M368882 五、新型說明： . 【新型所屬之技術領域】 本創作為—獅震裝置’應祕支撐各織械，尤其是-、 _職料式、料地將顺予以切的氣浮式防餘置。 【先前技術】 - 精密機械平台—般相於機械加卫、量測、檢測等，譬如 • 為半導體晶圓之_與加卫、液晶螢幕之校對與檢測、或是高 精被度的量測平台等’都是藉由一機械平台來提供各種動作的 進行；然而’因為機械平台_定得置放於地面、或是建築物地 面’因此’可能來自人㈣走動、周圍機械操作的運轉、甚至 是車輛行駛、或是賊、地群天候辟，都會造減械平台 的輕微震動，而影響其精密度。 為了克服此問崤，一般都會在機械平台的腳柱底部增加 ^ 雜震裝絲因應，而早_防震裝置聰尼、緩衝塾居多， •其原理主要譬如為橡與緩衝材奸以吸收外界的震 動’防止震動傳遞至機械平台等機器上；但是畢竟阻尼或缓衝 材質僅能將震動予以降低m;肖除所有的震動。 另外亦有以月夕版、點滞性高的流體來加以防震，其原理 兵上述相同’雖可進-錢善防震效果，但是因紐衝原理相 同口此同樣有其瓶;a。甚至也有以機械平衡配合緩衝材質、 流體的設計’但是畢竟機器依舊與地面有所連接，防震的效果 3 M368882 有其一定的限制。 據此，逐漸演變出氣浮式的防震結構，利用高覆空氣將整 個機器抬起，而使其完全脫離地面呈_浮狀態，因此，可完 全與外界隔絕’當然外界之震動就無法傳遞到機器上。然而， ^為機器是完錢浮，如何保持高氣的均勻化，使機器穩 疋平衡而不傾斜，就成了此類防震裝置最大的困難點所在。 【新型内容】 β糊作之目的在於提出—種氣浮式防震裝置，係可均句地 提供氣浮力’使作用的機器能约穩定地達到平衡氣浮狀態，而 達到完全氣浮及避震的效果。 有鑑於此’本創作揭露—種氣浮式防震裝置，係包含有連 接塊、氣洋頂座以及氣浮底座，連接塊設置於氣浮頂座上，而 與氣浮職i平貼於氣浮底座設置，連接塊頂來連接、 支撐機器。料’氣浮頂面上具有複數條環狀分佈之氣浮溝 槽，以及至條難狀的連通槽來連通此些氣浮溝槽；因 此’當研底觸由導氣管而輸人氣體，並進人氣浮溝槽以及 連通槽時’因為同心圓般環狀的分佈，以及使其相互連通的連 通槽之配置’而可提供氣體的流通及全面性的氣浮力平衡作 用’使氣相座連同連接塊、機器―肺起微小間隙。 另-方面’氣浮頂座底面具有突起的定外凸塊配合氣浮 底座之研頂面具有定位槽，而可提供氣浮頂座與氣浮底座的 M368882 定位’配合兩平面之粗糙度的特殊限制’更可使其達到氣密性。 有關本創作之詳細内容及技術，茲就配合圖式說明如下。 【實施方式】 根據本創作所揭露之氣浮式防震裝置，請參閱「第1、2 圖」所示，其為本創作氣浮式防震裝置之立體分解、組合示意 圖。 本創作之氣浮式防震裝置係包含有連接塊1〇、調整塊2〇、 氣浮頂座30、以及氣浮底座4〇。連接塊1〇係用以連接固定待 防震的機器（圖中未示）’其具有複數個内嵌式的螺孔12，可 藉由螺絲由下往上鎖固，使本創作之氣浮防震裝置可以和待避 震機器作很穩固的連接；如圖中所繪示，螺孔12係為6個， 然而，圖中僅為示意，並非限定為6個，而排列同樣也僅為示 意，並非用以限定應用方式。一般來說，機器根據其大小而可 裝設多個氣浮防震裝置於各腳柱上〇 而連接塊10以球窩結構設置於調整塊2〇，換句話說，連 接塊10底部具有窩槽11，而調整塊20頂部具有球體211，球 窩結構為類似萬向接頭的型式，可以使各方向接觸性良好，且 可以有很好的力量支撐點；當機器本身各部位重量不平均且水 平性不好，或是地面水平性不好，都可以使得機器架設時能得 到很好的水平調整及力量支樓點。 調整塊20包含有調整柱21以及底座22，調整柱21包含 有最頂端的球體211以及底部末端的細螺紋213、位於中央的 M368882 調整部212，而底座22則具有對應於細螺紋犯的調整螺孔 221 ;藉由調整柱21之細螺紋213結合於底座^的調整螺孔 切，因此調整柱21可相對於底座22進行相對運動，而改變 兩者的補位置，換句話說’可藉由調整部212 (如圖中麟 示，乃為六邊形或八邊形等類似螺帽形狀，以提供扳㈣施力 調整）的轉動，帶動調整柱21之細螺紋213轉動而進入、退 出底座22的調整螺孔221 ’進而改變調整柱21相對於底座22M368882 V. New description: . [New technical field] This creation is for the lion-shock device, which should support the various weaving machines, especially the -, _ job materials, materials will be cut to the air-floating anti-money Set. [Prior Art] - Precision mechanical platform - general mechanical reinforcement, measurement, inspection, etc., such as for semiconductor wafers and Guardian, LCD screen proofreading and detection, or high precision measurement Platforms, etc. are all provided by a mechanical platform to provide various actions; however, 'because the mechanical platform is set to be placed on the ground or on the floor of the building', it may be from the movement of people (four), the operation of surrounding mechanical operations, Even when the vehicle is driving, or the thief or the group is in the air, it will create a slight vibration of the mechanical platform and affect its precision. In order to overcome this problem, it is generally added to the bottom of the foot column of the mechanical platform. The anti-shock device has a large number of shock absorbers. The early _ anti-shock device has a large number of buffers and buffers. The principle is mainly for the rubber and buffer materials to absorb the outside world. Vibration 'prevents vibration from being transmitted to machines such as mechanical platforms; but after all, damping or cushioning materials can only reduce vibration by m; remove all vibrations. In addition, there are also fluids with high moons and high hysteresis to prevent earthquakes. The principle is the same as above. Although it can be entered into - Qianshan earthquake-proof effect, the same principle has the same bottle because of the same principle; a. There is even a mechanical balance with cushioning material and fluid design'. But after all, the machine is still connected to the ground, and the shockproof effect 3 M368882 has certain limitations. According to this, the air-floating anti-vibration structure is gradually evolved, and the whole machine is lifted by the high-covering air, so that it is completely detached from the ground, so that it can be completely isolated from the outside. Of course, the external vibration cannot be transmitted to the machine. on. However, ^ is the machine is the money floating, how to maintain the homogenization of high gas, so that the machine is stable and balanced without tilting, it becomes the biggest difficulty point of such anti-shock device. [New content] The purpose of β paste is to propose a kind of air-floating anti-shock device, which can provide air-floating force in a uniform manner, so that the working machine can reach the equilibrium air-floating state stably, and achieve complete air-floating and shock-absorbing. Effect. In view of this, the present disclosure discloses a kind of air-floating anti-shock device, which comprises a connecting block, a gas ocean top seat and an air floating base, and the connecting block is arranged on the air floating top seat, and is flushed with the air floating position. The floating base is set to connect the top of the block to connect and support the machine. The material 'air floating top surface has a plurality of annular floating air floating grooves, and a difficult connecting groove to connect the air floating grooves; therefore, when the bottom is touched by the air guiding tube, the gas is input. When entering the floating groove and the communication groove, the 'circular distribution of the concentric circles and the arrangement of the communication grooves that make them communicate with each other' can provide gas circulation and comprehensive air buoyancy balance. Connect the block, the machine - the lungs have a small gap. In another aspect, the bottom surface of the air-floating top has a protruding outer protrusion and the air-floating base has a positioning groove, and the M368882 positioning of the air floating top seat and the air floating base can be provided to match the roughness of the two planes. Special restrictions 'more to make it airtight. The details and techniques of this creation are explained below with reference to the drawings. [Embodiment] According to the "Floating 1 and 2", the air-floating anti-shock device disclosed in this creation is a three-dimensional decomposition and combination diagram of the air-floating anti-vibration device. The air floating type shockproof device of the present invention comprises a connecting block 1〇, an adjusting block 2〇, an air floating top seat 30, and an air floating base 4〇. The connecting block 1 is used for connecting and fixing a machine to be shockproof (not shown). The utility model has a plurality of in-line screw holes 12, which can be locked from bottom to top by screws, so that the air floating and shockproof of the present creation is made. The device can be firmly connected with the machine to be shocked; as shown in the figure, the number of the screw holes 12 is six. However, the figure is only schematic, not limited to six, and the arrangement is also only for the purpose of illustration, not Used to limit the way of application. Generally, the machine can be equipped with a plurality of air floating shock-proof devices on each leg according to its size, and the connecting block 10 is arranged in the ball-and-socket structure on the adjusting block 2〇, in other words, the bottom of the connecting block 10 has a socket. 11. The top of the adjusting block 20 has a spherical body 211. The ball and socket structure is a universal joint type, which can make the contact in all directions good, and can have a good strength support point; when the weight of each part of the machine itself is uneven and horizontal Poor sex, or poor ground level, can make a good level of adjustment and strength of the building when the machine is erected. The adjustment block 20 includes an adjustment post 21 including a topmost ball 211 and a fine thread 213 at the bottom end, a M368882 adjustment portion 212 at the center, and the base 22 has an adjustment corresponding to the fine thread. The screw hole 221 is fixed by the adjusting screw hole 213 of the adjusting column 21, so that the adjusting column 21 can move relative to the base 22, and the complementary position of the two can be changed, in other words, The adjustment portion 212 (shown in the middle of the figure, is a hexagonal shape or an octagonal shape, etc., to provide a rotation of the wrench (four) to adjust the force), and the fine thread 213 of the adjustment column 21 is rotated to enter and exit. The adjusting screw hole 221 ′ of the base 22 further changes the adjusting column 21 relative to the base 22
的高度；藉此，而可使機器達到水平度的要求。 而氣浮頂座30之頂面具有可供調整塊2〇裝設的容 33，因為乃是提供調整塊2〇嵌人固^，因此容設槽％的形狀 係依照調整塊2G之底座之底部形狀而定，如圖中所纷示為圓 形’當然也可以是六邊形或是人邊形、或任何形狀。而氣浮頂 座30之底面31用以平貼置放於氣料座4()之氣浮頂面侧， 因此’為了使其達到足夠的氣密性，氣浮頂座3〇之底面3ι與 氣浮底座40之氣浮頂面401之表面平坦度可限制小於8微米/ 公尺，而可有效增加氣浮頂座30之絲31與氣浮底座4〇之 氣浮頂面401之間的氣密性。 另-方面，為了使氣浮頂座3〇與氣浮底座4〇之間不會產 生滑動，因此’氣浮頂座3G之底面31具有雜凸塊32，而 配合氣浮底座4G之祕 4G1具找_ 44 ;因此定位凸 塊32可以卡合於定位槽44内，達到定位的效果（見第3圖）。 士圖中所繪示，疋位凸塊為具45肖斜面的圓錐形圓盤，其可 M368882 避免於氣相過程，氣浮職3Q會偏靴浮底座⑽的氣浮位 置’而失去氣浮的作用，因此，具有固定及氣浮防滑的作用· 相同的，亦可為任何纽的斜面、以及任何雜。 ’ 而氣浮底座40之氣浮頂面4〇1具有複數條環狀的氣浮溝 槽41，可為各種的幾何形狀之環狀分佈，譬如為圓形環、方 形％：等’較佳者為同—細的湖’圖情示為圓形環之同心 圓刀佈’但並非用以限麵能如此排歹1J ;並且具有至少一條輻 射狀的連賴42，用來將祕溝槽41予喊通。而氣浮底^ 40内部具有導氣管43，且導氣管43藉由進氣歧管431而連接 至氣洋溝槽4卜甚至可連通至中間的定位槽44，並可由所連 接的進氣管70輸入高壓氣體。 因此’常態未使用狀態下，請參閱「第3圖」，因為氣浮 頂座30之底面31 (包含定位凸塊32)與氣浮底座4〇之氣浮 頂面401之表面平坦度的要求，因此使兩者平貼達到一定的氣 畨性。而當欲使用時，請同時參閱「第4、5圖」，藉由進氣管 7〇將局壓氣體引入，而進入導氣管43經過進氣歧管431而進 入環狀排列的氣浮溝槽41、以及中央的定位槽44 ;此時，因 為氣浮溝槽41、定位槽44乃利用連通槽42予以連通，因此， 乳體可以相當快速的充滿於氣浮溝槽41、以及定位槽44内， 而可均勻地提供向上的浮力，而將氣浮頂座3〇連同調整塊 20、連接塊10以及其所連接待防震的機械（圖中未示），予以 抬起一個微小間隙（見第4圖），使其達到完全氣浮及避震的 M368882 效果。此時，因為藉由定位凸塊32以及定位槽44之間的配合， 且此微小間隙不會超過定位凸塊32的高度，因此，可藉由定 位凸塊32之斜面的導引，達到定位、固定及氣浮防滑的作用。 而氣浮溝槽41以及連通槽42可為半圓形的溝槽，使氣體 於其中導引流通；如圖所示，導氣管43之進氣歧管431連接 於氣浮溝槽41 —側、以及定_ 44，但是並賴限定於此方 式，亦可增加數個進氣歧管431，使每一圈氣浮溝槽41具有 多數個進氣歧管43卜譬如於同-直徑的兩侧設置，而可更加 提向其均自度m更可於氣浮频41上增設有多孔 性塾片’可使氣流的出氣均勻性增加，並提昇推起氣浮頂座 30的均勻性，同時亦可減少氣體的流量。 根據摘作職供之氣浮式防震裝置祕溝槽與連 通槽之特殊雜分佈以及輻躲連賴的配置，柯均句地提 供氣浮力，使待防震的機H能賊定地達到平衡氣浮狀態而 達到完全氣浮及避震的效果。 雖然本創作以前述之較佳實施例揭露如上，然其並非用以 限定本創作，任健狀技藝者，在不脫離本_之精神和範 圍内’當可作些許之更動與潤飾，因此本創作之保護範圍當視 後附之申請專利範圍所界定者為準。 【圖式簡單說明】 第1圖為本創作氣浮式防震裝置之立體分解圖； M368882 第2圖為本創作氣浮式防震裝置之組合示意圖； 第3圖為本創作氣浮式防震裝置之剖面示意圖； 第4圖為本創作氣浮式防震裝置之氣浮狀態示意圖；及 第5圖為本創作氣浮式防震裝置之氣浮頂面之示意圖。The height of the machine can be used to achieve the level of the machine. The top surface of the air floating top seat 30 has a capacity 33 for the adjusting block 2〇, because the adjusting block 2 is provided with the embedded solid body, so the shape of the receiving groove is in accordance with the base of the adjusting block 2G. Depending on the shape of the bottom, as shown in the figure, it is a circular shape. Of course, it can also be a hexagon or a human shape, or any shape. The bottom surface 31 of the air floating top seat 30 is placed on the air floating top surface side of the air material seat 4 (), so that in order to achieve sufficient airtightness, the bottom surface of the air floating top seat 3 is 3 The surface flatness of the air floating top surface 401 of the air floating base 40 can be limited to less than 8 micrometers / meter, and can effectively increase the air 31 of the air floating top seat 30 and the air floating top surface 401 of the air floating base 4 The air tightness. On the other hand, in order to prevent the sliding between the air floating top seat 3〇 and the air floating base 4〇, the bottom surface 31 of the air floating top seat 3G has the miscellaneous bumps 32, and the secret 4G1 of the air floating base 4G Looking for _ 44; therefore, the positioning projection 32 can be engaged in the positioning groove 44 to achieve the positioning effect (see Figure 3). As shown in the figure, the clamp is a conical disc with a 45-slope bevel. The M368882 can avoid the gas phase process. The air-floating position 3Q will lose the air float position of the floating base (10) of the boot. The role, therefore, has a fixed and air-floating anti-slip effect. The same, can also be any bevel, and any miscellaneous. The air floating top surface 4〇1 of the air floating base 40 has a plurality of annular air floating grooves 41, which can be distributed in various geometric shapes, such as a circular ring, a square shape, etc. The same as the thin lake's picture shows a circular ring of concentric circular knife cloth 'but not used to limit the surface can be so 歹 1J; and has at least one radial connection 42 for the secret trench 41 shouted. The air floating bottom 40 has an air guiding tube 43 inside, and the air guiding tube 43 is connected to the air ocean groove 4 by the intake manifold 431, and can even be connected to the intermediate positioning groove 44, and can be connected by the connected air inlet tube. 70 input high pressure gas. Therefore, in the normal state, please refer to "Fig. 3" because the surface flatness of the bottom surface 31 of the air floating top 30 (including the positioning projection 32) and the air floating top surface 401 of the air floating base 4 is required. Therefore, the two are flat and reach a certain degree of discouragement. When you want to use it, please refer to "4th and 5th" at the same time, introduce the local pressure gas through the intake pipe 7〇, and enter the air guide pipe 43 through the intake manifold 431 to enter the annular arrangement of the air flotation groove. The groove 41 and the central positioning groove 44; at this time, since the air floating groove 41 and the positioning groove 44 are communicated by the communication groove 42, the milk body can be filled with the air floating groove 41 and the positioning groove relatively quickly. 44, the upward buoyancy can be uniformly provided, and the air floating top seat 3〇 together with the adjusting block 20, the connecting block 10 and the machine to be shockproof (not shown) are raised to lift a small gap ( See Figure 4) to achieve the M368882 effect of full air suspension and suspension. At this time, because of the cooperation between the positioning bump 32 and the positioning groove 44, and the small gap does not exceed the height of the positioning protrusion 32, the positioning can be achieved by guiding the inclined surface of the positioning block 32. , fixed and air floating anti-slip effect. The air floating groove 41 and the communication groove 42 may be semicircular grooves for guiding the gas therein; as shown, the intake manifold 431 of the air pipe 43 is connected to the air floating groove 41. And _ 44, but depending on the manner, a plurality of intake manifolds 431 may be added, so that each of the air floating grooves 41 has a plurality of intake manifolds 43 such as two of the same diameter The side is arranged, and the self-adhesiveness m can be added to the air floating frequency 41 to increase the uniformity of the airflow, and the uniformity of the air-lifting top seat 30 can be improved. It also reduces the flow of gas. According to the special miscellaneous distribution of the groove and the connecting groove of the air-floating anti-shock device and the configuration of the escaping, the Ke Fu sentence provides the air buoyancy force, so that the machine to be shock-proof can reach the balance gas. The floating state achieves the effect of complete air floatation and suspension. Although the present invention has been disclosed in the foregoing preferred embodiments, it is not intended to limit the present invention, and the skilled artisan can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of protection of the creation shall be subject to the definition of the scope of the patent application attached. [Simple description of the diagram] The first picture is an exploded view of the air-floating anti-shock device of the creation; M368882 Figure 2 is a schematic diagram of the combination of the air-floating anti-vibration device; Schematic diagram of the section; Figure 4 is a schematic diagram of the air-floating state of the air-floating anti-vibration device; and Figure 5 is a schematic view of the air-floating top surface of the air-floating anti-vibration device.
【主要元件符號說明】 10 連接塊 11 窩槽 12 螺孔 20 調整塊 21 調整柱 211 球體 212 調整部 213 細螺紋 22 底座 221 調整螺孔 30 氣浮頂座 31 底面 32 定位凸塊 33 容設槽 40 氣浮底座 401 氣浮頂面 9 M368882 41 氣浮溝槽 42 連通槽 43 導氣管 431 進氣歧管 ' 44 定位槽 70 進氣管[Main component symbol description] 10 Connection block 11 Groove 12 Screw hole 20 Adjustment block 21 Adjustment column 211 Sphere 212 Adjustment part 213 Fine thread 22 Base 221 Adjustment screw hole Air floating top seat 31 Bottom surface 32 Positioning projection 33 Locating groove 40 Air floating base 401 Air floating top surface 9 M368882 41 Air floating groove 42 Connecting groove 43 Air duct 431 Intake manifold ' 44 Positioning slot 70 Intake pipe