TWM440814U - Countercurrent pulse detonation reactor for the abatement of hazardous chemical emissions - Google Patents

Abstract

This invention provides a novel continuous countercurrent pulse detonation reactor for the abatement of hazardous chemical emissions, including a detonation reactor body, connecters for continuous feeding of waste gases, connecters for continuous feeding of combustible fuel, connecters for continuous feeding of air/water/reaction aids into the said detonation reactor body simultaneously, a detonation enhancement device for the mixing of combustible fuel and waste gases, ignition devices for the ignition of the mixture of gases at the downstream of the said detonation enhancement device to produce a flame.

Description

M440814 is a method for creating a continuous countercurrent detonation high temperature shock wave by detonation technology and using a high temperature and high pressure condition of detonation high temperature shock wave to effectively apply to perfluorination in the semiconductor industry and chemical industry. PFCs) and volatile organic compound (VOC) waste gas treatment. [Prior Art] Perfluoro compounds such as CF4, C2F6, and NF3 are widely used as process gases in semiconductor processes, but only a small part of these gases are used, and most of the remaining are treated as exhaust gases. Emissions have doubts about the greenhouse effect. For example, CF4 uses only about 5% in the process, C2f6 uses only about 30%, C3F8 uses only about 6〇%, NF3 uses only about 60%, and CHF3 uses only about 40%. SF6 is only used. 20%. In the "Kyoto Protocol of the United Nations Framework Convention on Climate Change" in 1997, six kinds of carbon dioxide C2, methane CHU, nitrous oxide 0, sulfur hexafluoride SR, hydrofluorocarbon HFCs and perfluorinated PFCs were regulated. Specific reduction plans and timetables for major greenhouse gases. Among the six main regulated greenhouse gases, SF6, HFCs and PFCs are mainly artificial greenhouse gas components; although HFCs and PFCs do not deplete the ozone layer, they are all powerful greenhouse gases + have a high global warming potential. The Global Warming Potential 'GWP' has a very long life. For example, CF4 has a lifespan of 50,000 years, and CA has a lifespan of up to 1%. The life span can reach 3,2. The life of the leap year and (5) can reach 2, _ years, the life of NR can reach 740 years, the life of CHR can reach 27 years, and the life of CH2F2 can reach 4.9 years. This Wei compound is heterogeneous in the domain layer and is quite long between 3 M44U»14 and the cumulative effect in the atmosphere is irreversible. As the manufacturing technology of semiconductor device components is becoming more and more sophisticated, the use of perfluorinated substances has also led to the rapid growth of the county semiconductor system (4). Therefore, the industry is eager to have more efficient control and processing technologies and adopt new exhaust gas treatment systems. In order to avoid the occurrence of environmental pollution in response to more stringent emission standards in the future. Traditionally, the treatment of PFCs, HFCs and VOCs is most effective in using combustion methods. There is a risk of derivative fires due to improper use of the benevolent and improper combustion control. It is replaced by electrothermal method and plasma treatment. However, the electrothermal method is operated. Temperature field distribution control is not easy to influence 'Processing efficiency can usually only reach less than 9〇%, it is difficult to meet the requirements of meeting the stringent exhaust emission standards; the plasma torch treatment law has the problem that the price of plasma torch is too short; Moreover, taking the opportunity to process 2 〇〇L/mjn of exhaust gas per opportunity, this traditional technique requires about 1 〇 to 15 kW of energy; and using the method of creation, it only requires 15 〇W of electricity, and traditional craftsmanship. Compared with the energy consumption, 'continuous chemical reaction by continuously generating gas to reverse the high temperature and high pressure characteristics of the high temperature scale wave' can save 99% of energy and achieve the treatment purpose. When a mixture of combustible gas and a proper amount of air or oxygen ignites at a certain point in a tubular container, the combustion propagation speed is suddenly increased, so that the flame surface is very fast and combined with the compression wave of the other side to generate a shock wave, and the speed is up to the speed of sound. The phenomenon that tends to be stable above is called detonation, and this local reaction zone is called detonation. When the detonation wave passes, its chemical composition changes. If the detonation wave hits the material, it not only gives a strong impact pressure and high temperature in a very short time, but also causes mechanical damage. 4 knives related to gas detonation (Defl_on) and detonation (Det〇naii〇n), most of the focus on the explosion prevention [anti-cry related research, and some of the emphasis on the use of high-temperature shock wave charm super-sound fans Miscellaneous, developing high-speed aircraft or weapon applications. The detonation process can be simplified as a chemical reaction--the detonation high-temperature shock wave strong riding surface. For the mixed gas state on both sides of the detonation high-temperature shock wave intensity, three flavor equations can be given, namely mass conservation, momentum conservation and energy conservation, as shown in the following equation: (1) (2) (3)

Pl(Dz - ui) = P2(D2-u2)........

Pi + Pi(D2 - Ul)2 = P2 + p2(D2 - u2y + + (EiZHi)2 _ F , p2 , (d2-u2)2 1 Pi 2 — E2+^ + ~l~~

Among them, the state 1 is a state in which the reaction has not been performed before the detonation high-temperature shock wave, and the state 2 is a state in which the reaction has been performed after the detonation high-temperature shock wave. p is the gas pressure, D is the detonation high-temperature shock wave transmission speed, u is the gas velocity, p is the gas density, and E is the gas energy. Moreover, the piece has a chemical reaction and an ideal gas with a specific energy of Q. The equation of state can be written as: E = six b.....................: .................(4) where 'γ = _, Cp is constant pressure specific heat, Cv is constant volume specific heat. Equations (3) and (4) include not only the internal energy of the thermal motion of the substance but also the chemical reaction energy. In the shock relationship, E = E(P,V), and in the detonation high-temperature shock wave relationship, due to the chemical reaction of M440814, E = Ε(Ρ, ν, λ) where λ is the progress of chemical reaction. λ = 〇 : indicates an initial state in which no chemical reaction is performed; λ = 1: indicates a final state of the reaction. From Equations (1) and (2), the relationship between the flame velocity expressed by the dimensionless parameter and the state parameters on both sides of the wavefront can be obtained: (5) =: inverse 2_ui) (6)

Ci

Where Μ is the Mach number of the state after the flame surface passes with the _ shock wave. From the private (3) and (4) equations, (# + α) (» = β....... where (7)

.......................β=4(笤+罕)-"]...... by private (5) and square The formula parameters are: ........................(8) ................... .....(9) (7)Lianli' can be found after the flame front

(10) (ID £2 __ YxCYz + l) Ρι Υ2 (Υι+ν土A)

£2 = yi+v+YiA P1 (Y2 + 1)V .

(D2 ul) 2 · · · · (12) 6 • (13) M440814

κ 2 |Υι(Υ2-Υι)(Υ2 + 1) , Υι(Υ2~Υι)0] IY!(Yi-l) vici J· · · The positive sign "+eight pairs" in equation (10) A corresponds to the weak solution of the detonation branch, while the negative 唬-』A corresponds to the strong solution of the detonation branch.揪义 _ a-G, in the detonation and explosion

Each of the combustions has a unique solution, which is called (four) and CJ

(14) Detonation solution. Called the bomber (1) _ degree value can be obtained by A = 0: D = vCj =

(15)

Vcj =IliZi±PiD2) (Yl + l) p2D2 (16) (17) (18) ucj (19) D~Mi =—£i2. Yi + l · For CJ detonation, the flame front has already rushed The front drive shock wave front. According to the CJ theory, only the initial and final states of the reaction are considered, and the parameters of the reaction zone are not touched. For the CJ detonation parameters, the mass conservation, momentum conservation, energy conservation, and CJ detonation conditions can be combined. Out. The main difference between gas deflagration and detonation and general chemical reaction is that deflagration 7 M440814 and detonation propagate in a reaction wave at a certain speed and proceed automatically. The energy of the combustion reaction is transferred to the unburned reactants via heat conduction, heat radiation, and diffusion of combustion gas products; detonation is the use of the strong impact compression of the explosion shock wave to transfer energy to the unburned reactants. The speed of the combustion reaction used in traditional techniques is usually lower than the speed of sound, a few millimeters per second to several meters per second; the explosion shock wave propagation speed of the detonation process is much greater than the speed of sound, and its speed is as large as several thousand meters in the mother's second. For example, hydrogen (2〇%) has an explosive shock wave velocity in air of up to 1524 meters per second. The propagation of the traditional combustion process, the external conditions of Yizhang, especially the impact of environmental pressure; but the detonation of the explosion shock wave transmission speed is very fast, and almost unaffected by external conditions, its detonation speed is a fixed under certain conditions Constant. This creation uses the detonation theory to create a high-temperature pulse wave reactor that uses detonation technology for chemical reactions. It can continuously generate gas countercurrent detonation high-temperature shock waves using the created high-temperature pulse wave reactor, and utilizes detonation high-temperature shock waves. The method of continuous chemical reaction of the tempering pressure characteristics can be effectively applied to the exhaust gas treatment of perfluorinated substances (PFCs) and volatile organic compounds (v〇c) in the semiconductor industry. [New content] The main purpose of this creation is to provide a high temperature pulse wave reactor for the treatment of harmful chemical exhaust gas, comprising: - a high temperature pulse wave reactor body, an exhaust gas feed pipe for continuously injecting exhaust gas into the high temperature pulse wave reactor body, The fuel feed pipe is used to continuously inject the fuel into the high temperature pulse wave reactor body, air/water/auxiliary into the 8 M440814 material tube for continuous injection of air/water/auxiliary into the high temperature pulse wave reactor body, ~ detonation booster for Promoting the mixing of fuel, exhaust gas and air/water/auxiliaries and for tempering the mixed gas to produce a countercurrent detonation, a set of ignition devices for igniting the mixed gas. The operation principle is as follows: (1) Injecting harmful chemical waste gas that needs to be reacted or destroyed by high temperature into a high-temperature pulse wave reactor; (2) Feeding the fuel into a high-temperature pulse wave reactor'; (3) Air/water/help Injecting high temperature pulse wave reactor; (4) using a detonation booster to promote mixing of fuel, harmful chemical waste gas and air/water/auxiliary; (5) using a group of ignition devices installed at the downstream end of the detonation booster to mix the gas (6) using a detonation accelerator to cause the mixed gas to temper to generate a countercurrent detonation; (7) when the detonation high temperature shock wave reaches the feed end of the high temperature pulse wave reactor, the flame is extinguished by using a bursting heat shock wave; (8) The process of mixing, igniting, counter-current detonation, and flame-extinguishing of the above-mentioned gaseous reactants and harmful chemical exhaust gas is continuously repeated, so that the harmful chemical exhaust gas can be reacted or destroyed by the high temperature and high pressure of the detonation high-temperature shock wave. For the study of gas detonation, 'C〇-current Detonation' has been used in the same direction as the ignition position. Therefore, in order to control the occurrence of detonation, the gas supply needs to adopt half-batch (semj_bafch). Feeding mode, 9 M440814 2 is the 'into the amount of surface, you need to go ahead _ into the paste door, the point is missing = generate burst A, pick up the thin row _ 拙 vacuum for exhaust, after the exhaust is completed off __ door 'The money is renewed and called the batch feeding procedure of repeated feeds, ^. To date, continuous detonation techniques have not been utilized as a technical report and research for the energy of chemical reactions.

The creation of the high temperature pulse wave reaction of the harmful chemical waste gas treatment is the injection of the gas (4). The non-gas position is carried out in the opposite direction of the high temperature pulse wave reactor _ end. Therefore, the flammable gas can be continuously fed. Mixed age _ rough fire installation [_ position, _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ When the high-pressure wave front of the high-temperature shock wave reaches the feeding position, the fire is extinguished by the instantaneous high-speed vibration of the high-temperature shock wave. At this time, the feed can continue, and continue to flow along the flow direction of the reaction state, and reach the ignition position. Then ignited,

The procedure of feeding, igniting, detonating, and extinguishing flames is repeated in this way, which is an innovative method of providing continuous detonation for physical properties and providing high temperature and high pressure reaction conditions; a temperature pulse wave reactor designed by using this method The creator developed the actual machine to carry out the repeated measurement type 5, and it can be successfully and effectively controlled by the detonation to the temperature shock wave frequency, the knocking pressure and the reaction temperature, and the operation is completely safe and unquestionable. According to the detonation theory, the conversion from combustion to detonation in the pipeline requires the length of the pipeline to be related to the diameter of the pipe, the roughness of the pipe wall, and the obstruction. Usually, the pipe length is about 60 to 72 times the diameter of the pipe. The bombing application has substantial difficulty in reactor design. In this high-temperature pulse wave reactor, a detonation accelerator is made by a gentle static stirring device, which increases the disturbance of gas in the reactor, effectively shortens the length required for detonation in the pipeline, and makes the high-temperature pulse The design and operation of the wave reactor becomes simple and controllable. The scope of application of this creation includes: treatment of harmful exhaust gases such as perfluorinated organic compounds, organic chemical exhaust gases, and volatile organic waste gases in semiconductor and other industrial processes, such as: containing PFCs such as SilVCF4, ^, and other products, or containing benzene (Benzene), Toluene, Xy丨ene, styrene, 1,2-Dichloroethane, Trichloroethylene, Ethylbenzene, chloroform , Tetrachloroethylene, Methylene chlororide, Dimethyl Formamide, 1,1-Dichloroethane, Phenol, IV Gasoline (butetracho|oromethane), 1,1,1-1,1'1-Trichloroethane, Methanol, Furans, Methyl phenol, Exhaust gas treatment of Methyl isobutyl ketone, Butylacetate, carb〇n disulfide, polycyclic aromatic hydrocarbon compounds (PAHs), naphthalene or mixtures thereof. In order to better understand the present work, the following illustrations are taken as an example of a preferred embodiment of the present invention. [Embodiment] The main purpose of this creation is to provide a temperature pulse wave reaction state for the treatment of harmful chemical exhaust gas. Fig. 1 shows a preferred example of using the method of the present invention. - The south temperature pulse wave reactor body print, an exhaust gas feed pipe 22 is used for the hazardous chemical exhaust gas 2G to be used for the high temperature pulse wave reactor body 60, a fuel feed pipe 12 for continuously injecting the fuel 1 高温 into the high temperature pulse Wave reactor body 60, air/water/auxiliary feeding tube 32 H Additives and Cascades are used to promote the mixing of 1G, harmful chemical waste gas 20 and butterfly water/3Q and are used to make The mixed gas tempering produces a detonation, and an ignition device group 8 is used to ignite the mixed gas. The creation of this work - _ Wei Wei training _ high temperature pulse wave reactor operating procedures as shown in Figure 2, its principle and operation mode are as follows: (1) will need to use high temperature reaction or destruction of hazardous chemical waste gas Injected into the high-temperature pulse wave reactor body 6〇, the exhaust gas feed pipe 22 can be a single-feed pipe or a plurality of feed pipes, so that most or most of the harmful chemical waste gas can be fed simultaneously. (2) The fuel 10 is continuously pumped into the high-temperature pulse wave reactor body 60 through the fuel feed pipe. The fuel feed pipe 12 may be a single feed pipe or a plurality of feeds to facilitate the majority of the fuels. Feeding. (1) The air required for the reaction, 3 〇, and water 4 进 are fed through the air/water/auxiliary; 斗言32 S continued; the main inlet is the south temperature pulse wave reactor body. The air/water, agent feed line 32 can also be a single feed tube or can be fed simultaneously by a plurality of feeds's that can accept air 3, inert gas, oxygen, water 40, catalyzed M440814, and the like. (4) Using a detonation booster to promote the mixing of fuel, harmful chemical exhaust gas and air/water/auxiliary, (5) using the detonation booster 7 inside the high-temperature pulse wave reactor body 60 to promote fuel 10, harmful The chemical exhaust gas 20, the air 30, and the water 40 are mixed so that the gas mixture flows in the high-temperature pulse wave reactor body 6〇, and the flow is from the inlet end of the high-temperature pulse wave reactor 1 to the reaction product outlet 1〇〇, as in the first Feeding step 110 shown in Fig. 2 is filled to step 120. (6) When the carcass mixture reaches the position of the ignition device group 80 installed at the downstream end of the detonation accelerator 70, the mixed gas will be ignited by the ignition device group 8 as shown in the ignition step 130 of Fig. 2. Since there is no flammable gas downstream of the ignition device group 8, the flame will temper in the direction of the inlet end of the high-temperature pulse wave reactor 1 to generate a counter-current flame, as shown in the detonation step 140 of Fig. 2; The bomb booster 7〇 provides good mixing, so that the combustible gas mixture rapidly burns, warms, pressurizes, and accelerates, thereby generating countercurrent detonation (C〇unte “current Detonation”, as shown in FIG. 2, detonation acceleration step 150 As shown, the detonation high-temperature shock wave 2, followed by the compression of the combustible gas mixture, continues to accelerate until the cj shock wave velocity is reached, as shown in Fig. 2, the detonation step 16〇. (7) When the detonation high temperature shock wave 2 When the feed end of the high-temperature pulse wave reactor body 6〇 is reached, the instantaneous pressure of the detonation high-temperature shock wave 2 is used to cause the flame 13 M440814 flame to flame out, as shown in the flame-extinguishing step of Fig. 2 (8) Reactor The outlet flange 90 is connected to a subsequent device, and the reaction product 100 is discharged by the anti-shock wave 3 of the detonation high-temperature shock wave 2, as shown in the shock-discharging discharge step 180 of Fig. 2. (9) The feed can be continued when this overshoot is performed. , The process of continuously repeating the mixing of the fuel, the harmful chemical exhaust gas 20 and the air/water/auxiliary 30, the ignition, the countercurrent explosion, and the total flame, so that the harmful chemical waste gas 20 can continuously react with the high temperature and high pressure of the detonation high temperature shock wave. Or destruction. In the high temperature pulse wave reactor 彳 operating procedure, the speed of the detonation high temperature shock wave 2 is usually about i〇〇0~2〇0〇m/s, and under certain operating conditions, it can even reach 2500. The high speed of m/s; therefore, the high temperature pulse wave reactor 1 is ignited by step 130 to ;): 仏 step 17 〇 is extremely fast, and the required time is only a few microseconds U/1000 s). (d) 彳〇, The feed rate of harmful chemical waste gas 2 () and air / water / auxiliary agent, the general fluid rotation speed is carried out, the degree is 1~30 m / Se and the field: H temperature shock wave 2 arrives at the high temperature pulse wave reactor body 6〇,;斗斗7 as shown in Figure 2, 媳 flame step i7q, to use the high temperature impact of detonation, the instantaneous force, so that the fire secret scale, the fuel feed rate should be lower than the harmful chemical Wei 2G and find _ (four) (four) speed. Created high temperature pulse wave reactor for hazardous chemical exhaust gas treatment] , used in electronic production (four) exhaust gas _, high-temperature pulse wave reverse use of the fuel: Sichuan can be hydrogen, Jiazhu, Yiyuan, C-burn, Dingyuan, ethylene, B fast or - his milk fuel or a mixture thereof, As a base fuel for detonation. M440814 Harmful chemical waste gas 20 can be PFCs containing SiH4, CF4, C2F6, C3F8, SF6, etc. or contain stupid, stupid, dioxane, stupid ethylene, hydrazine, 2-diethylene, three Gas ethylene, B stupid, gas imitation, tetrachloroethylene, di-methane, dimethylformamide, 1,1-dioxaethane, phenol, tetrachloromethane, trichloroethane, methanol, furan, , methyl isobutyl hydrazine, butyl acetate, carbon disulfide, polycyclic aromatic hydrocarbon compounds, Qin or a mixture thereof. The amount of air 30 and water 40 used can be estimated using a chemical equilibrium formula. For example, in the case of treating harmful chemical waste gas, the required water can be calculated by using a chemical reaction equilibrium calculation. An example of its reaction equation is as follows:

SiH4+ 202 -> Si02 + 2H20

CF4+2H2O+ C〇2 + 4HF CF4 + 〇2 C〇2 + 2F2

C2F6 + 4H2O + 1/2 〇2 ^ 6HF + 2C〇2 + H2O C2F6+ 2〇2 2C〇2 + 3F2

C3F8 + 6H2O + O2 8HF + 3C〇2 + 2H2O C3F8+ 3〇2 3C〇2 + 4F2 SF6+ 3H2〇 -> SO2 + 6HF + 1/2 O2

F2+H2+2HF Since most of the harmful chemical waste gases containing PFCs are reacted, they are easily repolymerized into the most female compound CF4. Therefore, the harmful chemical waste gas containing pF〇s is used in the exhaust gas feed pipe. 22 While entering the high-temperature pulse wave reactor body 6〇, the air/water/auxiliary feed pipe 32 must be used to inject the appropriate amount of water 40 and air 30 required for the reaction, and simultaneously adjust and supply the M440B14 required for the reaction. Appropriate water 40 content and oxygen 3 〇, so that PFCs can be converted into HF and C02' to get better damage removal efficiency. By using the high temperature, high pressure and intense eddy current supplied to the warm pulse wave reactor 1, the most stable compound CF4 is also rapidly destroyed by the high temperature and high pressure of the detonation shock wave. CF4 is a very stable compound, and the pyrolysis and destruction of OR need to supply a large amount of energy, and at the same time, it requires a high activation energy; the reaction formula of CF* for pyrolysis reaction and the heat of reaction ΔΗ are as follows: CF4^ C( Soot) + F2 ΔΗ = +916 kJ/mol CF* in the high-temperature pulse wave reactor, the oxidation reaction with oxygen is still an endothermic reaction. The heat of reaction ΔΗ is as follows: CF4+〇2->C〇2+2F2 ΔΗ = +585 kJ/mol However, if CF4 is oxidized with oxygen and hydrogen in the presence of hydrogen, it becomes an exothermic reaction, and the reaction releases the heat of reaction ΔΗ as follows: # CF4+〇2+2H2-> C02 + 4HF ΔΗ = -557 kJ/mol Therefore, for the treatment of harmful chemical waste gas containing PFCs, it is preferable to use hydrogen gas for the chemical reaction. The detonation booster 70 is mounted in the warm pulse wave reactor body 60 for the purpose of promoting the mixing of the fuel 10, the hazardous chemical exhaust gas 20 and the air/water/auxiliary 32, and secondly, when the mixed gas is ignited, detonation The promoter 7 is required to accelerate the combustion reaction of the mixed gas to rapidly detonate. Therefore, the detonation booster provides a fine, loud static-mixing device design as in the third three: 'using the combination of the deflecting spiral 71 and the guiding spiral 72, the combination and cutting to achieve a winning effect; mixing The gas acts as a forced mixing of the gas due to the swirling flow of the flow guiding vane 72. The principle of basin action is the gas test _ _ _ 71_ type spiral piece 72 After the combination of the detonation accelerator 70 of f, the mixed gas will form a vortex rotation, and the mixed gas will be divided and converged by the blade to generate a mixed force. Therefore, the forced mixing effect can be achieved without using a power unit. Generally, the blades of the flow guiding spiral 71 and the guiding spiral 72 can be designed to be twisted (10) degrees or left-handed and right-handed at any angle. When the combined blades are connected one by one, the left-handed blade and the right-handed can be rotated. The blades are alternately combined, or all of the rotating blades in the same direction are used. Each blade is mounted at a 9 degree angle. When the liquid flows through the first flow guiding spiral blade 71, if it rotates in a clockwise manner, it will be cut into a second injury, and when it flows to the second flow guiding spiral blade 72, it may be in the same direction or in the opposite direction. The flow is rotated in the hour hand direction, and then the paste m is repeated and the above action is repeated. [When the fluid flows through the nth piece of the flow guiding type spiral, it is cut into 2n parts plus the rotation of the fluid to achieve a good mixing effect. If the high temperature reaction requires a long residence time, the detonation promoter 7 can also be designed as a static agitation device that provides a milder mixing, as shown in Fig. 4, with the spiral tube 73 as a gentle agitation. Static stirring device. Due to the flame tempering toward the inlet end of the high-temperature pulse wave reactor body 6〇, the 'detonation speed is extremely fast'. The frequency of detonation is mainly caused by the feed rate and high temperature of fuel, harmful chemical waste gas and M440814 air/water/auxiliary mixture. The operating temperature and dust force of the pulse wave reactor body are determined by the operating temperature and dust force. The faster the feed rate, the higher the temperature and the lower the frequency, the higher the frequency of the _ blast. The speed, temperature and pressure of the detonation high-temperature shock wave 2 mainly depend on the concentration, composition, temperature and movement of the neon gas, regardless of the feed rate. In order to ensure the safety of the operation of the equipment, the ignition unit 8〇 uses at least two ignition devices' as shown in Fig. 5, which may be used in part or in whole; or part of the button can be switched and replaced on the line, so that the high temperature pulse wave reactor body 60 It can be operated year-round without downtime maintenance. The ignition device group 80 can also adopt three ignition devices, as shown in Fig. 6; four ignition devices can also be used, as shown in Fig. 7, any counting ignition device can also be used, which can be partially or fully used. 'Or σ 卩 use and can be switched and replaced on-line, so that the high-temperature pulse wave reactor body (9) can be operated year-round without downtime maintenance. The ignition unit 80 is the simplest to use a spark plug (Spark piug) or a heated spark plug (G10W Plug), but other equipment such as an electric heater can be used as the igniter to provide a gas having a local temperature higher than the auto-ignition temperature. Fluorine N gas, oxygen, water, catalyst, etc., can be fed to the high temperature pulse wave reactor body 6 by air/water/assisted feed tube 32. The amount of air 3 〇 and water 40 fed depends primarily on the chemical reaction to be completed. Since the temperature pulse wave reactor body 60 is repeatedly swept by the high temperature and high pressure detonation high temperature shock wave, the temperature is gradually increased. When the high temperature pulse wave reactor body 60 is swollen, the temperature reaches the fuel 10, and the spontaneous combustion temperature of the chemical exhaust gas 20 is CAutcngnition Temperature) After that, the gas mixture will burn automatically. Therefore, as shown in Fig. 1, in order to effectively control and apply the detonation characteristics, a cooling jacket 62 is disposed outside the high temperature pulse wave reactor body 60 to allow the cooling fluid to enter the cooling jacket 62' from the cold portion fluid inlet 64. The outer wall of the high-temperature pulse wave reactor body 6 is subjected to heat exchange, and the energy I of the outer wall of the high-temperature pulse wave reactor body 6 is taken away, and is excluded by the cooling fluid outlet 65. It is possible to use circulating cooling water or hazardous chemical exhaust gas as the cooling fluid. After the outer wall of the high-temperature pulse wave reactor body 6 is cooled, the internal average temperature is kept lower than the auto-ignition temperature of the fuel 1〇 and the harmful chemical waste gas 2’, and the stable operation of the high-temperature pulse wave reactor body 6G can be maintained. The air/water/auxiliary feed tube 32 can be a two-fluid nozzle for adequate atomization of water and even distribution throughout the gas stream. For PFCs processing equipment that normally connects four sets of exhaust gas inlets, it is necessary to treat 200 L/miri of Si I, (10), % and other gas mixed materials as harmful chemical waste 2Q per unit time. The traditional electro-grouting torch is required. Using 1〇~15 _ power, the high-temperature pulse wave reactor body 60 of this creation is only needed; the knife-level ignition set group 8〇 can achieve more than % destruction efficiency treatment target 'can save energy to reach about 99 %. The above description is intended to be illustrative, and not restrictive, and it is understood by those of ordinary skill in the art that the invention can be modified and changed without departing from the spirit and scope of the invention. All of them will fall within the limits of the scope of the patent application of this creation. M440814 [Simplified description of the drawing] Fig. 1: The harmful chemical waste gas in the feed material_Example of the high-temperature pulse wave reactorFig. 2: Example of the implementation procedure of the high-temperature pulse wave reactor with the hybrid material Figure 3. Example of a strong detonation accelerator for use in a high temperature pulse wave reactor for hazardous chemically pure treatment. Figure 4: High temperature pulse wave reactor for hazardous chemical exhaust gas treatment. Example of Weak Detonation Promoter Fig. 5: Example of the double-ignition device group used in the high-temperature pulse wave reactor of the harmful chemical pure treatment of the present invention. Figure 6 shows the harmful chemical pureness _ high temperature pulse wave Example of three sets of ignition devices used in the reactor. Figure 7. Example of four ignition devices used in the high-temperature pulse wave reactor of the test. [High-frequency pulse wave] 1 High-temperature pulse wave Reactor 2 Detonation High-temperature shock wave 3 Anti-shock wave 1〇 Fuel 12 Fuel feed pipe 20 Harmful chemical waste gas 22 Exhaust gas feed pipe 3〇 Air/water/auxiliary 20 M440814 32 Air/water/auxiliary feed pipe 50 Feed End 60 high temperature pulse Wave reactor body 62 Cooling facility 64 Cooling fluid inlet 65 Cooling fluid outlet 70 Detonation booster 71 Flow-through coil 72 Flow-through coil 73 Spiral tube 80 Ignition unit 90 Reactor outlet flange 100 reaction product 110 Material step 120 full step 130 ignition step 140 detonation step 150 deflagration acceleration step 160 detonation step 170 flameout step 180 anti-vibration discharge step

Claims (1)

M440814 101 8. 14 2011/08, revised Sixth, the scope of application for patents: A high-temperature pulse wave reactor for the treatment of harmful chemical exhaust gas, comprising: a high-temperature pulse wave reactor body; an exhaust gas feed pipe for continuously injecting harmful chemical waste gas into the high-temperature pulse wave reactor body; a fuel feed pipe for continuously injecting fuel into the body of the high-temperature pulse wave reactor; an air/water/auxiliary feed pipe for continuously injecting air, water and an auxiliary agent into the high-temperature pulse wave reactor body; Promote Zhai' installed inside the high-temperature pulse wave reactor body to promote the mixing of fuel, harmful chemical waste gas and air/water/auxiliary, and to make the mixed gas temper to produce countercurrent detonation; the ignition device group 'installed at high temperature The pulse wave reactor body is located at the downstream end of the detonation booster for igniting the mixed gas; the characteristic is: Μ f f exhaust gas & exhaust gas feed pipe continuously injecting high temperature pulse wave reactor φ body; The fuel is continuously injected into the body of the high-temperature pulse wave reactor from the fuel feed pipe; the second gas, water and auxiliary agent are continuously injected into the high temperature from the air/water/auxiliary feed pipe a pulse wave reactor body; a mixture of harmful chemical exhaust gas and air/water/auxiliary to become a mixed gas; igniting the mixed gas with an ignition device group installed at the downstream end of the detonation (4); spear] using a detonation booster Retrograde tempering of existing gas produces countercurrent detonation; 22 101 101MH0814 '^ΎΓ-ΓΖ collar no 2011/08/ Revised by detonation high temperature shock wave to extinguish flame flame; continuously repeat the above procedure, so that harmful chemical exhaust gas can be continuously used High _ hits the south temperature of the wave and reacts with pressure. 2. If the application is specific, the high temperature pulse response H ′ for hazardous chemical exhaust treatment described in the first item has a cooling facility, and the temperature of the high temperature pulse reactor is lower than the autoignition temperature of the fuel and harmful chemical waste gas. 3. If the application is for 2 彳 彳 之 用于 用于 用于 用于 用于 用于 用于 用于 用于 用于 用于 用于 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏4_For example, the high-temperature pulse wave reaction II for harmful chemical aviation treatment, in which the harmful chemical waste gas is a domain compound (ρ(tetra) 嶋 Compounds) exhaust gas. 5. If you apply for the scope of the second item for the high temperature pulse wave reactor with Wei Xue waste, the harmful chemical waste gas is benzene, f benzene, xylene, benzene, 1 'dichloroethylene, three gas Ethylene, B stupid, chloroform, tetraethylene, dioxane, decyl decylamine, ι, ι·二气乙烧, 盼, 四气曱m 三气乙烧, methanol, 七南, mf Dingtongtong, butyl acetate, carbon disulfide, polycyclic aromatic hydrocarbon compounds, naphthalene or mixtures thereof. 6 The high temperature pulse for the treatment of harmful chemical waste gas mentioned in the first item ==心_卿She (4)Transporting several kinds of fuels...The eight medium-milk milk/water/auxiliary feeding tube is plural, and accepts * gas, Inert gas, oxygen, water, catalyst or a mixture thereof. 23 7' M440814 ,, ' 101. 8. 14 a 2011/08 Revision • h '1 - . J 8_The high temperature pulse wave reactor for hazardous chemical exhaust gas treatment as described in claim 1 of the patent application, wherein The ignition device group has a plurality of ignition devices; the ignition devices are all used or partially used; and the ignition device has the function of online replacement. 9. The high temperature pulse wave reactor for hazardous chemical exhaust gas treatment as described in claim 1, wherein the temperature and pressure of the high temperature shock wave are controlled by the type, concentration, feed temperature and pressure control of the fuel. . 10. For the application of the high-temperature pulse wave reactor for the treatment of harmful chemical waste gas as described in the full-scale sub-paragraph, the detonation frequency of the detonation high-temperature shock wave is fuel, harmful chemical exhaust gas/water/auxiliary lining rate, temperature And pressure control. 11_ The high temperature pulse, surge reactor for hazardous chemical exhaust gas treatment as described in the patent application, wherein the detonation promoter is a static agitator. 12. For a high temperature pulse wave reactor for hazardous chemical aeronautical treatment, for example, the detonation promoter is a spiral tube. 24 M440814 IV. Designated representative map. (1) The representative representative of the case is: (1). (2) A brief description of the symbol of the representative figure: ^1/06/3⁄4 iT 1 South temperature pulse wave reaction is 10 fuel 12 fuel feed pipe 20 harmful chemical waste gas 22 exhaust gas feed pipe 30 air 32 air / water / auxiliary feed pipe 40 water 60 high temperature pulse wave reactor body 62 cooling water jacket 64 Cooling water inlet 65 Cooling water outlet 70 Detonation booster 80 Ignition unit 90 Reactor outlet flange 100 Reaction product V. New description: [New technical field] This is a high temperature pulse for harmful chemical waste gas treatment. Wave reaction 2