1412974 2011年7月27曰修正替換頁 五、新型說明： 【新型所屬之技術領域】 本創作係關於一種超硬碳膜強化材，尤其係指—種利用 玻璃沉積系統於玻璃或高分子等材料表面之單面或雙面沉 積一層或多層複合超硬碳膜（非晶質類鑽碳或鑽石膜），藉由 薄膜本身之高硬度及高強度，消除玻璃表面較大數量的微裂 紋或使其寬度與深度變小，減少應力的集中以達到強化玻璃 ^ 或高分子之效果》 【先前技術】 一般工業上強化玻璃之方法可以歸納有物理強化以及 化學強化兩種方式，其中物理強化亦稱作風冷強化，目的 係為了提高玻璃瓶罐的機械強度及熱安定性，其方法係將 玻璃瓶罐由製瓶機脫膜後’立即送入馬弗式鋼化爐均句加 熱到接近玻璃之軟化溫度（但不得到達軟化溫度），然後轉入 參鋼化至；ij用多孔喷嘴之風柵向瓶罐之内外壁上喷射冷空 .氣以快速冷卻瓶罐，或用液體作冷卻介質進行突然冷= 罐，造成製品表面因突然收縮而形成壓應力層，製品内部 的冷卻停滞後，内部表面形成張應力層，當此兩種庫力分 佈合理時，玻璃耐内麼強度可以成倍提高。 另種化學強化則是對玻璃表面進行離子交換處理， 常用之方法有熔鹽法及嘖塗法。其中熔鹽法係以溶質中 控大的離子來交換主依< ^7 叉換丰徑小的離子，或以溶質中半徑小的離 子來置換破璃中半徑大的離子，以使得破璃表面產生塵應 3 M412974 2011年7月27日修正替換頁 力，如此可使得耐内壓強度提高，經處理後的製品硬度高、 耐磨損’製品強度不會因長時間使用而降低。而喷塗法則 具有增強玻璃之效果，其包括有： 表面酸處理 表面酸處理可以消除玻璃表面較大數量之微裂紋或使1412974 July 27, 2011 Revision Correction Page 5, New Description: [New Technology Area] This creation is about a super-hard carbon film reinforced material, especially a material that uses a glass deposition system in glass or polymer. One or more layers of composite superhard carbon film (amorphous diamond-like carbon or diamond film) are deposited on one or both sides of the surface, and the high hardness and high strength of the film itself eliminates a large number of microcracks on the glass surface or The width and depth are reduced, and the concentration of stress is reduced to achieve the effect of strengthening the glass or the polymer. [Prior Art] Generally, the method of strengthening the glass in the industry can be summarized into physical strengthening and chemical strengthening, wherein physical strengthening is also called The purpose of air cooling is to strengthen the mechanical strength and thermal stability of the glass bottle. The method is to remove the glass bottle from the bottle machine and then immediately send it to the muffle tempering furnace to heat it to near the glass. The softening temperature (but not to reach the softening temperature), and then transferred to the steel to the tempering; ij use the grille of the porous nozzle to spray cold air on the inner and outer walls of the bottle. Cool the bottle, or use the liquid as the cooling medium to make a sudden cold = tank, causing the surface of the product to form a compressive stress layer due to sudden shrinkage. The cooling inside the product stops, and the internal surface forms a tensile stress layer. When the two reservoir forces are distributed reasonably, When the glass is resistant to internal strength, it can be multiplied. Another type of chemical strengthening is the ion exchange treatment of the glass surface. The commonly used methods are the molten salt method and the sputum coating method. The molten salt method exchanges ions with a large solute in the solute to exchange the ions with a small diameter, or replaces the ions with a large radius in the solute with ions having a small radius in the solute, so that the glass is broken. Dust generated on the surface 3 M412974 The replacement page force was corrected on July 27, 2011. This can improve the internal pressure resistance, and the treated product has high hardness and wear resistance. The product strength will not be reduced due to long-term use. The spraying method has the effect of reinforced glass, which includes: surface acid treatment. Surface acid treatment can eliminate a large number of micro-cracks on the glass surface or
微裂紋之寬度及深度變小，減少應力集中，其處理方式係 將玻璃製品置於低濃度之氫氟酸中浸蝕一定時間，為使浸 蝕效果更佳，亦可在氫氟酸中加入適量的硫酸或磷酸，當 浸蝕深度在100Mm左右時，可以使得玻璃強度提高。 另一方面，一般工業上之高分子（塑膠）之強化方式則是 纖維複合強化，而強化物的種類可為琳瑯滿目，但以材質、 種類等區分’其最重要者不外乎碳纖維(石墨纖維)、玻璃纖 維以及克拉纖維三種’其他纖維則因為價格高、產量少， 多數僅供研究或特殊用# ’因此碳纖維、玻璃纖維及克拉 纖維便成為現今複合材料補強物之三大主流#中尤以碳 纖維及玻璃纖維佔強化纖維之全部。複合材料為了達到強 化效果’其纖維常被製成單向、二維或三維織物一般的 結構物只要單向或二維纖維即可達到強化的㈣但對於 特殊用途之結構物有時則需要三維多纖織物才能達到強化 強乂：Γ摻入強化物…，除了提升材料之機械 增加其特殊功能，例如以玻璃纖維強化 月曰可以增加環氧樹脂之耐衝擊性，以碳纖維加入尼 樹知可以增強其導電性及耐磨m強化物可以為 4 M412974The width and depth of the microcracks become smaller, and the stress concentration is reduced. The treatment method is to immerse the glass product in a low concentration of hydrofluoric acid for a certain period of time, so that the etching effect is better, and an appropriate amount can be added to the hydrofluoric acid. Sulfuric acid or phosphoric acid, when the etching depth is about 100Mm, can increase the strength of the glass. On the other hand, the general industrial polymer (plastic) strengthening method is fiber composite strengthening, and the types of reinforcements can be dazzling, but by material, type, etc., the most important one is nothing more than carbon fiber (graphite fiber) ), glass fiber and carat fiber three kinds of other fibers because of high price, low output, most for research or special use # ' Therefore, carbon fiber, glass fiber and carat fiber have become the three major mainstream of today's composite reinforcements Carbon fiber and glass fiber account for all of the reinforcing fiber. In order to achieve the strengthening effect of composite materials, the fibers are often made into unidirectional, two-dimensional or three-dimensional fabrics. The structure can be strengthened by unidirectional or two-dimensional fibers. (IV) However, for special-purpose structures, three-dimensional is sometimes required. Multi-fiber fabrics can be strengthened and strengthened: Γ is incorporated into the reinforcement... In addition to the mechanical enhancement of the material, its special function is enhanced. For example, the glass fiber reinforced cerium can increase the impact resistance of the epoxy resin, and the carbon fiber can be added to the tree. Enhance its conductivity and wear-resistant m reinforcement can be 4 M412974
201丨年7月27日修正替換H 有機材料、無機材料’或為粉末、顆粒、短纖維長纖維、 纖維蓆或纖維編織物。 但疋上述增加玻璃或高分子之強度的做法，均有其加工 上的缺點，其不外乎加工程序複雜、成本昂貴，摻入之加工 材會導致加工物之透明度降低且不良於透光性，另外，尚存 在有強度加強結構之壽命問題，因此如何提供—種可以確實 .讓破璃或高分子強化之方法則成為目前產業界所積極 的方向。 " 【新型内容】 本創作人有鑑於上述之需求，乃積極著手從事研究， 以期可以解決上述課題，經過不斷試驗及努力終於研發 出本創作。 為了提高玻璃或高分子材質產品之抗折（壓）強度，本創 作係利用薄膜沉積系統，於玻璃、高分子或陶瓷等材料表 面之單面或雙面，或整體之表面，沉積一層或多層複合之 ^超硬碳膜（非晶質類鑽碳膜或鑽石膜），藉此與基材共同構成 雙層或是三層結構，藉由超硬碳膜可以消除玻璃或高分子 材表面較大之微裂紋，或使該微裂紋之寬度或深度變小， 如此以減少應力集中，達到強化玻璃或高分子材料的目的。 在微觀結構中顯示，超硬碳膜之結構相當緻密，且與玻 璃或高分子基板的界面結合性亦非常良好，其厚度可依需求 進行增減’由於超硬碳膜之可見光透光性可為〇%(完全不透 光）至90%(—般玻璃），並可藉由製程參數（氣體種類、機台 功率、工作氣氛壓力、電壓等）進行調整，因此可達到不同 5 M412974 2011年7月27日修正替換頁 之透光度需求。再者，超硬碳膜對紫外光具有良好的遮蔽效 果，可見紫外光幾乎無法穿透超硬碳膜，因此應用在抗紫外 光鏡片及視窗上會有良好的效果。 【實施方式】 請參看第一圖所示’本創作超硬碳膜強化材主要係將 超硬碳膜披覆在玻璃或高分子材的單面或雙面表面，其具 有為玻璃或高分子之基材（20)，於基材（20)之單面或雙面表 φ 面（圖示者為雙面）上以物理氣相沉積法（如濺鍍、陰極電弧） 或化學氣相沉積法（如電漿輔助化學氣相沉積）塗佈一層或 多層之超硬碳膜（10)(非晶質類鑽碳膜或鑽石膜），藉此與基 材（10)共同構成雙層或是三層結構，由於超硬碳膜（10)可以 塗設在任何玻璃、高分子或陶瓷基板上，因此基材（20)可以 為眼鏡鏡片、太陽眼鏡鏡片、鐘錶玻璃、鐘錶表面、手機 玻璃、玻璃面板、玻璃鏡片、MP3面板、微晶玻璃、光學 玻璃、光學鏡片、LED晶片、半導體元件、CD視窗鏡片、 # 攝影鏡頭鏡片、觸摸屏視窗、鏡片櫥窗、玻璃帷幕牆等建 ’ 築玻璃、汽車擋風玻璃、倒車鏡、氧化鋁基板、二氧化矽 等陶瓷材料、壓克力塑膠、環氧樹脂、聚碳酸酯等高分子 材料。 經實驗’將超硬碳膜之非晶質類鑽碳膜塗佈在玻璃基 板上，並測試其抗折強度，可得知未塗佈有超硬碳膜之玻 璃的抗折強度為250N,而塗佈超硬碳膜後之抗折強度可增 加一倍，為490N，因此可證實超硬碳膜可確實增加基板的 強度》 6 M412974 2011年7月27日修正替換胃 再如第二圖所示，以紫外光/可見光光譜儀測量超硬碳 膜之非晶質類鑽碳膜之光穿透性，而非晶質類鑽碳膜之光穿 透性可由製程參數（氣體種類、機台功率、工作氣氛壓力、 電壓等）進行調整，其可見光之透光率可達近9〇%，且對紫 外光有良好的遮蔽效果。 藉由上述技術手段，本創作基材（20)配合超硬碳膜（1〇) 之雙層或是多層結構相較傳統玻璃具有高硬度、消除微裂 紋、良好透光率以及遮蔽紫外光等優點。 【圖式簡單說明】 第一圖係本創作結構之剖面圖。 第二圖係本創作之光穿透性分析圖。 【主要元件符號說明】 (10)超硬碳膜 (20)基材On July 27, 201, the replacement of H organic material, inorganic material was corrected or it was powder, granule, staple fiber long fiber, fiber mat or fiber braid. However, the above-mentioned practice of increasing the strength of the glass or the polymer has its processing disadvantages, which is complicated by the complicated processing procedure and high cost, and the processed material which is incorporated may cause the transparency of the processed product to be lowered and the light transmittance to be poor. In addition, there is still a problem of the life of the strength-enhancing structure, so how to provide it can be sure. The method of making glass or polymer strengthening has become a positive direction in the industry. " [New Content] In view of the above needs, the creator is actively engaged in research, in order to solve the above problems, and has finally developed this creation through continuous trial and effort. In order to improve the flexural strength of glass or polymer products, this film uses a thin film deposition system to deposit one or more layers on one or both sides of a surface of a glass, polymer or ceramic. Composite super hard carbon film (amorphous diamond-like carbon film or diamond film), which together with the substrate to form a double-layer or three-layer structure, the surface of the glass or polymer can be eliminated by the super-hard carbon film Large microcracks, or the width or depth of the microcracks is reduced, so as to reduce stress concentration and achieve the purpose of strengthening glass or polymer materials. In the microstructure, the structure of the super-hard carbon film is quite dense, and the interface with the glass or polymer substrate is also very good, and the thickness can be increased or decreased according to the demand. It is 〇% (completely opaque) to 90% (--glass) and can be adjusted by process parameters (gas type, machine power, working atmosphere pressure, voltage, etc.), so it can reach different 5 M412974 2011 On July 27th, the transmittance requirement of the replacement page was corrected. Furthermore, the super-hard carbon film has a good shielding effect on the ultraviolet light, and it can be seen that the ultraviolet light can hardly penetrate the super-hard carbon film, so that it can be applied to the anti-ultraviolet lens and the window. [Embodiment] Please refer to the first figure. 'This creation of super hard carbon film reinforcement mainly covers super-hard carbon film on one or both sides of glass or polymer. It has glass or polymer. The substrate (20) is physically vapor deposited (such as sputtering, cathodic arc) or chemical vapor deposition on the one-sided or double-sided surface of the substrate (20). a method (such as plasma-assisted chemical vapor deposition) coating one or more layers of superhard carbon film (10) (amorphous diamond-like carbon film or diamond film), thereby forming a double layer together with the substrate (10) It is a three-layer structure. Since the super-hard carbon film (10) can be coated on any glass, polymer or ceramic substrate, the substrate (20) can be an eyeglass lens, a sunglasses lens, a watch glass, a clock surface, a mobile phone glass. , glass panels, glass lenses, MP3 panels, glass ceramics, optical glass, optical lenses, LED chips, semiconductor components, CD window lenses, # photographic lens lenses, touch screen windows, lens windows, glass curtain walls, etc. Car windshield, mirror, oxygen Ceramic materials such as aluminum substrates, cerium oxide, acrylic materials, epoxy resins, polycarbonate and other polymer materials. After the experiment, the amorphous carbon-like carbon film of the super-hard carbon film was coated on a glass substrate, and the flexural strength was tested. It was found that the glass without the super-hard carbon film had a flexural strength of 250 N. The flexural strength after coating the super-hard carbon film can be doubled to 490N, so it can be confirmed that the super-hard carbon film can actually increase the strength of the substrate. 6 M412974 July 27, 2011, the replacement of the stomach is as shown in the second figure. As shown, the optical transmittance of the amorphous diamond-like carbon film of the ultra-hard carbon film is measured by an ultraviolet/visible spectrometer, and the light transmittance of the amorphous diamond-like carbon film can be determined by process parameters (gas type, machine) The power, working atmosphere pressure, voltage, etc. are adjusted, and the visible light transmittance can reach nearly 9〇%, and has a good shielding effect on ultraviolet light. By the above technical means, the double-layer or multi-layer structure of the substrate (20) combined with the super-hard carbon film (1 〇) has high hardness, eliminates micro-cracks, good light transmittance, and shields ultraviolet light, etc. compared with the conventional glass. advantage. [Simple description of the diagram] The first diagram is a sectional view of the creation structure. The second picture is the light penetration analysis of the creation. [Main component symbol description] (10) Super hard carbon film (20) substrate