M353471 八、新型說明： 【新型所屬之技術領域】 本創作係關於一種顧載台，特別是關於一種減少基 板的接觸面積來防止靜電產生的基板載台。 【先前技術】 β政著科技進步，具有省電、無幅射、體積小、低耗電 置:平面直角、高解析度、晝質穩定等多項優勢的液晶顯 二器:麵域獨佔地位讀統映像錢幕⑽稱CRT)帶 ，了莫大的衝擊，尤其是現今各式資訊產品如··手機、筆 5己型電腦、數位械、PDA、液晶榮幕等產品越來越普及， 亦使得液晶顯示器(LCD)的需求量大大提升。M353471 VIII. New description: [New technical field] This creation is about a kind of carrier, especially a substrate stage that reduces the contact area of the substrate to prevent static electricity. [Prior technology] β political science and technology advancement, with power saving, no radiation, small size, low power consumption: flat right angle, high resolution, stable quality and other advantages of liquid crystal display two: surface exclusive status read The unified image of the money screen (10) called CRT) has a great impact, especially in today's various information products such as mobile phones, pens, computers, digital devices, PDAs, LCD screens and other products are becoming more and more popular. The demand for liquid crystal displays (LCDs) has greatly increased.
液晶顯示器主要係包括—液㈣示面板以及一背光 二’其憎晶顯示面板是由—彩色濾、光#基板、一薄膜 ^曰曰體陣列基板以及置於此兩基板之間的液晶層所構 。其中’在液晶顯示面板的製造過程中，必須不斷地對 璃基板進辟洗、長膜、光阻塗佈、曝光、顯影、姓刻、 土阻剝離、熱處理等處理。而且，在每—道處理步驟後， 正^要，對基板進行檢測，以確保製造出來的面板其功能 品經過許多工作站與 工作站間，並置放在 然成為必然面臨的問 ’载送液晶面板於各 因此，液晶顯示面板的生產流程 機α，如何將基板順利地搬送在這些 工作站的機纟切進減續製程，自 題。而目前液晶顯示面板的製造廠中 M353471 工作站時，係多採用人工搬 各個工作關的賴。 錄觸或鋪臂來進行 以目前業界中最常見之移载 B圖’其係為習知之載台！及其j 圖。如第-A圖所示，载台！句人—使用移射3的不意 於固定機座H)上之承载台u 10、一設置The liquid crystal display mainly comprises a liquid (four) display panel and a backlight 2', wherein the twin crystal display panel is composed of a color filter, a light substrate, a thin film array substrate, and a liquid crystal layer interposed between the two substrates. Structure. Among them, in the manufacturing process of the liquid crystal display panel, it is necessary to continuously wash the glass substrate, long film, photoresist coating, exposure, development, surname, soil resistance peeling, heat treatment and the like. Moreover, after each processing step, it is necessary to test the substrate to ensure that the manufactured panel has its function product passing through many workstations and workstations, and it is inevitably faced with the problem of carrying the liquid crystal panel. Therefore, the production process machine α of the liquid crystal display panel, how to smoothly transport the substrate to the machine of these workstations into the continuation process, self-title. At present, when the M353471 workstation in the manufacturer of the liquid crystal display panel is used, it is often used to manually move each work. Touching or laying the arm to carry out the most common transfer in the industry. Figure B is a well-known stage! And its j diagram. As shown in Figure-A, the stage! Sentence - the use of the shifting 3 is not intended to fix the base on the base H) u 10, a setting
傳動機構12。其中，俩機構包含-紛 ==2 ’撓性_ 121兩端係分別連接胃 軌⑵，且滑轨m與固定機座1〇連接。因此，當一基： 置於承載台11上時，傳動機構 二 於固定機座1G移動。 ㈣基板2相對 雖轉示，固定機座更包含—舉升裝置，設置 實施例中’舉升裝置具有複數根升 可縣載台11表面所設置之開孔 伸出經由移載臂3被搬入該工作站 的基板2，被托持在升降鎖上後，可與升降銷—起下降， =被放置到承載台11的表社以進行虹作站所負責之 製程。 接著’當完成工作站中所欲執行之製程後，放置在承 載台11上的基板2會再度被升降銷托持並上升，亦即使基 板2離開承載台11的表面。此時，如第—B圖所示，移 載臂3會穿過基板2與承載台n f摘空隙，接手拖持住基 板2並將基板2向上搬離，使基板2完全脫離載台】。 然而，由於物體間的接觸面相互摩擦之下容易產生靜 電，因此基板2在脫離承載台n的瞬間會發生帶電現象， 進而使基板2上的靜電值瞬間升南。此時，在一連串的處 M353471 於基板上 里:二中’帶電基板高風險地將因放 认_講_#作損傷，轉埃等粉鱗相#容易附著 ^斟上述’基板時常在製程中因產生靜 電現象而損壞 =口ΐ=用吹氣式除靜電器，利用吹出的離 -方法的板進仃正負電巾和作用。但是，採用此 也很容易慢’能糾簡靜驗械。且吹氣方式 也很=造錢塵，反㈣使基板受到污染。 發生何發展出一種降低基板在載台1與移載臂3間 ^ 電見象的機率，乃是設計者汲思之目標。 【新型内容】 ^鑑於此’為了有效解決上述問題，本創作提供一種基 板载台，可㈣解決上述習知技藝所遭遇之困境，降低基板 發生靜電現象的機率。 此载台，係用以承載一基板，且至少包含一固定機座以 及承載台。承載台係設置於固定機座上方，且具有複數 個間隔元件可供基板放置於其上，並使得基板與承載台之 間具有一間隙。其中，間隔元件係為墊片，且為一止滑墊。 在本創作之一較佳實施例中，墊片所總佔面積約介於承 載台面積的1〜5%。如前文所述，靜電係經由物體間的接觸 面相互摩擦所產生，故本創作係藉由降低基板的接觸面積 以防止靜電現象的發生。 關於本創作之優點與精神，以及更詳細的實施方式可以 M353471 藉由以下的實施方式以及所附圖式得到進一步的瞭解。 【實施方式】 首先，如前所述，本創作所提供之載台丨係用以承載 一基板2。載台1包含一固定機座1〇、—設置於固定機座 10上之承載台11以及-與承載台U相結合之傳動機構 12。其中，傳動機構包含一撓性線槽丨21以及一滑執122，Transmission mechanism 12. The two mechanisms include - = == 2 ′ flexible _ 121 are respectively connected to the stomach rail (2), and the slide rail m is connected to the fixed base 1 。. Therefore, when a base is placed on the stage 11, the transmission mechanism 2 is moved by the fixed base 1G. (4) The substrate 2 is rotated relative to each other, and the fixed base further includes a lifting device. In the embodiment, the lifting device has a plurality of openings, and the opening of the surface of the county stage 11 is extended and moved through the transfer arm 3. The substrate 2 of the workstation, after being held on the lift lock, can be lowered with the lift pins, and is placed on the table of the load platform 11 for the process of the rainbow station. Then, when the process to be executed in the workstation is completed, the substrate 2 placed on the loading table 11 is again held by the lift pins and raised, even if the substrate 2 leaves the surface of the stage 11. At this time, as shown in Fig. B, the transfer arm 3 picks up the gap between the substrate 2 and the stage n f, picks up the substrate 2 and lifts the substrate 2 upward, so that the substrate 2 is completely separated from the stage. However, since the contact surfaces between the objects rub against each other to easily generate static electricity, the substrate 2 is charged at the moment of leaving the stage n, and the electrostatic value on the substrate 2 is instantaneously increased. At this time, in a series of M353471 on the substrate: the second middle of the 'charged substrate will be high-risk due to confession _ speak _# for damage, transfer and other powder scales # easy to attach ^ 斟 above the substrate is often in the process Damage due to the occurrence of static electricity = mouth ΐ = using a blower type static eliminator, using the blown off-method plate to enter the positive and negative electric towel and action. However, it is also very easy to use this to correct the static inspection tool. And the blowing method is also very = making money dust, anti (four) the substrate is contaminated. What happens to the development of a reduction in the probability of the substrate between the stage 1 and the transfer arm 3 is the goal of the designer. [New content] ^ In view of this, in order to effectively solve the above problems, the present invention provides a substrate carrier, which can (4) solve the dilemma encountered in the above-mentioned conventional techniques and reduce the probability of occurrence of electrostatic phenomena on the substrate. The stage is for carrying a substrate and comprises at least a fixed base and a carrying platform. The carrier is disposed above the fixed base and has a plurality of spacer elements for the substrate to be placed thereon with a gap between the substrate and the carrier. Wherein, the spacer element is a gasket and is a stop pad. In a preferred embodiment of the present invention, the total area occupied by the spacer is about 1 to 5% of the area of the carrier. As described above, the electrostatic system is generated by rubbing the contact faces between the objects, and the present invention prevents the occurrence of static electricity by reducing the contact area of the substrate. With regard to the advantages and spirit of the present invention, and the more detailed embodiments, M353471 can be further understood by the following embodiments and the drawings. [Embodiment] First, as described above, the stage cassette provided by the present invention is used to carry a substrate 2. The stage 1 comprises a fixed base 1 - a carrying base 11 provided on the fixed base 10 and a transmission mechanism 12 combined with the carrying base U. The transmission mechanism includes a flexible wire slot 21 and a slipper 122.
撓性線槽121兩端係分別連接於承載座n與滑執122，且 滑執122與固定機座10連接。因此，當—基板2放置於承 載台11上時’傳動機構12可帶動基板2械於固定機座 10移動。其中，基板可為-薄膜電晶體液晶顯示器、一超 f專向列液晶顯示器、電漿顯示器、有機發光二極體顯示 态或多晶矽顯示器之面板。 ^另外’雖未緣示，固定機座10更包含-舉升裝置， 下方。在—細种，料錢具有複數 Γφ且升降銷可從承載台11表面所設置之 作站的从9 ° 結構，經由移載f 3被搬入該工 =，、= 持在料鎖上後，可與升降鎖一起下 之製程。 载口 U的表面上以進行該工作站所負責 僅作為—實麻❻以’弟—A至B圖所示之載台1 為限。舉例來說= ’ 所提供之载台1並不欲以此 载台，只需負L里之载台1可為一執行搬送步驟的 置傳動機構Z另外?作站。此時載台1可不設 科載台1也可以為配合—影像擷取設 M353471 備執行光學檢測步驟的载台，此 機構12,始能自戰便而要5又置傳動 载台η並不定的位置以進行檢測。亦即，承 =需被應用的面向以及功能為何來調整其所需=見:; 之一參考第二A至β圖，其係分職示本創作 二Γ基板2放置於承載台11上之側視與俯^ 件4，可提供基板數個間隔元 11之間具有一間隙。此時， 戟口 2盥承載a i i之門的„ ΚΛ述之移載臂3，可透過基板 人右t l 隙’取錄板2。且移載臂3更包 =少-孔洞(未圖示），可透過孔洞抽真空而吸附基板 進-步說明的是’間隔元件4為墊片。在較佳實施例 ^隔讀4為止滑塾，且複數個塾片總佔面積約介於 载台總面積的1〜5%之間。 r 之 另外’間隔元件4可以貼合的方式設置於承載台n 上’但並不以此為限。亦即，間隔元件4可採用黏合、磁 附、扣合等固定方式’並不受限於上述任一之方式為 綜上所述，可以瞭解本創作之優點在於： __⑴作係在載纟1上設置有複數個小Φ積的間隔 兀件4 ’來減錄板2直接與承載台n表面接觸的接觸面 積。此方法經實際測量，靜電值可由1〇kv下降至2〇〇v内， ，實可有效達麟低靜電產生的效果，且無須仙習知之吹 氣機構，造成基板的污染。同時，塾片的價格便宜，此方法 M353471 也不需要額外增加製程上的成本。 #執4^)/外’祕在本創作之—触實施射係使用止 二塾來作胡隔元件’亦可在減少基板接觸面積的目的之 外’有效地防止面板放置於載台上時，因滑動所發生的損毁。 雖然本創作已以·實施例揭露如上，然其並非用以 限f本創作，任何熟習此技藝者，在不脫離本創作之精神 和補内’當可作各種之更動_飾，·本解之保護 範圍當視後附之申請專利範圍所界定者為準。The two ends of the flexible wire slot 121 are respectively connected to the bearing base n and the sliding block 122, and the sliding handle 122 is connected to the fixed base 10. Therefore, when the substrate 2 is placed on the loading platform 11, the transmission mechanism 12 can drive the substrate 2 to move on the fixed base 10. The substrate may be a thin film transistor liquid crystal display, a super f-directed liquid crystal display, a plasma display, an organic light emitting diode display or a polycrystalline germanium display panel. ^Alternatively, although not shown, the fixed base 10 further includes a lifting device, below. In the fine-grained, the money has a plurality of Γφ and the lift pin can be moved from the 9° structure of the station provided on the surface of the stage 11 to the work by the transfer f 3 , and = after being held on the material lock, Can be combined with the lift lock process. The surface of the carrier U is responsible for carrying out the work of the workstation only as a practical paralysis to the stage 1 shown in the figure -A to B. For example, the pedestal 1 provided is not intended to be used as a stage, and the stage 1 in the negative L only needs to be a station for performing the transfer step. At this time, the stage 1 may not be equipped with the stage 1 or the frame for performing the optical detection step of the M353471. The mechanism 12 can be self-contained and the drive stage η is not fixed. The location for testing. That is, the direction of the application to be applied and the function to adjust its needs = see:; one of the reference to the second A to the beta diagram, which is divided into two parts of the creation substrate 2 placed on the carrying platform 11 The side view and the protrusion 4 provide a gap between the plurality of spacers 11 of the substrate. At this time, the port 2 of the port 2 carrying the door of the aii can be accessed through the substrate right tl slot. The transfer arm 3 is further included = less - hole (not shown) The substrate can be adsorbed by vacuuming the hole. The spacer element 4 is a spacer. In the preferred embodiment, the slider is slipped, and the total area of the plurality of cymbals is about the total amount of the carrier. Between 1 and 5% of the area. The other 'interval elements 4 can be placed on the carrier n' in a manner of being attached to each other', but not limited thereto. That is, the spacer element 4 can be bonded, magnetically attached, buckled. The merging method is not limited to any of the above methods. In summary, it can be understood that the advantages of the present invention are as follows: __(1) is a spacer element 4' having a plurality of small Φ products on the carrier 1 The contact area of the subtraction plate 2 directly contacting the surface of the carrier n. The actual value of the method can be reduced from 1〇kv to 2〇〇v, which can effectively achieve the effect of low static electricity, and does not need to be Xianqi knows the blowing mechanism, causing contamination of the substrate. At the same time, the price of the cymbal is cheap, this method M353471 also There is no need to increase the cost of the process. #执4^)/外' Secret in this creation - touch the implementation of the shooting system using the second two as the separation element' can also be effective in reducing the contact area of the substrate. The prevention of damage caused by sliding when the panel is placed on the stage. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the creation of the present invention, and anyone skilled in the art may not deviate from the creation. Spirit and supplements can be used as a variety of changes. The scope of protection of this solution is subject to the definition of the patent application scope attached.
I 【圖式簡單說明】 第-A圖係為習知之載台及其搭配使用移載臂的俯視 示意圖； 第一β圖係為習知之載台及其搭配使用移載臂的侧視 示意圖； 第二Α圖係為本創作之一實施例中將基板放置於承載 | 台上之側視示意圖； 第二B圖係為本創作之一實施例中將基板放置於承載 台上之俯視示意圖。 【主要元件符號說明】 I 載台 II 承載台 ill 開孔 M353471 12 傳動機構 121 撓性線槽 122 滑軌 2 基板 3 移載臂 4 間隔元件I [Simplified description of the drawings] The first-A diagram is a schematic plan view of a conventional stage and its associated transfer arm; the first β-picture is a schematic view of a conventional stage and its associated transfer arm; The second diagram is a schematic side view of the substrate placed on the carrier in the embodiment of the present invention; the second diagram is a top view of the substrate placed on the carrier in one embodiment of the creation. [Main component symbol description] I Stage II Carrying table ill Opening M353471 12 Transmission mechanism 121 Flexible wire slot 122 Slide rail 2 Base plate 3 Transfer arm 4 Spacer