則^5014 Τ Α 2011年2月17日補充修正頁 五、新型說明： 【新型所屬之技術領域】 本創作係有關於一種座標轉換之介面裝置及其製造設 備’特別疋有關於一種將軌跡球或是滑鼠在顯示器上的位置座 私轉換為光筆位置座標之介面裝置及使用該介面裝置之製造 設備。 【先前技術】 在現在的半導體製造廠中，大部份的製程都已使用自動化 ，製造讀來製造半導體元件。而在自動化的製造設備中，均 疋經由顯Μ的螢幕來提供製程選擇歧 此，每一_造設備上的顯示器均已内建許多的^^程，透 過操作人員來選擇顯不II上的製造流程，^卩可控制每—個半導 體元件之製造流程。 =考第！ @’係-S前技射的製造_功能方塊示意 由s 1圖所不’早期的顯不器u (例如：映像管顯示器） :，疋以電子束來提供水平掃岐垂直掃晦；私筆12指向 並點到映像管顯示器u上的竿一位置 有光感應m 於絲12上配置 九聿12所點到的位置經過水平掃瞄及 if::，Γ12即可將感應到的水伽及垂直掃描之 電子束㈣减經過波職A電路13 將此電壓峨經由-個25編.成紐號後 輸入至製歧_ (_) 由。型_ 二:=:= 仙’之再經由光筆邏輯電⑽依據第23腳== 直腐贿後’ __絲12所纽置，並在光 4 ^ 丨I牛Z闩丨7日補充修正頁 筆12位置上顯示-個游標。當光筆12位置所在的顯示哭^ 位置上已有-個設糾圖像〇⑺n)時，再按下光筆i2上的 開關，當光筆的開關形成通路（〇n)後，製造設備主機ι〇 接收到開關訊號後，即會執行圖像所設定的流程；例如將光筆 12開關之訊號由D型連接器的帛μ腳位輸入至 101。 、科电紛 由於，目前的顯示器已經被液晶顯示器（Uquid Cfystal Display，LCD)所取代，而在液晶顯示器中，辨識液晶顯示器 之螢幕上的鋪，係使概跡球或是滑鼠的位置來辨識，因此 不舄使用電子束的水平掃瞄訊號及垂直掃瞄訊號，故使得原來 以辨識光筆12座標的方式無法制在液晶顯示器上；若為此 而將整部製造設備1G淘&，會使得製造成本增加。 因此，為了提向製造設備的使用率，應設法將液晶顯示器 上對螢幕上的轨跡球或是滑鼠的座標位置轉換成光筆12之辨 識訊號，並將此轉換過的訊號輸入至製造設備主機1〇中，以 使光筆邏輯電路1〇1能夠產生出正確的座標位置，以達到具有 選擇液晶顯示器上的圖像之功能，即可控制每一個半導體元件 之製造流程。 【新型内容】 依據上述之狀況，本創作之主要目的在於提供一種座標轉 換介面裝置，用來將液晶顯示器在螢幕上的座標位置轉換成映 像官顯示器之光筆之座標位置訊號，以提高製造設備的使用 率。 依據上述目的，本創作提供一種座標轉換介面裝置，其外 殼上配置有USB連接端、VGA連接端及D-Sub連接端，而介 細 5014 -端及第us7辅端連接；—個絲位置產生電路，具有第 2及第一鸲’其第一端與驅動裝置之第二端及職連接 =接而1Ϊ位置產生電路之第二端與咖連接端之一個腳 γ自/、，座標位置產生電路中内建有—液晶顯示器之座 電路，具有第-端及第二端，其第一端與驅 另\固_ :端連接’而開關電路之第二端與D-Sub連接端之 另一個腳位連接。 1本fr接著再提供-麵置有賴轉齡錄置之製造 造設備包括製造設備主機、液晶顯示器及座標轉換 "势义其中座標轉換介面裝置經由外殼上的USB連接端 查^與滑鼠連接，經由VGA連接端之第―端與液晶顯示 經由D_Sub連接端與製造設備主機連接，而製造設備 在於：座標轉換介面裝置之電路包括：-個驅動電路， ^有第-端及第二端，其第—端與聰連接端之第二端連 接，一個座標位置產生電路，具有第-端及第二端，Α第-端 置之第二端及VGA連接端之第二端連接，而座標位 置^生電路之第二端與D_Sub連接端之一個腳位連接，其中， =位置產生電路中内建有一液晶顯示器之座標訊息；丄個開 署二有第一端及第二端’其開關電路之第一端與驅動裝 個二連接，而開關電路之第二端與D-Sub連接端之另一 【實施方式】 由於本創作係揭露一種製造設備，特別是一種在顯示器上 配置有多個製造流程之設備；其帽__ -賴於水俯 日从》击士技 2〇丨丨年2月17日補充修正頁 訊號、D 連接器（Μ)或是液晶顯示器 ^鼠_標位置之辨識等，係·現有技術來達 成，=在下迷說明中，並不作完整描述。此外，於下述内文中 並未依據實際之侧尺寸完整繪製，其侧僅在表 達與本創作特徵有關之示意圖。 首先％參考第2圖，係本創作之座標轉換介 觀示意圖。如第2圖所示，座標轉換介面裝置5〇之= ，有個D-Sub連接端5卜其第一端與製造設備主機1〇連 ’個VGA連接端52 ’其第一端與液晶顯示器2〇連接； 一個USB連接端53 ’其第一端與一個滑鼠30 (或是軌跡球） 連f ;其中，D-Sub連接端51為—個具# 25 接著，請參考第3圖’係本創作之座標轉換介面裝置之電路方 塊示意圖。如第3圖所示’座標轉換介面裝置5〇中的電路包 括-個驅動電路54 ’其第-端與USB連接端53之第二端連 接；一個座標位置產生電路55，其第一端與驅動電路54之第 一端及VGA連接端52之第二端連接，而座標位置產生電路 55之第二端與D-Sub連接端51之第二端的第23腳位以及水 平掃瞄訊號與垂直掃瞄訊號連接；其中，座標位置產生電路 55中内建有一液晶顯示器之座標訊息；一個開關電路兄，其 第一端與驅動電路54之第二端連接，而開關電路56之第二端 與D-Sub連接端51之第二端之另一個腳位連接。 再接著，請參考第4圖，係本創作之製造設備之功能方塊 不意圖。如第4圖所示，本創作之製造設備包括製造設備主機 川、一液晶顯示器20及一個座標轉換介面裝置5〇 ;其中製造 設備主機10中進一步配置一個光筆邏輯電路1〇1及一顯示卡 102，此其中光筆邏輯電路ι〇〖之第一輸入端與光筆訊號及開 wmou 一 20丨丨年2月17曰補充修正頁 關訊號連接；而顯示卡102將水平掃瞄訊號、垂直掃瞄訊號連 接、藍色驅動δίΐ號、綠色驅動訊號及紅色驅動訊號送至與 D-Sub連接端51之第二端。故製造設備可依據座標位置產生 電路55内建液晶顯示器之座標訊息以及水平掃瞄訊號與垂直 掃瞄訊號時序的重疊時間來輸出一個游標22 (curs〇r) ^液晶 顯示器20之登幕上，此游標22即包括χ/γ之座標位置；很 明顯地，此一游標22座標位置即用來作為光筆訊號並輸入至 光筆邏輯電路101。Then ^5014 Τ 2 February 17, 2011 Supplementary Amendment Page 5, New Description: [New Technology Field] This creation department has an interface device for coordinate conversion and its manufacturing equipment. Or the interface device on the display where the mouse is transferred to the position of the light pen position coordinate and the manufacturing device using the interface device. [Prior Art] In the current semiconductor manufacturing plants, most of the processes have been automated, manufacturing read to manufacture semiconductor components. In the automated manufacturing equipment, the process selection is provided through the display screen. The display on each device has many built-in controls, and the operator selects the display II. The manufacturing process controls the manufacturing process of each semiconductor component. = test! @' Department-S pre-shooting manufacturing _ function block indicates that the s 1 figure does not 'early display u (for example: image tube display):, 疋 use electron beam to provide horizontal broom vertical broom; private The pen 12 points and points to the position of the image tube display u. The position of the light sensor m is arranged on the wire 12 at the position of the nine points and 12 points. After horizontal scanning and if::, Γ12 can sense the water gamma. And the vertical scanning electron beam (four) minus the wave of the A circuit 13 This voltage is 峨 via the 25 code. After entering the number, input to the ____. Type _ 2:=:= 仙's then via the light pen logic (10) according to the 23rd foot == straight remedy after the bribe ' _ _ silk 12 new, and in the light 4 ^ 丨 I cattle Z latch 7 corrections A cursor is displayed on the page pen 12 position. When there is already a correction image 〇(7)n) at the position where the light pen 12 is located, the switch on the light pen i2 is pressed, and when the switch of the light pen forms a path (〇n), the manufacturing device 〇 After receiving the switching signal, the flow set by the image is executed; for example, the signal of the light pen 12 is switched from the 帛μ pin of the D-type connector to 101. Because of the fact that the current display has been replaced by a liquid crystal display (Uquid Cfystal Display (LCD)), in the liquid crystal display, the screen on the screen of the liquid crystal display is recognized, so that the position of the ball or the mouse is made. Identification, so the horizontal scanning signal and the vertical scanning signal of the electron beam are not used, so that the original identification of the light pen 12 can not be made on the liquid crystal display; if so, the entire manufacturing equipment 1G Amoy & Will increase manufacturing costs. Therefore, in order to improve the usage rate of the manufacturing equipment, it is necessary to convert the coordinate position of the trackball or the mouse on the liquid crystal display into the identification signal of the light pen 12, and input the converted signal to the manufacturing equipment. In the host computer, the manufacturing process of each semiconductor element can be controlled by enabling the light pen logic circuit 1〇1 to generate the correct coordinate position to achieve the function of selecting an image on the liquid crystal display. [New content] According to the above situation, the main purpose of this creation is to provide a coordinate conversion interface device for converting the coordinate position of the liquid crystal display on the screen into a coordinate position signal of the light pen of the image display display to improve the manufacturing equipment. Usage rate. According to the above object, the present invention provides a coordinate conversion interface device, which is provided with a USB connection end, a VGA connection end and a D-Sub connection end, and a fine 5014-end and a us7 auxiliary end are connected; a wire position is generated. The circuit has a second and a first 鸲', the first end of which is connected to the second end of the driving device, and the second end of the position generating circuit, the second end of the position generating circuit, and a foot γ of the coffee connecting end, and the coordinate position is generated. The circuit has a built-in liquid crystal display seat circuit having a first end and a second end, the first end of which is connected with the drive and the other end of the switch circuit, and the second end of the switch circuit and the D-Sub connection end One foot is connected. 1fr then provides - manufacturing equipment including the manufacturing equipment host, LCD display and coordinate conversion The first end of the VGA connection terminal and the liquid crystal display are connected to the manufacturing device host via the D_Sub connection end, and the manufacturing device is: the circuit of the coordinate conversion interface device comprises: - a driving circuit, ^ having a first end and a second end, The first end is connected to the second end of the Cong connection end, and a coordinate position generating circuit has a first end and a second end, and the second end of the first end and the second end of the VGA connection are connected, and the coordinates are The second end of the position generating circuit is connected with a pin of the D_Sub connecting end, wherein the position generating circuit has a coordinate information of the liquid crystal display built therein; the second opening end has a first end and a second end 'the switch The first end of the circuit is connected to the driver package 2, and the second end of the switch circuit is connected to the D-Sub connector. [Embodiment] Since the present disclosure discloses a manufacturing apparatus, particularly a display. Equipment equipped with multiple manufacturing processes; its cap __ - depending on the water from the day of the "Knocker Technology 2" February 17 additional correction page signal, D connector (Μ) or LCD monitor mouse The identification of the _ target position, etc., is achieved by the prior art, and is not fully described in the following description. In addition, it is not completely drawn from the actual side dimensions in the following text, and its side only shows the schematic diagram related to this creative feature. First, refer to Figure 2 for a reference to the schematic diagram of the coordinate transformation of this creation. As shown in Fig. 2, the coordinate conversion interface device 5 = has a D-Sub connection terminal 5, the first end of which is connected to the manufacturing device host 1 'a VGA connection terminal 52', the first end thereof and the liquid crystal display 2〇 connection; a USB connector 53' has a first end connected to a mouse 30 (or a trackball) f; wherein, the D-Sub connection 51 is a member #25, then, refer to FIG. 3 A circuit block diagram of the coordinate conversion interface device of the present invention. As shown in FIG. 3, the circuit in the coordinate conversion interface device 5 includes a driving circuit 54' whose first end is connected to the second end of the USB connection terminal 53; a coordinate position generating circuit 55 whose first end is The first end of the driving circuit 54 and the second end of the VGA connecting end 52 are connected, and the second end of the coordinate position generating circuit 55 and the 23rd pin of the second end of the D-Sub connecting end 51 and the horizontal scanning signal and the vertical The scan signal connection; wherein the coordinate position generating circuit 55 has a coordinate information of the liquid crystal display; a switch circuit brother, the first end of which is connected to the second end of the driving circuit 54, and the second end of the switch circuit 56 is The other end of the second end of the D-Sub connection terminal 51 is connected. Next, please refer to Figure 4, which is the functional block of the manufacturing equipment of this creation. As shown in FIG. 4, the manufacturing apparatus of the present invention includes a manufacturing device host, a liquid crystal display 20, and a coordinate conversion interface device 5; wherein the manufacturing device host 10 is further configured with a light pen logic circuit 1〇1 and a display card. 102, wherein the first input end of the light pen logic circuit ι〇 is connected with the light pen signal and the opening of the mmou, the February 17th, the supplementary correction page signal; and the display card 102 will horizontally scan the signal and scan vertically. The signal connection, the blue drive δίΐ, the green drive signal and the red drive signal are sent to the second end of the D-Sub connection 51. Therefore, the manufacturing device can output a cursor 22 (curs〇r) according to the coordinate information of the built-in liquid crystal display in the coordinate position generating circuit 55 and the overlapping time of the horizontal scanning signal and the vertical scanning signal timing. This cursor 22 includes the coordinate position of χ/γ; obviously, this cursor 22 coordinate position is used as a light pen signal and input to the light pen logic circuit 101.
請再參考第4圖’當本創作之製造設備完成連接後，使相 座標轉換介面裝置50上的D_Sub連接端51之第二端與製造惑 備主機10連接，而VGA連接端52之第一端與液晶顯、示器^ 連接，並且將USB連接端53之第-端與滑鼠3〇 (或是執湖 球）連接；其中，座標轉換介面裝置5G之電路如第3圖之額 明丄同時’ D-Sub連接端51為-個具有25腳位的連接端。 接著，當本創作之製造設備啟動後，製造設駐機川中的夫 筆邏輯電路im及液晶顯示器20接收由顯示卡1〇2所傳絲Please refer to FIG. 4 again. After the manufacturing device of the present invention is connected, the second end of the D_Sub connector 51 on the phase coordinate conversion interface device 50 is connected to the manufacturing confusing host 10, and the first VGA connector 52 is connected. The end is connected to the liquid crystal display and the display unit ^, and the first end of the USB connection end 53 is connected with the mouse 3 (or the lake ball); wherein the circuit of the coordinate conversion interface device 5G is as shown in FIG.丄 At the same time, the 'D-Sub connector 51 is a connector with 25 pins. Then, when the manufacturing apparatus of the present creation is started, the writing logic circuit im and the liquid crystal display 20 of the resident machine Chuanzhong are received by the display card 1〇2.
訊號、垂直_訊號、藍色驅動訊號、綠色驅動訊號 、·工色驅動喊；同時，在滑鼠3Q與USB連接端幻 一 接彳^卩會啟動驅動電路54，並且再由驅動電路54啟 位置產生電路55及開關電路％，使得座標位置產生電 例如5 ^據内建之液晶顯示器之座標訊息送出—個位置訊號； 2機或重置（RESET)後的第—次啟動，座標位置產 螢ίη送卜個預設之座標位置訊號在液晶顯示㈣之 3Q的按鍵左鍵）後，座標位置產 HH.仏卩θ送出—個座標位置的電壓訊號至光筆邏輯電路 ⑻’例如：依序送出X軸及丫轴之電壓訊號（即光^3 8 2011年2月丨7日補充修正頁 至光筆邏輯電路101 ;由於，X軸及γ軸之電壓訊號與第1圖 中之光筆訊號屬於相同形式，故光筆邏輯電路101即可依據所 收封的水平掃瞄訊號及垂直掃瞄訊號以及座標位置產生電路 55所送出的X軸及γ軸之電壓訊號，藉由X軸及γ軸之電壓 訊號與水平掃瞄訊號及垂直掃瞄訊號時序的重疊時間，由光筆 邏輯電路101輸出一個座標訊號至液晶顯示器20。再接著， 當移動滑鼠30時’液晶顯示器20上的游標22即會隨著滑鼠 30的移動而在液晶顯示器2〇的螢幕上移動。 當滑鼠30之游標位置所在的液晶顯示器20的螢幕位置上 已有一個設定的圖像（ic〇n)時，當再按下滑鼠3〇上的開關 31後，製造設備主機1〇接收到開關電路56所送出的開關訊 號後’即會執行圖像所設定的流程。 很明顯地’本創作之座標位置產生電路55所送出的座標 位置之電壓訊號是經由D-Sub連接端51的第23腳位輸出至製 造設備主機10;而開關電路56所送出的開關訊號是經由D-Sub 連接端51的第23腳位輸出至製造設備主機10。因此，經由 本創作所提供之介面裝置5〇後，可以使用液晶顯示器2〇來取 代映像官顯不器11 ;使得製造設備得以繼續使用，而降低製 造之成本；其中，可以使用本創作之座標轉換介面裝置的製造 設備包括：薄膜（thin fllm)製造設備或是蝕刻（etching)製 造設備。 —雖然本前述之祕實酬揭露如上，織並非用以 ，疋本創作’任何熟冑相像技藝者，在不麟本創作之精神和 犯圍内’當可作些許之更動與潤飾，因此本創作之專利保護範 圍須視本·書所社申請專職麟界定者為準。 1405014 2011年2月17日補充修正頁 【圖式簡單說明】 第1圖係一先前技術中的製造設備功能方塊示意圖； 第2圖係本創作之座標轉換介面裝置之外觀示意圖； 第3圖係本創作之座標轉換介面裝置之電路方塊示意圖； 第4圖係本創作之製造設備之功能方塊示意圖。 【主要元件符號說明】 10 製造設備主機 101 光筆邏輯電路 11 映像管顯示器 12 光筆 13 波形放大電路 14 開關電路 20 液晶顯示器 30 滑鼠 31 滑鼠開關 50 介面裝置 51 D-Sub連接端 52 VGA連接端 53 USB連接端 54 驅動電路 55 座標位置產生電路 56 開關電路The signal, vertical_signal, blue drive signal, green drive signal, and color drive drive are shouted; at the same time, the drive circuit 54 is activated by the mouse 3Q and the USB connection terminal, and then the drive circuit 54 is activated. The position generating circuit 55 and the switching circuit % enable the coordinate position to generate electricity, for example, according to the coordinate information of the built-in liquid crystal display, to send a position signal; the second machine or the first start after the reset (RESET), the coordinate position is produced. After the η η 送 个 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设 预设The voltage signals of the X-axis and the X-axis are sent out (ie, the light ^3 8 February 2011, the supplementary correction page to the light pen logic circuit 101; since the voltage signals of the X-axis and the γ-axis and the light pen signal in the first figure belong to In the same form, the stylus logic circuit 101 can be based on the horizontal scanning signal and the vertical scanning signal and the X-axis and γ-axis voltage signals sent by the coordinate position generating circuit 55, by the X-axis and the γ-axis. Voltage signal The overlap time of the horizontal scanning signal and the vertical scanning signal timing is outputted by the light pen logic circuit 101 to a liquid crystal display 20. Then, when the mouse 30 is moved, the cursor 22 on the liquid crystal display 20 will slide. The movement of the mouse 30 moves on the screen of the liquid crystal display 2. When there is already a set image (ic〇n) on the screen position of the liquid crystal display 20 where the cursor position of the mouse 30 is located, when the mouse is pressed again, After the switch 31 on the third port, the manufacturing device host 1 receives the switching signal sent from the switch circuit 56, and then executes the flow set by the image. Obviously, the coordinate position generating circuit 55 of the present creation sends out The voltage signal at the coordinate position is output to the manufacturing device host 10 via the 23rd pin of the D-Sub connector 51; and the switching signal sent from the switch circuit 56 is output to the 23rd pin via the D-Sub connector 51. The device host 10. Therefore, after the interface device provided by the present creation, the liquid crystal display 2 can be used instead of the image display device 11; so that the manufacturing device can continue to be used, thereby reducing The manufacturing cost of the coordinate conversion interface device of the present invention includes: a thin flim manufacturing device or an etching manufacturing device. - Although the aforementioned secret disclosure is as above, the weaving is not used. Therefore, Sakamoto's creation of 'any skilled person who is familiar with the art, in the spirit of not creating the spirit of the creation and the inside of the pen' can be used to make some changes and retouching, so the scope of patent protection of this creation must be based on the bookstore to apply for full-time 1405014 Supplementary Amendment Page of February 17, 2011 [Simple Description of the Drawings] Figure 1 is a functional block diagram of a manufacturing device in the prior art; Figure 2 is the appearance of the coordinate conversion interface device of the present invention. FIG. 3 is a block diagram showing the circuit of the coordinate conversion interface device of the present invention; FIG. 4 is a functional block diagram of the manufacturing device of the present creation. [Main component symbol description] 10 Manufacturing equipment host 101 Light pen logic circuit 11 Image tube display 12 Light pen 13 Waveform amplifying circuit 14 Switch circuit 20 Liquid crystal display 30 Mouse 31 Mouse switch 50 Interface device 51 D-Sub connector 52 VGA connector 53 USB connector 54 drive circuit 55 coordinate position generation circuit 56 switch circuit