TWM380334U - A constant vertical deflection feedback control system device for a contact mode microcantilever sensor - Google Patents

Abstract

A constant vertical deflection feedback control system device for a contact mode microcantilever sensor comprises a microcantilever, a microcantilever frame, a spring clip, a laser diode driver, a laser diode, a first reflection mirror, a second reflection mirror, a vertical amplitude deflection detector, a central computer processor, a signal subtraction operator, a differentiator, a fuzzification unit, a inference engine unit, a fuzzy inference rules base, a defuzzification unit, an unknown sample, a sample-positioning unit, and a vertical piezoceramic actuator. The main principle of this invention is to utilize fuzzy control theory to automatically schedule the controller output efforts of the constant vertical deflection feedback control system device to dynamically maintain a constant contact interaction force between the microcantilever and the unknown sample. This invention enhances the scanning speed and accuracy while performing sample-scanning using the aforementioned microcantilever sensor. Besides, the inconvenience in traditional constant vertical deflection feedback control system is improved by exploiting the proposed feedback control mechanism.

Description

M380334 V. New description: [New technology field] This new technology belongs to a kind of precision surface topography detecting device with micro cantilever beam as measuring sensor. It is widely used in micro-nano level three. Dimensional measurement and detection instruments, such as scanning probe microscope, atomic force microscope, scanning capacitance microscope, scanning resistance microscope, precision temperature measurement system, and precision humidity measurement system. [Prior Art] A prior art patent, such as the Republic of China Patent No. 095130735, proposes a novel cantilever beam measurement method. However, this patent application does not disclose how to adjust the relationship between the microcantilever beam and the sample. Secondly, as for the Republic of China Patent No. 1293682, a control device for sensing sensitivity of a general-purpose resonant microcantilever is disclosed. The working principle of the patent is not the same as that of the present invention, and the present invention is not disclosed. A fixed amplitude fuzzy feedback controller is provided. For example, the patent of the Patent No. 095106230 of the Republic of China proposes a cantilever-type resistance humidity sensing structure and a manufacturing method thereof for sensing the moisture value of the environment. Furthermore, as disclosed in the Patent No. 1,273,221 of the Republic of China, a novel microcantilever sensor is disclosed, which is designed to make the microcantilever beam have a large effective offset by the design of the surface microstructure of the microcantilever beam, thereby improving the better. Microcantilever sensor sensitivity. In addition, the patent of the Republic of China Patent No. 092106406 discloses a method for fabricating a novel cantilever beam type MEMS. In summary, none of the above-mentioned patent applications, which have been approved or disclosed, have disclosed the same apparatus as the vertical offset feedback control system of the contact microcantilever sensor of the present invention. M380334 shift detector (8). 8. The vertical amplitude offset detector (8) shown in FIG. 1 is configured to calculate the longitudinal contact form of the microcantilever (1) by using the vertical amplitude offset of the laser beam reflected by the second mirror (7). The force output 'in other words, the output signal of the vertical amplitude offset detector (8) will be related to the longitudinal contact force of the cantilever beam (1). The larger the output signal of the vertical amplitude offset detector (8) is, the larger the longitudinal contact form of the microcantilever (1) is, and the smaller the output signal of the vertical amplitude offset detector (8) is. The smaller the longitudinal contact form of the cantilever beam (1) is. 9. The central computer processor (9) shown in FIG. 1 is used to determine that the vertical offset feedback control system device of the present invention performs the detection of the sample to be tested (16) with a micro cantilever beam (丨). The vertical offset between the micro cantilever (1) and the sample to be tested (16), and the above-mentioned vertical offset value is converted into a corresponding signal and fed back to the signal subtractor (1〇). 10. The signal subtractor (1〇) shown in FIG. 1 is used to subtract the output signal of the vertical amplitude offset detector (8) from the signal output by the central computer processor (9). The generated signal is the error signal of the vertical offset feedback control system device proposed by the present invention. 11. The differentiator (11) shown in Figure 1 is used to receive the error signal of the vertical offset feedback control system device outputted by the signal subtractor (1〇), and to differentiate the error signal. The signal is called an error differential signal. 12. The blurring device (12) shown in FIG. 1 is used to differentiate the error signal fed by the signal subtractor (1〇) and the error differential signal fed by the differentiator (11) to the fuzzy theory. The function performs the operation of signal blurring to generate the blurred error signal and the error differential signal. 13. The inference engine (13) shown in Figure 1 is used to utilize the error 6 M380334 signal and error differential signal output by the fuzzing device (12), and is combined with the fuzzy rule in the fuzzy inference rule library (14). The output signal of the vertical offset feedback control system device is inferred. 14. The fuzzy inference rule library (14) shown in Figure 1 is used as a fuzzy rule library for inferring the vertical offset feedback control system device output signal. In other words, the above inference engine (13) will rely on the fuzzy inference rule The fuzzy rule built into the library (14) carries out fuzzy inference. 15. The defuzzification device (15) shown in Fig. 1 is used to defuzzify the inference result of the inference engine (13) and to correspond the above inference value to the actual defuzzification device (15) The voltage signal is output, and the voltage signal is fed into the vertical axis piezoelectric ceramic actuator (18). 16. The sample to be tested (16) as shown in Figure 1 is used to represent all samples for surface topography detection with a contact microcantilever sensor. ΠThe sample carrier (17) to be tested as shown in FIG. 1 is used as a platform for carrying the sample (16) to be tested, and when the sample to be tested (16) is continuously tested, the sample to be tested is loaded. The stage (17) will drive the sample to be tested (16) to produce lateral movement. Because of the surface topography of the sample to be tested (16), the longitudinal contact between the micro cantilever beam (1) and the sample to be tested (10) is also Correspondence changes will occur as the surface topography differs, and the round-trip signal of the vertical amplitude offset detector (8) will also be different. As shown in Fig. i, the vertical secret_button (18) is fed with a voltage signal 'passed by the inverse piezoelectric principle of the piezoelectric ceramics' to generate a longitudinal deformation corresponding to the piezoelectric device. This - the vertical miscellaneous side of the ship drives the sample (10) to perform a corresponding longitudinal movement, while maintaining the micro-cantilever beam (1) at a fixed vertical offset. The nominal vertical offset of the above microcantilever (1) represents the rated contact atomic force between the microcantilever (1) and the sample to be tested (10). 7 When the feed control system device uses the microcantilever beam (1) to test the sample to be tested (16), the vertical offset between the microcantilever beam (I) and the sample to be tested (16) is 4 marks. Int, and set the above vertical offset value to 4哗. The im is converted into a corresponding voltage signal and fed into the signal subtractor (丨〇). 2. Referring to the drawing, the microcantilever (2) and the elastic spring (3) are used to fix the microcantilever (1) to the microcantilever (2) by the elastic force of the elastic spring (3). 3. Referring to Figure 1, a laser diode (5) is provided by a laser diode driver (4) to drive the laser diode (5)' to maintain the brightness of the laser diode (5) during the detection process. 4. Referring to the diagram, a laser beam of constant brightness required for the detection of the sample to be tested (16) by the microcantilever (1) is generated by the laser diode (5), and the laser beam is focused and then projected to The first mirror (6), after the laser beam is reflected by the first mirror (6), is projected on the back side of the contact end of the micro cantilever beam (1) and the sample to be tested (16). 5. Referring to Figure 1, the laser beam is reflected back to the second mirror (7) by the back side of the contact end of the micro cantilever beam (1) and the sample to be tested (16), and the laser beam passes through the second mirror ( After reflection, it will be received by the vertical amplitude offset detector (8). 6. Referring to Figure 1, the vertical amplitude offset detector (8) calculates the vertical offset of the laser beam reflected by the second mirror (7). And dynamically convert this vertical offset into a corresponding voltage signal. The output voltage signal of the vertical amplitude offset detector (8) is 々 (〇, this voltage signal will follow the sample to be tested ( 16) The surface topography changes. 7. Refer to Figure 1' to output the vertical amplitude offset detector (8) output signal 4 (7) and the central computer processor (9) output signal 4ei/wint by the signal subtractor (10). The subtraction operation produces an error signal ice. 8. Refer to Figure 1 'The differential signal (11) receives the error signal e(1), M380334 output from the signal subtractor (10), and differentiates the error signal to produce error differentiation. Signal & (7) 9. Referring to Figure 1, the signal subtractor (10) is fed by the fuzzing device (12) The error signal e (〇, at the same time, the error differential signal fed by the differentiator (11) is received (〇, the fuzzy function attribution function is used to blur the above e(i) and cfe(i) signals, The fuzzification error signal and the error differential signal are generated. 10. Referring to Figure 1, the inference engine (13) is combined with the fuzzy rule in the fuzzy inference rule library (14), and the fuzzification device (12) outputs the fuzzification. The error signal and the error differential signal, deducing the output voltage of the defuzzification device (15) required for the vertical offset feedback control system device of the present invention to return the micro cantilever beam (1) to a fixed vertical offset 11. Referring to Figure 1, the de-fuzzification operation of the inference engine (13) is defuzzified by the defuzzification device (15) and the above inference value is mapped to the actual output voltage of the defuzzification device (15). Signal, and then feed this voltage signal into the vertical axis piezoelectric ceramic actuator (18). 12. Referring to Figure 1, the vertical axis piezoelectric ceramic actuator (18) receives the defuzzification device (15) Into the output voltage signal t / (〇, the corresponding vertical vertical shape And synchronously driving the sample carrier (17) and the sample to be tested (16) to move up and down the vertical plane, so that the microcantilever (1) can quickly recover and maintain a vertical offset, thereby maintaining the microcantilever (丨) Contact atomic force fixed between the sample to be tested (16) M380334 [Simple diagram of the diagram] Figure 1. Schematic diagram of the device for the vertical offset feedback control system of the contact micro-cantilever sensor. Main component symbol description] 1: Micro cantilever beam 2: Micro cantilever beam 3: Elastic reed. 4: Laser diode driver. 5: Laser diode. 6: First mirror. 7: Second mirror. 8: Vertical amplitude offset detector. 9: Central computer processor. 10: Signal subtractor. 11: Differentiator. 12: Obfuscation device. 13: Inference engine. 14: Fuzzy inference law library. 15: Defuzzification device. 16: Sample to be tested. 17: Sample carrier to be tested. 18: Vertical axis piezoelectric ceramic actuator.

Claims (1)

M380334 VI. Scope of application: 1.-Contact vertical micro-cantilever beam n vertical offset feedback control (10) device, including: a micro cantilever beam, used as contact micro cantilever sensor for sample to be tested Contact force sensor used for detection; - micro cantilever beam for fixing micro cantilever beam; elastic spring plate for fixing micro cantilever beam to micro cantilever beam; a laser diode driver for The laser diode is driven by a constant current source to maintain a constant brightness of the laser diode during detection; a laser diode for receiving a constant current fed by the laser diode driver The signal produces a constant-luminance laser beam required for the detection of the sample to be tested with the microcantilever; - the first-counter-reaction, the laser beam detected by the laser-detecting diode is reflected to the micro-cantilever beam and is to be Measuring the back side of the contact end of the sample; a second mirror for receiving the laser beam reflected by the back side of the contact end of the micro cantilever beam and the sample to be tested, and feeding the laser beam into the vertical amplitude offset detection a vertical amplitude offset The quantity detector is configured to calculate the longitudinal contact form force of the micro cantilever beam by using the vertical amplitude offset of the laser beam reflected by the second mirror; a signal subtractor, and a vertical amplitude offset measurement The controller and the central computer processor are connected to perform an operation of subtracting the output signal of the vertical amplitude offset detector from the output signal of the central computer processor, and generating an error signal; a differentiator, corresponding to the signal subtractor The connection is used for receiving the error signal output by the signal subtractor, and differentiating the error signal to generate an error differential signal; a blurring device connected to the signal subtractor and the differentiator for receiving the signal subtractor 12 The error signal fed by the M380334 and the error differential signal fed by the differentiator generate a fuzzy error signal and an error differential signal; a deduction engine is connected to the fuzzification device and utilizes the fuzzification fed by the fuzzification device The error signal and the error differential signal are used to infer the device of the vertical offset back control system of the present invention. Arm of the beam return to the desired predetermined vertical offset amount of the output voltage of defuzzification makeup set; - Fuzzy inference rule library, connected with the inference engine, as a fuzzy rule library for inferring the output signal of the vertical offset back to the control system device. - Defuzzification device, connected with the inference engine, the rib will infer the engine Inference results are used to solve the problem of defuzzification' ϋ ϋ 推 上 上 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂· __ (10) sample of surface topography detection; - the sample carrier to be tested is used as a platform for carrying the service; the beam maintains a fixed vertical offset - the vertical axis piezoelectric actuator is used to connect the fuzzing device to the voltage signal of the device, using piezoelectric _ The inverse piezoelectric principle, the longitudinal deformation of the corresponding one, the longitudinal deformation of this kind of slanting step with the squama sample to carry out the longitudinal county of the ship, so that the micro material 13 M380334 [new content] The solution of this creation is - kind of contact The micro-cantilever beam sense vertical offset feedback control system device, the device includes: 1. As shown in Fig. _ of the micro-saki beam (1), the rib is used as a reclining_arm beam device to wait for tears] (10) Contact force sense ^, in the case of (4), the county arm 襟 (1) needs to touch the surface of the sample to be tested (16) with a small amount of force, if the surface morphology of the sample to be tested (10) shows high and low undulations, then the micro cantilever The contact between the beam (1) and the sample to be tested (10) will produce a change in the vertical offset of the correspondence. 2. The microcantilever (2) as shown in Figure 1 is used to secure the microcantilever (1). 3. The elastic reed (3) shown in Figure i uses the elastic force of the elastic crest (3) to fix the micro-cantilever beam (1) to the micro-cantilever (2). 4. As shown in Figure 魏, the Wei diode drive (4), the rib provides the mosquito cake source to drive the laser diode (5), so that the laser diode (5) can remain constant during the detection process. Brightness. 5. The laser diode (5) shown in Figure 1 is for receiving a constant current signal fed by the laser diode driver (4) to generate a sample to be tested with the microcantilever (1) ( 16) A constant-luminance laser beam required for detection, and focusing the above-mentioned laser beam onto the first mirror (6). 6. The first mirror (6) shown in FIG. 1 is for reflecting the laser beam for detection generated by the laser diode to the contact end of the micro cantilever beam (1) and the sample to be tested (16). back. 7. The second mirror (7) shown in FIG. 1 is for receiving a laser beam reflected by the back surface of the contact end of the micro cantilever beam (1) and the sample to be tested (16), and feeding the laser beam Vertical amplitude offset 19. According to the above method, the error signal fed by the signal subtractor (1〇) and the error differential signal fed by the micro-device (11) can be used, and the fuzzy device (12) and the inference engine ( 13), fuzzy inference rule library (14), and defuzzification device (15), infer and calculate the controller output required to restore and maintain the vertical vertical offset of the microcantilever (1), this voltage The output will be fed back into the vertical axis piezoceramic actuator (18). 20. According to the above method, the fuzzy control theory can be used to quickly and automatically calculate the vertical axis piezoelectric ceramic actuator (18) through the instantaneous and continuous detection of the error signal output by the signal subtractor (10). The voltage signal 'so that the microcantilever can dynamically maintain a constant longitudinal offset during the detection' compared to the conventional manual adjustment of the vertical offset feedback control system device PID controller gain In terms of the value, the method proposed in this case is simpler and is a mechanism for adaptively adjusting the gain. 21. As shown in Figure 1, the microcantilever (1), vertical amplitude offset detector (8), signal subtractor (1〇), differentiator (11), and fuzzy device (12) are inferred. The engine (13), the fuzzy inference rule library (14), the defuzzification device (15), the vertical axis piezoelectric ceramic actuator 〇8), the sample preparation table (17) to be tested, and the sample to be tested (16) The present invention proposes a device for a vertical offset feedback control system for a contact microcantilever sensor. [Embodiment] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings: Fig. 1: Referring to Fig. 1, the central computer processor (9) determines the vertical offset of the creation.