M425111 五、新型說明： 【新型所屬之技術領域】 ▲本創作涉及—種用以包裝半導體產業所使用晶圓的晶 圓保》又裝置，尤指一種啟閉簡便且能夠讓晶圓獲得穩定支 撐的晶圓保護盒。 u 【先前技術】 如圖8所示為現有的晶圓保護盒設計，其包括一呈圓 筒狀的皿座80及一可罩蓋於該盒座8〇的盒蓋其中 ’該盒座80的頂側為開口端且以筒壁81圍設形成一供晶 圓容置的容置槽, 並由開口鈿沿著軸線方向於筒壁81 間隔開設有數個缺口 83,以及於筒壁81下方的外周面設 有一具外螺紋的螺合部84;該盒座9〇於内壁的底側設有 ^與盒座80所設螺合部84以螺紋結合的螺合部，藉以讓 :盒蓋90能夠罩蓋結合於該盒座8〇外部，並且於該盒蓋 的頂側接近外周緣的位置凸設有一圈具有結構強化及便 於堆疊的環凸部91。 1有的B曰圓保5蒦盒雖然已經能夠達到包裝及保護晶圓 果仁疋因為其結構設計未臻完善，因此在實施應用 上，尚存在以下所述的不足及限制： 1、 現有晶圓保謹食的冬@ Λ 、 5孤的息盖90是以螺紋結合方式結合 2盒座必須旋轉盒蓋9〇數圈才能夠將盒蓋9〇予以 閉合或開啟’不僅盒蓋90的拆裝相當的麻煩不便。 2、 現有晶圓保護盒的盒座8〇的㈣μ上端與盒蓋 的内壁之間具有相當大的間隙，再加上數個缺口 83的 M425111 設置’導致筒壁81的上端受振動時容易產生偏擺晃動而 無法有效地支撐晶圓，難以對晶圓產生足夠的保護效果。 【新型内容】 為解決現有晶圓保護盒有關於以旋轉方式的啟閉操作 不便及無法有效地支撐晶圓的不足及限制，本創作的主要 目的在於提出一種啟閉簡便且能夠讓晶圓獲得穩定支撐的 晶圓保護盒。 本創作解決先前技術問題所提出的一種晶圓保護盒， 包括： ，、1 W叫六剛w >而叼圓同狀構造且設有一呈 裱繞狀的筒壁及一以該筒壁圍繞形成的容置槽，該盒座以 士稱开ν態由開口端沿著軸線方向於該筒壁開設有二缺口， 、、、對稱形態於$筒壁設有二彈性卡勾，各彈性卡勾的頂 端高於該筒壁的頂緣且設有一勾部； 其為匹配罩蓋結合於該盒座的圓筒狀蓋體， :麗盖於頂側接近外周緣的位置環凸設有—圈環凸部且以 D亥環凸部於马·各$ 的七 、^ I的内頂面形成一圈對應夾持該筒壁頂緣 的：性：=於該環ώ部的對稱位置設有二扣孔供相對應 卡勾的頂端穿出勾扣。 述的晶圓保1 於該筒壁的底部且二…中該彈性卡勾的下端-體連結 各形成 ^彈性卡勾的兩侧與相鄰的該筒壁之間M425111 V. New Description: [New Technology Area] ▲This creation involves a kind of wafer protection for packaging wafers used in the semiconductor industry, especially for a simple opening and closing and enabling stable support for wafers. Wafer protection box. u [Prior Art] As shown in FIG. 8, the conventional wafer protection box design includes a cylindrical holder 80 and a cover that can be covered on the cassette holder 8 of which the holder 80 The top side is an open end and is surrounded by a cylindrical wall 81 to form a receiving groove for receiving the wafer, and a plurality of notches 83 are spaced apart from the cylindrical wall 81 by the opening 钿 in the axial direction, and below the cylindrical wall 81 The outer peripheral surface of the inner peripheral surface is provided with an externally threaded screwing portion 84; the box base 9 is provided with a screwing portion on the bottom side of the inner wall to be screwed with the screwing portion 84 provided in the box base 80, thereby allowing: the cover The cover can be attached to the outside of the case 8 and a ring protrusion 91 having a structural reinforcement and facilitating stacking is protruded from a position where the top side of the cover is close to the outer periphery. 1 Some B曰圆保5蒦 boxes have been able to achieve packaging and protection of wafer nuts because their structural design is not perfect, so there are still some shortcomings and limitations in the application: 1. Existing crystal The winter Λ 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 It is quite inconvenient to install. 2. There is a considerable gap between the upper end of the (4) μ upper end of the existing wafer protection box and the inner wall of the cover, and the M425111 of the plurality of notches 83 is disposed to cause the upper end of the cylindrical wall 81 to be easily generated when subjected to vibration. The yaw is not able to effectively support the wafer, and it is difficult to provide sufficient protection for the wafer. [New content] In order to solve the shortcomings and limitations of the existing wafer protection box regarding the inconvenience of rotating and opening and closing, and the inability to support the wafer effectively, the main purpose of this creation is to propose a simple opening and closing and enabling the wafer to be obtained. A stable support wafer protection box. The present invention solves the prior art problem of a wafer protection box, comprising: , 1 W called Liugang w > and the dome is isomorphously constructed and has a winding wall and a wall surrounded by the wall Forming a receiving groove, the box seat is opened in the ν state by the open end along the axial direction, and two notches are formed in the tube wall, and the symmetrical shape is provided with two elastic hooks on the wall of the tube, and each elastic card The top end of the hook is higher than the top edge of the tube wall and is provided with a hook portion; the cylindrical cover body is matched with the cover cover and the cover is convexly arranged at a position close to the outer circumference of the top side - a ring-shaped convex portion and a D-ring ring convex portion formed on the inner top surface of the horse, each of which forms a circle corresponding to the top edge of the tube wall: sex: = symmetrical position at the ring portion There are two buttonholes for the hooks of the corresponding hooks to pass through. The wafer is protected at the bottom of the wall and the lower end-body of the elastic hook is formed between the two sides of the elastic hook and the adjacent wall
^ ^ —缺縫，兮勺A 前述s d 。卩是位於朝向該盒座中軸線的内側β 底部-體速处：保濩盒其中於該彈性卡勾外側與該筒壁 。叹有數道延軸線方向設置的補強肋。 M425111 前述的晶圓保謨各，使士 & #古〜1 ，、中於該嵌卡槽的外周緣間隔凸 3又有複數片頂抵片；於爷 片抵掣片。 於°玄敗卡槽的内周緣間隔凸設有複數 前述的晶圓保護盒， 扣孔的位置各凸出設有一 本創作所提出的晶圓 增進包括： 其中的盒蓋於外周面底側對應各 側翼》 保護盒，可以獲得的優點及功效^ ^ — Missing seams, spoon A, the aforementioned s d . The crucible is located at the inner side of the central axis of the box seat at the bottom body-body speed: the protective box is outside the elastic hook and the wall of the barrel. There are several reinforcing ribs that are arranged in the direction of the axis. M425111 The above-mentioned wafers are each protected, and the shovel &#古~1, is spaced apart from the outer periphery of the card slot 3 and has a plurality of top-butting pieces; A plurality of the above-mentioned wafer protection boxes are protruded from the inner periphery of the sinuous card slot, and the positions of the buttonholes are respectively convex. The wafer enhancement proposed by the present invention includes: wherein the cover corresponds to the bottom side of the outer peripheral surface Each side wing" protection box, the advantages and effects can be obtained
1本創作的盒座直接利用一對彈性卡勾來固定盒蓋 ，無論是要將盒蓋閉合或開啟均相當地簡便快速。一 2、本創作的彈性卡勾是以朝内卡扣方式將盒蓋固定 ’並且盒盍於外周面底側的相對位置對應設有呈凸出狀的 側翼’讓使用者能夠以符合人體I學的方式將盒蓋開啟， 操作使用極為便利。 3、 本創作於盒蓋的内頂側設有可夾持盒座筒壁頂緣 的嵌卡槽，使得盒座的圓弧狀筒壁能夠穩定地夾持支撐裝 填在容置槽的晶圓，搭配以盒座筒壁及盒蓋周壁形成^層1 The created box holder directly uses a pair of elastic hooks to fix the lid, which is quite simple and quick to close or open the lid. 1. The elastic hook of the present invention fixes the lid in an inwardly snapped manner, and the relative position of the box on the bottom side of the outer peripheral surface is correspondingly provided with a convex flank 'to enable the user to conform to the human body I The method of learning opens the lid and is extremely convenient to operate. 3. The creation has a card slot on the inner top side of the lid to clamp the top edge of the box cylinder wall, so that the arc-shaped cylinder wall of the box seat can stably hold the wafer loaded in the accommodating groove. , with the wall of the box and the wall of the lid to form a layer
• 框壁的緩衝設計，對晶圓產生絕佳的包裝保護效果。S 4、 本創作於盒座的底側外周緣朝下延伸設有—圈環 壁而於盒座的底部形成可對應匹配盒蓋頂側環凸部的套样 ，讓多數個晶圓保護盒能夠穩定地堆疊設置。 【實施方式】 為能詳細瞭解本創作的技術特徵及實用功效，並τ依^ 照說明書的内容來實施，玆進一步以如圖式所示的較佳實 施例，詳細說明如后： 5 M425111 本創作所提出的晶圓保護盒的較佳實施 3所示1包括-盒座10及—可置^士… 至圖 盒蓋20等構件；其中： 。。於該盖座1 〇的 該盒座10是頂側為開口端的圓筒狀構造且設 %繞狀的筒壁H，以該筒 呈 置的容…2,該盒座，。以對供晶圓裝填設 以對稱形態由開口端沿著軸魄 方向於該筒壁11開設有二缺口 ，’’ 筒辟q 以及以對稱形態於該 :1设有二彈性卡勾14,各彈性卡勾14的下端— 連結於該筒壁η底部且兩側與相鄰的該筒壁h : =縫15,藉以讓各彈性卡…備朝内或朝外偏擺 各彈性卡勾14的頂端略高於該筒壁n的頂緣且於朝 向该盒座10中抽線的内側凸設形成—勾部141，並於各彈 性卡勾14外側與該筒壁11Γ&部—體連結設有數道延抽線 :向設置的補強肋⑷，藉以加強各彈性卡勾14的連結強 ::勾扣彈性；該盒座1〇於該筒壁η底部的外周面連結 叹有一圈呈凸出狀的嵌緣16 ’並由該嵌緣16朝下延伸設 有一圈環藉以能夠將該盒座1〇架高而於該盒座1〇 的底部形成一套槽18。 八如圖2、圖3及圖4所示’該盒蓋2〇為規格尺寸與該 Μ 1Μ目匹配的圓筒狀蓋體’該盒蓋2()於頂側接近外周 緣的位置環凸設有-圈可對應嵌合前述套肖18的環&部 21 ’並且於相對該環凸部21的該盒蓋20的内頂面形成一 圈可對應夹持前述筒壁U頂緣的嵌卡槽22，並且為加強 對於該筒㉟11頂緣的夹持定位效果，本創作於該鼓卡槽 M425111 的外周緣間隔凸設有複數片可頂抵於該筒壁U外周緣 頂抵片2 21，以及於該嵌卡槽2 2的内周緣間隔凸設有複 數片可供遠筒壁”内周緣抵靠的抵掣片222 ;對應於該盒 座1〇所設的兩彈性卡Θ 14,該盒蓋20於該環凸部21的 相對應位置對稱開設有二可供各彈性卡勾14 了頁端穿出的 2 23’藉以讓各彈性卡勾14的勾部141能夠勾扣於該 盒盍2〇的頂面’並於該盒蓋20外周面底側相對於各扣孔 的位置各凸出設有一側冑24，藉以讓使用者能夠以符 :人體工學的方式將該盒蓋2〇開啟；又，該盒蓋2〇於頂 部的蓋面進一步設有一圈具結構強化功能的補強環肋25。 如此，本創作利用前述的盒座1 〇及盒蓋2〇組構成一 種如圖1所示的晶圓保護盒。 如圖3及® 4所示，本創作在實施使用時，可以將多 數片晶圓50以堆疊形態裝填於該盒座1〇的容置槽a中 ’再直接將該盒蓋2Q肖下罩蓋，即可直接利用兩彈性卡 么勾14—以勾部141由相對應的扣孔23穿出而將該盒蓋 勾扣定位的方式，能夠簡便快速地將該盒蓋20予以閉合 ;當要將該盒i 20開啟時，直接採取類似於拿東西料 勢，以四個手指捧住該盒座1Q的底部及該盒蓋2〇的側翼 24 ’並利用拇指將兩彈性卡自14朝外扳動，即可簡便快 逮地將該盒蓋20開啟，操作實施極為簡便且符合人體工 學設計，深具實用效能。 ▲如圖2、圖3及圖4所示，本創作將該盒蓋2〇罩蓋於 4盒座1 〇時’該盒蓋20能夠以内頂側的嵌卡;|f 22卡掣 夹持該盒座10的筒壁i絲_罐 』Π 土 Ή頂緣，讓忒盒座的圓弧狀筒 7 1料Cl 11 壁、11能夠穩定地夾持支撐裝填在該容置槽12的晶圓5〇 ’並且能夠利用該盒座1〇的筒壁川及該盒蓋2〇的周辟 而形成雙層框壁形態的緩衝構造，有效地對各晶圓5〇: 生絕佳的包裝保護效果。 如圖5及圖6所示，本創作於該盒座1〇的底側的底 部設有套槽18,能夠對應匹配套合於位於下方的合装2〇 頂側的環凸部21,有效地讓多數個晶圓保護盒能二地 依序堆疊設置。 如圖7戶斤示，本創作可以進一步於該盒座1〇的内周 面势靠設有-緩衝構件30，該緩衝構件3〇可以為泡棉、 Μ材或㈣層等類似的緩衝材料’冑以進—步提升對於 所裝填包裝的晶圓的保護效能。 、 以上所述，僅是本創作的較佳實施例，並非對本創作 :任何形式上的限制’任何所屬技術領域中具有通常知識 ，若在不脫離本創作所提技術特徵的範圍内，利用本創 作所揭示技術内容所作出局部更動或修娜的等效實施例， 均仍屬於本創作技術特徵的範圍内。 【圖式簡單說明】 圖1是本創作較佳實施例的外觀圖。 圖2是本創作較佳實施例的組成構件分解圖。 圖3是本創作較佳實施例的立體剖面圖。 圖4是本創作較佳實施例使用狀態的剖面示意圖。 圖5疋本創作較佳實施例相互堆疊的外觀立體圖。 圖6是本創作較佳實施例相互堆疊的剖面示意圖。 M425111 圖7是本創作於盒座容置槽增設緩衝構件的外觀圖 圖8是現有晶圓保護盒的立體分解圖。• The buffer design of the frame wall provides excellent packaging protection for the wafer. S4. The present invention has a ring wall extending downwardly on the outer periphery of the bottom side of the box base, and a sleeve sleeve corresponding to the top side ring protrusion of the cover is formed at the bottom of the box seat, so that a plurality of wafer protection boxes are provided. Ability to stack settings steadily. [Embodiment] In order to understand the technical features and practical functions of the present invention in detail, and to implement the contents according to the contents of the specification, the following further describes the preferred embodiment as shown in the following figure: 5 M425111 The preferred embodiment 3 of the wafer protection case proposed by the author 1 includes a box holder 10 and a member that can be placed to the cover 20 and the like; . The cassette base 10 of the cover 1 is a cylindrical structure having a top end side and an open end, and is provided with a cylindrical wall H, a container 2, which is a container. The wafer is filled in a symmetrical manner, and two openings are formed in the tube wall 11 from the open end along the axis direction, and the two sides are provided with two elastic hooks 14 respectively. The lower end of the elastic hook 14 is connected to the bottom of the wall η and on both sides and the adjacent wall h:=slot 15 so that the elastic cards can be biased inward or outward for each elastic hook 14 The top end is slightly higher than the top edge of the tube wall n and protrudes toward the inner side of the casing 10 to form a hook portion 141, and is connected to the tube wall 11 Γ & There are several extension lines: the reinforcing ribs (4) are provided to strengthen the connection strength of each elastic hook 14: the hooking elasticity; the box seat 1 is slanted on the outer peripheral surface of the bottom of the tube wall η The flange 16' is formed by a flange extending downwardly from the flange 16 so as to be able to frame the holder 1 and form a groove 18 at the bottom of the holder. 8. As shown in FIG. 2, FIG. 3 and FIG. 4, the cover 2 is a cylindrical cover whose size is matched with the size of the cymbal. The cover 2 (the cover 2) is convexly convex at a position close to the outer periphery of the top side. The ring-shaped portion can be correspondingly engaged with the ring & portion 21' of the sleeve 18 and formed on the inner top surface of the lid 20 opposite to the loop projection 21 to grip the top edge of the cylinder wall U. The card slot 22 is embedded, and in order to enhance the clamping and positioning effect on the top edge of the barrel 3511, the outer peripheral edge of the drum card slot M425111 is spaced apart from the plurality of sheets to abut against the outer peripheral edge of the tube wall U. 2 21, and at the inner peripheral edge of the card slot 2 2, a plurality of gussets 222 for abutting the inner periphery of the distal wall are protruded; and two elastic cassettes corresponding to the casing 1 对应14. The cover 20 is symmetrically disposed at a corresponding position of the ring protrusion 21, and is provided with two 23's for the elastic hooks 14 to pass through the page end, so that the hook portions 141 of the elastic hooks 14 can be hooked. A top side 凸 24 is protruded from the top surface of the box 盍 2 并 and the bottom side of the outer peripheral surface of the cover 20 is opposite to each of the button holes, so that the user can: In the manner of learning, the lid 2 is opened; further, the lid of the lid 2 is further provided with a reinforcing ring rib 25 having a structural strengthening function. Thus, the present invention utilizes the aforementioned cassette holder 1 and the box. The cover 2〇 group constitutes a wafer protection case as shown in Fig. 1. As shown in Figs. 3 and 4, the present invention can be used to load a plurality of wafers 50 in a stacked form in the cassette holder. In the accommodating slot a, the cover 2Q can be directly covered, so that the two elastic card hooks 14 can be directly used, and the hook portion 141 is passed out from the corresponding button hole 23 to hook the cover. The positioning method can be used to close the lid 20 easily and quickly; when the box i 20 is to be opened, the bottom of the box holder 1Q and the box are directly taken by four fingers. Covering the two side flaps 24' and using the thumb to pull the two elastic cards from 14 to the outside, the lid 20 can be opened easily and quickly, and the operation is extremely simple and ergonomically designed, and has practical utility. ▲ As shown in Fig. 2, Fig. 3 and Fig. 4, when the cover is covered by the cover 2 in the case of 4 boxes, The cover 20 can be inserted into the inner top side; the |f 22 card clamps the wall i of the box base 10, the canister, and the top edge of the soil, so that the arc-shaped cylinder 7 of the cassette holder is made of Cl 11 wall And 11 can stably hold and support the wafer 5' loaded in the accommodating groove 12, and can form a double-walled frame form by using the wall of the case and the periphery of the cover 2 The buffer structure is effective for each wafer 5: excellent packaging protection effect. As shown in Fig. 5 and Fig. 6, the bottom portion of the bottom side of the cassette holder 1 is provided with a sleeve groove 18, which can correspond to The ring projections 21 are matched to the bottom side of the assembled 2 dome, which effectively allows a plurality of wafer protection boxes to be stacked in sequence. As shown in FIG. 7 , the present invention can further provide a buffer member 30 on the inner circumferential surface of the casing 1 , and the buffer member 3 can be a foaming material, a coffin or a (four) layer and the like. '胄Into the step - step to improve the protection of the loaded packaged wafers. The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention: any form of limitation 'there is a general knowledge in any technical field, and the present invention is utilized without departing from the technical features of the present invention. Equivalent embodiments of the local changes or modifications made by the technical content disclosed by the authors are still within the scope of the features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an external view of a preferred embodiment of the present invention. Figure 2 is an exploded view of the components of the preferred embodiment of the present invention. Figure 3 is a perspective, cross-sectional view of the preferred embodiment of the present invention. Figure 4 is a schematic cross-sectional view showing the state of use of the preferred embodiment of the present invention. Fig. 5 is a perspective view showing the appearance of a preferred embodiment of the present invention stacked on each other. Figure 6 is a cross-sectional view showing the preferred embodiment of the present invention stacked on each other. M425111 Fig. 7 is an external view of the buffer member added to the housing receiving groove. Fig. 8 is an exploded perspective view of the conventional wafer protection box.
【主要元件符號說明】 10 盒座 11 筒壁 12 容置槽 13 缺口 14 彈性卡勾 141 勾部 142 補強肋 15 缺縫 16 嵌緣 17 環壁 18 套槽 20 盒蓋 21 環凸部 22 嵌卡槽 221 頂抵片 222 抵掣片 23 扣孔 24 側翼 25 補強環肋 30 緩衝構件 50 晶圓 80 盒座 81 筒壁 82 容置槽 83 缺口 84 螺合部 90 ΠΤΤ- TTTT- 91 環凸部[Main component symbol description] 10 Box seat 11 Tube wall 12 accommodating groove 13 Notch 14 Elastic hook 141 Hook 142 Reinforcing rib 15 Notch 16 Insert edge 17 Ring wall 18 Slot 20 Cover 21 Ring projection 22 Insert card Slot 221 abutting piece 222 abutting piece 23 button hole 24 side wing 25 reinforcing ring rib 30 cushioning member 50 wafer 80 box seat 81 cylinder wall 82 accommodating groove 83 notch 84 screwing portion 90 ΠΤΤ- TTTT- 91 ring convex portion