TWM444871U - A system for the abatement of industrial process emissions - Google Patents
A system for the abatement of industrial process emissions Download PDFInfo
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- TWM444871U TWM444871U TW101210867U TW101210867U TWM444871U TW M444871 U TWM444871 U TW M444871U TW 101210867 U TW101210867 U TW 101210867U TW 101210867 U TW101210867 U TW 101210867U TW M444871 U TWM444871 U TW M444871U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Abstract
Description
本新型係與廢氣處理系統有關，特別有關於一種整合蓄熱式觸媒焚化法及選擇性觸媒還原法的廢氣處理系統，可同時去除廢氣中的揮發性有機物與氮氧化物。 The present invention relates to an exhaust gas treatment system, and particularly relates to an exhaust gas treatment system that integrates a regenerative catalytic incineration method and a selective catalyst reduction method, and simultaneously removes volatile organic compounds and nitrogen oxides in the exhaust gas.
半導體及光電產業製程多見含有氮化合物，如：NMP、DMF、TMAH、MEA等，這些含氮物質隨著其他揮發性有機物(volatile organic compounds,VOCs)，一起經由污染防制廢氣處理後排放，而高科技產業對於揮發性有機物管末處理，現行以沸石轉輪搭配焚化處理為具有效益的方式。 In the semiconductor and optoelectronics industry, nitrogen compounds, such as NMP, DMF, TMAH, and MEA, are often found. These nitrogen-containing substances are discharged together with other volatile organic compounds (VOCs) through pollution prevention and control. In the high-tech industry, for the treatment of volatile organic compounds, the current use of zeolite runners incineration is an effective way.
不過最終以焚化方式處理含氮揮發性有機物時，將面臨燃燒尾氣排放氮氧化物(nitrogen oxides,NOx)之問題，雖然高科技產業所排放之NOx濃度目前仍符合法規標準，但為改善整個區域之空氣品質，在未來控制此類NOx將有所必要。 However, when the nitrogen-containing volatile organic compounds are finally treated by incineration, they will face the problem of nitrogen oxides (NOx) emitted from the combustion exhaust gas. Although the NOx concentration emitted by the high-tech industry is still in compliance with regulatory standards, it is to improve the entire region. The quality of the air will be necessary to control such NOx in the future.
廢氣中揮發性有機物之控制技術，目前係採用蓄熱式焚化爐(RTO)或蓄熱式觸媒焚化爐(RCO)，對揮發性有機物進行燃燒。蓄熱式焚化爐及蓄熱式觸媒焚化爐主要是在燃燒室下方設置蓄熱床，蓄熱床內部裝置有熱交換介質例如蓄熱陶瓷，並於燃燒室上方設置燃燒器，用於燃燒揮發性有機物，而蓄熱床內部的蓄熱陶瓷則是用於回收焚化後的高溫熱能，並用於預熱進入燃燒室之廢氣溫度。 The control technology of volatile organic compounds in exhaust gas is currently used to burn volatile organic compounds by using a regenerative incinerator (RTO) or a regenerative catalytic incinerator (RCO). The regenerative incinerator and the regenerative catalytic incinerator mainly provide a regenerator bed under the combustion chamber, and the regenerator bed is internally provided with a heat exchange medium such as a regenerative ceramic, and a burner is arranged above the combustion chamber for burning volatile organic substances. The heat storage ceramic inside the regenerator bed is used to recover the high temperature heat energy after incineration and is used to preheat the temperature of the exhaust gas entering the combustion chamber.
廢氣中氮氧化物的控制，目前以選擇性觸媒還原法(SCR)較有效率。選擇性觸媒還原法係輸入還原氣體例如氨氣與氮氧化物反應，還原成無害的氮氣與水。 The control of nitrogen oxides in exhaust gas is currently more efficient with selective catalytic reduction (SCR). The selective catalyst reduction method converts an input reducing gas such as ammonia with nitrogen oxides to reduce it to harmless nitrogen and water.
然而，利用個別的處理裝置去除VOCs與NOx係昂貴且無效率的。例如，當NOx與還原氣體反應時，流至觸媒還原裝置的氣體需再次加熱。兩個個別處理裝置的維護與操作亦是昂貴且工作繁重的。 However, the use of individual processing devices to remove VOCs and NOx is expensive and inefficient. For example, when NOx reacts with the reducing gas, the gas flowing to the catalyst reducing device needs to be heated again. The maintenance and operation of the two individual processing devices is also expensive and labor intensive.
有鑑於此，本創作人為改善並解決上述之缺失，乃特潛心研究並配合學理之運用，終於提出一種設計合理且有效改善上述缺失之本新型。 In view of this, in order to improve and solve the above-mentioned shortcomings, the author has devoted himself to researching and cooperating with the application of theory, and finally proposed a novel design that is reasonable in design and effective in improving the above-mentioned defects.
本新型之一目的，在於提供一種廢氣處理系統，係整合蓄熱式觸媒焚化法及選擇性觸媒還原法，可同時去除廢氣中的揮發性有機物與氮氧化物。 One of the objects of the present invention is to provide an exhaust gas treatment system which integrates a regenerative catalytic incineration method and a selective catalyst reduction method to simultaneously remove volatile organic compounds and nitrogen oxides in the exhaust gas.
為了達成上述本新型之目的，本新型之一態樣的廢氣處理系統包含整合在單一殼體中的蓄熱式觸媒焚化爐(RCO)與選擇性觸媒還原器(SCR)。廢氣處理系統包含蓄熱床、去除揮發性有機物觸媒床、選擇性還原觸媒床、燃燒室、燃燒器及還原氣體輸入管線。 In order to achieve the above object, an exhaust gas treatment system of the present invention comprises a regenerative catalytic converter (RCO) and a selective catalytic converter (SCR) integrated in a single casing. The exhaust gas treatment system includes a regenerator bed, a volatile organic catalyst removal bed, a selective reduction catalyst bed, a combustion chamber, a burner, and a reducing gas input line.
與習知的廢氣處理系統相比，本新型之廢氣處理系統將蓄熱式觸媒焚化爐(RCO)與選擇性觸媒還原器(SCR)整合在單一殼體中，可提高處理效率及降低維護與操作的成本。 Compared with the conventional exhaust gas treatment system, the novel exhaust gas treatment system integrates a regenerative catalytic converter (RCO) and a selective catalytic converter (SCR) in a single casing, which improves processing efficiency and reduces maintenance. The cost of operation.
有關本新型之詳細說明及技術內容，配合圖式說明如下，然而所附圖式僅提供參考與說明用，並非用來對本新型加以限制者。 The detailed description and technical content of the present invention are set forth below with reference to the accompanying drawings.
請參照第一圖，第一圖係本新型之一實施例的廢氣處理系統剖視圖。本新型之廢氣處理系統10將蓄熱式觸媒焚化爐(RCO)與選擇性觸媒還原器(SCR)整合在單一殼體12中。本實施例之廢氣處理系統10包含二蓄熱床14、16，內部含有熱交換介質例如蜂窩型、馬鞍型或球型蓄熱陶瓷；去除揮發性有機物觸媒床18、20，分別設置在蓄熱床14、16上方，去除揮發性有機物觸媒例如將鉑沈積在擔體上形成；選擇性還原觸媒床22、24，分別設置在去除揮發性有機物觸媒床18、20上方，選擇性還原觸媒例如將鈦及/或釩沈積在擔體上形成；燃燒室26，連通選擇性還原觸媒床22、24；燃燒器28，提供熱至燃燒室26；及還原氣體輸入管線70、72，分別設置在蓄熱床14、16下方，用於輸入還原氣體例如氨氣。 Referring to the first drawing, the first drawing is a cross-sectional view of an exhaust gas treatment system according to an embodiment of the present invention. The novel exhaust gas treatment system 10 integrates a regenerative catalytic incinerator (RCO) and a selective catalytic converter (SCR) in a single housing 12. The exhaust gas treatment system 10 of the present embodiment comprises two regenerator beds 14, 16 containing a heat exchange medium such as a honeycomb type, a saddle type or a ball type regenerative ceramic; the volatile organic substance catalyst beds 18, 20 are respectively disposed on the regenerator bed 14 Above the 16th, the volatile organic catalyst is removed, for example, depositing platinum on the support; the selective reduction catalyst beds 22, 24 are respectively disposed above the volatile organic organic catalyst bed 18, 20, and the selective reduction catalyst For example, titanium and/or vanadium is deposited on the support; the combustion chamber 26 is connected to the selective reduction catalyst beds 22, 24; the burner 28 provides heat to the combustion chamber 26; and the reducing gas input lines 70, 72 are respectively It is disposed below the regenerator beds 14, 16 for inputting a reducing gas such as ammonia.
如第一圖所示，本實施例之去除揮發性有機物觸媒床18係直接連通蓄熱床14，但是也可以在殼體12中分開設置。而且，如第一圖所示，選擇性還原觸媒床22係直接設置連通去除揮發性有機物觸媒床18，但是也可以在殼體12中分開設置。 As shown in the first figure, the volatile organic-containing catalyst bed 18 of the present embodiment is directly connected to the regenerator bed 14, but may be separately provided in the casing 12. Moreover, as shown in the first figure, the selective reduction catalyst bed 22 is directly provided in communication to remove the volatile organic material catalyst bed 18, but may be separately provided in the casing 12.
同理，如第一圖所示，本實施例之去除揮發性有機物觸媒床20係直接連通蓄熱床16，但是也可以在殼體12中分開設置。而且，如第一圖所示，選擇性還原觸媒床24係直接設置連通去除揮發性有機物觸媒床20，但是也可以 在殼體12中分開設置。 Similarly, as shown in the first figure, the volatile organic-containing catalyst bed 20 of the present embodiment directly communicates with the regenerator bed 16, but may be separately disposed in the casing 12. Moreover, as shown in the first figure, the selective reduction catalyst bed 24 is directly disposed to connect and remove the volatile organic catalyst bed 20, but may also They are provided separately in the housing 12.
一製程廢氣管道30允許含有揮發性有機物及氮氧化物的製程廢氣，藉由入口管道32、34進入本實施例之廢氣處理系統10。淨化空氣係藉由一對出口管道36、38導出廢氣處理系統10，接著經由淨化排氣管道50連接至鼓風機52排至大氣中。本實施例中，含有揮發性有機物及氮氧化物的製程廢氣亦可藉由製程廢氣旁路管道40藉由入口管道42、44進入本實施例之廢氣處理系統10。本實施例之廢氣處理系統10係使用多個閥54、56、58、60、62、64以控制製程廢氣進入廢氣處理系統10與淨化空氣自廢氣處理系統10排出。 A process exhaust gas line 30 allows process exhaust gases containing volatile organic compounds and nitrogen oxides to enter the exhaust gas treatment system 10 of the present embodiment via inlet conduits 32,34. The purified air is directed to the exhaust treatment system 10 by a pair of outlet conduits 36, 38, and then connected to the blower 52 via the purge exhaust conduit 50 to the atmosphere. In this embodiment, the process waste gas containing volatile organic compounds and nitrogen oxides may also enter the exhaust gas treatment system 10 of the present embodiment through the inlet conduits 42, 44 through the process exhaust gas bypass conduit 40. The exhaust gas treatment system 10 of the present embodiment uses a plurality of valves 54, 56, 58, 60, 62, 64 to control process exhaust gas from entering the exhaust gas treatment system 10 and purifying air from the exhaust gas treatment system 10.
還原氣體輸入管線70、72係分別設置在蓄熱床14、16下方，輸入還原氣體例如氨氣，當來自製程廢氣管道30之製程廢氣中的氮氧化物與氨氣通過留有空隙供氣體流動的蓄熱床14、16與去除揮發性有機物觸媒床18、20可均勻混合，接著氮氧化物與氨氣流經選擇性還原觸媒床22、24，在選擇性還原觸媒上反應成無害的氮氣與水。 The reducing gas input lines 70, 72 are respectively disposed under the regenerator beds 14, 16 and input a reducing gas such as ammonia gas, and nitrogen oxides and ammonia gas in the process exhaust gas from the process exhaust gas pipe 30 pass through the gap to supply the gas. The regenerator beds 14, 16 are uniformly mixed with the volatile organic-containing catalyst beds 18, 20, and then the nitrogen oxides and ammonia streams are selectively reduced to the catalytic beds 22, 24 to form harmless nitrogen on the selective reduction catalyst. with water.
本實施例中，還原氣體輸入管線70、72分別設置在蓄熱床14、16下方，用於輸入還原氣體例如氨氣，當來自製程廢氣管道30之製程廢氣中的氮氧化物與氨氣通過蓄熱床14、16與去除揮發性有機物觸媒床18、20即可均勻混合，如此無需增加殼體12高度以提供氣體混合的空間，方便維修人員進行維修。 In this embodiment, the reducing gas input lines 70, 72 are respectively disposed under the regenerator beds 14, 16 for inputting a reducing gas such as ammonia gas, and nitrogen oxides and ammonia gas in the process exhaust gas from the process exhaust gas pipe 30 are passed through the heat storage. The beds 14, 16 can be uniformly mixed with the volatile organic-catalyst beds 18, 20, so that there is no need to increase the height of the casing 12 to provide a space for gas mixing, facilitating maintenance by maintenance personnel.
接著，請參照第二圖，第二圖係本新型之廢氣處理系統之第一操作循環示意圖。於第一操作循環中，閥54打開 ，閥58關閉，藉以使蓄熱床14為注入床，而蓄熱床16為排出床。蓄熱床14、16內部的蓄熱陶瓷可吸收經燃燒器28燃燒的揮發性有機物的熱能。含有揮發性有機物及氮氧化物的製程廢氣經由製程廢氣管道30、閥54及入口管道32至蓄熱床14，經由蓄熱床14的預熱，接著流經去除揮發性有機物觸媒床18，於溫度約350~400℃下，揮發性有機物在去除揮發性有機物觸媒上發生氧化反應成為二氧化碳與水。 Next, please refer to the second figure, which is a schematic diagram of the first operation cycle of the novel exhaust gas treatment system. In the first operating cycle, valve 54 opens The valve 58 is closed so that the regenerator bed 14 is the injection bed and the regenerator bed 16 is the discharge bed. The heat storage ceramics inside the regenerator beds 14, 16 absorb the thermal energy of the volatile organic compounds combusted by the burner 28. Process exhaust gas containing volatile organic compounds and nitrogen oxides is passed through process exhaust gas line 30, valve 54 and inlet line 32 to regenerator bed 14, preheated via regenerator bed 14, and then passed through volatile organic solvent bed 18 at temperature At about 350~400 °C, volatile organic compounds oxidize to remove carbon dioxide and water on the volatile organic catalyst.
製程廢氣中的氮氧化物與自還原氣體輸入管線70輸入的氨氣通過蓄熱床14與去除揮發性有機物觸媒床18均勻混合，接著氮氧化物與氨氣流經選擇性還原觸媒床22，在選擇性還原觸媒上反應成無害的氮氣與水。 The nitrogen oxides in the process exhaust gas and the ammonia gas input from the reducing gas input line 70 are uniformly mixed through the regenerator bed 14 and the volatile organic-containing catalyst bed 18, and then the nitrogen oxides and the ammonia gas stream are selectively reduced to the catalyst bed 22, It reacts to harmless nitrogen and water on a selective reduction catalyst.
本實施例中，流出選擇性還原觸媒床22的氣體進入燃燒室26，提高至燃燒室26溫度，停留例如0.5秒時間，對未反應的揮發性有機物進行燃燒，提高本實施例之廢氣處理系統的效率。 In this embodiment, the gas flowing out of the selective reduction catalyst bed 22 enters the combustion chamber 26, is raised to the temperature of the combustion chamber 26, and stays for, for example, 0.5 seconds, to burn unreacted volatile organic compounds, thereby improving the exhaust gas treatment of the present embodiment. The efficiency of the system.
接著流出燃燒室26之淨化後的氣體進入選擇性還原觸媒床24、去除揮發性有機物觸媒床20、蓄熱床16、出口管道38、閥60至淨化排氣管道50及鼓風機52排至大氣中或另作他用。此第一操作循環中，還原氣體輸入管線72關閉。 The purified gas flowing out of the combustion chamber 26 then enters the selective reduction catalyst bed 24, the volatile organic catalyst bed 20, the regenerator bed 16, the outlet conduit 38, the valve 60 to the purge exhaust conduit 50, and the blower 52 to the atmosphere. In the middle or for other purposes. In this first operational cycle, the reducing gas input line 72 is closed.
接著，請參照第三圖，第三圖係本新型之廢氣處理系統之第二操作循環示意圖。於第二操作循環中，閥54關閉，閥58打開，藉以使蓄熱床16為注入床，而蓄熱床14為排出床。蓄熱床14、16內部的蓄熱陶瓷可吸收經燃燒器 28燃燒的揮發性有機物的熱能。含有揮發性有機物及氮氧化物的製程廢氣經由製程廢氣管道30、閥58及入口管道34至蓄熱床16，經由蓄熱床16的預熱，接著流經去除揮發性有機物觸媒床20，於溫度約350~400℃下，揮發性有機物在去除揮發性有機物觸媒上發生氧化反應成為二氧化碳與水。 Next, please refer to the third figure, which is a schematic diagram of the second operation cycle of the novel exhaust gas treatment system. In the second cycle of operation, valve 54 is closed and valve 58 is opened, whereby regenerator bed 16 is the injection bed and regenerator bed 14 is the discharge bed. The regenerative ceramic inside the regenerator beds 14, 16 can absorb the burner 28 heat of combustion of volatile organic compounds. Process exhaust gas containing volatile organic compounds and nitrogen oxides is passed through process exhaust gas conduit 30, valve 58 and inlet conduit 34 to regenerator bed 16, preheated via regenerator bed 16, and then passed through volatile organic catalyst bed 20 at temperature At about 350~400 °C, volatile organic compounds oxidize to remove carbon dioxide and water on the volatile organic catalyst.
製程廢氣中的氮氧化物與自還原氣體輸入管線72輸入的氨氣通過蓄熱床16與去除揮發性有機物觸媒床20均勻混合，接著氮氧化物與氨氣流經選擇性還原觸媒床24，在選擇性還原觸媒上反應成無害的氮氣與水。 The nitrogen oxides in the process exhaust gas and the ammonia gas input from the reducing gas input line 72 are uniformly mixed with the volatile organic-containing catalyst bed 20 through the regenerator bed 16, and then the nitrogen oxides and the ammonia gas stream are selectively reduced to the catalyst bed 24, It reacts to harmless nitrogen and water on a selective reduction catalyst.
本實施例中，流出選擇性還原觸媒床24的氣體進入燃燒室26，提高至燃燒室溫度，停留例如0.5秒時間，對未反應的揮發性有機物進行燃燒，提高本實施例之廢氣處理系統的效率。 In this embodiment, the gas flowing out of the selective reduction catalyst bed 24 enters the combustion chamber 26, is raised to the combustion chamber temperature, and stays for, for example, 0.5 seconds, to burn unreacted volatile organic substances, thereby improving the exhaust gas treatment system of the present embodiment. s efficiency.
接著流出燃燒室26之淨化後的氣體進入選擇性還原觸媒床22、去除揮發性有機物觸媒床18、蓄熱床14、出口管道36、閥56至淨化排氣管道50及鼓風機52排至大氣中或另作他用。此第二操作循環中，還原氣體輸入管線70關閉。 The purified gas flowing out of the combustion chamber 26 then enters the selective reduction catalyst bed 22, the volatile organic organic catalyst bed 18, the regenerator bed 14, the outlet conduit 36, the valve 56 to the purification exhaust conduit 50, and the blower 52 to the atmosphere. In the middle or for other purposes. In this second operating cycle, the reducing gas input line 70 is closed.
接著，請參見第四圖，第四圖係本新型之另一實施例的廢氣處理系統剖視圖。本實施例係三床系統。本實施例的廢氣處理系統10將蓄熱式觸媒焚化爐(RCO)與選擇性觸媒還原器(SCR)整合在單一殼體12中。本實施例之廢氣處理系統10包含三個蓄熱床14、16、17，內部含有熱交換介質例如蜂窩型、馬鞍型或球型蓄熱陶瓷；去除揮 發性有機物觸媒床18、20、21，位於蓄熱床14、16、17上方，去除揮發性有機物觸媒例如將鉑沈積在擔體上形成；選擇性還原觸媒床22、24、25位於去除揮發性有機物觸媒床18、20、21上方，選擇性還原觸媒例如將鈦及/或釩沈積在擔體上形成；燃燒室26，連通選擇性還原觸媒床22、24、25；燃燒器28、29，提供熱至燃燒室26；及還原氣體輸入管線70、72、73，分別設置在蓄熱床14、16、17下方，用於輸入還原氣體例如氨氣。 Next, please refer to the fourth drawing, which is a cross-sectional view of an exhaust gas treatment system according to another embodiment of the present invention. This embodiment is a three bed system. The exhaust gas treatment system 10 of the present embodiment integrates a regenerative catalytic converter (RCO) and a selective catalytic converter (SCR) in a single casing 12. The exhaust gas treatment system 10 of the present embodiment comprises three regenerator beds 14, 16, 17 containing a heat exchange medium such as a honeycomb type, a saddle type or a ball type regenerative ceramic; The organic organic catalyst beds 18, 20, 21 are located above the regenerator beds 14, 16, 17 to remove volatile organic catalysts such as platinum deposited on the support; the selective reduction catalyst beds 22, 24, 25 are located Removing the volatile organic material catalyst bed 18, 20, 21, a selective reduction catalyst such as titanium and / or vanadium deposited on the support; a combustion chamber 26, connected to the selective reduction catalyst bed 22, 24, 25; The burners 28, 29 provide heat to the combustion chamber 26; and reducing gas input lines 70, 72, 73, respectively disposed below the regenerator beds 14, 16, 17 for inputting a reducing gas such as ammonia.
一製程廢氣管道30允許含有揮發性有機物及氮氧化物的製程廢氣，藉由入口管道32、34、35進入本實施例之廢氣處理系統10。淨化空氣係藉由一對出口管道36、38、39導出廢氣處理系統10，接著經由淨化排氣管道50連接至鼓風機52排至大氣中。本實施例中，含有揮發性有機物及氮氧化物的製程廢氣亦可藉由製程廢氣旁路管道40藉由入口管道42、44、45進入本實施例之廢氣處理系統10。本實施例之廢氣處理系統10係使用多個閥54、56、58、59、60、61、62、64與65以控制製程廢氣進入廢氣處理系統10與淨化空氣自廢氣處理系統10排出。 A process exhaust gas line 30 allows process exhaust gases containing volatile organic compounds and nitrogen oxides to enter the exhaust gas treatment system 10 of the present embodiment via inlet conduits 32, 34, 35. The purified air is led out of the exhaust treatment system 10 by a pair of outlet conduits 36, 38, 39, and then connected to the blower 52 via the purge exhaust conduit 50 to the atmosphere. In this embodiment, the process waste gas containing volatile organic compounds and nitrogen oxides may also enter the exhaust gas treatment system 10 of the present embodiment through the inlet conduits 42, 44, 45 through the process exhaust gas bypass conduit 40. The exhaust gas treatment system 10 of the present embodiment uses a plurality of valves 54, 56, 58, 59, 60, 61, 62, 64 and 65 to control process exhaust gas from entering the exhaust gas treatment system 10 and purifying air from the exhaust gas treatment system 10.
還原氣體輸入管線70、72、73，分別設置在蓄熱床14、16、17下方，輸入還原氣體例如氨氣，當來自製程廢氣管道30之製程廢氣中的氮氧化物與氨氣通過留有空隙供氣體流動的蓄熱床14、16、17與去除揮發性有機物觸媒床18、20、21可均勻混合，接著氮氧化物與氨氣流經選擇性還原觸媒床22、24、25，在選擇性還原觸媒上反應成無害的氮氣與水。 The reducing gas input lines 70, 72, 73 are respectively disposed under the regenerator beds 14, 16, 17 and input a reducing gas such as ammonia gas, and nitrogen oxides and ammonia gas in the process exhaust gas from the process exhaust gas pipe 30 are left in the gap. The regenerator beds 14, 16, 17 for gas flow are uniformly mixed with the volatile organic-catalyst beds 18, 20, 21, and then the nitrogen oxides and ammonia streams are selectively reduced by the catalyst beds 22, 24, 25, in the selection The reducing catalyst reacts into harmless nitrogen and water.
本實施例之廢氣處理系統操作時，可選擇蓄熱床14、16、17其中的兩床進行，操作循環如上述的第一操作循環與第二操作循環。 When the exhaust gas treatment system of the present embodiment is operated, two of the regenerator beds 14, 16, 17 may be selected for operation, such as the first operation cycle and the second operation cycle described above.
以上所述僅為本新型之較佳實施例，非用以限定本新型之專利範圍，其他運用本新型之專利精神之等效變化，均應俱屬本新型之專利範圍。例如本新型廢氣處理系統係整合蓄熱式觸媒焚化法及選擇性觸媒還原法，可同時去除廢氣中的可氧化化合物與可還原化合物，上述實施例之揮發性有機物與氮氧化物僅是舉例說明，非用來限制為只能處理揮發性有機物與氮氧化物。 The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the patent of the present invention. Other equivalent variations of the patent spirit of the present invention are all within the scope of the patent of the present invention. For example, the novel exhaust gas treatment system integrates a regenerative catalytic incineration method and a selective catalyst reduction method, and can simultaneously remove oxidizable compounds and reducible compounds in the exhaust gas. The volatile organic compounds and nitrogen oxides in the above embodiments are merely examples. Note that it is not limited to only deal with volatile organic compounds and nitrogen oxides.
10‧‧‧廢氣處理系統 10‧‧‧Exhaust gas treatment system
12‧‧‧殼體 12‧‧‧ housing
14‧‧‧蓄熱床 14‧‧‧heat storage bed
16‧‧‧蓄熱床 16‧‧‧heat storage bed
17‧‧‧蓄熱床 17‧‧‧heat storage bed
18‧‧‧去除揮發性有機物觸媒床 18‧‧‧Removal of volatile organic compound catalyst bed
20‧‧‧去除揮發性有機物觸媒床 20‧‧‧Removing volatile organic catalyst bed
21‧‧‧去除揮發性有機物觸媒床 21‧‧‧Removal of volatile organic compound catalyst bed
22‧‧‧選擇性還原觸媒床 22‧‧‧Selective reduction catalyst bed
24‧‧‧選擇性還原觸媒床 24‧‧‧Selective reduction catalyst bed
25‧‧‧選擇性還原觸媒床 25‧‧‧Selective reduction catalyst bed
26‧‧‧燃燒室 26‧‧‧ combustion chamber
28‧‧‧燃燒器 28‧‧‧ Burner
29‧‧‧燃燒器 29‧‧‧ Burner
30‧‧‧製程廢氣管道 30‧‧‧Process exhaust pipe
32‧‧‧入口管道 32‧‧‧Inlet Pipeline
34‧‧‧入口管道 34‧‧‧Inlet Pipeline
35‧‧‧入口管道 35‧‧‧Inlet pipe
36‧‧‧出口管道 36‧‧‧Export Pipeline
38‧‧‧出口管道 38‧‧‧Export pipeline
39‧‧‧出口管道 39‧‧‧Export pipeline
40‧‧‧製程廢氣旁路管道 40‧‧‧Process exhaust gas bypass pipe
42‧‧‧入口管道 42‧‧‧Inlet Pipeline
44‧‧‧入口管道 44‧‧‧Inlet Pipeline
45‧‧‧入口管道 45‧‧‧Inlet Pipeline
50‧‧‧淨化排氣管道 50‧‧‧purification exhaust pipe
52‧‧‧鼓風機 52‧‧‧Blowers
54‧‧‧閥 54‧‧‧ valve
56‧‧‧閥 56‧‧‧ valve
58‧‧‧閥 58‧‧‧ valve
59‧‧‧閥 59‧‧‧Valves
60‧‧‧閥 60‧‧‧ valve
61‧‧‧閥 61‧‧‧ valve
62‧‧‧閥 62‧‧‧ valve
64‧‧‧閥 64‧‧‧ valve
65‧‧‧閥 65‧‧‧ valve
70‧‧‧還原氣體輸入管線 70‧‧‧Reducing gas input line
72‧‧‧還原氣體輸入管線 72‧‧‧Reducing gas input pipeline
73‧‧‧還原氣體輸入管線 73‧‧‧Reducing gas input line
第一圖係本新型之一實施例的廢氣處理系統剖視圖；第二圖係本新型之廢氣處理系統之第一操作循環示意圖；第三圖係本新型之廢氣處理系統之第二操作循環示意圖；以及第四圖係本新型之另一實施例的廢氣處理系統剖視圖。 1 is a cross-sectional view of an exhaust gas treatment system according to an embodiment of the present invention; a second diagram is a schematic diagram of a first operation cycle of the exhaust gas treatment system of the present invention; and a third diagram is a schematic diagram of a second operation cycle of the exhaust gas treatment system of the present invention; And a fourth drawing is a cross-sectional view of an exhaust gas treatment system of another embodiment of the present invention.
10‧‧‧廢氣處理系統 10‧‧‧Exhaust gas treatment system
12‧‧‧殼體 12‧‧‧ housing
14‧‧‧蓄熱床 14‧‧‧heat storage bed
16‧‧‧蓄熱床 16‧‧‧heat storage bed
18‧‧‧去除揮發性有機物觸媒床 18‧‧‧Removal of volatile organic compound catalyst bed
20‧‧‧去除揮發性有機物觸媒床 20‧‧‧Removing volatile organic catalyst bed
22‧‧‧選擇性還原觸媒床 22‧‧‧Selective reduction catalyst bed
24‧‧‧選擇性還原觸媒床 24‧‧‧Selective reduction catalyst bed
26‧‧‧燃燒室 26‧‧‧ combustion chamber
28‧‧‧燃燒器 28‧‧‧ Burner
30‧‧‧製程廢氣管道 30‧‧‧Process exhaust pipe
32‧‧‧入口管道 32‧‧‧Inlet Pipeline
34‧‧‧入口管道 34‧‧‧Inlet Pipeline
36‧‧‧出口管道 36‧‧‧Export Pipeline
38‧‧‧出口管道 38‧‧‧Export pipeline
40‧‧‧製程廢氣旁路管道 40‧‧‧Process exhaust gas bypass pipe
42‧‧‧入口管道 42‧‧‧Inlet Pipeline
44‧‧‧入口管道 44‧‧‧Inlet Pipeline
50‧‧‧淨化排氣管道 50‧‧‧purification exhaust pipe
52‧‧‧鼓風機 52‧‧‧Blowers
54‧‧‧閥 54‧‧‧ valve
56‧‧‧閥 56‧‧‧ valve
58‧‧‧閥 58‧‧‧ valve
60‧‧‧閥 60‧‧‧ valve
62‧‧‧閥 62‧‧‧ valve
64‧‧‧閥 64‧‧‧ valve
70‧‧‧還原氣體輸入管線 70‧‧‧Reducing gas input line
72‧‧‧還原氣體輸入管線 72‧‧‧Reducing gas input pipeline
Claims (6)
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| TW101210867U TWM444871U (en) | 2012-06-05 | 2012-06-05 | A system for the abatement of industrial process emissions |
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| Application Number | Priority Date | Filing Date | Title |
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| TW101210867U TWM444871U (en) | 2012-06-05 | 2012-06-05 | A system for the abatement of industrial process emissions |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106540543A (en) * | 2017-01-17 | 2017-03-29 | 启迪桑德环境资源股份有限公司 | A kind of multiple pass type selective catalytic reduction denitration device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106540543A (en) * | 2017-01-17 | 2017-03-29 | 启迪桑德环境资源股份有限公司 | A kind of multiple pass type selective catalytic reduction denitration device |
| CN106540543B (en) * | 2017-01-17 | 2022-12-02 | 启迪环境科技发展股份有限公司 | Multi-pass selective catalytic reduction denitration device |
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