M436498 五、新型說明： 【新型所屬之技術領域】 本新型是有關於一種過濾裝置，特別是指一種用以過 濾流體中之雜質的流體過濾裝置。 【先前技術】M436498 V. New description: [New technical field] The present invention relates to a filtering device, in particular to a fluid filtering device for filtering impurities in a fluid. [Prior Art]
在半導體製程中，有許多製程流體是可重複使用的， 例如光阻劑或製程氣體，但在回收重複使用之前，得先將 该製程流體中的顆粒雜質及/或空氣濾除，目前都是在一回 收系統中安裝一過濾裝置，藉由將製程流體通入該過濾裝 置進行過濾’以除去顆粒雜質及/或空氣，使過濾後之製程 流體可再重複使用。而該過濾裝置使用一段時間後，就得 要拆離該回收系統，以更換其内部用以過濾雜質與空氣之 過慮模組’但一般的過濾裝置拆離該回收系統後，其用以 注入待過濾流體之注入孔與用以排出過濾後流體之排出孔 會呈開放外露狀，所以在拆取移動該過濾裝置時，常會因 為過濾裝置傾斜或傾倒，而發生内部殘留之製程流體外漏 的情況’因此’對於目前之過濾裝置的設計仍有改良之空 間。 【新型内容】 因此’本新型之目的’即在提供一種可於拆裝時有效 防止流體外漏之流體過濾裝置。 於疋’本新型流體過滤裝置，適用於安裝在一回收系 統以過濾流體，並包含一中空的外殼、一安裝於該外殼中 的過濾模組，及二分別安裝於該外殼之防漏閥。該外殼内 3 M436498 部界定出一過濾空間，且具有分別連通該過濾空間之一注 入孔與一排出孔。該過濾模組是安裝於該過濾空間内，並 可過濾自該注入孔注入該過濾空間中之流體，且使過濾後 之流體自該排出孔排出。該等防漏閥是分別安裝固定於該 外殼之注入孔與該排出孔中’並分別用以安裝於所述回收. 系統，且可分別被安裝之回收系統驅動開啟而分別將流體 注入該注入孔與排出該排出孔内之流體，並可於拆離所述 回收系統時分別自動封閉注入孔與排出孔。 本新型之功效：透過安裝在該注入孔與排出孔之防漏 閥會在該流體過濾裝置拆離回收系統進行時，自動封閉該 注入孔與排出孔的結構設計，可大幢提高流體過遽装置之 使用方便性。 【實施方式】 特點與功效，在 細說明中，將可 有關本新型之前述及其他技術内容、 以下配合參考圖式之一個較佳實施例的詳 清楚的呈現。 ,Μ ，十、没 〜叫〜〃思衣直之較佳营 例’適用於安裝在一回收系統（圖未禾），以對液 等流體（圖未示）進行過濾處理，例如 雜質與氣體等，或者是滹除氣俨 m體中之顆 技1 中之懸浮微粒等，但實 時’濾除之物質不以上述種類為限。在 以過濾液體為例進行說明。 實粑例中， 該流體過濾裝置包含一外殼3、_安 用以對流體進行過遽處理之過遽 、、表"幻中， 一連通安裝於該: 4 M436498 殼3頂端部之防漏閥5，及一安梦 裒於β玄外殼3頂端部之排氣 閥6。 該外殼3包括一開口朝上之中空的殼本體3ι，及一蓋 封該殼本體31開口地蓋設於該殼本體31上之蓋體％，且 該殼本體與該蓋體32相配合界定出—用以安裝該過遽 模組4的過滤空間30’該蓋體32頂端面間隔穿設有與該過 遽空間30連通的-注入孔321、—排出孔322與一排氣孔 323,其中，該排出孔322位於蓋體32中心部位，而注入 孔321與排氣孔323位於蓋體32近環緣部位。 該過濾模組4是安裝於該過濾空間3〇中，並與該注入 孔321、排出孔322及排氣孔323連通，可用以過滤自該注 入孔32i注入之液體中的雜質與氣體，並使過濾後之液體 自該排出孔322排出，而使濾出之氣體自該排氣孔323排 出。在本實施例中，注入孔321注入之待過濾液體是自該 過濾模組4周側往其中心部位通過進行過濾，過濾後之液 體才自蓋體32中心之排出孔322排出。由於該過遽模組4 為習知構件，且類型眾多，因此不再詳述。 該等防漏閥5是分別連通插裝於該注入孔321與排出 孔322中’並可分別被所述回收系統驅動開啟，而將液體 導入注入孔321或將來自排出孔322之液體導出，由於該 等防漏閥5結構相同’因此，以下僅以安裝於該注入孔3 21 之防漏閥5結構為例進行說明。 該防漏閥5包括一插裝於該注入孔321中的管狀閥殼 體51、一連通插裝於該閥殼體51中的連通軸52，及一安 5 M436498 裝於該閥殼體51與該連通軸52間的彈性件53 ^該閥殼艎 51具有一插裝於該注入孔321 _的管狀插接段511、一自該 插接段511同軸往外突伸出外殼3外且徑向外擴之管狀安裝 餃512，及一自該安裝段512同軸往外突伸且内徑小於該安 裝段512内徑之管狀外接段513。在本實施例中，該插接段 511是緊配插裝固定於注入孔321中，但實施時，也可透過 黏膠黏固，或改成螺鎖固定方式。 該連通軸52具有一可軸向位移地設置於該安裝段512 中之閥片部521，及一自該閥片部521同軸往外延伸貫穿該 外接段513之管狀的軸管部522，且該轴管部522徑向穿設 有多個與該外接段513連通的連通孔523，並可相對外接段 513軸向位移而軸向推移該閥片部521。 該連通軸52可在一封閉該閥殼體51之封閉位置與一 導通該閥殼體51之開啟位置間位移變化，當其位在該封閉 位置時，該閥片部521是封閉阻隔於該安裝段512與該外 接段513連通處間，且該轴管段522之連通孔523是位於 該外接段513中，無法與安裝段512連通，所以該連通軸 52無法將液體導入該安裝段513中。當該連通轴52位於該 開啟位置時，該閥片部521會軸向移離該外接段513，而使 該安裝段512與該外接段513連通，且該轴管段522會軸 向移入該安裝段512中，而使該等連通孔523與該安裝段 512連通，進而可將液體導入該安裝段512，而自該插接段 511注入該注入孔321中。 該彈性件53是安裝於該安裝段512中，且軸向彈性頂 M436498 抵於該閥片部52卜而恆將該閥片部521轴向彈性推移至該 該封閉位置。在本實施例中，該彈性件53為彈簧。 該排氣閥6之結構設計是與該防漏閥5相同可用以 排出該過濾空間30的氣體’因此不再詳述。但實施時由 於排氣閥6類型眾多，所以不以上述類型為限。 本新型流體過濾裝置用於過濾液體時，連通安裝於該 入孔321與排出孔322之防漏閥5會分別連通安裝於一 回收系統的一接頭（圖未示），該等防漏閥5之連通軸U 會分別被該接頭往圖3箭頭所示方向推移至該開啟位置， 而使得防漏閥5之彈性件53積存—復位彈力，另外，將該 排氣閥6連通至該回收系統的氣體抽吸管路（圖未示），同 樣使該排氣閥6被驅動至開啟位置。 當待過濾之液體經由防漏閥5而注入該注入孔32ι後 ’該過遽频4就會將通過之液财的㈣與氣體遽出， 濾除，雜質會卡在過濾模組4中，而濾出之空氣會被吸入 該排乳孔323與排氣閥6排出，過滤後之液體會自該排出 孔322與對應之防漏閥5導入該回收系統中。 虽過濾杈組4需要更換，而將該流體過濾裝置拆離該 回收系統後，該等防漏閥5會因為失去該回收系統之驅動 ，其彈性件53之復位彈力會立即自動將該連通軸52彈性 推移向該封閉位置，而封閉該閥殼體51，進而防止該過遽 空間30中的液體自該注入孔⑵與排出孔似漏出，待液 體過遽裝置移至預定更換位置後，才再次透過其它工具使 /等防漏閥5變換至該開啟位置，而可將該過渡空間％内 7 之液體倒出，以便拆開該蓋體32更換該過濾模組4。 實施時，該過濾模組4不以可濾除液體中之氣體為必 要，可僅用以濾除液體中之雜質，所以該外殼3可不必設 置該排氣孔323，或者在使用時，不要將該洩氣閥6開啟。 如圖2、4所示，在本實施例中，該注入孔321、排出 孔322與排氣孔323都是設置在該蓋體32上，但實施時， 注入孔321與排出孔322之設置位置，可根據過濾模組4 之類型或者是過濾之流體種類而對應調整改變，例如將該 排出孔322移至該殼本體31底部。另外，用於過濾氣體時 ，也可將圖2之注入孔321與排出孔322互換，使待過濾 之氣體直接灌注入該過濾模組4中心，使過濾後之氣體自 過濾模組4周側排出，而接續自該排出孔322排出。 表τ、上所述，透過在該注入孔321與排出孔322分別安 裝防漏閥5的結構設計，使得該流體過濾裝置拆離回收系 統進行過濾模組4之更換時，該等防漏閥5會自動變化至 。玄封閉位置，進而封閉該注入孔32丨與排出孔322，而可防 止該過濾空間30内之流體外漏。此外，由於該等防漏閥5 與洩氣閥6皆可受控開啟、關閉，因此當過濾之流體不需 進行排軋時，僅需關閉茂氣閥6，不需要更換過遽裝置，且 可根據過濾之流體為液體或氣體，而自動調整液體與氣體 /主入β亥過;慮空間3〇内之過濾模組4的方向，而可適用於氣 體與液體之過濾，可大幅提高流體過濾裝置之使用方便性 ’因此’確實能達成本新型之目的。 准以上所述者，僅為本新型之較佳實施例而已，當不 8 叫 b498 =以此限定本新型實施之範圍，即大凡依柄型巾請專利 範圍及新型說明内容所作之簡單的等效變化與修飾皆仍 屬本新型專利涵蓋之範圍内。 【圖式簡單說明】 圖1疋本新型流體過濾裝置的一較佳實施例之立體分 解圖； 圖2是該較佳實施例的側視剖面圖； 圖3是該較佳實施例之局部放大剖視圖，說明一防漏 閥位在開啟位置時的情況；及 圖4是本新型流體過濾裝置之另一實施態樣的側視剖 面圖。 M436498 【主要元件符號說明】 3....... ....外殼 511.··· ....插接段 30 ..... .…過濾空間 512.... ....安裝段 31 ...·· ----殼本體 513.... ....外接段 32 …·· ....蓋體 52 …_· —連通轴 321.... ....注入孔 521.... ....閥片部 322.... ....排出孔 522.... ....軸管部 323···· ....排氣孔 523… •…連通孔 4....... ....過渡模組 53…… •…彈性件 5....... ----防漏閥 6 ....... •…排氣閥 51 .·.·· ····閥殼體 10In the semiconductor process, there are many process fluids that are reusable, such as photoresist or process gases, but before recycling, the particulate impurities and/or air in the process fluid must be filtered out. A filtration device is installed in a recovery system, and the process fluid is passed through the filtration device for filtration to remove particulate impurities and/or air, so that the filtered process fluid can be reused. After the filter device is used for a period of time, the recovery system has to be detached to replace the internal filter module for filtering impurities and air. However, after the general filter device is detached from the recovery system, it is used for injection. The injection hole for filtering the fluid and the discharge hole for discharging the filtered fluid may be open and exposed. Therefore, when the filter device is removed and moved, the process residual fluid is often caused by the tilting or dumping of the filter device. 'Therefore there is still room for improvement in the design of current filtration devices. [New content] Therefore, the object of the present invention is to provide a fluid filtering device which can effectively prevent fluid leakage during disassembly and assembly. The present invention is adapted to be installed in a recovery system for filtering fluid and comprising a hollow outer casing, a filter module mounted in the outer casing, and two anti-leak valves respectively mounted to the outer casing. The 3 M436498 portion of the housing defines a filtering space and has an injection hole and a discharge hole respectively communicating with the filtering space. The filter module is installed in the filter space, and can filter the fluid injected into the filter space from the injection hole, and discharge the filtered fluid from the discharge hole. The anti-leak valves are respectively installed and fixed in the injection hole and the discharge hole of the outer casing and are respectively installed for the recycling system, and can be separately driven by the installed recovery system to respectively inject the fluid into the injection. The hole and the fluid in the discharge hole are discharged, and the injection hole and the discharge hole are automatically closed respectively when the recovery system is detached. The utility model has the advantages that the leakage preventing valve installed in the injection hole and the discharge hole automatically closes the structure of the injection hole and the discharge hole when the fluid filtering device is detached from the recovery system, and can greatly improve the fluid flow. The ease of use of the device. [Embodiment] The above and other technical contents of the present invention, and a preferred embodiment of the following reference drawings, will be clearly described in the detailed description. , Μ, 十, 没~叫~ 〃思衣直之好营例' is suitable for installation in a recycling system (Fig.), for filtering liquids (such as not shown), such as impurities and gases. , or the suspended particles in the particle 1 in the degassing m body, but the material that is filtered out in real time is not limited to the above types. The filtration liquid is taken as an example for explanation. In a practical example, the fluid filtering device comprises a casing 3, an ampule for over-flushing the fluid, and a table & phantom, a connection is installed in the: 4 M436498 leakage prevention at the top end of the casing 3 The valve 5, and an exhaust valve 6 at the top end of the β-shaped outer casing 3. The outer casing 3 includes a hollow shell body 3ι with an opening upward, and a cover body 100 that covers the shell body 31 and is covered with the shell body 31, and the shell body is matched with the lid body 32. a filter space 30 ′ for mounting the raft module 4 . The top surface of the cover 32 is spaced apart from the injection hole 321 , the discharge hole 322 , and the vent hole 323 . The discharge hole 322 is located at the center of the cover 32, and the injection hole 321 and the exhaust hole 323 are located at the proximal edge of the cover 32. The filter module 4 is installed in the filter space 3, and communicates with the injection hole 321, the discharge hole 322 and the exhaust hole 323, and can filter impurities and gas in the liquid injected from the injection hole 32i, and The filtered liquid is discharged from the discharge hole 322, and the filtered gas is discharged from the exhaust hole 323. In the present embodiment, the liquid to be filtered injected into the injection hole 321 is filtered from the peripheral side of the filter module 4 toward the center thereof, and the filtered liquid is discharged from the discharge hole 322 at the center of the cover 32. Since the over-twist module 4 is a conventional member and has many types, it will not be described in detail. The anti-leak valves 5 are respectively inserted into the injection holes 321 and the discharge holes 322 and can be driven to be opened by the recovery system, respectively, and the liquid is introduced into the injection holes 321 or the liquid from the discharge holes 322 is led out. Since the anti-leak valves 5 have the same structure, the following description will be made by taking only the structure of the anti-leak valve 5 attached to the injection hole 3 21 as an example. The anti-leak valve 5 includes a tubular valve housing 51 that is inserted into the injection hole 321 , a communication shaft 52 that is inserted into the valve housing 51 , and an A 5 M436498 mounted on the valve housing 51 . The elastic member 53 between the connecting shaft 52 and the tubular housing 51 has a tubular insertion portion 511 inserted into the injection hole 321 _, and a coaxial outer projection from the insertion portion 511 The outwardly expanded tubular mounting dumpling 512 and a tubular outer connecting section 513 projecting coaxially outward from the mounting section 512 and having an inner diameter smaller than the inner diameter of the mounting section 512. In this embodiment, the insertion section 511 is tightly fitted and fixed in the injection hole 321, but in practice, it can also be adhered by adhesive or changed into a screw lock. The communication shaft 52 has a valve piece portion 521 that is axially displaceably disposed in the mounting portion 512, and a tubular shaft portion 522 that extends coaxially outwardly from the valve piece portion 521 and extends through the outer connecting portion 513. The shaft tube portion 522 is radially provided with a plurality of communication holes 523 communicating with the outer connecting portion 513, and is axially displaceable relative to the outer connecting portion 513 to axially displace the valve piece portion 521. The communication shaft 52 can be displaced between a closed position that closes the valve housing 51 and an open position that opens the valve housing 51. When the position is in the closed position, the valve portion 521 is closed to block. The communication section 512 is in communication with the external section 513, and the communication hole 523 of the shaft section 522 is located in the external section 513 and cannot communicate with the mounting section 512. Therefore, the communication shaft 52 cannot introduce liquid into the mounting section 513. . When the connecting shaft 52 is in the open position, the valve piece portion 521 is axially moved away from the external connecting portion 513, and the mounting portion 512 is in communication with the external connecting portion 513, and the shaft tube portion 522 is axially moved into the mounting portion. In the segment 512, the communication holes 523 are communicated with the mounting portion 512, so that liquid can be introduced into the mounting portion 512 and injected into the injection hole 321 from the plug portion 511. The elastic member 53 is mounted in the mounting portion 512, and the axial elastic top M436498 is elastically urged to the closed position by the axial direction of the valve portion 521. In this embodiment, the elastic member 53 is a spring. The exhaust valve 6 is of a structural design that is the same as the anti-leak valve 5 to discharge the gas of the filter space 30, and therefore will not be described in detail. However, since the type of the exhaust valve 6 is numerous in implementation, it is not limited to the above types. When the fluid filtering device of the present invention is used for filtering liquid, the leakage preventing valve 5 connected to the inlet hole 321 and the discharge hole 322 is connected to a joint (not shown) installed in a recovery system, and the leakage preventing valve 5 is respectively connected. The communication shaft U is respectively pushed by the joint to the open position in the direction indicated by the arrow in Fig. 3, so that the elastic member 53 of the leakage preventing valve 5 accumulates - the return elastic force, and the exhaust valve 6 is connected to the recovery system. A gas suction line (not shown) also drives the exhaust valve 6 to the open position. When the liquid to be filtered is injected into the injection hole 32 through the anti-leak valve 5, the liquid frequency (4) and the gas are removed, and the impurities are trapped in the filter module 4, The filtered air is sucked into the drain hole 323 and the exhaust valve 6, and the filtered liquid is introduced into the recovery system from the discharge hole 322 and the corresponding anti-leak valve 5. Although the filter pack 4 needs to be replaced, and the fluid filter device is detached from the recovery system, the anti-leak valve 5 will automatically drive the connecting shaft immediately after the recovery of the recovery system. 52 elastically shifts to the closed position, and closes the valve housing 51, thereby preventing the liquid in the passing space 30 from leaking out from the injection hole (2) and the discharge hole, after the liquid filter device is moved to the predetermined replacement position. The air leaking valve 5 is again switched to the open position by other tools, and the liquid in the transition space % can be poured out to disassemble the cover 32 to replace the filter module 4. In practice, the filter module 4 is not necessary to filter out the gas in the liquid, and can only be used to filter out impurities in the liquid, so the outer casing 3 does not need to be provided with the venting hole 323, or when used, The bleed valve 6 is opened. As shown in FIG. 2 and FIG. 4, in the present embodiment, the injection hole 321, the discharge hole 322 and the exhaust hole 323 are both disposed on the cover 32, but in practice, the injection hole 321 and the discharge hole 322 are disposed. The position can be adjusted according to the type of the filter module 4 or the type of fluid to be filtered, for example, the discharge hole 322 is moved to the bottom of the case body 31. In addition, when the gas is filtered, the injection hole 321 and the discharge hole 322 of FIG. 2 can be exchanged, and the gas to be filtered is directly poured into the center of the filter module 4, so that the filtered gas is self-filtered from the side of the filter module 4. The discharge is discharged from the discharge hole 322. Table τ, as described above, through the structural design of the leakage preventing valve 5 installed in the injection hole 321 and the discharge hole 322, respectively, such that the fluid filtering device is detached from the recovery system for replacement of the filter module 4, the anti-leak valve 5 will automatically change to. The closed position further encloses the injection hole 32丨 and the discharge hole 322 to prevent leakage of fluid in the filter space 30. In addition, since the anti-leak valve 5 and the deflation valve 6 can be controlled to open and close, when the filtered fluid does not need to be rolled, only the moo-valve valve 6 needs to be closed, and the over-clamping device does not need to be replaced, and According to the filtered fluid as a liquid or a gas, the liquid and the gas are automatically adjusted. The direction of the filter module 4 in the space 3 is considered to be suitable for the filtration of gas and liquid, which can greatly improve the fluid filtration. The ease of use of the device 'so' can indeed achieve the purpose of the novel. The above-mentioned ones are only the preferred embodiments of the present invention. When 8 is not called b498, the scope of the present invention is limited, that is, the simple scope of the patent scope and the new description contents of the handle-type towel. Both effect changes and modifications remain within the scope of this new patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective exploded view of a preferred embodiment of a novel fluid filtering device; FIG. 2 is a side cross-sectional view of the preferred embodiment; FIG. 3 is a partial enlarged view of the preferred embodiment. The cross-sectional view illustrates a condition of a leak-proof valve position in an open position; and Figure 4 is a side cross-sectional view of another embodiment of the fluid filter device of the present invention. M436498 [Description of main component symbols] 3....... .... Housing 511.···....Plug section 30 ..... ....Filtering space 512.... Mounting section 31 ...·· ---- Shell body 513...... External section 32 ...··.. Cover body 52 ..._· - Connecting shaft 321.... .. injection hole 521.. .... valve piece 322.. .... discharge hole 522.. .... shaft tube part 323 · · · · .... exhaust Hole 523... •...communication hole 4.............transition module 53...•...elastic member 5....... ----anti-leak valve 6 ..... .. •...Exhaust valve 51 .········ Valve housing 10