cleaning tank by an automatic feeder to perform a surface degreasing process, and after removing the lubricating oil attached to the surface of the metal workpiece, the blower is blown by a blower. Finishing the quenching pre-operation, then feeding the metal workpiece into the quenching zone at the front end of the heat treatment equipment for heating (about 820 °C to 900 °C), and simultaneously injecting gases such as methanol and propane to prevent decarburization of the metal workpiece surface. Then, the metal workpiece is rapidly cooled (quenched) by oil quenching to cause a hardening reaction, and then the metal workpiece is transported to the heated degreasing washing tank for grease cleaning operation and blown by a blower, and finally sent. The metal workpiece is tempered in the tempering zone, and the metal workpiece is slowly cooled down by the room temperature.

上述熱處理的整個流程中,該淬火區係利用一設於熱處理設備前端頂部的廢氣燃燒加熱器,以熱輸出端朝下地對淬火區提供熱氣,藉以使金屬工件經過該淬火區能被氣體加熱升溫,此時,因熱體受熱上升原理而會直接自廢氣燃燒加熱器頂端向上散逸自外界空間,結果導致許多廢熱未能被加以充分利用之情形。In the whole process of the above heat treatment, the quenching zone utilizes an exhaust gas combustion heater disposed at the top of the front end of the heat treatment apparatus to supply hot gas to the quenching zone with the heat output end facing downward, so that the metal workpiece can be heated by the gas through the quenching zone. At this time, due to the principle that the hot body is heated up, it will directly dissipate from the top of the exhaust gas combustion heater from the external space, resulting in a situation in which many waste heats are not fully utilized.

本創作之主要目的在於提供一種熱處理設備廢熱氣再利用之節能式加熱裝置,希藉此創作,改善目前熱處理設備中用以對金屬工件加熱之高溫氣體極容易散逸至設備外部,而過度消耗電熱能之問題。The main purpose of this creation is to provide an energy-saving heating device for recycling waste heat of heat treatment equipment, and to create and improve the high-temperature gas used in the current heat treatment equipment for heating metal workpieces to easily escape to the outside of the equipment, and excessively consume electric heat. The problem can be.

為達前揭目的,本創作熱處理設備廢熱氣再利用之節能式加熱裝置係用以安裝於熱處理設備之爐體預熱區段,該節能式加熱裝置係包含:一廢氣燃燒加熱器,係用以設置於爐體預熱區段底部,該廢氣燃燒加熱器包含有一熱輸出端,該熱輸出端連接爐體預熱區段底部,廢氣燃燒加熱器能由下向上對爐體預熱區段供熱;以及一熱能回收器,係用以設置於爐體預熱區段頂部且與廢氣燃燒加熱器錯位,該熱能回收器包含一中空的隔熱殼體以及一熱導管,該隔熱殼體內部空間連通於爐體預熱區段,該熱導管設於隔熱殼體內,熱導管兩端伸出隔熱殼體外側,該熱導管內能導入導熱介質流動,且導熱介質能通過熱導管吸熱而將熱回收移轉至外部使用端。In order to achieve the goal, the energy-saving heating device for recycling waste heat of the heat treatment equipment is used for installing the preheating section of the furnace body of the heat treatment equipment, and the energy-saving heating device comprises: an exhaust gas combustion heater, which is used for The exhaust gas combustion heater is disposed at the bottom of the preheating section of the furnace body, and the exhaust gas combustion heater comprises a heat output end connected to the bottom of the preheating section of the furnace body, and the exhaust gas combustion heater can be preheated from the bottom to the furnace body Heating; and a heat recovery device disposed at the top of the preheating section of the furnace and offset from the exhaust gas combustion heater, the heat recovery unit comprising a hollow insulated housing and a heat pipe The internal space of the body is connected to the preheating section of the furnace body. The heat pipe is disposed in the heat insulating casing, and both ends of the heat pipe extend outside the heat insulating casing, and the heat pipe can be introduced into the heat conducting medium, and the heat conducting medium can pass the heat. The conduit absorbs heat and transfers heat recovery to the external use end.

經由以上所述可得知,本創作係將廢氣燃燒加熱器設置 於熱處理設備之爐體預熱區段底部,該廢氣燃燒加熱器能經熱輸出端對爐體預熱區段進行供熱,使經過爐體預熱區段的金屬工件能達到升溫目的,進而節省電熱電力的消耗。As can be seen from the above, the creation department sets the exhaust gas combustion heater. At the bottom of the preheating section of the furnace body of the heat treatment equipment, the exhaust gas combustion heater can supply heat to the preheating section of the furnace body through the heat output end, so that the metal workpiece passing through the preheating section of the furnace body can achieve the purpose of heating up, and further Save the consumption of electric heating power.

於此同時,高溫氣體會流竄至熱能回收器中,並對熱導管外側表面傳遞熱能,使得熱導管中的導熱介質能因吸收熱能而升溫,且導熱介質能被移轉至熱處理設備外,用以對金屬工件作進入熱處理設備前之預熱清潔或是對油淬後的金屬工件作表面油漬做熱清洗動作,除此之外,當本創作係應用於爐體預熱區段之淬火區時,則可將向上通過隔熱殼體之含有一氧化碳及二氧化碳的高溫氣體,導入位於熱處理設備中後段區域之回火區中再利用,藉以提供金屬工件黑化處理之用。由上述可得知,本創作能充分地利用自爐體預熱區段逸出的高溫氣體回收至熱處理爐爐內幫助升溫,節省電熱,並可對導熱介質進行加熱,以對金屬工件進行除脂程序,且燃燒後之廢氣體可再導入回火區中對金屬工件進行黑化處理,藉此充分利用回收逸散廢熱氣之剩餘價值,以達到節能減碳之目的。At the same time, the high temperature gas will flow into the heat recovery device, and transfer heat energy to the outer surface of the heat pipe, so that the heat transfer medium in the heat pipe can be heated by absorbing heat energy, and the heat transfer medium can be transferred to the heat treatment device, In addition to the preheating cleaning of the metal workpiece before entering the heat treatment equipment or the surface cleaning of the metal workpiece after oil quenching, in addition, the creation system is applied to the quenching zone of the preheating section of the furnace body. At this time, the high-temperature gas containing carbon monoxide and carbon dioxide which passes upward through the heat insulating casing can be introduced into the tempering zone in the rear section of the heat treatment apparatus for reuse, thereby providing the blackening treatment of the metal workpiece. It can be known from the above that the present invention can fully utilize the high-temperature gas escaping from the preheating section of the furnace to be recovered into the heat treatment furnace to help heat up, save electric heat, and heat the heat transfer medium to remove the metal workpiece. The fat program, and the burned exhaust gas body can be further introduced into the tempering zone to blacken the metal workpiece, thereby fully utilizing the residual value of the recovered waste heat exhaust gas to achieve the purpose of energy saving and carbon reduction.

為能詳細瞭解本發明的技術特徵及實用功效,並可依照說明書的內容來實施,玆進一步以如圖式所示的較佳實施例,詳細說明如後:In order to understand the technical features and practical functions of the present invention in detail, and in accordance with the contents of the specification, the following is further illustrated in the preferred embodiment as illustrated in the following:

本發明所提出的熱處理設備廢熱氣再利用之節能式加熱裝置之較佳實施例,如圖1所示,所述節能式加熱裝置係用以設置於一熱處理設備1之爐體預熱區段2,該節能式加熱裝置係包含一廢氣燃燒加熱器10以及一熱能回收器 20。A preferred embodiment of the energy-saving heating device for recycling waste heat of the heat treatment apparatus of the present invention is as shown in FIG. 1 , wherein the energy-saving heating device is disposed in a preheating section of the furnace body of a heat treatment apparatus 1 2, the energy-saving heating device comprises an exhaust gas combustion heater 10 and a heat energy recovery device 20.

如圖1所示,該廢氣燃燒加熱器10係用以設置於爐體預熱區段2底部,該廢氣燃燒加熱器10包含有一熱輸出端11,該熱輸出端11係連接爐體預熱區段2底部,使該廢氣燃燒加熱器10能由下向上對爐體預熱區段2提供高溫氣體。As shown in FIG. 1, the exhaust gas combustion heater 10 is disposed at the bottom of the furnace preheating section 2, and the exhaust gas combustion heater 10 includes a heat output end 11 which is connected to the furnace body for preheating. At the bottom of section 2, the exhaust gas combustion heater 10 is capable of supplying high temperature gas to the furnace body preheating section 2 from the bottom to the top.

如圖1所示,該熱能回收器20係包含一中空的隔熱殼體21以及一熱導管22,該隔熱殼體21係設置於爐體預熱區段2頂部且與廢氣燃燒加熱器10錯位,該隔熱殼體21內部空間連通於爐體預熱區段2,該熱導管22係設於該隔熱殼體21內,且熱導管22兩端伸出隔熱殼體21外側,該熱導管22內能導入導熱介質流動,導熱介質能通過熱導管22吸熱而將熱回收並移轉至外部使用端。As shown in FIG. 1, the thermal energy recovery unit 20 includes a hollow insulated housing 21 and a heat pipe 22 disposed on the top of the furnace preheating section 2 and associated with the exhaust gas combustion heater. 10 is misaligned, the inner space of the heat insulating casing 21 is communicated with the furnace preheating section 2, the heat pipe 22 is disposed in the heat insulating casing 21, and both ends of the heat pipe 22 protrude outside the heat insulating casing 21. The heat pipe 22 can introduce a heat transfer medium, and the heat transfer medium can absorb heat through the heat pipe 22 to recover heat and transfer it to the external use end.

如圖1所示,該熱導管22係呈一中空螺旋管,用以提供導熱介質流入其中,該中空螺旋管於其二端分別形成一輸入端及一輸出端,該輸入端係連接一外部的供應導熱介質裝置,該輸出端則可進一步分成二輸出管道,其中一輸出管道可將導熱介質引流至熱處理設備1外側對金屬工件作進入熱處理設備1之前的預熱清洗,另一輸出管道則可將導熱介質引流至熱處理裝置1中後段對經過油淬降溫之金屬工件進行表面油漬熱清洗。As shown in FIG. 1 , the heat pipe 22 is a hollow spiral tube for providing a heat conductive medium flowing therein. The hollow spiral tube has an input end and an output end respectively formed at two ends thereof, and the input end is connected to an external portion. The supply of the heat transfer medium device, the output end can be further divided into two output pipes, wherein an output pipe can drain the heat transfer medium to the outside of the heat treatment device 1 for preheating cleaning of the metal workpiece before entering the heat treatment device 1, and the other output pipe is The heat conductive medium can be drained to the heat treatment device 1 to perform surface oil stain cleaning on the metal workpiece subjected to oil quenching and cooling.

如圖1所示,所述節能裝置尚可進一步包含一空氣門裝置30,該空氣門裝置30係設置於所述熱處理設備1的入口端上方,該空氣門裝置30係包含一本體及一風扇組,該本體具有一容置空間、一設於本體下方的出風口,以及複數設 於本體前方的進風口,所述出風口與進風口均連通於容置空間,該風扇組係設於本體之容置空間中,該空氣門裝置30係用以將熱處理設備1的內外部空氣予以區隔,避免爐體預熱區段2中的高溫氣體直接自熱處理設備1之入口端散逸至外部而造成熱能浪費。As shown in FIG. 1 , the energy saving device may further include an air door device 30 disposed above the inlet end of the heat treatment device 1 , the air door device 30 including a body and a fan. The body has an accommodating space, an air outlet disposed under the body, and a plurality of air outlets The air inlet and the air inlet are both connected to the accommodating space, and the fan unit is disposed in the accommodating space of the body, and the air door device 30 is used to heat the inside and outside of the heat treatment device 1 The separation is performed to prevent the high temperature gas in the preheating section 2 of the furnace from directly escaping from the inlet end of the heat treatment apparatus 1 to the outside, thereby causing waste of heat energy.

如圖1所示,所述節能式加熱裝置尚可進一步包含一風扇裝置40,該風扇裝置40係吹向朝下地設置於所述爐體預熱區段2上方且位於熱能回收器20一側。As shown in FIG. 1 , the energy-saving heating device may further include a fan device 40 that is disposed downwardly above the furnace body preheating section 2 and on the side of the heat energy recovery unit 20 . .

該爐體預熱區段2係包含一淬火區及一回火區,於本較佳實施例中,如圖2所示,該爐體預熱區段2係位於熱處理設備1前端之淬火區,當廢氣燃燒加熱器10對待燃燒物進行燃燒時,會不斷地對淬火區供應高溫氣體,此時,該設於淬火區頂部的風扇裝置40可協助將高溫氣體均勻吹散至淬火區內,令經過淬火區的金屬工件50能被均勻且快速地加熱,至於設在風扇裝置40一側的熱能回收器20一方面除可導引燃燒後之廢氣體流至熱處理設備1後端之回火區中再利用,藉以對金屬工件50提供黑化處理時所需之一氧化碳及二氧化碳。The furnace preheating section 2 comprises a quenching zone and a tempering zone. In the preferred embodiment, as shown in FIG. 2, the furnace preheating section 2 is located in the quenching zone at the front end of the heat treatment apparatus 1. When the exhaust gas combustion heater 10 burns the combustion products, the high temperature gas is continuously supplied to the quenching zone. At this time, the fan device 40 disposed at the top of the quenching zone can assist the air to be uniformly blown into the quenching zone. The metal workpiece 50 passing through the quenching zone can be uniformly and rapidly heated, and the heat recovery device 20 disposed on the side of the fan unit 40 can smelt the exhaust gas body to the rear end of the heat treatment apparatus 1 on the one hand. The zone is reused to provide the metal workpiece 50 with one of the carbon oxides and carbon dioxide required for the blackening process.

另一方面,熱能回收器20亦可令流經隔熱殼體21之高溫氣體對熱導管22外側表面傳遞熱能,使得熱導管22中的導熱介質因吸收熱能而能產生升溫效果,並將導熱介質分別輸送至熱處理設備1外對金屬工件50作進入熱處理設備1前之前清洗,以及對油淬後的金屬工件50作表面油漬清洗的動作,藉以協助完成前脫脂洗淨及後脫脂洗淨程序。On the other hand, the heat recovery device 20 can also transfer the heat energy to the outer surface of the heat pipe 22 through the high temperature gas flowing through the heat insulating casing 21, so that the heat conductive medium in the heat pipe 22 can generate a heating effect by absorbing heat energy, and will conduct heat. The medium is separately sent to the outside of the heat treatment equipment 1 to clean the metal workpiece 50 before entering the heat treatment equipment 1, and the surface of the oil-quenched metal workpiece 50 is cleaned by surface oil to assist in the process of pre-fat cleaning and post-degreasing cleaning. .

本創作能充分地將自爐體預熱區段2逸出的高溫氣體回收再利用,輔助爐內溫度升溫,並對導熱介質進行加熱,利用導熱介質對金屬工件50進行清洗除脂程序,若該爐體預熱區段2係淬火區時,則可將燃燒後之廢氣體導入回火區中對金屬工件50進行黑化處理,藉此充分利用所回收廢熱氣之剩餘價值,以達到節能減碳之目的。The creation can fully recover and reuse the high-temperature gas escaping from the preheating section 2 of the furnace body, assist the temperature of the furnace to heat up, heat the heat conductive medium, and clean the grease removal procedure of the metal workpiece 50 by using the heat conductive medium. When the preheating section 2 of the furnace body is in the quenching zone, the burned exhaust gas body can be introduced into the tempering zone to blacken the metal workpiece 50, thereby fully utilizing the residual value of the recovered waste hot gas to save energy. The purpose of carbon reduction.

以上所述,僅是揭示本創作之較佳實施例,並非對本創作作任何形式上的限制,任何所屬技術領域中具有通常知識者在不脫離本創作所提出的技術特徵的範圍內,利用本創作所揭示技術內容所作出局部更動或修飾的等效實施例,均仍屬於本創作技術特徵的範圍內。The above description is merely a preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Anyone having ordinary skill in the art can use the present invention without departing from the technical features proposed by the present invention. Equivalent embodiments of the local changes or modifications made by the technical content disclosed herein are still within the scope of the features of the present invention.

1‧‧‧熱處理設備1‧‧‧heat treatment equipment

2‧‧‧爐體預熱區段2‧‧‧furnace preheating section

10‧‧‧廢氣燃燒加熱器10‧‧‧Exhaust gas combustion heater

11‧‧‧熱輸出端11‧‧‧Hot output

20‧‧‧熱能回收器20‧‧‧ Thermal energy recovery unit

21‧‧‧隔熱殼體21‧‧‧Insulated housing

22‧‧‧熱導管22‧‧‧heat pipe

30‧‧‧空氣門裝置30‧‧‧Air door installation

40‧‧‧風扇裝置40‧‧‧Fan device

50‧‧‧金屬工件50‧‧‧Metal workpiece

圖1係本創作熱處理設備廢熱氣再利用之節能式加熱裝置較佳實施例的平面示意圖。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a preferred embodiment of an energy-saving heating device for recycling waste heat of the heat treatment apparatus of the present invention.

圖2係本創作熱處理設備廢熱氣再利用之節能式加熱裝置較佳實施例的實施狀態圖。Fig. 2 is a view showing an implementation state of a preferred embodiment of the energy-saving heating device for recycling waste heat of the heat treatment equipment of the present invention.

1‧‧‧熱處理設備1‧‧‧heat treatment equipment

2‧‧‧爐體預熱區段2‧‧‧furnace preheating section

10‧‧‧廢氣燃燒加熱器10‧‧‧Exhaust gas combustion heater

11‧‧‧熱輸出端11‧‧‧Hot output

20‧‧‧熱能回收器20‧‧‧ Thermal energy recovery unit

21‧‧‧隔熱殼體21‧‧‧Insulated housing

22‧‧‧熱導管22‧‧‧heat pipe

30‧‧‧空氣門裝置30‧‧‧Air door installation

40‧‧‧風扇裝置40‧‧‧Fan device

Claims (4)

一種熱處理設備廢熱氣再利用之節能式加熱裝置,係用以設置於所述熱處理設備之爐體預熱區段,該節能式加熱裝置係包含:一廢氣燃燒加熱器,係用以設置於爐體預熱區段底部,該廢氣燃燒加熱器包含有一熱輸出端,該熱輸出端連接爐體預熱區段底部,廢氣燃燒加熱器能由下向上對爐體預熱區段供熱;以及一熱能回收器,係用以設置於爐體預熱區段頂部且與廢氣燃燒加熱器錯位,該熱能回收器包含一中空的隔熱殼體以及一熱導管,該隔熱殼體內部空間連通於爐體預熱區段,該熱導管設於隔熱殼體內,熱導管兩端伸出隔熱殼體外側,該熱導管內能導入導熱介質流動,且導熱介質能通過熱導管吸熱而將熱回收移轉至外部使用端。An energy-saving heating device for recycling waste heat of a heat treatment device is used for setting a preheating section of the furnace body of the heat treatment device, wherein the energy-saving heating device comprises: an exhaust gas combustion heater, which is used for setting in the furnace At the bottom of the body preheating section, the exhaust gas combustion heater includes a heat output end connected to the bottom of the preheating section of the furnace body, and the exhaust gas combustion heater can supply heat to the furnace body preheating section from bottom to top; a thermal energy recovery device is disposed at the top of the preheating section of the furnace and is misaligned with the exhaust gas combustion heater. The thermal energy recovery device comprises a hollow insulated casing and a heat pipe, and the internal space of the insulated casing is connected In the preheating section of the furnace body, the heat pipe is disposed in the heat insulating casing, and both ends of the heat pipe extend outside the heat insulating casing, wherein the heat pipe can introduce a heat transfer medium, and the heat conductive medium can absorb heat through the heat pipe. The heat recovery is transferred to the external use end. 如請求項1所述之熱處理設備廢熱氣再利用之節能式加熱裝置,所述節能式加熱裝置尚包含一空氣門裝置,該空氣門裝置係設置於所述熱處理設備的入口端上方;該空氣門裝置係包含一本體及一風扇組,該本體具有一容置空間、一設於本體下方的出風口,以及複數設於本體前方的進風口,所述出風口與進風口均連通於容置空間,該風扇組係設於本體之容置空間中。An energy-saving heating device for recycling waste heat of a heat treatment apparatus according to claim 1, wherein the energy-saving heating device further comprises an air door device disposed above an inlet end of the heat treatment device; the air The door device comprises a body and a fan set, the body has a receiving space, an air outlet disposed under the body, and a plurality of air inlets disposed in front of the body, wherein the air outlet and the air inlet are connected to each other. The fan unit is disposed in the accommodating space of the body. 如請求項1或2所述之熱處理設備廢熱氣再利用之節能式加熱裝置,所述節能式加熱裝置尚包含一風扇裝置,該風扇裝置係吹向朝下地設置於所述爐體預熱區段頂部且位於熱能回收器一側。An energy-saving heating device for recycling waste heat of a heat treatment apparatus according to claim 1 or 2, wherein the energy-saving heating device further comprises a fan device, wherein the fan device is disposed downwardly in the preheating zone of the furnace body At the top of the section and on the side of the heat recovery unit. 如請求項3所述之熱處理設備廢熱氣再利用之節能式加熱裝置,其中,該熱導管係呈一中空螺旋管。An energy-saving heating device for recycling waste heat of a heat treatment apparatus according to claim 3, wherein the heat pipe is a hollow spiral pipe.
TW101221120U 2012-11-01 2012-11-01 Energy-saving heater for reusing waste hot gas of thermal treatment equipment TWM447388U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9304357B2 (en) 2013-11-05 2016-04-05 Au Optronics Corporation Photoalignment equipment and photoalignment method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9304357B2 (en) 2013-11-05 2016-04-05 Au Optronics Corporation Photoalignment equipment and photoalignment method
US9507212B2 (en) 2013-11-05 2016-11-29 Au Optronics Corporation Photoalignment equipment and photoalignment method

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