TWM421590U - Multi-chip package structure with an inductor die - Google Patents
Multi-chip package structure with an inductor die Download PDFInfo
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- TWM421590U TWM421590U TW100217676U TW100217676U TWM421590U TW M421590 U TWM421590 U TW M421590U TW 100217676 U TW100217676 U TW 100217676U TW 100217676 U TW100217676 U TW 100217676U TW M421590 U TWM421590 U TW M421590U
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M421590 五、新型說明: 【創作所屬之技術領域】 種具有電 感晶===封裝結構’特別是關於- 【先前技術】 的電:市ίίΐ電:朝要求輕薄短小時,其内部 縮小體積與重量的t的頁設計。因此為了達到 概念’如此只敎用—個封:融入了整合的 亦可減少封裝的費_日_ 的功f, 多廠商設計開發的方向。 曰片封装、,,。構,已是許 ,是目前市面上,發展的多晶片封裳, 朝垂直的方向將多晶片整合 二卜 每層晶綱性連接之方式,更增加====計 具有常 D二=圖产之升嫩(b。。一) 串連於電感L與開關凡件M的連接點與電容c ?:開關兀件Μ導通(0N)時1感L處於充電的曰f C上 升麼的功能。因此,為了增加晶片整合的價值,尋找一種實用 的電感晶$ ’並细-種能簡化整合^縣的 電感晶片整合於卿元件的縣内,為目前晶片整^的重要課 ,飢β抓的特性,電流仍維持於原來的流向,此 處於放⑽㈣’縣·存雜量轉制餘 心 M421590 題 【新型内容】 片,之主要目岐提供-種電感晶 型心r增 為達成上述目的,本創作提供一瀚容 ^ 晶片域結構包括:-載板,1一3 S日片ί裝結構。此多 導線其中,第一晶片位於载板的—面,且: 此上表面具有一第一電性連接-曰:、 表, 相同的载板面上,且具有一第一電5;曰:’:於與第-晶片 具有至少n f 紐_層。第—電感圖案層 、了王個第一電性連接點,用以 義出至少二個不同的電感值。 弟賊圖案層上’疋 圖案ί本 述第7電感_係-螺旋狀 =^綠圖㈣具有至少二個螺旋圈 角。V四轉角。至少一個第二電性連接點係位於螺旋圈之& 個第實施财,前述職㈣案層具有至少-一電/·生連接點位於螺旋圈之兩個轉角之間。 第一導 在本創作之一實施例中,前述第_曰 方。第一導電墊(c〇ndu〜•位於笫: 連接第·4¾緣。第二電性連接點係透過第—導線結構“M421590 V. New description: [Technical field of creation] Kind of inductor crystal === package structure 'Specially about - [Prior Art] Electricity: City ίίΐ Electricity: Light and thin for a short time, its internal volume and weight are reduced The page design of t. Therefore, in order to achieve the concept of 'so only use a single package: integrated into the integration can also reduce the cost of packaging _ day _ work f, multi-vendor design and development direction.曰片包装,,,. Structure, has been Xu, is currently on the market, the development of multi-chip wafers, the vertical direction of the multi-chip integration of the two crystal layers of each layer, the increase of ==== meter has a constant D two = map The product is tender and tender (b..). The connection point between the inductor L and the switch member M and the capacitor c?: When the switch device is turned on (0N), the function of the sense L is charged 曰f C rises. . Therefore, in order to increase the value of wafer integration, look for a practical inductor crystal $' and fine-type can simplify the integration of the county's inductor chip integrated into the county of the Qing element, for the current important class of wafers, hungry Characteristics, the current is still maintained in the original flow direction, here in the release (10) (four) 'county · storage amount conversion M421590 title [new content] film, the main goal of providing - kind of inductor crystal core r increase to achieve the above purpose, this The creation provides a content ^ chip domain structure including: - carrier board, 1 3 S S chip zip structure. The multi-wire, wherein the first wafer is located on the surface of the carrier, and: the upper surface has a first electrical connection - 曰:, a table, the same carrier surface, and has a first electrical 5; ': has at least nf 纽 layer with the first wafer. The first-inductive pattern layer and the first electrical connection point of the king are used to define at least two different inductance values. On the pattern of the thief's pattern, the pattern of the 疋 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ V four corners. The at least one second electrical connection point is located in the spiral circle & the first implementation, the aforementioned (4) layer has at least one electric/life connection point between the two corners of the spiral circle. The first guide In one embodiment of the present creation, the aforementioned _曰. The first conductive pad (c〇ndu~• is located at the 笫: the connection is the 43th edge. The second electrical connection point is transmitted through the first-wire structure”
威Ρίίίΐ作之—實施例中,前述第二晶片更包括-第-雷 成圖案層,位於第—電感圖案層之下方,第二電感圖案忿J - 2⑵細案層係透過 第三電性連接點,轉更包括一 電性連接一封裝引腳 f^™Jt' 之—實__ ’前述晶片係、為—金氧半場效 晶體(MOSFET) 電 層,前述第二晶片更包括-隔離 體,’多;難結敎包含一封裝 載板中ΐ 一』; 板與依=^電電感感^^^^ ⑽刪-糊案層 料可簡㈣下的㈣料及所附圖 M421.590 【實施方式】 第2圖顯示本創作-種電感晶片的一較佳實施例。此電感 晶片200包含基板210與第一電感圖案層22〇。第一電感圖案 層220位在基板210上,且具有至少三個第二電性連接點 221 222,223。此第_電感_層22()以螺旋狀的圖案層為例, 但本創作並不關於螺旋狀圖案層。其次,本實施例係以一四 邊形職狀随層為触行_,惟本創作並不限於此。此第 電感圖案層亦可以採圓形、三角形、五邊形、六邊形等不同 形狀設計。此外,本實施例之第—電感圖案層22G上的二個第 -電性連接點221,223分別位於其端點,在端點之間並分布至 少-個第二電性連接點222。使用者可以在這些電性連接點 221,222,223中,任選其中兩個第二電性連接點,#作_^ 點與輸出點。錄此f雜人點與輸丨關之螺旋狀圖 圈數’即可決定其電感值的大小。 …舉^來說,若設置三個第二電性連接點221,222,223,即可 疋義出二個不同的螺旋圈數(第二電性連接點223與,第二 電性連接點221與222,第二電性連接點223與22幻,以提& 二個不同的電感值。依此,若增加設置於第一電感圖案層 上之第二電性連接點221,222,223的數量,即可定義出更多組不 同的電感值。因此,根據本創作的電感晶片2〇〇,在不增加1 體積的前提下’可獲得多組的電感值,以因應設計者實^的二 要。 而 其次,本實施例之第二電性連接點221,223係分別位於 了電感圖案層220之兩端點。惟,本創作並不限於此。形於 ^ 一電感圖案層220上之各個第二電性連接點221,222,223未必 需位於第一電感圖案層220之端點。不過,將二個第二電性 接點221,223設置於第一電感圖案層220之端點,即可提供 第一電感圖案層220所具有之最大的電感值。 ’、 6 M421590 間利感圖多;層四营俜為了=較佳的空 此=狀圖案層之兩個端點分別位於 2洛ΐ:ίΓ例在最内側之第二電性連接請= 之第一電性連接點223之間的螺旋走線圖柰 二電性連接點222 ’分別位於不同的螺旋圈' 個第In an embodiment, the second wafer further includes a -th-ray pattern layer located under the first inductor pattern layer, and the second inductor pattern 忿J-2(2) is through the third electrical connection The point further includes an electrical connection of a package pin f^TMJt'--the actual chip system, which is a metal oxide half field effect crystal (MOSFET) layer, and the second chip further includes a spacer , 'Multiple; Difficult to knot contains a load plate in the first one』; Plate and according to ^ ^ Inductive sense ^^^^ (10) Delete - paste layer material can be simplified (4) under (4) material and the drawing M421.590 [ Embodiments Fig. 2 shows a preferred embodiment of the present invention. The inductor chip 200 includes a substrate 210 and a first inductor pattern layer 22A. The first inductive pattern layer 220 is on the substrate 210 and has at least three second electrical connection points 221 222, 223. This _inductor_layer 22() is exemplified by a spiral pattern layer, but this creation does not relate to a spiral pattern layer. Secondly, this embodiment adopts a quadrilateral job as a touch with the layer _, but the creation is not limited thereto. The first inductor pattern layer can also be designed in different shapes such as a circle, a triangle, a pentagon, and a hexagon. In addition, the two first electrical connection points 221, 223 on the first inductive pattern layer 22G of the present embodiment are respectively located at their end points, and at least one second electrical connection point 222 is distributed between the end points. The user can select two of the second electrical connection points, _^ points and output points, among the electrical connection points 221, 222, 223. Record the number of laps of the 杂 杂 与 与 与 丨 丨 ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ In other words, if three second electrical connection points 221, 222, 223 are provided, two different number of turns (two electrical connection points 223 and second electrical connection points 221) can be deduced. 222, the second electrical connection points 223 and 22 are illusory to raise two different inductance values. Accordingly, if the number of second electrical connection points 221, 222, 223 disposed on the first inductance pattern layer is increased, Define more sets of different inductance values. Therefore, according to the inventive inductor chip 2〇〇, multiple sets of inductance values can be obtained without increasing the volume of one, in order to meet the designer's requirements. Secondly, the second electrical connection points 221, 223 of the embodiment are respectively located at the two ends of the inductor pattern layer 220. However, the present invention is not limited thereto, and is formed on each of the second inductive pattern layers 220. The electrical connection points 221, 222, 223 are not necessarily located at the end of the first inductor pattern layer 220. However, by providing the second electrical contacts 221, 223 at the end of the first inductor pattern layer 220, the first inductor pattern layer can be provided. 220 has the largest inductance value. ', 6 M421590 Figure 4; layer four camps in order to = better empty this = shape layer of the two end points are located in 2 Luo: Γ 在 in the innermost second electrical connection please = the first electrical connection point 223 The spiral trace between the two electrical connection points 222 'is located in different spiral circles'
=距變小,.以有效利用電感晶片2。 J,J目J螺J 其次,第二電性連接點222的位置,亦可位 之:如第犯圖所示,此實施例係將第二電S3 又水平方向排列,以方便導線連接步驟之進ί。 ί-ί - , ^ 排歹1 接2,係以交錯方式沿著晶片的水平方向 第3A圖顯示本創作一種電感晶片的 Γ圖T所示第^雪圖/曰電感晶片2〇0,沿著虛線从^ 安\思=’匕電感晶月具有一上層導電圖案與一下層導電圖 厂。,層導電圖案包括第一電感圖案層220與多個第二藝 乂件之;mon iayer) ’順離電磁場’避免電感晶片就他 Ϊ件電磁感應作用之影響。位於第-電感圖案ΐ 220、Ϊ 過一貫穿絕緣層之第—導電i構⑽ 接至第-導線結構33〇之一端。此第一導線結構別之 7 M421590 電性連接至相對應之 另一端係透過另一個第一導電結構340 第一導電墊370。 同理’位於第一電感圖案層22〇最内侧之第二電性連接點 221亦可利用第-導電結構34〇與第一導 =連 =第-導電墊·,於《晶片上表4緣的H 〒墊3_ ’可用來當成電感晶片2〇〇的電流輸入點與輸出 ..以方便此電感晶片200後續的打線與測試製程。本實施 第一導電墊360,370的位置係位於電感晶片2〇〇相對的兩側, 以利於後續縣打線時,與晶片和封糾腳的連接,亦避免其 金屬線會互相接觸干擾。但其相對位置亦可根據設 晶片上的空間糊、電感值設計與後續製程的需求而改變。^ 例來說’這些導電墊可設置於電感晶片細的四週,而 其相對侧。 、 第4A至第4C圖顯示本創作多層電感晶片之一較佳實施 例。此電感晶片具有多個電感圖案層,堆疊於基板上,可用來 增加電感晶片200的電感值。本實施例係以二層電感圖案層為 例進行說明。第4A圖顯示位於下層之第二電感圖案層ϋ', 第4Β圖顯示位於上層之第一電感圖案層22〇。第4C圖係第 4B圖的電感晶片200,延著虛線bb,的剖面圖。 如圖中所示,第二電感圖案層420具有一第二電性連接點 421與一第二電性連接點423。第二電性連接點421係用以連 接第一電感圖案層220。在本實施例中,第二電性連接點421 係位於第二電感圖案層420之最内侧,第三電性連接點423則 是位於第二電感圖案層420之最外侧。不過,本創作並不限於 此。第一電感圖案層420亦可以透過設置於其他位置的電性連 接點與第一電感圖案層220相連接。 電結構440電性連接至第二之第二導 42卜此外,位於晶片細^^案層创之紅電性連接點 外,供導線連接之用。如此% 423係裸露於 與輸出點,柯峨域W _之ti值 輸入點 本實施例中,第一電感圖案層22〇,係 221的螺旋^ : 内側的第二電性連‘點 電性連接點421 ^時^層fG ’係由内側的第二 接點423轉旋狀圖案層。因j至外側的第三電性連 ί構ΙΓ=Γ上的第二電性連接丄 423流出時,其電流方向於第一 性 ==時’電感⑽。 層的電性連接點相連使 電感晶片㈣感值,即可依據設計者的需知加 ^ 爾性。同時’亦可克服積體化“晶片 根據上述的電感晶片,本創作亦提供 的-較佳實施例,如第5圖顯示。此多晶片封 -載板5。2、至少-個與載板5。2相分離之封裝弓Ί广一 M421590 第-晶片50卜-電感晶片以及一封裝體5〇7。如圖 不,此載板502亦具有一封裝引腳5〇6向 曰 立於載板502之上表面。此第一晶片5〇1之上表面並具 有一第-電性連接點5011。封裝體5〇7將第一晶片5〇i、電▲ ^片2〇〇、載板5〇2及封褒引腳5〇6、封裝引腳5〇5 封 裝於内,以達到保護這些元件之功能。 ^ 第一 晶 sa -放片ϋ〇1可為開關元件晶片或控制電路晶片,因為開 關兀件*與魏兀件搭配使用,在此以開關元件為例,但不因 二用範圍。第二晶片即為上述的電感晶片· ’且 ίίΐ 性連接點供選擇。第5圖顯示其中兩個被ί 笛ίΓΤ連接點521,522。如圖中所示,電感晶片2〇〇與 裁板5〇2的同一側,且第二電性連接點= The distance becomes smaller, in order to effectively utilize the inductor chip 2. J, J J J J Next, the position of the second electrical connection point 222 can also be located: as shown in the first figure, this embodiment is to arrange the second electric S3 horizontally to facilitate the wire connection step Into ί. Ί-ί - , ^ 排 歹 1 接 2, in a staggered manner along the horizontal direction of the wafer 3A shows the creation of an inductor chip T shown in the figure T snow figure / 曰 inductor chip 2 〇 0, along The dotted line from ^安\思='匕Inductance Crystal Moon has an upper conductive pattern and a lower layer conductive pattern factory. The layer conductive pattern includes the first inductive pattern layer 220 and the plurality of second elements; the ohmic field is prevented from affecting the electromagnetic induction of the inductor chip. The first conductive pattern ΐ 220 is connected to one end of the first conductive structure (10) through the insulating layer. The first wire structure 7 M421590 is electrically connected to the corresponding other end through the first first conductive structure 340 of the first conductive pad 370. Similarly, the second electrical connection point 221 located at the innermost side of the first inductor pattern layer 22 can also utilize the first conductive structure 34 and the first conductive connection = the first conductive pad, on the wafer 4 The H 〒 pad 3_ ' can be used as the current input point and output of the inductor chip 2 . to facilitate the subsequent wire bonding and test process of the inductor chip 200. The position of the first conductive pads 360, 370 is located on opposite sides of the inductor chip 2, so as to facilitate the connection between the wafer and the sealing foot when the subsequent county is wired, and the metal wires are prevented from contacting each other. However, the relative position can also be changed according to the space paste on the wafer, the inductance value design and the requirements of subsequent processes. ^ For example, these conductive pads can be placed around the thin sides of the inductor wafer, and on the opposite side. 4A to 4C show a preferred embodiment of the present invention. The inductor chip has a plurality of inductor pattern layers stacked on the substrate to increase the inductance of the inductor chip 200. This embodiment is described by taking a two-layer inductor pattern layer as an example. Fig. 4A shows the second inductance pattern layer ϋ' located in the lower layer, and the fourth figure shows the first inductance pattern layer 22 位于 located in the upper layer. Fig. 4C is a cross-sectional view of the inductor wafer 200 of Fig. 4B, which is extended by a broken line bb. As shown in the figure, the second inductor pattern layer 420 has a second electrical connection point 421 and a second electrical connection point 423. The second electrical connection point 421 is used to connect the first inductor pattern layer 220. In this embodiment, the second electrical connection point 421 is located at the innermost side of the second inductor pattern layer 420, and the third electrical connection point 423 is located at the outermost side of the second inductor pattern layer 420. However, this creation is not limited to this. The first inductor pattern layer 420 can also be connected to the first inductor pattern layer 220 through electrical connection points disposed at other locations. The electrical structure 440 is electrically connected to the second second conductor 42. In addition, it is located outside the red electrical connection point of the wafer thin layer for wire connection. Thus, % 423 is exposed to the output point, and the ti value input point of the 峨 峨 domain W _ in this embodiment, the first inductance pattern layer 22 〇, the spiral of the system 221 : the second electrical connection of the inner side The connection point 421 ^h layer fG ' is rotated by the inner second contact point 423. When the second electrical connection j 423 on the outer side of j is out of the second electrical connection 423 423, the current direction is the first polarity == when the inductance (10). The electrical connection points of the layers are connected so that the inductance chip (4) senses the value, which can be added according to the designer's needs. At the same time, 'the integrated wafer can also be overcome. According to the above-mentioned inductor chip, the present invention also provides a preferred embodiment, as shown in Fig. 5. This multi-chip package-carrier board 5. 2. at least one and carrier board 5.2 phase separation package Ί 一 M M421590 first-wafer 50-inductor chip and a package 5〇7. As shown in the figure, the carrier 502 also has a package pin 5〇6 standing on the load The upper surface of the plate 502. The upper surface of the first wafer 5〇1 has a first electrical connection point 5011. The package 5〇7 will be the first wafer 5〇i, the electric film 2〇〇, the carrier board 5〇2 and sealing pins 5〇6, package pins 5〇5 are packaged inside to protect the functions of these components. ^ The first crystal sa-mounting chip 1 can be a switching element chip or a control circuit chip Because the switch element* is used in conjunction with the Wei piece, here the switching element is taken as an example, but not for the two-purpose range. The second chip is the above-mentioned inductor chip · 'and ίίΐ connection point to choose. Figure 5 Show two of them are connected by ί ΓΤ 521 521, 522. As shown in the figure, the inductor chip 2 同一 is on the same side as the panel 5 〇 2, and the Electrical connecting point
Hi透第一導線503電性連接至第—晶片训的第一電 ,連接點5011。電感晶片2〇〇所具有的一 522,^ 5〇4 其次,載板502通常是由導電材料所構成。若是第一 晶 片 ^面形成有電性連接點,亦連接至載板5〇2,以接收或輸 ^號。其次’連接至載板502之封裝引腳5〇6亦可充作一接 供一參考電位。而封裝體507可裸露載板502未 部分表面於外,作為—散熱片,以提升多 片封裝結構500之散熱能力。 斤夕 晶 勘設定,第一晶片5〇1與電感晶片 曰?^ 狀位置與連接方式,亦可以互換。電感 ΐ感曰片路(bG<)Stdreuit)時’請同時參照第1圖, 電4日日片200的弟二電性連接點521, 5〇1) 則疋透過另-個弟-導線5G4與封裝引腳5G5電性連接至電源 10 M421590 輸入端Vin。 此外,視電感晶片2GG的應用需求,此多晶 500亦用以將三個以上之晶片封裝於單一個|纴发二構 ,選擇電感晶月獅上的第二電性連接點522^=接= 二晶片(未圖不)。依此,本創作之電感晶片2〇〇所選 接之二個第二電性連接點521 52 古# +广卜連The first wire 503 is electrically connected to the first electrode of the first wafer, and the connection point 5011. The inductor chip 2 has a 522, ^ 5 〇 4. Next, the carrier 502 is usually made of a conductive material. If the first wafer has an electrical connection point, it is also connected to the carrier 5〇2 to receive or input the number. Next, the package pins 5〇6 connected to the carrier 502 can also be used as a reference potential. The package body 507 can expose the unexposed surface of the carrier 502 as a heat sink to enhance the heat dissipation capability of the multi-pack package structure 500. The setting of the first wafer 5〇1 and the inductor chip 曰?^ can also be interchanged. Inductive 曰 曰 路 ( b b 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 请 521 521 521 521 521 521 521 521 521 521 521 521 It is electrically connected to the package pin 5G5 to the power supply 10 M421590 input terminal Vin. In addition, depending on the application requirements of the inductor chip 2GG, the polycrystalline 500 is also used to package more than three chips in a single one, and the second electrical connection point on the inductor crystal lion is selected. = two wafers (not shown). Accordingly, the second inductive chip 2 of the present invention is selected to be connected to the second electrical connection point 521 52 ancient # + Guang Bulian
至封裝引腳505、亦可將二個第二^=^=^連接 連接至別的以上的紐連接點,端視_電路之H均電性 此限定本創作實施^本創作之較佳實施例而已,當不能以 明說明内容所作^!*®,即纽依本創作申請專利範圍及發 涵蓋之範圍内。另的等效變化與修飾,皆仍屬本創作專利 達成本創作所揭命f創作的任一實施例或申請專利範圍不須 和標題僅是用來g之全部目的或優點或特點。此外,摘要部分 之權利範圍。领助專利文件搜尋之用,並非用來限制本創作 M421590 【圖式簡單說明】 第1 -係一典型升壓電路(boost circuit)之電路圖。 第2圖顯示本創作一種電感晶片之一較佳實施例。 第3A圖顯示本創作一種電感晶片之另一較佳實施例。 第3B關不第3A圖的電感晶片,延著虛線μ,的剖 第4Α至第4C圖顯示本創作一種多層電感晶片之一較佳To the package pin 505, the two second ^^^=^ connections can also be connected to other above-mentioned new connection points, and the H-average of the end-view circuit is limited to the preferred implementation of the present implementation. For example, when you can't explain the content clearly! *®, which is within the scope of the patent application and coverage of New Zealand. The other equivalent changes and modifications are still the invention patents. Any embodiment or patent application scope that is created by the creation of this creation is not required and the title is only used for all purposes or advantages or features of g. In addition, the scope of the rights in the summary section. The use of patent documents for searching is not intended to limit the creation of this document. M421590 [Simple Description] The first is a circuit diagram of a typical boost circuit. Figure 2 shows a preferred embodiment of an inductive chip of the present invention. Fig. 3A shows another preferred embodiment of an inductor chip of the present invention. In the third embodiment, the inductor chip of FIG. 3A is not shown in FIG. 3A, and the cross-sections of FIG. 4 to FIG. 4C show that one of the multilayer inductor chips is preferably.
例。 I 第5圖顯示本創作-種多晶片封裝結構之_較佳實施例(example. I Figure 5 shows the present invention - a multi-chip package structure - a preferred embodiment (
【主要元件符號說明】 電感L 二極體元件D 電容C 開關元件Μ 電感晶片200 基板210 第一電感圖案層220 第二電性連接點 221,222,223,421,521,522 第一導線結構330 第一導電結構340 通道350 第一導電塾(conductive pad) 360,370 隔離層380 第二電感圖案層420 第三電性連接點423 第二導電結構440 開口 450 多晶片封裝結構500 第一晶片501 第一電性連接點5011 12 Μ42Γ590 載板502 載板面5021 第一導線503,504 封裝引腳506, 505 封裝體507[Main component symbol description] Inductor L diode element D Capacitor C Switching element 电感 Inductor chip 200 Substrate 210 First inductance pattern layer 220 Second electrical connection point 221, 222, 223, 421, 521, 522 First wire structure 330 First conductive Structure 340 Channel 350 First conductive pad 360, 370 Isolation layer 380 Second inductance pattern layer 420 Third electrical connection point 423 Second conductive structure 440 Opening 450 Multi-chip package structure 500 First wafer 501 First electrical connection Point 5011 12 Μ42Γ590 Carrier 502 Carrier Surface 5021 First Conductor 503,504 Package Pin 506, 505 Package 507
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TW100217676U TWM421590U (en) | 2011-09-21 | 2011-09-21 | Multi-chip package structure with an inductor die |
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TW100217676U TWM421590U (en) | 2011-09-21 | 2011-09-21 | Multi-chip package structure with an inductor die |
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