M356218 八、新型說明： 【新型所屬之技術領域】 特別是一種應 補監測以示警 =作做_—種晶财-之雙重安全監視裝置， _咖_，及財嫩全監視器互 灯早及令晶《料麟電停機之監視裝置。 f先前技術】 以昇_: (或稱域人器），廣泛應驗晶則之排列存放， 作提供晶_程中的機械手臂取出或 二 正魏置於晶難引器之載台 各的Η疋否能 或更多片晶圓放置於载台内部之位不正^目田重要’一旦至少一片晶圓 索引器之物糊，份凸出於晶圓 出於載台外部之部份碰撞到晶圓索引器内部 二讓該曰曰圓凸 圓破裂或致賴台停擺故障損壞之問題與缺點Γ 而產生晶 22此，某些習知索㈣會在載台上裝設 範圍，以及時示警與令晴^^咐局部w載台之外部 測裝置，恤電她產二器之監 就偵測或魏器無法魏侧時，繼發射訊 不、正確之霜綠_瓣知，物_有凸位置 伤碰撞到晶圓料器内部之其他零件或框架 破之部 停擺故障猶之問題與缺點。 纽㈤_破料致使載台 此外，在相關之先前專利文獻方面，如中華 μ 「用以檢查餘巾晶圓裝餘義裝置與方 號 ^引器中㈣組光電感測器以作晶圓水平狀態與載架是^露在晶圓 查，但無法對_輪中之·水平《位置正常，但晶圓局^同出= M356218 ：；Γ行偵測，即該不正常擺設位置之晶圓則無法被偵 _該晶_部凸於絲之部份仍有因載架 碰撞晶圓索引器破損損壞之問題，且該用以侧載架 斜狀先電感測II如產生故障時’即使該裁架内之晶圓水平麟不正常或 ，架斜傾，則無法被侧得知，該光電感剩器則形同 〜’ 【新型内容】 上述習知晶®索引ϋ之晶·態監視器或光 監測機制，導致一旦單一於泪彳哭七止帝田於/又有互補 m_a· 或先電感測器故障失能或動作錯誤時，將 仏成凸出於日日圓索引器之载架外部的晶圓碰撞損壞之問題鱼缺點。 : 第二安全監視器及至少-總合示警控制器，1中，該第 向女置Γ置於一晶圓索引器之载台外圍的空間座標轴之垂直軸 •第超出載台範圍之外，該第二安全監視器設於 超出載台矿圍之Γ 位置，以同時監測载台内之晶圓是否 監視器’以同時接收第-安全監視器及第二安全監視器;:== 測訊號’以使該第一安全監視器或第二安全監視器 =， 圓擺設位置翻屮r FI处$ 者4貞測到載台内晶 超出域«下，由總合示雜繼發出— 及控制該晶圓索引器斷電停止運轉，以構成一具心遽不3維修 雙重安全監視n 、又 *全li測機制之 本創作之晶®封器之雙重安全監視裝置的功效 之機制’即其中任—者產生故障失能狀態，另_ 互補監测 與及時使晶圓索”斷電停機之控制功能，而得以防==，3監測 之載台内晶圓碰撞損壞之問題與缺點。 圓索引器 M356218 【實施方式】 ❾閱第圖、第二圖及第三圖所示，本創作之晶圓索引器之雙重安 二皿視，置1GG係包含至少—第—安全監視器1()，該第—安全監視器川裝 設於-晶圓索引器細之載台21〇的外圍空間座標軸之垂直轴向位置，在 本創作中係列舉該第—安全監視器1G裝設於晶圓索細之上方對應載 台210的外圍垂直轴向位置。 該第安全&視器10係更包括至少一第一光電發射器^及第一光電 接收盗12 ’該弟一光電發射器11與第一光電接收器I2配置形成反射感應 鲁 j的近程侧監視模式，即由該第一光電發射器U發射至感測物反射後經 第光包接收器12接收之偵測監視功能，該第一光電接收器12並輸出一 第-監視訊號m (如第三圖所示），以提供該第一安全監視器1〇之監視狀 態0 ' 至少—第二安全監視11 2G，設於柿於第-安全監視H 1G之同軸向 " 平打位置’即設於該晶圓索引器200之上方對應載台210的外圍垂直軸向 位置，與第-安全監視器1〇相互形成互補監視機制，即該第一安全監視器 ⑴與第二安全監聽2〇 —者冑可對魏聽崎錄，軸任一者損 • 壞故障，另一者仍可負起正常監視偵測之功能。 上述之第二安全監視器20係包括一第二光電發射器21及第二光電接 收器22，該第二光電發射器21設於晶圓索引器2⑻之上方對應載台綱的 外圍垂直軸向位置，該第二光電接收器22設於晶圓索引12〇〇之下方對應 載台210的外圍垂直軸向位置，使該第二光電發射器21及第二光電接收器 22間形成遠程侧監視模式，即該第二光電發射器21及第二光電接收器 Μ之間藉由感測物遮斷而產生_監視功能，該第二光電接收器22並輸出 一第二監視訊號221，以提供該第二安全監視器2〇之監視狀態。 上述弟一女全監視器10之第一光電發射器n及第—光電接收器丨2間 7 M356218 之配置，或者第二安全監視器20之第二光電發射器2ι及第二光電接收器 =之配置關，跡社述之雜錢絲限，鄉-安全監視器ι〇之 弟光電發射器11及第—光電接收器12間之配置亦可為遠程偵測監視模 式而該第一安王監視器20之第二光電發射器21及第二光電接收器間 之配置關係為近程偵測監視模式。 θ „至^總合不警控制器3〇，其設置位置不限，在本創作中係列舉設於 °索引器2GG之外’其他如將總合示警控制器％整合設置於晶圓索引器 6等U冓亦屬本創作之範嘴，該總合示警控制器％連結上述之第 一，全監_0之第—光電接收器12與第二安全監視㈣之第二光電接 t 22 ^接收來自第—光電接收器12輪出之第-監視訊號121及第二光 葙铺L 2輪出U視訊號221，以讓總合示警控制器3〇根據第一監 y 1及第二監視訊號221所代表之監測狀態進行比對，如兩者一致 =測狀_ ’職合示警控輸％不作任何動作，如兩者之中只要任 繼為異常^ _雜舰縣輯麟，_總合示警控 22〇 ’料J :警不訊號31與一切斷訊號32給晶圓索引器之控制器 讓曰JP12制為220發出故障警示與即時切斷該晶圓索引器200的電源， 讓晶圓索引器200斷電停機。 97电源 π配合第四圖所示，林創作之雙重安全監視裝置⑽ =顯示該晶圓索引器2〇〇之载台21〇内的晶圓料凸出‘= 德圍之雜，可藉由該第—安全監視器W與第 心。 時進行對晶圓300擺置肤離夕#、視器20兩者同 一光電接收器12所輪出之第_ ^皿視器^之弟 光電接收器22輸出之第二二見訊號121與弟-安全監视器功之第二 铷®之第—監視訊號221任一者 擺設位置超_之_態下，__=； =〇〇 訊號31與一切市、刈則輪出一警示 /、刀斷訊就32給晶圓索引器2〇〇之控制器22〇 發出故障警示與即時切斷 吏〜控制器220 了刀斷该曰曰圓索弓ί|| 200的電源，讓晶圚料器斷 M356218 電停機。 當然地’上述之第-安全監視器10之第一光電接收器12所輪 -監視訊號121與第二安全監視器2G之第二光電接收器22輪出之第二& 視訊號221，除可提供為晶圓300於載台21〇内擺置位置異常示鑿偵 :M356218 VIII. New description: [New technical field] It is a dual safety monitoring device that should be supplemented to monitor the warning = doing _ - kind of crystal money, _ _ _ _, and Cai Neng full monitor mutual light early Ling Jing "the monitoring device of the equipment." f Prior art] In the case of liter _: (or domain device), the array of crystals is widely stored, and the mechanical arm is taken out in the crystal _ process or the dynasty of the dynasty is placed on the stage of the crystal hardener. No or more wafers placed in the interior of the stage is not correct. ^ Once at least one wafer indexer paste, the part protrudes from the wafer to the outside of the stage. Inside the indexer, the problem of the rupture of the round circle or the failure of the swaying of the slab is caused by the problem and the defect. 晶 The crystal 22 is used. Some conventional cables (4) will install the range on the stage, and the warning and order will be given. Qing ^ ^ 咐 local w-stage external measuring device, the electrician of her two devices is detected or the Wei device can not be Wei side, after the launch of the signal is not, the correct frost green _ valve know, the object _ has a convex position There are still problems and shortcomings in the failure of the other parts or frame breaks that hit the inside of the wafer. New (5) _ broken material to cause the stage In addition, in the relevant prior patent documents, such as the Chinese μ "used to inspect the waste tissue wafer device and the square (4) group of photo-electric detectors for wafers The horizontal state and the carrier are exposed on the wafer, but the horizontal position of the _ wheel is not normal, but the wafer is the same as the M356218:; the detection is performed, that is, the crystal of the abnormal position The circle can not be detected _ the part of the crystal _ convex to the wire still has the problem of damage to the wafer indexer due to the collision of the carrier, and the side carrier is inclined first, and the inductance is measured, if the fault occurs, even if If the wafer level in the arbor is not normal or the frame is tilted, it cannot be known by the side. The photoinductor remains the same~' [New content] The above-mentioned crystal crystal index monitor or The light monitoring mechanism will result in a single out of the tears, crying, seven, or in the presence of a complementary m_a· or first inductive detector failure or malfunction, which will become external to the carrier of the Japanese indexer. Wafer Collision Damage Problem Fish Disadvantages: Second Safety Monitor and At least - Total Alarm Control , in the first direction, the vertical axis of the space coordinate axis placed on the periphery of the wafer indexer of the wafer indexer is out of the range of the stage, and the second safety monitor is disposed outside the carrier Positioning to monitor whether the wafer in the stage is a monitor' to simultaneously receive the first-safety monitor and the second safety monitor;:== the test signal' to make the first safety monitor or the second Safety monitor =, the position of the circle is turned over, r is at the position of the FI, and 4 is measured. The crystal inside the stage exceeds the field «below, the sum is indicated by the total display, and the wafer indexer is stopped and stopped. A mechanism that doubles the safety of the double safety monitoring device, which is the heart of the maintenance and maintenance of the double safety monitoring n, and the full-scale measurement mechanism, that is, the incumbent--the fault-disabled state, another_complementary Monitoring and timely control of the wafer cord "power off shutdown", to prevent the problem and shortcomings of wafer collision damage in the monitoring station. Circular indexer M356218 [Embodiment] Referring to the figures, the second figure and the third figure, the wafer indexer of the present invention is double-independent, and the 1GG system includes at least the first-safety monitor 1 ( The first safety monitor is installed in the vertical axial position of the outer space coordinate axis of the wafer indexer stage 21〇. In this creation, the first safety monitor 1G is installed in the crystal. The upper side of the round wire corresponds to the vertical axial position of the periphery of the stage 210. The first security & video device 10 further includes at least a first photo-emitter and a first photo-receiver 12'. The photo-electric transmitter 11 and the first photo-receiver 11 are configured to form a proximity of the reflection sensor. The side monitoring mode, that is, the detection and monitoring function received by the first photo-emitter U after being reflected by the sensing object and received by the optical packet receiver 12, the first photo-receiver 12 outputs a first-monitoring signal m ( As shown in the third figure, to provide the first security monitor 1 监视 monitoring state 0 ' at least - the second security monitoring 11 2G, set in the same axis - "leveling position" of the first - security monitoring H 1G That is, the peripheral vertical axial position of the corresponding stage 210 above the wafer indexer 200 forms a complementary monitoring mechanism with the first safety monitor 1 , that is, the first safety monitor (1) and the second safety monitor 2 〇 胄 胄 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏The second safety monitor 20 includes a second photo-emitter 21 and a second photo-emitter 22, and the second photo-emitter 21 is disposed above the wafer indexer 2 (8) corresponding to the peripheral vertical axis of the stage. The second photoreceiver 22 is disposed under the wafer index 12 对应 at a peripheral vertical axial position of the corresponding stage 210 to form a remote side monitoring between the second photo emitter 21 and the second photoreceiver 22 . a mode in which the second photo-emitter 21 and the second photo-receiver Μ are interrupted by the sensing object, and the second photo-receiver 22 outputs a second monitoring signal 221 to provide The second security monitor 2 monitors the status. The configuration of the first photo-emitter n and the photo-electric receiver 72 of the above-mentioned female full monitor 10 is 7 M356218, or the second photo-emitter 2ι of the second safety monitor 20 and the second photoreceiver= The configuration is off, the traces of the miscellaneous money limit, the township-safety monitor ι〇's brother's photoelectric transmitter 11 and the first - optoelectronic receiver 12 can also be configured for the remote detection and monitoring mode and the first An Wang The configuration relationship between the second phototransmitter 21 and the second photoreceiver of the monitor 20 is a proximity detection monitoring mode. θ „至^总合不警警控制器3〇, its setting position is not limited, in this creation, the series is set outside the ° indexer 2GG. Others such as the integrated warning controller% integrated in the wafer indexer 6等U冓 is also the mouthpiece of this creation. The total warning controller is linked to the first one mentioned above, the whole of the supervisory number-0, the photoelectric receiver 12 and the second safety monitoring (four) the second photoelectric connection t 22 ^ Receiving the first-monitoring signal 121 and the second optical-slot L 2 from the first-photon receiver 12 to rotate the U-video signal 221, so that the total warning controller 3 is based on the first monitoring y 1 and the second monitoring The monitoring status represented by the signal 221 is compared, if the two are consistent = the test _ 'the job shows that the police control loses % of the action, as long as the two are abnormal. ^ _ Miscellaneous County Ji Lin, _ total Display the police control 22〇' material J: the police signal 31 and a cut-off signal 32 to the wafer indexer controller let the JP12 system 220 issue a fault warning and immediately cut off the power of the wafer indexer 200, let the crystal The circular indexer 200 is powered off. 97 power supply π cooperates with the fourth figure, Lin created the dual safety monitoring device (10) = display The wafer material in the stage 21 of the wafer indexer 2 is protruded and the product is placed on the wafer 300 by the first safety monitor W and the center.肤离夕#, 视器20, the same photodetector 12, the second photo-receiver 22 output second photo signal 121 and the brother-safety monitor The second 铷 之 — 监视 监视 监视 监视 监视 — — — — — 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 221 The controller 22 of the device 2 〇 issued a fault warning and immediately cut off 吏 ~ controller 220 broke the 曰曰 round cable ί|| 200 power, let the crystal smasher M356218 electric shutdown. Of course ' The second & video signal 221 of the first photoreceiver 12 of the first safety receiver 10 and the second photoreceiver 22 of the second safety monitor 2G may be provided as The wafer 300 is placed in the position of the stage 21 in an abnormal position.
斜，另可提讎第-安全監聽1G與第二安全監視器2()，被Z 之檢查魏，即當兩者間之第-監視訊號121與第二監魏號221 同時，則可同時提供檢修者對第一安全監視器10與第二安全監視器^任 —者進行檢查维修之參考；另外，該第一安全監視器1G之第;電接』 • 12所輸出之第一監視訊號121與第二安全監視器20之第二光電接收器22 輸出之第二監視訊號221也可以提供晶圓3⑻之機器手臂操作的障礙物偵 測之用。 上述第一圖〜第四圖所示本創作之晶圓索引器之雙重安全監視裝置， 其+所揭示之說明及®^，係為便於Μ明本創作之技術内容及技術手段， 所揭示較佳實施例之一隅，並不因而拘限其範疇。並且，舉凡一切針對本 創作之結構細部修飾、變更，或者是元件之較替代、驗，當不脫離本 創作之創作精神及範疇，其範圍將由以下之申請專利範圍來界定之。 【圖式簡單說明】 第一圖係本創作之晶圓索引器之雙重安全監視裝置之侧視圖； 第二圖係第—圖之局部放大圖，顯示第一安全監視器與第二安全監視器間之 結構； 第二圖係本創作之晶圓索引器之雙重安全監視裝置的方塊電路圖； 第四圖係第一圖之側視圖，顯示本創作之晶圓索引器之雙重安全監視裝置 之應用例。 【主要元件符號說明】 100雙重安全監視裝置 1G g-安全監視器 11第一光電發射器 12第一光電接收器 M356218 121 第一監視訊號 20 第二安全監視器 21 第二光電發射器 22 第二光電接收器 221 第二監視訊號 30 總合示警控制器 31 警示訊號 32 切斷訊號 200 晶圓索引器 210 載台 220 控制器 300 晶圓 10Oblique, it is also possible to mention the first-safety monitoring 1G and the second safety monitor 2(), which is checked by Z, that is, when the first-monitoring signal 121 and the second supervisory number 221 are both at the same time, Providing a reference for the maintenance and repair of the first safety monitor 10 and the second safety monitor; and, in addition, the first safety signal of the first safety monitor 1G; The second monitor signal 221 outputted by the second photoreceiver 22 of the second security monitor 20 can also provide obstacle detection for the robot arm operation of the wafer 3 (8). The dual security monitoring device of the wafer indexer of the present invention shown in the above first to fourth figures, the description and the ® disclosed by the above, are for the purpose of explaining the technical content and technical means of the present invention. One of the best practices does not limit its scope. In addition, all the modifications, alterations, or substitutions or alterations of the components of this creation are defined without departing from the spirit and scope of this creation. The scope of the application will be defined by the following patent application scope. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a side view of the dual safety monitoring device of the wafer indexer of the present invention; the second drawing is a partial enlarged view of the first figure, showing the first safety monitor and the second safety monitor. The second figure is a block circuit diagram of the dual security monitoring device of the wafer indexer of the present invention; the fourth figure is a side view of the first figure, showing the application of the dual security monitoring device of the wafer indexer of the present invention. example. [Main component symbol description] 100 dual security monitoring device 1G g-security monitor 11 first phototransmitter 12 first photoreceiver M356218 121 first monitoring signal 20 second security monitor 21 second phototransmitter 22 second Photoelectric Receiver 221 Second Monitor Signal 30 Total Alarm Controller 31 Warning Signal 32 Cut Signal 200 Wafer Indexer 210 Stage 220 Controller 300 Wafer 10