M381793 五、新型說明： 【新型所屬之技術領域】 [0001] 本創作係有關於一種光學元件之壓合加熱機構，其 下壓板具有控溫功能，當上壓板與下壓板壓合時，可以 將包含有晶圓之覆層式光學元件，一次性地完成壓合、 加熱及冷卻之作業程序，避免該複層式光學元件在加工 移動的過程中產生位移，藉以有效提升成品良率。 【先前技術】M381793 V. New description: [New technical field] [0001] This author is about a pressing and heating mechanism for an optical component. The lower pressing plate has a temperature control function. When the upper pressing plate and the lower pressing plate are pressed together, The coated optical component including the wafer completes the pressing, heating and cooling operation procedures at one time, thereby avoiding displacement of the multi-layer optical component during the process of moving, thereby effectively improving the yield of the finished product. [Prior Art]
[0002] 目前一般所常見之光學元件，例如電荷耦合元件〔 CCD，Charge-coupled Device〕、互補金氧化半導體 〔Colplementary Metal-Oxide Semiconductor ； CMOS〕、反射式液晶〔Liquid Crystal On Silicon ，LCOS〕及數位光源處理技術〔Digital Light Processing ， 簡稱DLP〕 等 ，其主要構造係在於晶圓 上依次 參差排列疊合有若干之玻璃層及膠膜層，於疊合後則必 需經由壓合、加熱及冷卻等作業程序，當其壓合完成後 ，則可再予以切割而形成一光學元件。上述之壓合、加 熱及冷卻通常在不同的工作站進行，因此在壓合、加熱 及冷卻之移動過程中，容易造成疊合後之玻璃層及膠膜 層產生位移，而形成不良品；且異地加工的結果，亦使 得加工時間相對增加。 因此有如中華民國95年5月1日所公告之新型第 M290307號「晶片壓合座及其應用裝置」專利案，其主要 係設有一壓合頭；一晶片壓合座，位於該壓合頭之下方 ，其中該晶片壓合座具有一陶瓷層，其中該陶瓷層係用 表單編號A0101 第3頁/共19頁 M381793 以承載一晶片，其中該陶瓷層係由80重量百分率（wt%)以 上之一氮化鋁燒結體所構成；以及一捲帶載具，位於該 晶片上方，用來固持至少一内引線，當該壓合頭與該陶 瓷層相互壓合時，能將該些内引線壓合於該晶片之上； 惟該等構造，仍然存在有容易位移、加熱及冷卻效率不 佳等問題，所以在使用上仍然不盡理想。 【新型内容】 [0003] 爰此，有鑑於目前光學元件之壓合裝置具有上述種 種的缺點，故本創作係在提供一種光學元件之壓合加熱 機構，其包括有一機台，其係設有一定位座，該定位座 設置有一滑軌，又該定位座之底部係固定有導桿及一伺 服馬達，該伺服馬達係透過一連轴器而連接有一螺桿； 一昇降單元，其係螺設於該螺桿上，又該昇降單元上設 置有滑桿，該滑桿係貫穿該定位座，又該等滑桿一端係 固定有一上壓板；一滑動單元，其係滑設於該機台之滑 軌上，該滑動單元上係設有一下壓板；一第一加熱單元 ，其係電性連接有第一加熱管，該第一加熱管係設入於 該滑動單元之下壓板内，又該第一加熱單元係電性連接 有一第一控制元件，該第一控制元件則電性連接有一第 一感溫元件，該第一感溫元件則設入於該下壓板内；一 第一冷卻單元，係與該第一加熱單元之第一控制元件電 性連接，該第一冷卻單元係連通設有第一冷卻管，該第 一冷卻管係貫穿設於該下壓板内，該第一冷卻管内則流 通有冷卻劑，另該第一冷卻管之一端係連接有一第一出 口端；一荷重元測壓單元，至少設有一組以上，並結合 表單編號A0101 第4頁/共19頁 M381793 於該昇降單元與該滑桿之間相接處。 上述〆降單元係有一螺接部，該螺接部則螺設於該 螺桿上。 上述冷卻管係與該加熱管等距參差排列於該下壓板 内。 上述冷卻劑係為水或油。[0002] Optical elements commonly used at present, such as a charge coupled device (CCD), a complementary gold-oxide semiconductor (CMOS), a reflective liquid crystal (LCOS), and a liquid crystal (Liquid Crystal On Silicon, LCOS) Digital Light Processing (DLP), etc., whose main structure is that the glass layer and the film layer are laminated on the wafer in sequence, and after lamination, it must be pressed, heated and cooled. After the pressing process is completed, it can be further cut to form an optical component. The above-mentioned pressing, heating and cooling are usually carried out at different workstations, so that during the moving process of pressing, heating and cooling, it is easy to cause displacement of the laminated glass layer and the film layer, thereby forming a defective product; The result of the processing also increases the processing time. Therefore, there is a new patent No. M290307 "wafer press seat and its application device" announced by the Republic of China on May 1, 1995, which mainly has a press-fit head; a wafer press seat is located at the press head. Below, wherein the wafer press seat has a ceramic layer, wherein the ceramic layer is provided with a wafer by using Form No. A0101, page 3 / 19 pages, M381793, wherein the ceramic layer is 80 weight percent (wt%) or more One of the aluminum nitride sintered bodies; and a tape carrier located above the wafer for holding at least one inner lead, and the inner lead can be pressed when the press head and the ceramic layer are pressed against each other Pressed on the wafer; however, these structures still have problems such as easy displacement, poor heating and cooling efficiency, etc., so they are still not ideal in use. [New content] [0003] In view of the above-mentioned various disadvantages of the optical component pressing device, the present invention provides a pressing and heating mechanism for an optical component, which includes a machine, which is provided with a a positioning seat, the positioning seat is provided with a sliding rail, and a bottom of the positioning seat is fixed with a guiding rod and a servo motor, the servo motor is connected to a screw through a coupling; a lifting unit is screwed on the On the screw, the lifting unit is provided with a sliding bar, the sliding bar is inserted through the positioning seat, and one end of the sliding bar is fixed with an upper pressing plate; a sliding unit is slidably disposed on the sliding rail of the machine. The sliding unit is provided with a lower pressing plate; a first heating unit electrically connected to the first heating tube, the first heating tube is disposed in the pressing plate below the sliding unit, and the first heating The unit is electrically connected to a first control element, the first control element is electrically connected to a first temperature sensing element, and the first temperature sensing element is disposed in the lower pressure plate; a first cooling unit is coupled to The The first control unit is electrically connected to the first cooling unit, and the first cooling unit is connected to the first cooling tube. The first cooling tube is disposed in the lower pressing plate, and the coolant is circulated in the first cooling tube. And one of the first cooling tubes is connected to a first outlet end; a load cell pressure measuring unit is provided with at least one set, and is combined with the form number A0101, page 4/19 pages, M381793, in the lifting unit and the sliding unit The junction between the rods. The dip unit has a screwing portion, and the screwing portion is screwed on the screw. The cooling pipe is arranged equidistant from the heating pipe in the lower platen. The above coolant is water or oil.
上述光合元件之壓合加熱機構進一步設置有一第二 加熱單元及一第二冷卻單元，其中該第二加熱單元，其 係電性連接有第二加熱管，該第二加熱管係設入於該下 壓板内，又該第二加熱單元係電性連接有一第二控制元 件，該第二控制元件則電性連接有一第二感溫元件，該 第二感溫元件則設入於該下壓板内，又該第二冷卻單元 係與該第二加熱單元之第二控制元件電性連接，該第二 冷卻單元係連通設有第二冷卻管，該第二冷卻管係貫穿 設於該下壓板内，該第二冷卻管内則流通有冷卻劑，另 該第二冷卻管之一端係連接有一第二出口端。The pressing and heating mechanism of the photosynthetic element is further provided with a second heating unit and a second cooling unit, wherein the second heating unit is electrically connected to the second heating tube, and the second heating tube is disposed in the In the lower pressing plate, the second heating unit is electrically connected to a second control component, the second control component is electrically connected to a second temperature sensing component, and the second temperature sensing component is disposed in the lower pressure plate. And the second cooling unit is electrically connected to the second control unit of the second heating unit, the second cooling unit is connected to the second cooling tube, and the second cooling tube is disposed in the lower pressing plate. A coolant is circulated in the second cooling pipe, and a second outlet end is connected to one end of the second cooling pipe.
本創作具有下列之優點： 1. 本創作係集合壓合、加熱及冷卻之作業程序一次 完成，藉以避免複層式光學元件在加工過程中之位移， 進而提高光學元件之加工良率。 2. 本創作利用第一加熱管、第二加熱管及第一冷卻 管、第二冷卻管分別埋設於下壓板及上壓板内，並利用 第一感溫元件及第二感溫元件監控下壓板及上壓板之工 作溫度，可以對複層式光學元件提供最適合之加工溫度 3.本創作之下壓板利用滑軌進行水平移位，該下壓 表單编號A0101 第5頁/共19頁 M381793 板於加壓说係位於加壓區之外，在該位置時，操作人員 容易檢查複層式光學元件之對位準確度，以執行必要之 修正。 4·本創作於第一冷卻管及第二冷卻管内流通有冷卻 劑，其以水冷或油冷方式進行散熱冷卻，適合冰點以下 之冷卻需求。 5.本創作適用於電荷耦合元件〔CCj)，Charge_ coupled Device〕' 互補金氧化半導體[(：〇11)16_ roentary Metal-Oxide Semiconductor; CMOS〕、反 射式液晶〔Liquid Crystal On Si 1 i con，LCOS〕及 數位光源處理技術〔Digital Light Processing，簡 稱DLP〕或其他複層式光學元件之加工。 【實施方式】 [0004] 首先，請參閱第一圖及第二圖所示，本創作係包括 有機台（1)、昇降單元（2)、滑動單元（3)、第一加熱單 元（4)、第一冷卻單元（5)及荷重元測壓單元（6)，其中 機台（1) ’其係設有一定位座（11)，該定位座（11) 上橫向設置有一滑軌（12)，又該定位座（11)之底部係固 定有四支導桿（13)，該等導桿（13)之末端處係共同固定 有一伺骒馬達（14)，該伺服馬達（14)係透過一連軸器 (15)而連接傳動有一螺桿（16)。 昇降單元（2)，其係有一螺接部（21)，該螺接部 (21)係螺設於該螺桿（16)上，又該昇降單元（2)上係供 機台（1)之四支導桿（13)貫穿，而使該昇降單元（2)因螺 第6頁/共19頁 表單编號A0101 M381793 接部（21)與螺桿（16)相對轉動，而可於該等導桿⑴）上 作昇降移動，又該昇降單元（2)上設置有四支滑桿（22)， 該等滑桿（22)係貫穿該定位座⑴），又該等滑桿（22)之 頂端則共同固定有一上壓板（23)。 滑動單元（3) ’其储設於該機台⑴之滑執（12)上 ，該滑動單元（3)上係設有一下壓板（31)。 第-加熱單元（4)，其簡單配置如第三圖及第四圖所 示，該第一加熱單元（4)係電性連接有若干之第一加熱管 (41)，該等第一加熱管（41)係埋設於該滑動單元（3)之 下壓板（31)内，又該第一加熱單元（4)係電性連接有一第 一控制το件（42)，該第一控制元件（42)係電性連接有一 第一感溫元件（43)，該第一感溫元件（43)係同樣埋入於 該滑動單元（3)之下壓板（31)内，並與該等第一加熱管 (41)相接觸。 第一冷卻單元（5)，其簡單配置如第三圖及第四圖所 示，該第一冷卻單元（5)係連通設有若干之第一冷卻管 (51)，該等第一冷卻管（51)係貫穿設於該滑動單元 之下壓板（31)内，並與該等第一加熱管（41)等距參差排 列，又該等第一冷卻管（51) 一端共同連接至該第一冷卻 單元（5)，該第一冷卻單元（5)則與該第一加熱單元（4) 之第一控制元件（42)電性連接，並受其控制而開啟或關 閉輸入冷卻劑〔圖中未示〕，該冷卻劑係可為水或油， 另該等第一冷卻管（51)之另一端則共同匯集至一第一出 口端（52)。 荷重元測壓單元（6 )’其係至少設有一組以上，並結 合於該昇降單元（2)與該等滑桿（22)之間相接處。 表單編號A0101 第7頁/共19頁 M381793 使用％，如第二圖所示，係將一待壓合之複層式光 學元件（A)置放於該滑動單元（3)之下壓板（31)上，當開 始啟動後，則該滑動單元（3)於滑軌（12)上向定位座 (11)之昇降單元（2)位置處滑動，當到達上壓板（23)之 正下方位置後即停止滑動〔如第五圖所示〕，此時伺服 馬達（14)開始啟動，則可透過連軸器（15)而使螺桿（16) 轉動，而昇降單元（2)因螺接部（21)與螺桿（16)相對轉 動，則會開始向下降，此時昇降單元（2)係會經由該等滑 桿（22)而同步帶動上壓板（23)向下移動，直到上壓板 (23)及下壓板（31)互相夾合施壓，而對於複層式光學元 件（A)進行壓合，並可利用該荷重元測壓單元（6)控制及 測量上壓板（23)向下之壓力值，然後同時啟動第一加熱 單兀（4)〔如第三圖及第四圖所示〕，使該等第一加熱管 (41)開始加熱，透過下壓板（31)而對於複層式光學元件 (A)進行加熱，如果第一感溫元件（43)偵測到其溫度高於 .預設值時，則會經由該第一控制元件（42)控制第一加熱 單兀（4)斷電停止加熱，以保持工作溫度於設定值之範圍 内。執行冷卻時，則啟動第一冷卻單元（5),以控制其對 於第一冷卻管（51 )開始輸入冷卻劑，利用該冷卻劑與下 壓板（31)產生熱交換，以降低該下壓板之溫度，而 熱交換過後之冷卻劑則會經由該等第一冷卻管（51)之另 端共同匯集至第一出口端（52)排出〇如此，則可同時 達到複層式光學元件（A)之壓合、加熱及冷卻之作業程序 ，藉以避免複層式光學元件（A)在移動的過程中產生位移 ，從而提昇其良率。 本創作另一實施例，如第七圖所示，其進一步於該 表單編號A0101 第8頁/共19頁 上壓板⑵）㈣設置有—第二加熱單元⑺及第二冷卻單 元（8)，其中該第二加熱單元（7)係電性連接有若干之第 二加熱管（71) ’該等第二加熱管（71)係埋設於該上壓板 (23)内，又該第二加熱單元（7)係電性連接有—第二控制 元件（72)，該第二控制元件（72)係電性連接有一第二感 溫元件（73)，該第二感溫元件（73)係同樣埋入於該上壓 板（23)内，並與該等第二加熱管（71)相接觸，另該第二 冷卻單元（8)係連通設有若干之第二冷卻管（81)，該等第 二冷卻管（81)係貫穿設於該上壓板（23)内，並與該等第 二加熱管（71)等距參差排列，又該等第二冷卻管（8丨）一 知共同連接至該第一冷卻單元（8)，該第二冷卻單元（8) 則與該第二加熱單元（7)之第二控制元件（72)電性連接， 並受其控制而開啟或關閉輸入冷卻劑〔圖中未示〕，該 冷卻劑係可為水或油，另該等第二冷卻管（8丨）之另一端 則共同匯集至一第二出口端（82)，藉以增強其加熱及冷 卻之效果。 惟，以上所述僅為本創作其中之一最佳實施例，當 不能以此限定本創作之申請專利保護範圍，舉凡依本創 作之申請專利範圍及說明書内容所作之簡單的等效變化 與替換，皆應仍屬於本創作申請專利範圍所涵蓋保護之 範圍内。 【圖式簡單說明】 第一圖係為本創作之立體外觀示意圖。 第二圖係為本創作之組合剖視圖。 第三圖係為本創作下壓板構造之示意圖。 表單編號A0101 第9頁/共19頁 M381793 第四圖係為本創作第一加熱單元及第一冷卻單元之 簡單配置示意圖。 第五圖係為本創作滑動單元滑動至上壓板正下方處 之示意圖。 第✓、圖係為本創作上壓板下降至下屋板而壓合複層 式光學元件之示意圖。 第七圖係為本創作另一實施例於上壓板内設置有第 一加熱單元及第二冷卻單元之簡單配置示意圖。 【主要元件符號說明】 定位座 導桿 連軸器 昇降單元 滑桿 滑動單元 第一加熱單元 第一控制元件 第一冷卻單元 第一出口端 第二加熱營 第二感溫元件 第二冷卻營 [_] ( 1 ) 機台 （1工） (12)滑軌 （13) (14) 伺服馬達 （15) (16)螺桿 （2) (21) 螺接部 （22) (23) 上壓板 （3) (31) 下壓板 （4) (41) 第一加熱管 （42) (43) 第一感溫元件 （5) (51) 第一冷卻管 （52) (6) 荷重元測壓單元 (7 ) 第二加熱單元 （71) (72) 第二控制元件 （73) (8 ) 第二冷卻單元 （81) (82) 第二出口端 (A ) 複層式光學元件. 表單編號A0101 第10頁/共19頁This creation has the following advantages: 1. The creation process of the assembly, heating and cooling is completed in one operation, in order to avoid the displacement of the multi-layer optical component during the processing, thereby improving the processing yield of the optical component. 2. The first heating tube, the second heating tube, the first cooling tube and the second cooling tube are respectively embedded in the lower pressing plate and the upper pressing plate, and the lower pressing plate is monitored by the first temperature sensing element and the second temperature sensing element. And the working temperature of the upper platen can provide the most suitable processing temperature for the multi-layer optical component. 3. The platen is horizontally displaced by the slide rail under the original creation. The pressure-pressing form number A0101 Page 5 of 19 M381793 The plate is said to be outside the pressurized zone where it is easy for the operator to check the alignment accuracy of the multi-layer optical component to perform the necessary corrections. 4. The coolant flows through the first cooling pipe and the second cooling pipe, and is cooled by water cooling or oil cooling, and is suitable for cooling requirements below freezing point. 5. This creation applies to charge coupled devices (CCj), Charge_coupled devices] 'Complementary gold oxide semiconductors [(: 〇 11) 16_ roentary Metal-Oxide Semiconductor; CMOS], reflective liquid crystal [Liquid Crystal On Si 1 i con, LCOS] and digital light processing (DLP) or other multi-layer optical components. [Embodiment] [0004] First, referring to the first figure and the second figure, the creation system includes an organic table (1), a lifting unit (2), a sliding unit (3), and a first heating unit (4). a first cooling unit (5) and a load cell measuring unit (6), wherein the machine (1) is provided with a positioning seat (11), and a sliding rail (12) is disposed laterally on the positioning seat (11) Further, at the bottom of the positioning seat (11), four guiding rods (13) are fixed, and a servo motor (14) is fixedly fixed at the end of the guiding rods (13), and the servo motor (14) is transmitted through A coupling (15) is connected to the drive with a screw (16). The lifting unit (2) is provided with a screwing portion (21), the screwing portion (21) is screwed on the screw (16), and the lifting unit (2) is provided for the machine table (1) The four guide rods (13) are penetrated, so that the lifting unit (2) can be rotated relative to the screw (16) due to the screwing of the sixth page/the 19th page form number A0101 M381793. The rod (1)) is moved up and down, and the lifting unit (2) is provided with four sliding rods (22), the sliding rods (22) running through the positioning seat (1)), and the sliding rods (22) The top end is fixed with an upper pressure plate (23). The sliding unit (3)' is stored on the sliding table (12) of the machine table (1), and the sliding unit (3) is provided with a lower pressing plate (31). The first heating unit (4) is electrically connected to a plurality of first heating tubes (41), and the first heating unit (4) is as shown in the third and fourth figures. The tube (41) is embedded in the pressing plate (31) under the sliding unit (3), and the first heating unit (4) is electrically connected to a first control unit (42), the first control element ( 42) electrically connected to a first temperature sensing element (43), the first temperature sensing element (43) is also embedded in the pressing plate (31) under the sliding unit (3), and the first The heating tubes (41) are in contact. a first cooling unit (5) having a simple configuration, as shown in the third and fourth figures, the first cooling unit (5) is connected to a plurality of first cooling tubes (51), the first cooling tubes (51) is disposed through the lower platen (31) of the sliding unit, and is equidistantly arranged from the first heating tubes (41), and one end of the first cooling tubes (51) is connected to the first a cooling unit (5), the first cooling unit (5) is electrically connected to the first control element (42) of the first heating unit (4), and is controlled to open or close the input coolant. The coolant may be water or oil, and the other ends of the first cooling tubes (51) are collectively collected to a first outlet end (52). The load cell measuring unit (6)' is provided with at least one set and is joined to the junction between the lifting unit (2) and the sliding bars (22). Form No. A0101 Page 7 of 19 M381793 Use %, as shown in the second figure, to place a multi-layer optical element (A) to be pressed under the sliding unit (3) (31) When the start of the start, the sliding unit (3) slides on the slide rail (12) to the position of the lifting unit (2) of the positioning seat (11), and when it reaches the position directly below the upper pressing plate (23) That is, the sliding is stopped (as shown in the fifth figure). At this time, when the servo motor (14) starts to be activated, the screw (16) can be rotated through the coupling (15), and the lifting unit (2) is screwed ( 21) Relative to the rotation of the screw (16), the downward movement will begin. At this time, the lifting unit (2) will synchronously drive the upper pressing plate (23) downward through the sliding rods (22) until the upper pressing plate (23). And the lower pressing plate (31) is pressed against each other, and the laminated optical element (A) is pressed, and the load cell (6) can be used to control and measure the upper platen (23) downward. The pressure value is then simultaneously activated by the first heating unit (4) (as shown in the third and fourth figures) to start heating the first heating tubes (41). The multi-layer optical element (A) is heated by passing the lower platen (31), and if the first temperature sensing element (43) detects that its temperature is higher than a preset value, it passes through the first control element ( 42) Control the first heating unit (4) to stop power and stop heating to keep the operating temperature within the set value. When cooling is performed, the first cooling unit (5) is activated to control the start of input of the coolant to the first cooling pipe (51), and the coolant is used to generate heat exchange with the lower platen (31) to lower the lower platen. The temperature, and the heat exchanged coolant is collected and discharged to the first outlet end (52) through the other ends of the first cooling tubes (51). Thus, the multi-layer optical element (A) can be simultaneously achieved. The operation of pressing, heating and cooling to avoid the displacement of the multi-layer optical element (A) during the movement, thereby increasing its yield. Another embodiment of the present invention, as shown in the seventh figure, is further provided with a second heating unit (7) and a second cooling unit (8) on the form number A0101 on page 8/19 on the platen (2). The second heating unit (7) is electrically connected to a plurality of second heating tubes (71). The second heating tubes (71) are embedded in the upper pressing plate (23), and the second heating unit is further (7) electrically connected to a second control element (72), the second control element (72) is electrically connected to a second temperature sensing element (73), and the second temperature sensing element (73) is the same Buried in the upper pressing plate (23) and in contact with the second heating tubes (71), and the second cooling unit (8) is connected to be provided with a plurality of second cooling tubes (81), The second cooling pipe (81) is disposed in the upper pressing plate (23), and is equidistantly arranged with the second heating pipes (71), and the second cooling pipes (8丨) are jointly connected. To the first cooling unit (8), the second cooling unit (8) is electrically connected to and controlled by the second control element (72) of the second heating unit (7) And turning on or off the input coolant (not shown), the coolant may be water or oil, and the other ends of the second cooling tubes (8丨) are collectively collected to a second outlet end (82) In order to enhance the effect of heating and cooling. However, the above is only one of the best examples of this creation. When it is not possible to limit the scope of the patent protection of this creation, the simple equivalent change and replacement according to the scope of the patent application and the content of the manual. , shall remain within the scope of protection covered by the scope of this patent application. [Simple description of the diagram] The first diagram is a schematic diagram of the three-dimensional appearance of the creation. The second figure is a sectional view of the combination of the creation. The third figure is a schematic diagram of the construction of the lower press plate. Form No. A0101 Page 9 of 19 M381793 The fourth picture is a simple configuration diagram of the first heating unit and the first cooling unit. The fifth figure is a schematic view of the creation of the sliding unit sliding directly below the upper platen. The figure ✓ is a schematic view of the laminated optical element in which the upper platen is lowered to the lower roof plate. The seventh figure is a schematic diagram of a simple configuration in which the first heating unit and the second cooling unit are disposed in the upper platen according to another embodiment of the present invention. [Main component symbol description] Positioning seat guide shaft coupling lifting unit slider sliding unit first heating unit first control element first cooling unit first outlet end second heating camp second temperature sensing element second cooling camp [_ ] ( 1 ) Machine (1 work) (12) Slide rail (13) (14) Servo motor (15) (16) Screw (2) (21) Screw (22) (23) Upper plate (3) (31) Lower platen (4) (41) First heating pipe (42) (43) First temperature sensing element (5) (51) First cooling pipe (52) (6) Load cell pressure measuring unit (7) Second heating unit (71) (72) second control element (73) (8) second cooling unit (81) (82) second outlet end (A) multi-layer optical element. Form No. A0101 Page 10 / Total 19 pages