TWM443866U - Multi-axis video camera based template calibration device of - Google Patents

Description

M443866 V. New description: [New technical field] This is a technical field of single lens camera calibration and home position return, specifically a multi-axis camera calibration plate device, which enables single-lens camera External parameters, zeroing of the distance between the single-lens camera and the object to be tested, and measurement of the relative position of the object to be tested on the single-lens camera. [Prior Art] As shown in FIG. 1A, the platform 12 is conventionally set with the object to be tested 12, and the relative position (χγθ) between the object 12 and the coordinates of the two cameras 21 and 22 is completed by using the two cameras 2 and 22 The typical application is the alignment of the object to be tested 12 (such as the alignment of the wafer, and can also be used on the slide of the biological detection). The alignment method is to use the two cameras 2 to obtain the patterns 121 and 122. The relative positions on the image center, and the patterns 121, 122 are engraved on the object to be tested 12. Generally, the object to be tested 12 is moved so that the patterns 121 and 122 are held at the center points of the images 211 and 221 of the two cameras 21 and 22, and the reference coordinates of the object to be tested η are orthogonal to the ideal reference coordinates. . For the moving distance of χγ, the relative position of the center position of one of the patterns 121 and 122 and the center of the images 211 and 221 can be obtained (assuming the distance between the two patterns 121 and 122 and the distance between the two cameras 2 and 22) ...and is known), and the amount of displacement in the direction is calculated using the center line between the two patterns 121, 221 . As shown in Fig. 1, it is assumed that the centers of the two images 21, 22 of the two images 21, 22 and the respective shadows 3 M443866 are 211, 221 with a center distance of δ δ 〇χ 2 6y 丨, Sy2 and two images 211

The distance between the centers of 221 is L ’, then the amount of displacement required for the flat A is 10 0 11 is δχ = δχ\ = ^, 2

OR sy = syl = sy2 δθ = tan'

Syl ~8y .L~5xl The above-mentioned clamping method has a measured resolution proportional to the pixels of the two cameras U, 22, and under fixed pixel conditions, the resolution of the angle and the image 211 of the two cameras 21, 22 221 center flower drag dry ~ distance is proportional. This type of positioning accuracy is high, but because the use of - sawing / co-, the use of a camera 21, 22, the cost is also higher, for some accuracy requirements of the 琢 琢 σ (for example, accuracy is 1 In the case of 〇/zm), the measurement of the two cameras 21 and 22 is too 々p_amp and the 菫劂 method may be less applicable, and in terms of depth of field, when the object to be tested 12 is high (house, Xu female door ( When the thickness is changed, the distance between the two cameras 21, 22 and the object to be tested 12 is changed. 'At this time, the position of the cameras 21 and 22 is adjusted to change the depth of field is not a single piece. It can be seen that in the past, there were still many room for improvement in the second camera mode. Therefore, there are still many cases in which there are still many missing items that are not good designers. The shortcomings of the creator of this case, which was derived from the above-mentioned conventional image location, were improved and innovated by Miao Si, and after Miao Ya and Xi Nian painstakingly researched, they finally successfully developed and completed this multi-axis camera calibration device. [New content] 4 M443866 The purpose of the creation is to provide a multi-axis camera calibration plate device 'to break the existing measurement method of two camera image positioning, and can use a single lens camera as a measurement, and the depth of field can be matched with the calibration pattern. The adjustment and the positioning of the cymbal (4), in addition to the measurement of the two-degree-of-freedom of the single single-lens camera, can be improved to a four-degree-of-freedom (ΧΥΖΘζ) measurement, and can be effective for occasions with low accuracy requirements. Cost saving. Positive sample device, including a sample to be tested and a single mirror

The multi-axis camera capable of achieving the above-mentioned creative purposes includes: a multi-axis positioning platform, a calibration pattern, and at least a head camera; wherein the calibration pattern surface has at least two marks, and the object to be tested has the same mark corresponding to the calibration pattern. . In this way, through the specific implementation of the above-mentioned technical means of the creation, the creation can perform the position measurement of depth of field (four) and χ θ θ through a single single-lens camera, thereby breaking the measurement method of the existing two camera shadow positions and utilizing The relationship between the two marks on the single-lens camera on this calibration plate can be used to correct the external parameters of the single-lens camera. In turn, the single-lens camera can be used for distance measurement. This allows the original single-lens camera to be used only. The performance of the energy measurement two degrees of freedom is improved to four degrees of freedom (χγζθζ). For the case where the accuracy is low, there may be (4) cost savings and substantial economic benefits. [Embodiment] 5 M443866 Please refer to FIG. 2, the multi-axis camera calibration template device provided by the present invention mainly comprises a multi-axis positioning platform 5, a calibration pattern 6, at least one object to be tested 7 and a single Lens camera 8. The multi-axis positioning platform 5 is provided with a setting calibration pattern 6 and provides a single-lens camera 8 to capture the marking images 61', 62' of the calibration pattern 6 through the two marks 61, 62 on the calibration pattern 6.

The calibration pattern 6 is disposed between the single lens camera 8 and the object to be tested 7, the surface of the calibration pattern 6 has two marks 61, 62, and the two calibration marks 61'62 of the calibration pattern 6 may be the same or different types. As a basis for the single-lens camera 8 image comparison, the surface of the calibration template 6 has at least two marks 6162, and the calibration patterns 6 and 2 marks 61, 62 can be the same. Or different types, for example: consisting of two circular marks 61, 62 (as shown in Figure 3): the available rotation angle is less than plus or minus 90 degrees; shown): can be used to rotate a circle and a square Marking 61, 62 (as shown in Fig. 3) when the angle of rotation is less than or equal to plus or minus 3 degrees; 3C is shown: the angle of rotation of a circle and a line 61, 62 can be used (when the degree is less than or minus 180 degrees; Any graphic mark 61'62 (can be L〇g〇 or polygon as shown): can be used for occasions where the rotation angle is less than or equal to plus or minus 3 degrees. Also, the markings 61, 62 of the pattern 6 can be used for inkjet, Key, printing, laser engraving, 6 M443866 mode, portrayed on wafers or other objects to be tested 7 (such as a biodetection slide), the mark 6162 on the calibration pattern 6 is captured by the single lens camera 8 as the mark image 61', 62' can be used as the basis of the image comparison, and the calibration pattern 6 It can be used in various materials such as paper, glass, steel, plastic or rubber, and the size of the calibration sample 6 is not limited. The object to be tested 7 has a corresponding calibration pattern 6 bis mark 6162, in order to provide two marks 61, 62 and The relative position of the measuring object 7. The single-lens camera 8 provides the relative position of the second standard MW of the calibration pattern 6 and the object to be tested 7 for depth of field adjustment, or the two marks 61, 62 and the object to be tested 7 The relative position is changed to the pixel distance to provide a multi-axis positioning platform 5 for the displacement distance. The single-lens photographic center is used to mark the calibration pattern 6 or the object to be tested 7 on the multi-axis positioning platform 5. 61, 62' or image capture of the image 71 to be tested, and the single lens camera 8 can be a general digital camera, a video single lens camera (WebCam), a monocular digital camera (dslr), an industrial camera or various image captures. The implementation example of this creation is described in detail, as shown in Figure 4 The calibration pattern 6 has two marks 61, 62 to; ^ # _ an object to be tested 7 ' This embodiment is for observation of the object to be tested 7. At the beginning of the amount, the calibration sample 6 of the present invention can be used. The two marks 61'62 perform the origin return and the depth of field adjustment. First, move the calibration pattern 6 to the single-lens camera. In the picture of the shirt, you can see the markings of the calibration sample 61, 62, and then you can close the circuit. The controlled side 7 M443866 type controls the distance between the single lens camera 8 and the calibration pattern 6, so that the distance between the two marks 61, 62 on the calibration pattern 6 is set to the set pixel distance, and when the image is corrected, the pattern 6 is The mark image 61', 62, the zero return of the depth of field is completed when the t-heart distance is reached. When the height of the correction pattern 6 and the single-lens camera 8 is changed, the depth of field (height) can be effectively adjusted by this method. Zeroing) When using a different height (thickness) calibration pattern 6 (slide), regardless of the calibration pattern 6 (how the height (thickness) of the glass is changed'), the single-lens camera 8 depth of field can be used forever. Keep it fixed. Next, you can use the angle found by the center of the mark in the calibration pattern 6 and the angle between the single-lens camera 8 (4) to go to zero. Waiting for zero to complete, because the actual distance of the mark 1,62 of the actual calibration pattern 6 and the center and the pixel distance in the image frame are both known and fixed (when the depth of field is fixed), so there is no change. In the situation, the external parameters of the single-lens camera 8 can be set. ★ For the actual application of this creation, please refer to Figure 5, the operation process includes - sample, - move the pattern to the surface, - zero return, one depth of field adjustment and one χ θ ^ adjustment Waiting for the steps to achieve the purpose of return-to-origin restoration, the calibration sample 6 is a sample of the image, 61, 62, and the calibration sample 6 of the slide is placed with #测物7 (eg Cell, white rice); wherein: 6 placed in the multi-axis positioning step of placing the template, will be corrected on the plate platform 5; 8 000 said moving the pattern to the _ in the 4 sides, is the positioning through h 5 Move the calibration template 6 to the single-lens camera 8 to pick up the bottom of the screen. The ride U Lin (4), the single-mirror art q correction pattern 6 mark image 61, the zero return of the platform 5; ~ image After the step of performing multi-axis positioning of the depth of field adjustment, the calibration template 6 is placed on the multi-axis positioning platform 5 for the image of the single lens camera 8_correction pattern 6 mark 61 and the object 7 to be tested. To be compared with the mark circle image of the correction pattern 6, and the relative position of the image to be tested 71, Depth of field adjustment (as shown in FIGS. 6A to 6C); the step of adjusting the ΧΥΘζ is performed by the single-lens camera (4) which is rotated by the aforementioned zero-point returning step depth adjustment step, and the marked image 61 of the calibration pattern 6 and the object to be tested are taken. The image plane and the pixel distance of 7 are used for the multi-axis positioning platform to perform the calibration pattern 6 # ΧΥΘ ”, and then the origin return of the multi-axis positioning platform 5 is completed to improve the accuracy of the measurement. In a specific implementation manner, the relationship between the height of the calibration template 6 and the image of the single-lens camera 8 is as shown in FIG. 6A to FIG. C, wherein ζ+ is the single-lens camera 8 image plane is close to the calibration template 6 and (Depth of field) distance after the object 7 to be tested (as shown in Fig. 6Α); Ζ0 is the original (depth of field) distance between the single-lens camera 8 image plane and the calibration pattern 6 and the object to be tested 7 (as shown in Fig. 6Β) ;Ζ- for the single-lens camera 8 image plane away from the calibration pattern 6 and the object to be tested 7 (view M443866

Deep) distance (as shown in Figure 6C). Thus, after the standard distance is preset, when the distance between the mark image 61''62' of the calibration pattern 6 and the image of the object to be tested 7 is changed, the image on the single shot (4) may also change. The depth of field adjustment can be performed by the method of Fig. 7A C. When the mark 61 of the calibration pattern 6 and the object to be tested 7 are close to each other, the single lens camera 8 is notified to be away from the object 7 to be tested (as shown in Fig. 7B). On the other hand, the mark 61 of the correction pattern 6 and the object to be tested 7 are distant from each other', and the single lens camera 8 is notified to be close to the workpiece 7 (as shown in Fig. 7c). Thus, when the heights of the correction pattern 6 and the single-lens camera 8 are changed, the four-shot camera 8 can be focused on the object to be tested 7 for a long time. As shown in Fig. 8, when the single-lens camera 8 captures the image of the marked image 61, 62 of the calibration pattern 6, the reference origin of the image frame is at the position of the upper left corner (〇, 〇), and the image is utilized. The processing technique can find the center position of the dot mark image. At this point, the center of the dot can be used to locate the χγ direction (ie, the image in the figure). With the same principle, the square mark of the image frame can also be used. Image 62' is used to perform the position. Using the technique of image processing, the dot mark image 61, the center and the square mark image 62 in the figure can be separately found, and the center 'using the center line of the two mark images 61', 62 can be The calibration pattern 6 and the yaw angle of the reference lens of the single lens camera 8 are found (ie, Δθ' in the figure and the angle of the multi-axis positioning platform 5 is adjusted. For the above positioning, all the corrections in FIGS. 3A to D are applied. In the form of the pattern 6, and the calibration pattern 6 such as the ® 9 has another special purpose, the school M443866 is a circular line with the markings 61, 62, wherein the straight part is corrected by the pattern 6 The middle and white borders are used for identification, and a single line can be used for identification. The circle of the correction pattern 6 is used for the setting of the XY direction, and the distance between the circle and the line is used for the adjustment of the depth of field. The angle of the line is used to adjust the angle. For a calibration pattern of a circular line, the angle from the center of the circle can also be used to adjust the angle. If the actual distance and pattern image of the pattern center of the pattern 6 are corrected 71 center When the prime distance is known, when the image is not distorted, the calibration pattern 6 can also be used to obtain the external parameters of the single-lens camera 8 (ie, the conversion parameters of the pixel and the actual distance). A five-axis (XYZH) variation type calibration pattern 6, as shown in FIG. 1A, wherein the direction of χγζθζ is used, as in the above embodiment, and the θχ direction is the distance adjustment port using L2, which is in five degrees of freedom. The calibration template 6 can be selected from the three-circle, two-circle, two-circle-line or three-arbitrary graphics, and the relative position between the three arbitrary graphics can be any position, and the non-ship three graphics are in an equilateral triangle. Or any three (four) points in the rectangle, the two arbitrary graphics may be polygons, letters, numbers or irregular shapes. The graphics need to be clearly identifiable in the single-lens camera 8. The single-lens camera correction provided by this creation The sample version, when compared with the prior art, has the following advantages: The upper version of the proof plate is made by using the two marks on the relative position of the single lens camera image screen 11 M443866. Position measurement, compared to the traditional single-lens camera can only measure the two-dimensional displacement, this creation can use a single lens camera for the measurement of four-dimensional displacement. The above detailed description is for this creation DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE INVENTION The present invention is not intended to limit the scope of the patents of the present invention, and the equivalent implementation or modification of the present invention should be included in the patent garden of this case. In summary, this case is not only innovative in terms of space type, but also can enhance the above-mentioned multiple functions compared with the customary items. It should fully comply with the statutory invention patent requirements of novelty and progressiveness, and apply for it according to law. Approving the invention patent application, in order to invent the invention, to the sense of virtue. [Simple diagram of the diagram] Figure 1Α~Β is the positioning measurement method of the traditional two camera single object to be tested, • (Α) to illustrate the object to be tested The distance between the top view and (Β) is the structure diagram; Figure 2 is the multi-axis camera calibration pattern device structure; Figure 3Α~D is the various types of calibration patterns for the creation, the description mark There are different patterns; 'Fig. 4 is a schematic diagram of the test object set in the calibration pattern, Fig. 5 is a flow chart of the implementation of the present invention; Fig. 6 is the relationship between the height of the calibration template and the image of the single lens camera. Where is the (depth of field) distance of the camera image plane close to the calibration pattern and the plane of the object to be tested 12 M443866; Figure 6B shows the relationship between the height of the calibration pattern and the image of the single-lens camera, where Z0 is the camera image plane to the calibration template The original (depth of field) distance from the plane of the object to be tested; Figure 6C shows the relationship between the height of the calibration pattern and the image of the single-lens camera, where Z- is the camera image plane away from the calibration pattern and the object plane (depth of field) Figure 7A shows the relationship between the required adjustment height of the calibration template and the image change of the single-lens camera. It is the original center distance of the object to be tested in the camera image. Figure 7B shows the required adjustment height and single-lens camera image. The relationship of change 'its tAz+ is the distance between the center of the sample image after the camera image plane is close to the plane of the object to be tested;

FIG. 7C shows the required adjustment height of the calibration template and the image relationship of the single-lens camera. Where ΔΖ· is the distance between the center of the sample image after the camera image plane is far from the object plane to be tested. FIG. 8 is the positioning of the calibration template in the direction of χγθ. Fig. 9 is a pattern measurement method of a circular pattern of the calibration pattern. Fig. 10 is another variation of the calibration pattern. [Main component symbol description] 11 platform 13 M443866 12 DUT 121, 122 Pattern 21, 22 Camera 211, 221 Image 5 Multi-axis positioning platform 6 Calibration template 61, 62 mark

6Γ, 62, mark image 7 DUT 7 1 DUT image 8 Single lens camera

Claims (1)

M443866 VI. Scope of Application: 1. A multi-axis camera calibration plate device, including: Multi-axis leveling. The system provides a calibration sample and provides a single-lens camera to capture the calibration image of the calibration template through the two marks on the calibration template; the calibration template 'sighs between the single-lens camera and the object to be tested, and the calibration sample The surface of the version has eight marks, and the two marks of the calibration template can be the same or different! S α is used as the basis for image comparison of single-lens cameras; the object to be tested has two marks corresponding to the calibration pattern, in order to provide the relative position of the two marks and the object to be tested; the single-lens camera is provided with a calibration sample The position of the two marks and the object to be tested is adjusted for depth of field, or the relative position of the two marks and the object to be tested is converted into a pixel distance to provide a multi-axis positioning platform for the displacement distance. The multi-axis camera calibration pattern device described in the first paragraph of the patent application, wherein the single-lens camera performs the correction of the external parameter of the single-lens camera by taking the image and pixel distance of the two-labeled pattern image on the calibration template. The zeroing of the distance from the lens camera to the object to be tested and the measurement of the relative position of the object to be tested on the single lens camera. The multi-axis camera calibration pattern device as described in claim 1, wherein the calibration pattern can be selected from the two-circle mark, measuring the line connecting the center of the circle 15 M443866, and the single-lens camera When the angle between the left and right horizontal direction of the image screen is less than plus or minus 90 degrees. 4. The multi-axis camera calibration template device of the above-mentioned patent scope, wherein the calibration template is selected from the group consisting of a circular and a square mark, measuring the center of the circle, and connecting with the square scarf collar. Listen, and the angle between the left and right horizontal direction of the image of the single-lens camera is less than or equal to plus or minus 3 degrees. 5. The multi-axis camera calibration pattern device of claim 2, wherein the calibration pattern is selected from the group consisting of a circle and a line mark, and measuring the shortest vertical distance from the center of the circle to the line. The straight line is different from the horizontal angle of the left and right horizontal direction of the single-lens camera image image when the angle of rotation is less than plus or minus 180 degrees. 6_ The multi-axis camera calibration pattern device according to claim 1, wherein the calibration pattern may be selected from two arbitrary graphic marks, and the second arbitrary graphic may be a polygon, a letter, a number or an irregular shape graphic. The circular shape needs to clearly distinguish the pixels in the single-lens camera, and measure the straight line connecting the center of the arbitrary graphic, and the angle between the left and right 'horizontal directions of the single-lens camera image image is less than or equal to plus or minus three degrees. 7_ The multi-axis camera calibration sample package described in claim 1 wherein the calibration template mark can be selected from two circles, one circle side, one circle line or two arbitrary patterns, and the second arbitrary pattern can be implemented. For graphics with more than 16 JL^^ to the parent, number, or irregular shape, the graphic needs to be clearly identifiable in a single-lens camera. The multi-axis camera calibration pattern device according to the invention of claim 2, wherein the marking of the calibration template is selected from the group consisting of a three-circle, a two-circle-square, a two-circle straight line or a three-arbitrary graphic, and the second arbitrary graphic can be implemented. For graphics, sons, numbers, or irregular shapes, the graphic needs to be clearly identifiable in a single-lens camera. 17