TWM424587U - CMOS-MEMS microstructure liquid switch - Google Patents

CMOS-MEMS microstructure liquid switch Download PDF

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Publication number
TWM424587U
TWM424587U TW100215636U TW100215636U TWM424587U TW M424587 U TWM424587 U TW M424587U TW 100215636 U TW100215636 U TW 100215636U TW 100215636 U TW100215636 U TW 100215636U TW M424587 U TWM424587 U TW M424587U
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Taiwan
Prior art keywords
cmos
mems
liquid switch
water conduit
substrate
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TW100215636U
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Chinese (zh)
Inventor
Chien-Chung Tsai
An-Fan Liu
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Univ Minghsin Sci & Tech
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Priority to TW100215636U priority Critical patent/TWM424587U/en
Publication of TWM424587U publication Critical patent/TWM424587U/en

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五、新型說明: 【新型所屬之技術領域】 [〇〇〇1] 本創作係關於一種CMOS-MEMS微結構液體開關’特指一 種可利用於土壤中做渔度感測之微結構。 【先前技術】 [0002] 農產業是人類獲得糧食的主要來源,而農產物需要良好 的照顧才能夠有預期的收成’其中包含施肥、除蟲及灌 溉等等》 [0003] 而在灌溉方面,現今人們多半係靠機器定時做澆水,但 若是因為天氣影響’例如陰天時’即使設定好澆水之間 隔時間,土壤亦未必能在時間内吸收完水份’恐導致積 水太多而反倒影響作物生長,且有浪費用水之虞,而目 前市面上所見用以控制自動澆水之方式多半是透過定時 或者是透過感測空氣中的溼度來達成’如此之設計並未 能確實感測土壌中之實際溼度,於其控制上有其精確度 不足之處,故綜觀前所述,本創作之創作人思索並設計 一種CMOS-MEMS微結構液體開關’以期針對現有技術之 缺失加以改善,進而增進產業上之實施利用。 【新型内容】 [0004] 有鑒於前述之現有技術的不足點,本創作係設計一種具 備新穎性、進步性及產業利用性等專利要件之CMOS-MEMS微結構液體開關,以期克服現有技術之難點。 [0005] 為達到上述目的,本創作所採用的技術手段為設計一種 CMOS-MEMS微結構液體開關,其包含: 表單編號A0101 第3頁/共10頁 M424587 一基板,其係為一板材,其上具有一配置作業面;一主 體,對應成型於該基板之該配置作業面上;一導水管, 其係自該主體之一侧朝該主體内成型之空心通道,可自 該主體外側將水分導引入内而後積於導水管内;一接地 線路,其對應連接於該基板上以及該導水管之一侧壁面 上;一導通線路,其對應連接於該導水管上之另一側壁 面上,且於該導水管内未積水時與該接地線路呈現斷路 ,而於該導水管内具有積水時與該接地線路呈現電性導 通;及一訊號電極,其對應設於該主體之一側壁面上, 且該訊號電極電性連接於該導通線路,進而可於該導通 線路與該接地線路呈現導通時接受電壓而發出一控制訊 號。 [0006] 其中,該CMOS-MEMS微結構液體開關整體係透過CMOS-MEMS微結構製程所製作;其中,該主體係為外形對應於 該基板之塊體;其中,該訊號電極係設於該主體之上側 壁面;其中,該基板呈長矩形。 [0007] 本創作之CMOS-MEMS微結構液體開關於設計上係利用構 造上的配合而可提供一種簡易且確實之溼度感測手段, 將該CMOS-MEMS微結構液體開關埋入種植處如田野或花 圃等地之土壤中後,於土壤内水分達到飽和時,該導水 管内將因為充水而具備有電導性,進而讓導通線路與該 接地線路間形成電性導通,而後可透過訊號電極發出一 電控制訊號,以進一步地電性驅動如灑水器等灑水裝置 停止灑水,除了於實際實施之應用上提供了高度之便利 性外,更可有效防止水源之浪費,有利於實務上的推廣 表單编號A0101 第4頁/共10頁 ,而為了讓上述目的、技術特徵以及實際實施後之增益 性更為明顯易懂,於下文中將係以較佳之實施範例輔佐 對應相關之圖式來進行更詳細之說明。 【實施方式】 [0008] 為利貴審查員瞭解本創作之創作特徵、内容與優點及其 所能達成之功效,茲將本創作配合附圖,並以實施例之 表達形式詳細說明如下,而其中所使用之圖式,其主旨 僅為示意及輔助說明書之用,未必為本創作實施後之真 實比例與精準配置,故不應就所附之圖式的比例與配置 關係解讀、侷限本創作於實際實施上的權利範圍,合先 敘明。 [0009] 請配合參看第一至三圖所示,本創作提出一種CMOS-MEMS微結構液體開關,其於一較佳之實施方式可包含一 基板(10)、一主體(20)、一導水管(30)、一接地線路 (40)、一導通線路(50)及一訊號電極(60)。 [0010] 前述之基板(10)係為一薄板材,或可呈長矩形,其上具 有一配置作業面(11)。 [0011] 前述之主體(20)為一對應成型於該基板(10)之配置作業 面(11)上之塊體,其外形對應於該基板(10)。 [0012] 前述之導水管(30)係自該主體(20)之一側朝該主體(20) \ 内成型之空心通道,可自主體(20)外側將水分導引入内 部而後積於導水管(30)内。 [0013] 前述之接地線路(40)對應連接於該基板(10)及該導水管 (30)之一側壁面上,係為一導體。 表單编號A0101 第5頁/共10頁 M424587 [0014] 前述之導通線路(50)對應連接於該導水管(30)上之另一 側壁面上’且於該導水管(30)内未積水時與該接地線路 (40)呈現斷路,而於該導水管(30)内具有積水時與該接 地線路(40)呈現導通。 [0015] 前述之訊號電極(60)對應設於該主體(2〇)之一側壁面上 ,例如設於該主體(20)之上側壁面,且該訊號電極(6〇) 電性連接於該導通線路(50),進而可於該導通線路 與該接地線路(40)呈現導通時接受電壓而發出一控制訊 號’以做為判讀座度之機制’而其中該CMOS-MEMS微結 構液體開關整體係利用一 CMOS-MEMS微結構所製作。 [0016] 透過本創作之CMOS-MEMS微結構液體開關於設計上之巧 思變化,其利用構造上的配合而可提供一種簡易且確實 之溼度感測手段’將該CMOS-MEMS微結構液體開關埋入 種植處如田野或花圃等地之土壤中後,於土壤内水分達 到飽和時,該導水管(30)内將因為充水而具備有電導性 ,進而讓導通線路(50)與該接地線路(40)間形成電性導 通,而後町透過訊號電極(60)發出一電控制訊號,以進 一步地電性驅動如灑水器等灑水裝置停止灑水,除了於 實際實施之應用上提供了高度之便利性外,更可有效防 止水源之浪費,有利於實務上的推廣,為習知技術所不 能及者,故可見其增益性所在。 [00Π]以上所述之實施例僅係為說明本創作之技術思想及特點 ’其目的在使熟習此項技藝之人士能夠瞭解本創作之内 容並據以實施,當不能以之限定本創作之專利範圍’即 大凡依本創作所揭示之精神所作之均等變化或修飾,仍 表單編號Α0101 笫6頁/共10頁 M424587 [0018] 應涵蓋在本創作之專利範圍内。 综觀上述,可見本創作在突破先前之技術下,確實已達 到所欲增進之功效,且也非熟悉該項技藝者所易於思及 ,其所具之進步性、實用性,顯已符合專利之申請要件 ,爰依法提出專利申請,懇請貴局核准本件創作專利申 請案,以勵創作,至感德便。 • [0019] 【圖式簡單說明】 第一圖為本創作之CM0S-MEMS微結構液體開關之外觀圖 • 〇 第二圖為本創作之CM0S-MEMS微結構液體開關之透視外 觀圖。 第三圖為本創作之CM0S-MEMS微結構液體開關之局部剖 視外觀圖。 [0020] • 【主要元件符號說明】 基板(10) 配置作業面(11) 主體(20) 導水管(30) 接地線路(40) 導通線路(50) 訊號電極(60) 表單編號A0101 第7頁/共10頁V. New description: [New technology field] [〇〇〇1] This creation is about a CMOS-MEMS micro-structured liquid switch, which refers to a microstructure that can be used in the soil for fishery sensing. [Prior Art] [0002] The agro-industry is the main source of human access to food, and agricultural products require good care to have the expected harvest 'which includes fertilization, de-worming and irrigation, etc.' [0003] Nowadays, most people rely on machines to water regularly, but if the weather affects 'such as cloudy days', even if the interval between waterings is set, the soil may not be able to absorb the water in time. Instead, it affects crop growth and wastes water. The way to control automatic watering on the market is mostly achieved by timing or by sensing the humidity in the air. The actual humidity in the soil has insufficient precision in its control. Therefore, the author of this creation thinks and designs a CMOS-MEMS microstructure liquid switch to improve the lack of the prior art. In addition, it will enhance the implementation and utilization of the industry. [New content] [0004] In view of the above shortcomings of the prior art, the present invention designs a CMOS-MEMS micro-structured liquid switch with novelty, advancement and industrial utilization, etc., in order to overcome the difficulties of the prior art. . [0005] In order to achieve the above object, the technical means adopted in the present invention is to design a CMOS-MEMS microstructure liquid switch, which comprises: a form number A0101, a third substrate, a total of 10 pages, M424587, a substrate, which is a plate, Having a configuration working surface; a main body corresponding to the configuration working surface formed on the substrate; a water conduit from a side of the main body toward the hollow channel formed in the main body, which can be hydrated from the outside of the main body The guide is introduced into the inside and then accumulated in the water conduit; a grounding line is connected to the substrate and a side wall of the water conduit; a conductive line is correspondingly connected to the other side wall of the water conduit, and When the water is not accumulated in the water conduit, the grounding circuit is disconnected, and when the water conduit has water accumulation, the grounding circuit is electrically connected; and a signal electrode is disposed on a side wall of the main body, and the The signal electrode is electrically connected to the conduction line, and further receives a voltage when the conduction line and the ground line are conducting, and sends a control signal. [0006] wherein the CMOS-MEMS micro-structure liquid switch is integrally formed by a CMOS-MEMS micro-structure process; wherein the main system is a block whose shape corresponds to the substrate; wherein the signal electrode is disposed in the main body The upper sidewall surface; wherein the substrate has a long rectangular shape. [0007] The CMOS-MEMS microstructure liquid switch of the present invention is designed to provide a simple and accurate humidity sensing means by using a structural fit, and the CMOS-MEMS microstructure liquid switch is buried in a planting field such as a field. After the soil in the soil such as flower buds is saturated, when the water in the soil reaches saturation, the water conduit will be electrically conductive due to water filling, thereby electrically connecting the conduction line and the grounding line, and then transmitting through the signal electrode. An electric control signal is used to further electrically drive a sprinkler such as a sprinkler to stop watering. In addition to providing a high degree of convenience in practical application, it can effectively prevent waste of water source and is beneficial to practice. Promotion Form No. A0101 Page 4 of 10, and in order to make the above objectives, technical features and gains after actual implementation more obvious, in the following, the corresponding embodiments will be assisted by the corresponding embodiments. For a more detailed description. [Embodiment] [0008] In order to understand the creative features, contents and advantages of the creation and the effects that can be achieved by the examiner, the present author will be described in detail with reference to the drawings, and the details of the embodiments are as follows. The schematics used are for the purpose of illustration and supplementary instructions. They are not necessarily true proportions and precise configurations after the implementation of the creation. Therefore, the proportions and configuration relationships of the attached drawings should not be interpreted or limited. The scope of rights in actual implementation is described first. [0009] Please refer to the first to third figures, the present application proposes a CMOS-MEMS microstructure liquid switch, which in a preferred embodiment may include a substrate (10), a body (20), and a water conduit. (30), a grounding line (40), a conducting line (50) and a signal electrode (60). [0010] The aforementioned substrate (10) is a thin plate or may have a long rectangular shape with a configuration working surface (11) thereon. [0011] The main body (20) is a block corresponding to a working surface (11) formed on the substrate (10), and its outer shape corresponds to the substrate (10). [0012] The foregoing water conduit (30) is a hollow passage formed from one side of the main body (20) toward the main body (20), and can introduce moisture into the interior from the outside of the main body (20) and then accumulate in the guide. Inside the water pipe (30). [0013] The grounding line (40) is connected to the substrate (10) and one of the side walls of the water conduit (30), and is a conductor. Form No. A0101 Page 5 of 10 M424587 [0014] The above-mentioned conduction line (50) corresponds to the other side wall surface of the water conduit (30) and does not accumulate water in the water conduit (30) At the same time, the grounding line (40) presents an open circuit, and when the water conduit (30) has accumulated water, it is electrically connected to the grounding line (40). [0015] The signal electrode (60) is disposed on one side wall of the main body (2〇), for example, disposed on a sidewall surface of the main body (20), and the signal electrode (6〇) is electrically connected to the main body (20) The conduction line (50) can further receive a voltage when the conduction line and the ground line (40) are turned on to emit a control signal 'as a mechanism for reading the seat', wherein the CMOS-MEMS micro-structure liquid switch is integrated It is fabricated using a CMOS-MEMS microstructure. [0016] Through the design of the CMOS-MEMS micro-structure liquid switch in the design of the ingenious change, it can provide a simple and accurate humidity sensing means by means of the construction of the 'CMOS-MEMS micro-structure liquid switch After being buried in the soil of a planting field such as a field or a flower garden, when the water in the soil reaches saturation, the water conduit (30) will have electrical conductivity due to water filling, and then the conduction line (50) and the grounding Electrical conduction is formed between the lines (40), and an electric control signal is sent through the signal electrode (60) to further electrically drive a sprinkler such as a sprinkler to stop watering, except for practical application. In addition to the high degree of convenience, it can effectively prevent the waste of water sources, and is conducive to the promotion of practice. It is not possible for the conventional technology, so the gain is visible. [0000] The above-described embodiments are merely illustrative of the technical ideas and features of the present invention. The purpose of the present invention is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. The scope of the patent 'is the equivalent change or modification made by the spirit of this creation, still form number Α0101 笫6 pages/total 10 pages M424587 [0018] should be covered by the scope of this creation patent. Looking at the above, it can be seen that this creation has achieved the desired effect under the previous technology, and it is not familiar with the skill of the artist. The progress and practicality of the creation are in line with the patent. The application requirements, 提出 file a patent application according to law, I urge you to approve the creation of a patent application for this article, to encourage creation, to the sense of virtue. • [0019] [Simple description of the diagram] The first picture is the appearance of the CM0S-MEMS micro-structured liquid switch of the creation. • The second picture is a perspective view of the CM0S-MEMS micro-structured liquid switch. The third figure is a partial cross-sectional view of the CM0S-MEMS microstructure liquid switch of the creation. [0020] • [Main component symbol description] Substrate (10) Configuration work surface (11) Main body (20) Water conduit (30) Ground wiring (40) Conduction line (50) Signal electrode (60) Form number A0101 Page 7 / Total 10 pages

Claims (1)

M424587 六、申請專利範圍: 1 · 一種CMOS-MEMS微結構液體開關,其包含: 一基板,其係為一板材,其上具有一配置作業面; 一主體’對應成型於該基板之該配置作業面上; 一導水管,其係自該主體之一側朝該主體内成型之空心通 道,可自該主體外側將水分導引入内而後積於導水管内 一接地線路,其對應連接於該基板上以及該導水管 < —側 壁面上; 一導通線路,其對應連接於該導水管上之另一側壁面上, 且於該導水管内未積水時與該接地線路呈現斷路,而於診 導水管内具有積水時與該接地線路呈現電性導通;及 一訊號電極,其對應設於該主體之一側壁面上,且該訊號 電極電性連接於該導通線路,進而可於該導通線路與該接 地線路呈現導通時接受電壓而發出一控制訊號。 2 .如申請專利範圍第1項所述之CM0S_MEMS微結構液體開關 ,其中該CMOS-MEMS微結構液體開關整體係透過 CMOS-MEMS微結構製程所製作。 3 .如申請專利範圍第2項所述之CMOS-MEMS微結構液體開關 ’其中該主體係為外形對應於該基板之塊體。 4 .如申請專利範圍第3項所述之CM0S_MEMS微結構液體開關 ’其中該訊號電極係設於該主體之上側壁面。 5 .如申請專利範圍第4項所述之CM0S_MEMS微結構液體開關 ,其中該基板呈長矩形。 100215636 表單編號A0101 第8頁/共10頁 1002050864-0M424587 VI. Patent Application Range: 1 · A CMOS-MEMS microstructured liquid switch comprising: a substrate, which is a plate having a configuration working surface; a body corresponding to the configuration of the substrate a water conduit, which is formed from one side of the main body toward the hollow passage formed in the main body, and can introduce a moisture guide from the outside of the main body and then accumulate in a grounding line in the water conduit, which is correspondingly connected to the substrate And the water conduit <-side wall surface; a conductive line correspondingly connected to the other side wall surface of the water conduit, and when the water is not accumulated in the water conduit, the grounding circuit is open circuit, and is in the diagnostic water conduit When the water is accumulated, the grounding line is electrically connected; and a signal electrode is disposed on a side wall of the main body, and the signal electrode is electrically connected to the conducting line, and the conductive line and the grounding are further When the line is conducting, it receives a voltage and sends a control signal. 2. The CMOS_MEMS microstructured liquid switch according to claim 1, wherein the CMOS-MEMS microstructure liquid switch is integrally fabricated through a CMOS-MEMS microstructure process. 3. The CMOS-MEMS microstructured liquid switch as described in claim 2, wherein the main system is a block having a shape corresponding to the substrate. 4. The CMOS_MEMS microstructured liquid switch' as described in claim 3, wherein the signal electrode is disposed on a sidewall surface of the body. 5. The CMOS_MEMS microstructured liquid switch of claim 4, wherein the substrate has a long rectangular shape. 100215636 Form No. A0101 Page 8 of 10 1002050864-0
TW100215636U 2011-08-22 2011-08-22 CMOS-MEMS microstructure liquid switch TWM424587U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI576882B (en) * 2016-04-19 2017-04-01 明新科技大學 Wafer level humidity microswitch and an electronic apparatus having a humidity sensing function

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI576882B (en) * 2016-04-19 2017-04-01 明新科技大學 Wafer level humidity microswitch and an electronic apparatus having a humidity sensing function

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MM4K Annulment or lapse of a utility model due to non-payment of fees