M397587 五、新型說明： 【新型所屬之技術領域】 本創作涉及一種反轉輸送零件方向的裝置，特別是涉 及一種電子元件極性反轉裝置。 【先前技術】 現有的電子元件極性反轉裝置是結合於晶片型元件測 試包裝機上，如tw專利證書號數第M35〇8〇7號「測試包 裝機之晶片極性反轉結構」新型專利案，其設有測盤，= 測盤周緣設有多個置放晶片的容槽，又對應相鄰的兩容槽 之間設有馬綠形軌道，當需要晶片極性的位置錯誤，需^ 反轉晶片的極性時，是以測盤氣道將容槽内的晶片朝，=蹄 形軌道吹出，令晶片以位置相反的形態進如前—個容样 内’達到將晶片的方向改正的效果。 前述現有反轉電子元件極性的構造雖可將電子元件的 極性反轉’但由於其執道為馬蹄形，彎折的角度較大，因 此在晶片進入馬蹄形軌道後，晶片的毛邊容易在執道 部產生阻礙，發生卡料等不順暢的情形，造成反轉晶 程的缺陷。 < 【新型内容】 由於現有反轉電子元件極性的構造為馬蹄形，因此 使用過程中容易發生卡料的問題。為此，本創作於測般旁 設有反轉構造’以反轉構造靠近測盤的半側設有相接執道 的方式’達到流暢反轉電子元件極性的效果。 為達到上述目的，本創作提供一種電子元件極性反轉 3 M397587 裝置，包括： . 一測盤，為玎轉動形態的圓形盤體，並且於頂面的周 緣以環繞且等間隔的形態凹設多個容槽，多個容槽分別於 該測盤的周面形成開口， 一反轉構造，設有一外筒，為圓環形的管體並位於該 測盤旁，於該外筒朝向該測盤半側的等高位置，以間隔的 • 形態各穿設一入口以及一出口 ’該入口與該出口的位置與 • 各容槽等高；於該外筒内以同心的形態設有一中柱，為圓 _ 形的柱體並且於周面的相反兩側貫穿設有一直線的随道， 為尚度與該入口等高的孔道並具有一入口端以及一出口 端，該入口端朝向該入口； ;以r衽穴咏„阿< ,ej M 轉動的形態設有一轉動 環，為圓形的裱體並且於頂面以環繞且等間隔的形態凹設 多個置槽，多個置槽分別於該轉動環的内周面以及外周面 形成開：，多個置槽的高度分別與該入口、該隧道以及該 出口等高’並且其中三個置槽分別連接於該人〇與該入口 端、正對該出口以及正對該出口端； ^ 進入轨道，為具有兩端的轨道且設於該測盤與該外 筒：：與該入口同側的位置，並以—端連接該測盤的其中 一合二又以另—端結合於該外筒的入口；以及 一送出轨道，太目士 之間與該“同側心ζΓ轨道且設於該測盤與該外筒 以另-端結合於，二 以一蠕連接該外筒的出口，又 於遠測盤的另一容槽。 進*一步，太名 穿設-隧道氣、首，乍於所述中柱尚於所述隧道的表面朝内 、其内端朝下連接於所述隧道位於入口端 M397587 處的頂部。 進一步，本創作正對於所述出口端的罢秘Λ 而的置槽與正對於所 述出口的置槽之間間隔一個以上的置栘. j 1、，連接所述進入轨 道的容槽與連接所述送出軌道的容槽之 分〜 < 間間隔的容槽數量 與正對於所述出口端的置槽與正對於 尸汁迷出口的置槽之間 間隔的數量相同。 較佳的，本創作正對於所述出口端 崎的置槽與正對於所 述出口的置槽之間間隔兩個置槽。 當本創作使用時，是將晶片設於 '、丨 “ 门又％ /則盤周圍的各個容 槽，當晶片通過檢測，判斷極性的位詈 #逆 夏錯块時’在該晶片 次置的容槽對正進入軌道時，會將 η人出，通過進入軌 、、入口以及隧道後，被外筒阻指 $以 运罝於正對出口端的 置槽内，接著轉動環與測盤同向轉動，當容置晶片的置槽 轉至正對送出軌道的位置時，當初送出同—晶片的容槽怜 好也轉至正對送出軌道另一端的位置，此時晶片由置= 出，穿過送出軌道並回到原來的容槽位置，此時晶片兩端 的極性已被反轉，成為正確的形態。 本創作的有益功效在於，利用反絲 扣久捋構造可將極性位置 錯誤的晶片由容槽_，翻轉位置再經由送出軌道送回 同—容槽内，達到反轉極性的效果，並且由於外筒的入口 以及出口皆設於外筒靠近測盤的半側，因此無論進入軌道 或者送出軌道的轉折都小於馬蹄形的軌道，能夠避免晶片 在軌道中被吹送的輸送過程中產 座玍丨且礙u流暢的滑動方 式輪达晶片並反轉極性’達到較佳的反轉極性效果。 【實施方式】 5 M397587 本創作提供一種電子元件極性反轉裝置，是裝設於晶 片型元件測試包裝機，並用以反轉晶片的位置，請參看圖二 的本創作第一較佳實施例，包括： -測盤10,為可轉動形態的圓形盤體，並且於頂面的 周緣以環繞且等間隔的形態凹設多個容槽n，多個容槽” 分別於該測盤10的周面形成開口，藉由多個容槽n 置可分別供各晶片容置，並且對應多個容槽彳彳的位置，2 分別於測冑10設有測盤氣道12’以測盤氣道12連接氣壓 源或者真空源，可達到吸取各容槽w内的晶片或者將晶片 朝外吹送的效果。 一反轉構造20，設有一外筒21，為直立設置的圓環形 管體並位於測盤10旁，於外筒21朝向測盤1〇半側的等高 位置，以間隔的形態於左、右位置各穿設一入口 21彳以及 一出口212’入口211與出口212的高度與各容槽11的高 度等高，於外筒21相反於入口 211的位置穿設一外筒氣道 213,以外筒氣道213可連接負壓源，用吸引的方 片的位置，於外筒21内的中間以同心的形態設有一中杈 22,為圓形且直立設置的柱體，並且於周面的相反的兩側 貫穿設有一隧道221,為高度與入口 211以及出口 212等 鬲的直線孔道，並且具有一入口端2211以及一出口端 2212，以入口端2211朝向外筒21的入口 211方向，又以 出口端2212朝向外筒氣道213的方向； 於中杈22高於隧道221的表面朝内穿設一隧道氣道 222 ’其内端朝下連接於隧道221位於入口端2211處的丁貝 部，以随道氣道222的外端連接氣壓源，可將由入口端221， 6 M397587 進入並通過隧道221的晶片朝出口 σ 212 鴂乂212吹送出，對應出 口 212的位置，於中柱22 、首2：^拉产r 〒柱虱道223,以中枉氣 、223連接乱壓源，將晶片朝出口端& ψ ,. 99 rt 2的方向吹出， Γ 23、_/、外筒21之間以可轉動的形態設有-轉動 '，為圓形的環體並且於頂面以環繞且等間隔的形態凹 設户個置槽⑶，多個置槽231分別於轉動環23的内周面 以及外周面形成開口，且高度分別與入口 2”、隨道221 以及出口 212等高，获外矣他 , 门错此夕個置槽231能分別與入口 211、 隧道221以及出口 212相連接； 對應多個置槽231的位置，分別扒姑去 置刀別於轉動環23設有轉動 環氣道’以轉動環氣道連接氣麼源或者真空源，可達到吸 取各置槽231内的晶片或者將晶片朝外吹送的效果多個 置槽231的其中之—連接於人口 211與降道a的入口端 221]，另-個正對並連接於出口 212，還有—個正對並連 接於随道22i的出口端2212，並且正對於出口端a”的 置槽231與正對於出口 212的置槽231之間間隔兩個置槽 231 0 -進入軌道3G’為具有兩端且中間f折小於9q度的軌 道，並且設於測盤10與外筒21之間與入口 211同側的左 側位置，進入軌道30以一端連接測盤彳〇的其中一容槽，”， 又以另一端結合於外筒21的入口 211，於進入軌道3〇設 有多個進入軌道氣道31,以進入軌道氣道31連接氣壓源叹 玎達到吹送通過的晶片朝入口 211前進的效果。 一达出轨道40 ,為具有兩端的直線軌道，並且設於測 盤1〇與外筒21之間與出口 212同側的右側位置，送出軌 7 M397587 道40以一端連接測盤ι 〇的另〜 令槽1 1，又以另一端結合 於外筒21的出口 212，於送出 、 广、士 執道40設有多個送出軌道 軋道’以达出轨道氣道連接氣壓 . 你，可達到°人运通過的晶 片朝測盤1 0的容槽11前進的效 丨丨月i退π攻果，並且連接進入軌道30 的容槽11與連接送出轨道40的容 % Ί1之間間k兩個容槽 11，而測盤1 0與轉動環23為 衣 勺u向旋轉的形態，且於相同 的單位時間分別轉動一格容槽彳彳或置槽231。 本創作除前述較佳實施例’將正對於出口端2212的置 槽231與正對於出口 212的置槽231之間，設為間隔兩個 U曰2 31以外’亦可設為間隔一個或者三個等一個以上的 間隔數量，並且連接進入軌道3〇的容槽彳彳與連接送出轨 道40的容槽11之間所設有的容槽μ間隔數量亦隨之設為 相等的間隔數量，如此置槽231以及容槽彳彳的間隔數量改 變本創作在此不加以限制。 S本創作使用時，晶片型元件測試包裝機5 〇在測盤1 〇 轉向進入軌道30前的位置，依序對應測盤1 〇設有—入料 鲁構造51以及一第—檢測站52，又在測盤1 0轉離送出轨道 40之後的位置，依序對應測盤1 〇設有一ccd外觀檢測站 53、一第一排料口 54、一第二檢測站55、一第二排料口 56、一第三檢測站57以及一第三排料口 58。 用於包裝晶片時，如圖2至圖4所示，晶片型元件測 試包裝機50由入料構造51將晶片6〇送至測盤1 〇的各個 容槽1 1 ’當晶片60通過第一檢測站52時，會檢測通過晶 片60的極性是否有擺正，若為擺正的狀態，則當晶片6〇 通過進入軌道30的時候，測盤氣道彳2會持續吸引晶片6〇, 8 M397587 =60不會被送入進入軌道3〇,若非正確的狀態，則於 a日片60所在的容槽杓對正進入軌道3〇的 、 12會將晶片60吹出，通過進入執道3〇、入口、2測盤氣道 道22”复，被外筒21阻擔而留置於正對出口端221/= 槽231内，此時又以213外筒氣道吸住晶片定位. 接著由於轉動環23與測盤1〇 ’ 60的荖描喆s 符助，當容置晶片 6〇的置槽231轉至正對送出執道4〇的位置時， 问-晶片60的容槽W恰好也轉至正對送出 i 的位置’此時223中柱氣道將晶片 另1 過送出執…回到原來的容槽”位置，：：出：穿 極性已被反轉，成為正確的形態， ^兩知的 當各個晶片通過CCD外觀檢測站5二動’ 第三檢…並作分級的檢測後，再分=測站55、 ⑷第二排料”6、第三排料口 58:::由第-排料口 出，並在晶片60到達……及弟四排料口 59排 包裝。 1達植入座61時，將晶片6。植入載帶内 本創作除前述第_輕 β 中間f折小於9〇 _ c進入軌道30設為 道以外，如圖5:第軌道：又將送出軌道4〇設為直線軌 、第—較佳貫施例’亦可骑4 λ β 設為直線軌道，並將送^ a ， ^ 30Α 道，改變形狀的進Α私、、 勹"折90度的轨 入口 211斑1中〜道3〇Α與送出軌道40Α同樣連接於M397587 V. New description: [New technical field] This creation relates to a device for reversing the direction of conveying parts, in particular to an electronic component polarity reversal device. [Prior Art] The existing electronic component polarity reversal device is incorporated in a wafer type component test packaging machine, such as the tw patent certificate number M35〇8〇7 "Testing the packaging machine chip polarity reversal structure" new patent case It is provided with a test disc, = there are a plurality of pockets for placing the wafer on the periphery of the disc, and a horse-green track is arranged between the adjacent two slots. When the position of the wafer polarity is required to be wrong, it is necessary to reverse When the polarity of the wafer is used, the wafer in the cavity is blown toward the hoof-shaped track by the air channel of the disk, so that the wafer is brought into the front-in-one shape in the opposite position to achieve the effect of correcting the direction of the wafer. The above-mentioned structure of the polarity of the inverted electronic component can reverse the polarity of the electronic component. However, since it is in the shape of a horseshoe, the angle of bending is large, so that the burr of the wafer is easily in the obstruction after the wafer enters the horseshoe-shaped track. There is a hindrance, a situation in which the jam or the like is not smooth, and a defect of the reverse crystal path is caused. < [New content] Since the structure of the polarity of the existing inverted electronic component is a horseshoe shape, the problem of jamming tends to occur during use. For this reason, the present invention has an effect of smoothly inverting the polarity of the electronic component by providing an inversion structure "in the form of a reversed structure on the half side of the reversing plate". In order to achieve the above object, the present invention provides an electronic component polarity reversal 3 M397587 device, comprising: a test disc, which is a circular disc body in a rotating shape, and is recessed in a circumferential and equidistant manner on the periphery of the top surface. a plurality of pockets, wherein the plurality of pockets respectively form an opening in a circumferential surface of the measuring disc, and an inverted structure is provided with an outer cylinder which is a circular tubular body and is located beside the measuring disc, and the outer cylinder faces the outer cylinder The equipotential position on the half side of the dial, each of which is provided with an inlet and an outlet in the form of a gap. The position of the inlet and the outlet is equal to the height of each of the pockets; and a central portion is provided in a concentric manner in the outer cylinder. The column is a circular _-shaped cylinder and has a straight line on the opposite sides of the circumferential surface, and is a channel having a height equal to the inlet and having an inlet end and an outlet end facing the inlet end The inlet is provided with a rotating ring in the form of a rotating ring, which is a circular body and is recessed in a circumferentially and evenly spaced manner on the top surface, and a plurality of grooves are provided. The grooves are respectively formed on the inner circumferential surface and the outer circumferential surface of the rotating ring a plurality of slots having a height equal to the inlet, the tunnel, and the outlet, respectively, and wherein the three slots are respectively connected to the inlet and the inlet, to the outlet, and to the outlet; a track having a track at both ends and disposed on the same side of the test plate and the outer tube: on the same side as the inlet, and connecting one end of the test disc to the outer end and the other end to the outer tube The entrance; and a delivery track, between the Taimu and the "same side of the heart track and is located in the test disk and the outer tube is joined at the other end, the second is connected with the outer tube of the outer tube, and Another slot of the remote test disc. Into the step, the name is passed - the tunnel gas, the first, the middle column is still inward of the surface of the tunnel, and its inner end is connected downward to the top of the tunnel at the entrance end M397587. Further, the present invention is disposed between the slot for the exit end and the slot for the outlet. The space is more than one between the slots for the outlet. j 1, the slot and the connection connecting the entry track The number of pockets of the sent-out track is < the number of pockets of the interval is the same as the number of slots between the slot for the outlet end and the slot for the outlet of the corpse. Preferably, the present invention is to space two slots between the slot for the outlet port and the slot for the outlet. When this creation is used, the wafer is placed in each pocket of the ', 丨' gate and %/the disk. When the wafer passes the detection, it is judged that the polarity is located at the time of the wafer. When the groove is entering the orbit, the η person will be out. After entering the rail, the inlet and the tunnel, the outer cylinder is blocked by the outer cylinder to move in the slot opposite the outlet end, and then the rotating ring is in the same direction as the dial. Rotating, when the groove for accommodating the wafer is turned to the position of the feeding track, the accommodating groove of the same wafer is also transferred to the position opposite to the other end of the feeding track, and the wafer is placed and discharged. After the track is sent out and returned to the original position of the groove, the polarity of the ends of the wafer has been reversed to become the correct shape. The beneficial effect of the creation is that the reverse polarity of the wafer can be used to correct the polarity of the wafer. The groove _, the reversing position is sent back to the same groove via the delivery track to achieve the effect of reverse polarity, and since the inlet and the outlet of the outer cylinder are both located on the half side of the outer cylinder, no matter whether it enters the track or Send the track The folding is smaller than the horseshoe-shaped track, which can prevent the wafer from being blown during the conveyance process in the track, and can prevent the smooth rotation of the wafer and reverse the polarity to achieve a better reverse polarity effect. 5 M397587 This application provides an electronic component polarity reversal device which is mounted on a wafer type component test packaging machine and used to invert the position of the wafer. Please refer to the first preferred embodiment of the present invention in FIG. 2, including: The disk 10 is a circular disk body of a rotatable shape, and a plurality of pockets n are recessed in a circumferentially and evenly spaced manner on the periphery of the top surface, and the plurality of pockets respectively form openings on the circumferential surface of the dial 10 The plurality of pockets n can be respectively accommodated for each wafer, and corresponding to the positions of the plurality of pockets, 2 the dial air channel 12' is respectively disposed on the test wheel 10 to connect the air pressure source of the dial air channel 12 or The vacuum source can achieve the effect of sucking the wafers in the respective tanks w or blowing the wafers outward. An inverted structure 20 is provided with an outer cylinder 21 which is an upright circular tubular body and is located beside the measuring disc 10 at the same height position of the outer cylinder 21 toward the half of the measuring disc 1 in the form of a space on the left side. Each of the right positions is provided with an inlet 21 彳 and an outlet 212 ′. The heights of the inlets 211 and 212 are equal to the heights of the respective slots 11 , and an outer cylinder air passage 213 is disposed at a position opposite to the inlet 211 of the outer cylinder 21 . The outer cylinder air passage 213 can be connected to the negative pressure source, and a middle cymbal 22 is disposed in a concentric manner in the middle of the outer cylinder 21 by the position of the attracted square piece, which is a circular and erected column body, and is circumferentially The opposite sides are provided with a tunnel 221, which is a straight hole with a height equal to the inlet 211 and the outlet 212, and has an inlet end 2211 and an outlet end 2212, with the inlet end 2211 facing the inlet 211 of the outer cylinder 21, With the outlet end 2212 facing the direction of the outer cylinder air passage 213; a tunnel air passage 222 is disposed inwardly of the middle cymbal 22 above the surface of the tunnel 221, and the inner end thereof is connected downward to the Dingbei portion of the tunnel 221 at the inlet end 2211. Connect the air pressure source to the outer end of the airway 222. The inlet end 221, 6 M397587 enters and passes through the wafer of the tunnel 221 to the outlet σ 212 鴂乂 212, corresponding to the position of the outlet 212, and the middle column 22, the first 2: ^ pulls the r-column 223, to the middle Gas, 223 is connected to the source of random pressure, and the wafer is blown out in the direction of the outlet end & , . 99 rt 2, and Γ 23, _/, and the outer cylinder 21 are provided in a rotatable manner - rotating ', circular And a plurality of slots 231 respectively forming openings on the inner circumferential surface and the outer circumferential surface of the rotating ring 23, and the heights respectively correspond to the inlets 2", and are respectively arranged on the top surface in a manner of being circumferentially and equally spaced. With the height of the road 221 and the exit 212, the outer door is smashed, and the door slot 231 can be connected to the inlet 211, the tunnel 221 and the outlet 212 respectively; corresponding to the positions of the plurality of slots 231, respectively The cutter is provided with a rotating ring air passage 'to rotate the ring air passage to connect the gas source or the vacuum source, so as to obtain the effect of sucking the wafers in the respective slots 231 or blowing the wafer outward. - connected to the entrance 221 of the population 211 and the descending a), the other one is directly opposite and connected The outlet 212 has a pair of outlets 2212 that are opposite and connected to the channel 22i, and two slots 231 0 are spaced between the slot 231 for the outlet end a" and the slot 231 for the outlet 212. The entry rail 3G' is a rail having both ends and the intermediate f is folded by less than 9q degrees, and is disposed at a left side position between the dial 10 and the outer cylinder 21 on the same side as the inlet 211, and the entrance rail 30 is connected to the disc at one end. One of the receptacles," is joined to the inlet 211 of the outer cylinder 21 at the other end, and a plurality of inlet orbital air passages 31 are provided in the entrance rail 3 to enter the orbital air passage 31 to connect the air pressure source to sigh to reach the wafer through which the blow passes. The effect of the entrance 211 advancing. As soon as the rail 40 is reached, it is a linear rail having two ends, and is disposed at a right side position between the dial 1 〇 and the outer cylinder 21 on the same side as the outlet 212, and the delivery rail 7 M397587 40 is connected to the measuring disc at one end. ~ The groove 1 1 is coupled to the outlet 212 of the outer cylinder 21 at the other end, and a plurality of delivery track rolling passes are provided at the delivery, wide, and Shishidao 40 to reach the orbital air passage connection air pressure. You can reach ° The wafer that the person passes through advances toward the pocket 11 of the test disc 10, and the effect is obtained, and the gap between the slot 11 connected to the track 30 and the volume % 连接1 connecting the delivery track 40 is two. The groove 11 and the disk 10 and the rotating ring 23 are rotated in the direction of the u-turn, and the groove or the groove 231 is rotated in the same unit time. In addition to the foregoing preferred embodiment, the space between the slot 231 of the outlet end 2212 and the slot 231 facing the outlet 212 is set to be spaced apart by two U 曰 2 31 'may also be set to one or three. The number of intervals of more than one interval, and the number of slots μ provided between the slot 连接 connected to the track 3〇 and the slot 11 connected to the send track 40 is also set to an equal number of intervals, The number of intervals in which the slots 231 and the pockets are changed is not limited herein. When the S is used in this creation, the wafer type component test packaging machine 5 is placed at a position before the test wheel 1 〇 turns into the track 30, and the corresponding test disk 1 is provided with an input material structure 51 and a first detection station 52. Further, after the disk 10 is turned away from the delivery track 40, a corresponding ccd appearance detecting station 53, a first discharging port 54, a second detecting station 55, and a second discharging device are sequentially disposed corresponding to the measuring plate 1 The port 56, a third detecting station 57 and a third discharging port 58. When the wafer is packaged, as shown in FIGS. 2 to 4, the wafer type component test packaging machine 50 feeds the wafer 6 to the respective pockets 1 1 ' of the tray 1 by the feeding configuration 51. When the wafer 60 passes the first When the station 52 is inspected, it is detected whether the polarity of the wafer 60 is squared. If it is in a square state, when the wafer 6 passes through the track 30, the disk air channel 彳2 continues to attract the wafer 6〇, 8 M397587 =60 will not be sent into the track 3〇, if it is not in the correct state, then the groove in the a-day piece 60 is aligned into the track 3〇, 12 will blow out the wafer 60, and enter the way 3〇, The inlet and the 2 gauge air passage 22" are blocked by the outer cylinder 21 and left in the opposite end 221 / = slot 231. At this time, the wafer is positioned by the 213 outer cylinder air passage. Then, due to the rotation ring 23 and The scanning s s of the measuring disc 1 〇 '60 assists that when the slot 231 for accommodating the wafer 6 turns to the position where the wafer 4 is sent, the slot W of the wafer 60 just goes to positive For the position where the i is sent out, 'At this time, the 223 column air channel will send the wafer to another one to return to the original position" position::: Out: wear polarity It is reversed and becomes the correct form. ^When the two wafers pass the CCD appearance inspection station 5, the second detection 'the third inspection... and the classification test, then sub-point = station 55, (4) second discharge "6 The third discharge port 58::: is discharged from the first discharge port, and arrives at the wafer 60 ... and the fourth discharge port 59 rows of packaging. 1 When the implant 61 is reached, the wafer 6 is implanted. In-band creation, except for the aforementioned _light β intermediate f-fold is less than 9〇_c, and the orbit 30 is set as the track, as shown in Fig. 5: the first track: the outgoing track 4〇 is set as a linear track, and the first best For example, you can also ride 4 λ β to set up a linear orbit, and send ^ a , ^ 30 Α , to change the shape of the Α 、 , , 勹 quot 折 折 90 度 度 90 90 90 211 211 211 211 211 211 211 211 211 211 The delivery track 40Α is also connected to
11之間。::本::V1之間W 式以及達成功效皆:第較佳！施例的其餘構造、實施方 在此不作贅述。〃車乂佳實例所述相同，故本創作 9 M397587 【圖式簡單說明】 圖1為本創作第一較佳實施例的構造示意圖。 圖2至圖4為本創作第一較佳實施例的實施示意圖。 圖5為本創作第二較佳實施例的構造示意圖。 11容槽 20反轉構造 21 1 入口11 between. ::This::W between the V1 and the achievement of the effect: the first! The rest of the construction and implementation of the embodiment are not described herein. The same is true for the example of the car, so the author 9 M397587 [Simplified illustration of the drawings] Fig. 1 is a schematic structural view of the first preferred embodiment of the creation. 2 to 4 are schematic views showing the implementation of the first preferred embodiment of the present invention. Fig. 5 is a schematic view showing the configuration of a second preferred embodiment of the present invention. 11 tank 20 reverse structure 21 1 entrance
21 3外筒氣道 221隧道 221 2出口端 223中柱氣道 231置槽 31進入轨道氣道 50晶片型元件測試包裝機 52第一檢測站21 3 outer cylinder air passage 221 tunnel 221 2 outlet end 223 middle column air passage 231 slot 31 into the orbital air passage 50 chip type component test packaging machine 52 first inspection station
【主要元件符號說明】 1 0測盤 1 2測盤氣道 21外筒 212 出口 22中柱 221 1入口端 222隧道氣道 23轉動環 30進入軌道 40送出軌道 51入料構造 53CCD夕卜觀檢測站 5 5第二檢測站 5 7第二檢測站 59第四排料口 61植入座 54第一排料口 56第二排料口 58第三排料口 60晶片 ]〇[Main component symbol description] 1 0 Dish 1 2 Dish air passage 21 Outer cylinder 212 Outlet 22 Middle column 221 1 Inlet end 222 Tunnel air passage 23 Rotation ring 30 Entering track 40 Feeding track 51 Feeding structure 53 CCD 卜 观 observation station 5 5 second detection station 5 7 second detection station 59 fourth discharge port 61 implant seat 54 first discharge port 56 second discharge port 58 third discharge port 60 wafer]