M396171 五、新型說明： 【新型所屬之技術領域】 古* ί ΐ作係涉及一種高速雷射加工機’特別是指-種具 型補償機制之創新高速雷射加工機結構型態設計 【先前技術】 t丄請參第1圖所示，習知高速雷射加工機結構設計 統由雷射源10 (如⑴2雷射源）輸出雷射光束 U經由光束擴大將雷射源10所輸出的雷射光束 得到ί用：ί =擴大’接著再經過由衰減器12的能量控制 第一 二二射加工盲孔的最佳參數值，而雷射光束以由 ΐ「5 導引至第二反射鏡14再折射至第三反射 二工在一料j 16，雷射光束U由聚焦鏡16聚焦雷射能量 材料分子鍵結狀態，產生材料氣化與 孔；又第料件17加工面形成具有深度及圓形的盲 射朵走τ 目中各指引框R内所繪示之圓,點，係表示雷 射先束L1經過各該區段位置時之光束斷面形狀。 ’所述第三反射鏡15與聚焦鏡 f速移動的光學模組，其作用在於能夠高：導；:雷= 互相能夠高速移動之精密移動平台18 (γ‘） 成經過計算排列範圍内的料件17 ’並形 丨升併〜傻的大1精密盲孔圖案〇 動平=速習知技術而言’—般光路設計在精密移 千〇间速移動時，雷射聚焦圓點加工 雷射脈衝時間與快逮往 ：：：17上時’因 間差的關係，導致在： = 二反射鏡15之間具有時 ，雷射聚隹知Γΐί 的往復高速運動方向上 往會由片:μ〜=件17上的加工形狀如第2圖所示，往 在會由原本叹疋的圓形盲孔19A態樣延伸變成橢圓形盲孔 3 M396171 Α ，、 項：成 合客戶端要求之問題與缺憾。 .一 另須補充說明的是， 力（ΡΜΜΑ)為其令常見之加工田：σ工材料而言，光學壓克 壓克力上能夠獲得較佳光料，而圓形光束加工於光學 射聚焦圓點是否精確，=寺性與品質要求，因此，其雷 顯為相關業界與客戶端關加工成果品質優劣等級，此 碼所重視之項目。 是以，針對上述習知言 題點，如何開發—種更具理相雷射加工機結構所存在之問 者所企盼，亦係相關鞏 ^實用丨生之創新結構，實使用 有鑑於此，創作人本於 艰之目私及方向。 與設計經驗，針對上述之 * 攸事相關產品之製造開發 終得一確具實用性之^創^標，詳加設計與審慎評估後， 【新型内容】 本創作之主要目 制之高速雷射加工機 如何研發出一種能夠 用性之新式高速雷射 述高速雷射加工機包 之雷射源、光束調整 動光學模組；該雷射 模組進行光束狀態之 高速移動光學模組後 該可高速移動光學模 一反射鏡片及聚焦鏡 轉向模組相對設置以 本創作解決問題 束反射轉向模組之間 的，係在 結構，其 提昇加工 加工機結 括可移動 模組、光 源所輸出 調整，再 聚焦於可 組包括一 片所構成 銜接雷射 之技術特 並組設有 提供一種具 所欲解決之 精確度與品 構為目標加 平台、設於 束反射轉向 之雷射光束 經由光束反 移動平台所 移動座及呈 :該反射鏡 光束； 點’主要在於該雷射源與光 一光束整形補償模組，其包 光束整 問題點 質、更 以創新 該可移 模組及 係經由 射轉向 預置的 上下間 片係與 型補償機 ，係針對 具理想實 突破；所 動平台上 可局速移 光束調整 模組、可 料件上； 隔相對之 光束反射 4 M396171 括間隔相對設置 整形補償模組係 為橢圓形斷面態 藉此創新獨特設 過該光束整形補 學模組高速往復 之雷射光束能由 效大幅提昇高速 性與較佳產業利 的一平凸透鏡及 藉以將圓形斷面 樣的輸出雷射光 計’使本創作對 償模組的設置， 移動所產生的時 橢圓形轉為趨近 雷射加工機加工 用效益。 平凹透鏡所構成 態樣之入射雷射 束，達到光束整 照先前技術而言 以補償因為可高 間差’令最終聚 圓形之狀態，進 精確度與品質之 ，該光束 光束轉變 形目的； ，俾可透 速移動光 焦於料件 而達到有 實用進步 【實施方式】 ^請參閱第3圖所示，係本創作具光束整型補 南速雷射加工機結構之較佳實施例，惟此 明之用’在專利申請上並不受此結構之限制。所 射加工機A係包括一可移動平台2〇 (係進行γ軸 復高速移動）、設於該可移動平台2〇上之一雷射 光束調整模組40、一光束反射轉向模組5〇以及一 動光學模組60 (係進行X軸方向之往復高速移動 ;其中該雷射源30可為C〇2雷射源，其所輸出之雷 ®係經由光束調整模組40調整雷射光束L2之直徑或 ，等狀態’再經由該光束反射轉向模組50、可高速 模組60後聚焦於可移動平台20所預置的料件7〇上 ’該雷射源30與光束反射轉向模組50之間組設有 形補償模組80 ( Beam Shaper )，該光束整形補償模 以將圓形斷面態樣之入射雷射光束L2轉變為橢圓 樣的輸出雷射光束L3 ’達到光束整形之目的（如 示）； 如第3圖所示’該光束調整模組40可包括一 器41(Β·Ε)、一衰減器42 (Attenuator)任至少其中一 償機制之 例僅供說 述高速雷 方向之往 源 30、一 可高速移 )所構成 射光束L2 能量大小 移動光學 ;且其中 一光束整 組80係藉 形斷面態 第4圖所 光束擴大 者所構成 5 M396171 ，所，光束擴大器41係藉以將雷射源3〇所輸出的雷射光束 L2直ί小加以擴大；所述衰減器42則是藉以將雷射光束 L2的能置控制於雷射加工所預設的最佳參數值狀態。 =第3圖所示’該光束反射轉向模組5〇可包括間隔相 對之第—反射鏡51以及一第二反射鏡52所構成。 如第3圖所示，該可高速移動光學模組6〇係包括一移 動座61以及呈上下間隔相對之—反射鏡片犯以及一聚焦鏡 片=構成；其中該反射鏡片62係與光束反射轉向模:5〇 相對设置’以銜接雷射光束L2。 心^ 3圖所示，該光束整形補償模組係包括間隔相 萼：輔二平凸透鏡81以及一平凹透鏡82所構成；該光束 :補償模組80依此構成實施例而言，其運作原理如第4 ，將Τ鈾：：之雷射光束L2由右邊穿透過該片平凸透鏡81 不度聚合縮短而x軸方向的光束長度M396171 V. New description: 【New technology field】 The ancient* ΐ 涉及 涉及 涉及 涉及 涉及 涉及 涉及 涉及 涉及 古 古 古 古 古 古 古 古 古 古 古 古 古 古 高速 高速 高速 高速 高速 高速 高速 高速 高速 高速 高速 高速 高速 高速 创新 高速 创新 高速 高速 高速 高速 高速】 t丄 Please refer to Figure 1, the structure design of the high-speed laser processing machine is output from the laser source 10 (such as (1) 2 laser source) to output the laser beam U through the beam to expand the output of the laser source 10 The beam is obtained by: ί = expansion 'and then the optimum parameter value of the first two-two-shot blind hole is controlled by the energy of the attenuator 12, and the laser beam is guided by ΐ5 to the second mirror 14 re-refracting to the third reflection, the second beam is in a material j, the laser beam U is focused by the focusing mirror 16 to focus the molecular bonding state of the laser energy material, and the material is vaporized and the hole is formed; and the processing surface of the first material member 17 is formed to have a depth. And the rounded blind spot τ, the circle drawn in each of the guide frames R, the point indicates the beam cross-sectional shape of the laser beam L1 passing through each segment position. The optical module of the mirror 15 and the focusing mirror f-moving, the function of which is High: guide;: Ray = the high-speed moving precision mobile platform 18 (γ') into the calculated arrangement of the material within the range of 17 'and shape soar and ~ silly big 1 precision blind hole pattern 平 flat = speed In the conventional technology, when the precision light path is designed to move between the precise movements of the millennium, the laser focusing time of the laser focusing point is fast and the catch is fast:::17, the relationship between the difference is caused by: = When there is a relationship between the two mirrors 15 , the laser reciprocating high-speed motion direction will be from the film: μ ~ = the shape of the processing on the piece 17 as shown in Fig. 2, the original sigh The circular blind hole 19A extends into an elliptical blind hole 3 M396171 Α , , Item: The problems and shortcomings required to meet the client requirements. It is also necessary to add that the force (ΡΜΜΑ) is the common processing field. : For the sigma material, the optical acryl is able to obtain better light, and the circular beam is processed in the optical spot. The focus is accurate, = temple and quality requirements. Therefore, the lightning is related to the industry. The level of quality of the processing results with the client, this code pays attention to The project is based on the above-mentioned problems, how to develop a kind of more reasonable phase laser processing machine structure, and the innovative structure of the relevant and practical In view of this, the creators are in a difficult position and direction. With the design experience, the manufacturing development of the above-mentioned products related to the anecdote has finally become practical and practical. After detailed design and careful evaluation, [New content] How does the high-speed laser processing machine, which is the main target of this creation, develop a laser source and beam-adjusting dynamic optical module for a new high-speed laser-based high-speed laser processing machine package that can be used; After the module performs the high-speed moving optical module of the beam state, the high-speed moving optical mode-reflecting lens and the focusing mirror steering module are oppositely arranged to solve the problem between the beam-reflecting steering module, and the structure is upgraded. The processing machine includes a movable module, an output adjustment of the light source, and then focuses on a group of technologies that can be combined to form a connected laser to provide a desired solution. Accuracy and structure are the target plus platform, the laser beam disposed on the beam reflection steering moves through the beam and moves the platform and presents: the mirror beam; the point 'mainly lies in the laser source and the light beam shaping compensation module The package beam is integrated with the problem, and the movable module and the upper and lower film system and the type compensation machine are preset for the purpose of the actual breakthrough; the moving platform can be moved at a local speed. Adjusting the module, the material can be placed; the relative beam reflection 4 M396171, the spacing is relatively set, the shaping compensation module is an elliptical cross-section state, and the innovative and unique laser beam shaping module is used to reciprocate the laser beam at high speed. A flat-lens lens that can greatly improve the high speed and better industry benefits, and the circular laser-shaped output laser light meter can make the setting of the compensation module to be closer to the time when the movement is generated. Laser processing machine processing benefits. The incident laser beam formed by the plano-concave lens reaches the beam illuminating technique in the prior art to compensate for the high-interval difference, which makes the final poly-circular state, the precision and the quality, and the beam beam is transformed; , 俾 can move the light focus on the material to achieve practical progress [Embodiment] ^ Please refer to Figure 3, which is a preferred embodiment of the structure of the beam shaping type south speed laser processing machine However, the use of 'the patent application' is not limited by this structure. The shot processing machine A includes a movable platform 2〇 (for γ-axis complex high-speed movement), a laser beam adjustment module 40 disposed on the movable platform 2〇, and a beam reflection steering module 5〇. And a moving optical module 60 (which performs reciprocating high-speed movement in the X-axis direction; wherein the laser source 30 can be a C〇2 laser source, and the output Ray® adjusts the laser beam L2 via the beam adjusting module 40 The diameter or the state of the reflector is further reflected by the beam to the steering module 50, and the high-speed module 60 is focused on the material member 7 preset by the movable platform 20. The laser source 30 and the beam reflection steering module The group between 50 sets a shape compensation module 80 (beam shaper), and the beam shaping compensation mode converts the incident laser beam L2 of a circular cross-sectional shape into an elliptical output laser beam L3' for beam shaping purposes ( As shown in FIG. 3, the beam adjustment module 40 may include a device 41 (A u Ε), an attenuator 42 (Attenuator), and at least one of the compensation mechanisms is only for describing the high-speed lightning direction. The energy of the beam L2 formed by the source 30 and the high-speed shift Moving optics; and one of the beam sets 80 is a 5 M396171 formed by the beam expander of Fig. 4, and the beam expander 41 is used to direct the laser beam L2 output from the laser source 3 The attenuator 42 is used to control the energy of the laser beam L2 to the optimum parameter value state preset by the laser processing. = The light reflection steering module 5' shown in Fig. 3 may comprise a first mirror 51 and a second mirror 52 spaced apart from each other. As shown in FIG. 3, the high-speed movable optical module 6 includes a moving base 61 and an upper and lower spacing-reflecting lens and a focusing lens=constitution; wherein the reflecting mirror 62 and the beam reflecting the steering mode : 5 〇 relative setting 'to connect the laser beam L2. As shown in the figure of FIG. 3, the beam shaping compensation module comprises a spacer phase: a secondary dichroic lens 81 and a plano-concave lens 82. The beam: compensation module 80 is constructed according to the embodiment. Fourth, the uranium::the laser beam L2 is penetrated by the right side of the plano-convex lens 81, and the beam length is shortened in the x-axis direction.
Π向束維持一定的準直性，而同樣的X 射光束L3在，ΐί不變’發散角也不變’因此’輸出的雷 射先束L3在γ轴部分的長度將縮短而 = = 圓形的雷射光U，得=成= 圓η ΐμ第3圖中各指引框r内所緣示之 [係表不雷射光束經過各該區段位置 藉由上述結構組成設計，俾可透過該. 組80之設i，以補償因為該可高速 整形補償模 方向高速移動所產生的時間i，而能夠令C'x轴 70之雷射光束能由橢圓形轉為趨近圓形之焦於料件 詳言之，在雷射脈衝時間較短與聚声^狀態者。 況下，因為該可高速移動光學模組6〇係進點較大的情 T X轴方向之往 6 M396171 復高速移 將橢圓形 述光束整 為圓形的 焦後的加 因為鏡片 圖中之指 高速往復 ，而能如 第5圖所 聚焦於料 生時間差 及單元盲 動，其聚焦 轉變為圓形 形補償模組 雷射光束L2 工點也將成 聚焦折射作 引框R2所繪 移動的可移 預期般地將 示，前述由 件70上時， 的關係，以 孔形狀係為 加工點會變為糖圓 ’其作法主要是利 ( Beam Shaper )， 轉變為橢圓形，如 為橢圓形（註：但 用而產生90度角的 示者）；而因為聚 動平台20上，故有 橢圓形轉為趨近圓 圓形轉變為橢圓形 將會因為可移動平 致最終成型於料件 趨近於圓形的精確 形，本創 用在光路 以將原本 此經聚焦 其橢圓形 轉變，此 焦鏡片63 時間差的 形的狀態 之雷射光 台20兩速 70上之雷 狀態（如 作是希望 上加入所 斷面形狀 鏡片63聚 的方向會 請參第3 是掛載在 關係產生 ，此詳如 束L3，其 移動而產 射光束以 L4所指） ，•啻2 f說：的疋’本創作所揭具光束整型補償機制之高 速雷射加工機，特为丨；Μ ^ % - φ ^ σ針對一種光學壓克力（ΡΜΜΑ)板材 料件進饤雷射加工；蓋因圓形止杰丄 ^ ^ ^ ^ ^^ ^ 盍U圓形先束加工於光學壓克力上能 夠擭付較佳光學特性鱼&晳φ μ μ a 、。質要求，而本創作之技術即是能 夠渠敢終成型於料件上之雷鉍 形的精確狀態、。 之雷射先束聚焦加工點達到趨近圓 功效說 本 結構」 設有所 作對照 補償模 形斷面 過此一 速左右 明： 創作所揭 其主要藉 述光束整 【先前技 組能夠將 態樣的輸 調整補償 移動所產 具光束整型補償機制之高速雷射加工機 "亥田射源與光束反射轉向模組之間並組 形f償模組之創新獨特結構設計，使本創 间， 、，°構而&，由於該光束整形 圓形斷面態樣之入射兩 町田射先束轉變為橢圓 出雷射光束，達釗本古& y 逐到先束整形目的，俾可透 作用，以補償因兔± ★从為向速移動光學模組高 生的間差> ^ /Jb -a 7取終聚焦於料件之雷射光 7 束能由；fefe 精 月圓形轉為趨近圓形 嫉力0工盲孔型能，逸而、奎狀4而靶獲付趨近囡形之 機加工精確進達到有效大幅提昇高速雷射加工 確度與品質之實用進步性與較佳產業利用效益。 雖透過：ϊ Ϊ:::示者係藉以具體說明本創作，且文中 之專利範圍行說明’當^能以此限定本新型創作 .. ’ L Μ此項技術領域之人士當可在瞭解本創作 之精神與原則後對其進行變更與修改而達到等效目的，而 此等變更與修改’皆應涵蓋於如戶所述申請專利範圍所界 定之範疇中。 α 8 M396171 【圖式簡單說明】 第1圖：係習知高速雷射加工機之結構示意圖。 第2圖：係習知高速雷射加工機之料件加工形狀會由圓形 態樣延伸變成橢圓形態樣之示意圖。 第3圖：本創作高速雷射加工機之結構示意圖。 第4圖：本創作之光束整形補償模組結構實施例圖（並說 明該光束整形補償模組能夠將雷射光束由圓形轉 變為橢圓形之狀態變化）。 •第5圖：本創作成型於料件之盲孔可由橢圓形轉為圓形之 ,. 狀態示意圖。 說明 【主要元件符號 習知部份： 0 1 2 3 4 7 雷射源 光束擴大器 衰減器 第一反射鏡 第二反射鏡 第三反射鏡 _聚焦鏡 料件 1 9 A 1 9 B L 1 ' 精密移動平台 圓形盲孔 橢圓形盲孔 雷射光束 本創作部份： A 2 0 高速雷射加工機 可移動平台 9 M396171The Π beam maintains a certain degree of collimation, while the same X-ray beam L3 is in, ΐί unchanged 'the divergence angle is also constant' so the length of the output laser beam L3 in the γ-axis portion will be shortened and == circle Shaped laser light U, ==================================================================================================== The set 80 of i is used to compensate for the time i generated by the high-speed movement of the high-speed shaping compensation mode, and the laser beam of the C'x axis 70 can be turned from an ellipse to a circular one. In detail, the material is shorter in the time of the laser pulse and the state of the sound is ^. In this case, because the high-speed moving optical module 6 is a large point of the TX axis direction to the 6 M396171 complex high-speed shifting the elliptical beam into a circular focus after the addition of the lens in the lens High-speed reciprocating, and can focus on the time difference of the material and the blind motion of the unit as shown in Fig. 5. The focus is converted into a circular compensation module. The laser beam L2 will also be moved to the focus and refraction as the movement of the frame R2. It is expected that the relationship between the above-mentioned members 70 and the shape of the hole will be changed to a sugar circle, which is mainly a beam shaper, which is converted into an ellipse, such as an ellipse. : but it is used to produce a 90 degree angle); and because of the convergence of the platform 20, the elliptical shape turns into a round shape and becomes an ellipse because the movable flat is finally formed in the material. In the precise shape of the circle, the present invention is used in the optical path to transform the elliptical shape which is originally focused, and the state of the focal plane of the focal lens 63 is in a state of time difference. Adding a cross-sectional shape lens The direction of 63 poly will be listed in the third is mounted in the relationship, this details as bundle L3, its movement and the beam of light produced by L4), • 啻 2 f said: 疋 'The creation of the beam High-speed laser processing machine with type compensation mechanism, especially for 丨; Μ ^ % - φ ^ σ for laser processing of an optical acrylic (ΡΜΜΑ) plate material; cover due to circular stop 丄 ^ ^ ^ ^ ^^ ^ 盍U round toe processing on optical acryl can afford better optical properties of fish & φ μ μ a . Quality requirements, and the technology of this creation is the precise state of the Thunder shape that can be formed on the material. The laser beam is first focused on the processing point to reach the round effect. This structure is equipped with a comparison of the compensation model section to the speed of the first speed: the creation of the main deduction of the light beam [the previous group can be The innovative and unique structural design of the high-speed laser processing machine and the beam-reflex steering module between the high-speed laser processing machine and the beam-reflecting steering module , , , ° ° &, due to the beam shaping circular cross-section of the incident two Machida shot first beam into elliptical out of the laser beam, up to the ancient & y to the first beam shaping purposes, Permeation to compensate for the rabbit ± ★ from the high-speed difference between the moving optical module for the speed of movement> ^ / Jb - a 7 to focus on the laser light of the material 7 beam can be; fefe fine moon round to Approaching the circular force 0 0 worker blind hole type energy, Yi, 奎状4 and the target is paid close to the shape of the machine to achieve accurate and effective to greatly improve the high-speed laser processing accuracy and quality of practical progress and better Industrial utilization benefits. Although through: ϊ Ϊ::: The show is used to specify the creation, and the scope of the patent in the text explains 'When ^ can limit this new creation.. 'L Μ People in this technical field can understand this The spirit and principles of creation shall be changed and modified to achieve an equivalent purpose, and such changes and modifications shall be included in the scope defined by the patent application scope as described in the household. α 8 M396171 [Simple description of the diagram] Fig. 1 is a schematic diagram of the structure of a conventional high-speed laser processing machine. Figure 2: Schematic diagram of the shape of the material processing of the high-speed laser processing machine from the circular shape to the elliptical shape. Figure 3: Schematic diagram of the structure of the high-speed laser processing machine. Fig. 4 is a view showing the structure of the beam shaping compensation module of the present invention (and indicating that the beam shaping compensation module can change the state of the laser beam from a circular shape to an elliptical shape). • Figure 5: The blind hole formed by the creation of the material can be turned from an ellipse to a circular shape. Description [Main component symbol known part: 0 1 2 3 4 7 Laser source beam amplifier attenuator First mirror Second mirror Third mirror _ Focusing mirror material 1 9 A 1 9 BL 1 'Precision Mobile platform circular blind hole elliptical blind hole laser beam Part of the creation: A 2 0 high speed laser processing machine movable platform 9 M396171
雷射源 3 0 光束調整模組 4 0 光束擴大器 4 1 衰減器 4 2 光束反射轉向模組. 5 0 第一反射鏡 5 1 第二反射鏡 5 2 可高速移動光學模組 6 0 移動座 6 1 反射鏡片 6 2 聚焦鏡片 6 3 料件 7 0 光束整形補償模組 8 0 平凸透鏡 8 1 平凹透鏡 8 2 雷射光束 L 2、L 10Laser source 3 0 Beam adjustment module 4 0 Beam expander 4 1 Attenuator 4 2 Beam reflection steering module. 5 0 First mirror 5 1 Second mirror 5 2 High-speed moving optical module 6 0 Moving seat 6 1 Reflective lens 6 2 Focusing lens 6 3 Material 7 0 Beam shaping compensation module 80 0 Plano-convex lens 8 1 Plano-concave lens 8 2 Laser beam L 2, L 10