M348658 八、新型說明： 【新型所屬之技術領域】 本創作係關於一種線性滑軌，特別是指一種具有精密度 高、承載剛性大、提升使用壽命之流體靜壓線性滑軌。 . 【先前技術】 . 針對目前各式工作母機而言，不論是工件承載平台，或 Φ 是搭載刀具、砂輪同步移動的工具平台，基本上大都是使用 傳統的滑動磨擦方式來運動，因此上下機械滑動面間會產生 相當的非線性磨擦力，不但在平面運動時會造成滯滑移動而 影響系統的定位精度，其在快速或長期的運動磨擦下也會產 生相當的溫升，即使在使用潤滑油進行強制潤滑的情況下， 滑動面在長時間的磨擦下仍然會產生相當的熱溫昇，造成承 載平台與工作滑動軌道產生熱變形，嚴重影響加工及定位精 _ 度。 目前業界較常見滑動體之滑動面的斷面形狀不外乎v 型、角形（平面形）、鳩尾形或圓形，並在此等滑動面上貼附鐵 弗龍等材質耐磨片，再經過人工剷花作業來達到滑動面的平 整度，並在滑動面内壁刻劃流道及注入孔，以油壓系統針對 滑動面實施強制供油潤滑，以減少滑動面間之磨損。 但這類滑動面設計在長時間使用後仍會產生磨耗，並使 兩滑動體彼此嵌合之間隙加大，嚴重影響滑軌進行線性位移 M348658 守之真直度，並間接影響到該加工機具之加工精度。由此可 見，上述習用之物品仍有許多缺失，並非一優良之設計者， 仍有相當大改善之空間。 本案創作人鑑於上述習用傳統滑動磨擦式線性滑軌所衍 之口項缺失，乃努力思考各項解決方法並加以實驗驗證， -終而開發出一種流體靜壓線性滑軌。 • 【新型内容】 本創作係一種流體靜壓線性滑軌，其目的在於提供滑塊 與滑軌進行無磨擦的線性位移。 為達上述目的，本創作為一種流體靜壓線性滑軌，包含 一滑執、一滑塊、數個壓力感應器、數個喷嘴及數個壓差平 衡增遂益’該滑塊滑設於該滑軌上，且該滑塊與該滑執之間 #形成-滑動間隙；該滑塊之内壁設有至少一蓄壓槽，且該蓄 •左抬:置該壓力感應器及該噴嘴，並於該滑塊設置該壓差平 衡增壓益，δ玄壓力感應及該噴嘴透過流道與該壓差平衡增 壓器連接供工作流體流動；當卫作流體經由該壓差平衡增壓 器流入各流道由該喷嘴噴出至該滑塊的蓄壓槽中，該滑塊與 該滑軌的間隙便形成-流體薄膜，而此流體薄膜即可產生對 應之垂直與水平兩軸之穩定對向靜壓推力，令㈣塊透過流 體4膜升起並穩疋之賴間隙，使該滑塊在無磨擦狀態下順 M348658 -暢地順沿該滑執作線性位移。 藉由前述進一步分析將可獲得下述功效： 1. 本創作由於該滑塊藉由工作流體懸浮於其與滑執之 滑動間隙中，因此該滑塊與滑執即使在高速情況下持續進行 . 往復之線性運動，該滑塊與滑執也不會產生磨擦熱，大幅降 . 低熱溫昇及減少熱變形，因此長時間進行往復運動，也都不 Φ 會影響加工精度，更有效提高加工工件之品質及精度，且由 於沒有滑動磨擦的產生，因此不須再於滑動面上裝設耐磨貼 片，除了可減少安裝程序及成本，無磨擦的優點更可大幅提 升使用壽命，並降低日後維修的時間及成本。 2. 本創作由於以該各壓力感應器對該各蓄壓槽内的壓 力進行監控，所以能夠自動補償調整壓力，控制該各蓄壓槽 内的流體壓力以配合各種不同輕重負載之情況，即使在高荷 φ 重情況下，也可達到比傳統滑執加工時更為優異之加工參數。 3. 本創作因該各壓力感應器與該各壓差平衡增壓器控 制連接，且該各壓力感應器對該各蓄壓槽内的壓力進行監 控，所以當該壓力感應器偵測到偏高或偏低之壓力，便可立 即由該壓差平衡增壓器改變流體流量及流體壓力，使該蓄壓 槽内之飽和壓力均維持在最佳平衡工作狀態，維持該滑塊2於 任何時刻及任何狀況之穩定性，所以加工品質亦相對提昇。 7 M348658 - 【實施方式】 有關本創作所採用之技術、手段及其他之功效，茲舉一 較佳實施例，並配合圖示詳細說明如下，相信本創作上述之 目的、特徵及其他優點，當可由之得一深入而具體暸解； 本創作流體靜壓線性滑軌（請參閱第1圖至第3圖所示） . 包含： 一斷面為凹字形之滑軌1，該滑執1視需求固定於一工作 0 母機A之床身上，該滑軌1外壁設有六個滑動面11，其包括上 下四個及左右兩個施以精密研磨，且其真直度公差須達 O.Olmm/lOOOmm 内； 一斷面為倒凸字形活動式之滑塊2，該滑塊2—端相對該 滑軌1 一端滑設於其上，當該滑塊2施以外力下，將使該滑塊2 順沿該滑執1作線性位移，該滑塊2内壁相對該滑軌1的滑動面 11設有六個滑動面21，其包括上下四個及左右兩個基準面施 φ 以精密研磨，且其真直度公差亦須達O.Olmm/lOOOmm内，如 此在該滑執1與該滑塊2二者組裝後形成一精密的滑動間隙。 該滑塊2的各滑動面21上依運動轴向各設有一蓄壓槽 22，該各蓄壓槽22中裝設一壓力感應器4及一喷嘴5，該各壓 力感應器4分別以一訊號線路與該各壓差平衡增壓器6控制連 接，該各壓差平衡增壓器6則裝設於滑塊2中，且該各喷嘴5與 該各壓差平衡增壓器6透過流道連接彼此連通，該壓差平衡增 8 M348658 壓器6另經由管路連接導入工作流體（工作流體可為液體或為 氣體）。 將該滑塊2與滑執1組合後，工作流體經由管路輸送至該 各屋差平衡增壓;器6，再經該各流道從該各喷嘴5喷出至該各 -蓄壓槽22，使該各蓄壓槽22充滿工作流體，且工作流體亦會 趁隙流至該滑執1與滑塊2之間，且於該滑執丨與該滑塊2的滑 •動間隙形成一流體薄膜，且此流體薄膜會包覆住滑軌1之六個 滑動面11，使該滑塊2受此推力而升起而懸浮於此流體薄膜 上，該滑塊2藉由外力穩定地於該滑執丨的引導下進行高精度 之線性運動。 另外该各蓄壓槽22内部之壓力感應器4還可經由一控制 器7 (請參閱第5圖所示）與該各壓差平衡增麼器6控制連結， 籲该控制器7可為單晶片、主機或祠服器，並以該控制器7控制 该各麗力感應器4對該各蓄麗槽22進行塵力監控，使該滑塊2 於不同負載情況下由該控制器7控制該塵差平衡增塵器6主動 即時驅動絲f嘴5進㈣力之輕，可使該滑塊2不論在何 種負載及外力條件下維持懸浮之高真直度線性運動 ’讓該滑 塊2的α動面21不會與該滑軌】的滑動面“產生磨擦，甚至不 曰因磨擦而產生溫昇’如此更可癌保該滑執旧該滑塊2的使 用壽命及精度。 9 M348658 本創作流體靜壓線性滑執和前述習用相較之下，更具有 下列優點： 1.本創作由於該滑塊2藉由工作流體懸浮於其與滑軌1 之滑動間隙中，因此該滑塊2與滑執1即使在高速情況下持續 進行往復之線性運動，該滑塊2與滑軌1也不會產生磨擦熱， . 大幅降低熱溫昇及減少熱變形，因此長時間進行往復運動， . 也都不會影響加工精度，更有效提高加工工件之品質及精度。 φ 2.本創作由於以該各壓力感應器4對該各蓄壓槽22内的 壓力進行監控，所以能夠自動補償調整壓力，控制該各蓄壓 槽22内的流體壓力以配合各種不同輕重負載之情況，即使在 高荷重情況下，也可達到比傳統滑軌加工時更為優異之加工 參數。 3. 本創作因該各壓力感應器4與該各壓差平衡增壓器6 控制連接，且該各壓力感應器4對該各蓄壓槽22内的壓力進行 φ 監控，所以當該壓力感應器4偵測到偏高或偏低之壓力，便可 立即由該壓差平衡增壓器6改變流體流量及流體壓力，使該蓄 壓槽22内之飽和壓力均維持在最佳平衡工作狀態，維持該滑 塊2於任何時刻及任何狀況之穩定性，所以加工品質亦相對提 昇。 4. 本創作該各壓力感應器4與該各壓差平衡增壓器6之 間的控制連接可以透過該控制器7進行控制連結，該控制器7 可為主機或伺服器，而由該控制器7進行自動化控制時，更可 10 M348658 ，節省人力操作的成本以及提高工作效率。 5. 本創作之流體靜壓線性滑軌，只要將該滑軌1的滑動 面11與該滑塊2的滑動面21分別進行精密研磨後，不需要在'骨 動面貼附傳統使用之鐵弗龍等耐磨片，不但能相對減少安表 程序以節省工時，且在維修保養上也相當方便’由於該滑軌1 - 與該滑塊2之間並無磨擦產生，因此在零磨耗情況下，保養上 -只要注意工作流體之清潔度即可，大幅降低傳統滑軌之繁複 籲保養程序。 6. 本創作該凹字形之滑執與該倒凸字形之滑塊所組成 的流體靜壓線性滑軌，較傳統更多了側向的支撐力，因其除 了提供均衡的對向垂直推力，能使滑塊穩定且精準地懸浮於 其與滑執的垂直間隙間，更多了位於滑塊内部兩侧所提供的 侧向水平推力，因此除了可提供相當之垂直靜壓剛性外，更 可提供極高之側向水平靜壓剛性，以確保滑執在工作運動期 鲁間維持全方位之穩定剛性，因此更能提高其工作精度。 為使減㈣技術者可確實了解糊狀構造特徵及Α 他創作目的與功效，兹列舉上述所陳之具體實施例，並配合 所附圖示予以詳細說明，惟所選用之實施例供本案說明之 用’本案尚可以其他方式實施， 文热悉該項技術者在不脫離 本創作之創作精神下，凡依本說明而做出的其他變化實施離 樣’皆可被本案申請專利範圍所涵蓋，特併予指明。 M348658 綜上所述，本創作為一種流體靜壓線性滑軌，其包含一 滑軌、一内部設有蓄壓槽之滑塊、數個壓力感應器、數個喷 嘴及數個壓差平衡增壓器；該滑軌為一凹字形之長方體構 造，作為該滑塊穩定、堅固及平直的滑動路徑；該滑塊為一 倒凸字形之長方體構造，該滑塊内壁設有數個蓄壓槽，作為 . 提供垂直及水平兩軸之對向靜壓推力產生處；該數個壓力感 _ 應器及數個喷嘴設於該滑塊的蓄壓槽中，作為將節流推力精 Φ 準送該入蓄壓槽；該數個壓差平衡增壓器設於該滑塊中，提 供該蓄壓槽一穩定之節流阻抗；藉由上述元件組成的流體靜 壓線性滑執，讓工作流體經由該各壓差平衡增壓器及該各喷 嘴流至該滑塊的蓄壓槽產生一穩定之阻抗，使得該滑塊與該 滑軌間的滑動間隙，產生垂直與水平兩軸之對向靜壓推力， 該滑塊即使在負載增加情況下，也能使流體薄膜保持一定的 厚度，使該滑塊於無磨擦狀態下順暢地沿著該滑軌作線性位 鲁移；藉此本創作提供精密度高、承載剛性大、提升使用壽命 之流體靜壓線性滑軌。 由上述得知本創作確實符合「產業可利用性」、「新穎 性」以及「進步性」，爰依法提出新型專利申請，祈請惠予 審查並早日賜准專利’貫感德便。 12 M348658 【圖式簡單說明】 第1圖係本創作之分解示意圖。 第2圖係本創作之組合示意圖。 第3圖係本創作之組合剖面圖。 第4圖係本創作之流體系統示意圖。 . 第5圖係本創作之電性系統示意圖。 • 【主要元件符號說明】 〔本創作〕 滑軌1 滑動面11 滑塊2 滑動面21蓄壓槽22 壓力感應器4 喷嘴5 • 壓差平衡增壓器6 控制器7M348658 VIII. New description: [New technical field] This creation is about a linear slide, especially a hydrostatic linear slide with high precision, high rigidity and long service life. [Prior Art] For the current working machine, whether it is the workpiece carrying platform, or Φ is the tool platform for the synchronous movement of the tool and the grinding wheel, basically the traditional sliding friction method is used to move, so the upper and lower machinery There is a considerable non-linear friction between the sliding surfaces, which not only causes the slippage movement during the plane motion, but also affects the positioning accuracy of the system. It also produces a considerable temperature rise under the fast or long-term motion friction, even when using lubrication. In the case of forced lubrication of the oil, the sliding surface will still produce a considerable thermal rise under long-term friction, causing thermal deformation of the load-bearing platform and the working sliding track, which seriously affects the processing and positioning accuracy. At present, the cross-sectional shape of the sliding surface of the common sliding body in the industry is nothing more than v-shaped, angular (planar), dovetail or circular, and the wear-resistant pieces such as Teflon are attached to the sliding surfaces. The artificial shovel operation is used to achieve the flatness of the sliding surface, and the flow passage and the injection hole are scribed on the inner wall of the sliding surface, and the hydraulic system is used to perform forced oil lubrication on the sliding surface to reduce the wear between the sliding surfaces. However, this type of sliding surface design will still wear after long-term use, and the gap between the two sliding bodies will increase, which will seriously affect the straightness of the linear displacement of the sliding rail M348658, and indirectly affect the processing of the processing tool. Precision. From this, it can be seen that there are still many missing items in the above-mentioned items, and it is not a good designer, and there is still considerable room for improvement. In view of the lack of the above-mentioned conventional sliding friction type linear slides, the creators of this case tried to think about various solutions and verified them experimentally, and finally developed a hydrostatic linear slide. • [New Content] This creation is a hydrostatic linear slide with the aim of providing a frictionless linear displacement of the slider and the slide. In order to achieve the above purpose, the present invention is a hydrostatic linear slide rail comprising a slipper, a slider, a plurality of pressure sensors, a plurality of nozzles and a plurality of differential pressure balances. And forming a sliding gap between the slider and the sliding plate; forming an at least one pressure accumulating groove on the inner wall of the sliding block, and storing the left side: placing the pressure sensor and the nozzle And the differential pressure boosting benefit is set in the slider, the δ threshold pressure sensing and the nozzle through the flow channel are connected with the differential pressure balance supercharger for the working fluid to flow; when the maintenance fluid balances the supercharger via the differential pressure The flow path is ejected from the nozzle into the accumulator groove of the slider, and the gap between the slider and the slide rail forms a fluid film, and the fluid film can generate a stable pair of vertical and horizontal axes. To the static pressure thrust, let the (4) block rise through the fluid 4 membrane and stabilize the gap, so that the slider linearly displaces along the slipper in the non-friction state along the M348658. By the above analysis, the following effects can be obtained: 1. Since the slider is suspended in its sliding gap with the sliding by the working fluid, the slider and the sliding block continue even at high speed. The reciprocating linear motion, the slider and the sliding handle will not generate friction heat, greatly reduce. Low thermal temperature rise and reduce thermal deformation, so long-term reciprocating motion, no Φ will affect the machining accuracy, and more effectively improve the machining workpiece The quality and precision, and because there is no sliding friction, it is no longer necessary to install the wear-resistant patch on the sliding surface, in addition to reducing the installation procedure and cost, the advantage of no friction can greatly improve the service life and reduce the future. Time and cost of repairs. 2. In this creation, since the pressures in the pressure accumulating tanks are monitored by the pressure sensors, the adjustment pressure can be automatically compensated, and the fluid pressure in the pressure accumulating tanks can be controlled to match various light and heavy loads, even if In the case of high load φ weight, it is also possible to achieve more excellent processing parameters than conventional sliding processing. 3. The creation is controlled by the pressure sensors and the differential pressure balance superchargers, and the pressure sensors monitor the pressures in the pressure accumulating tanks, so when the pressure sensor detects the partial pressure High or low pressure, the pressure difference and the fluid pressure can be immediately changed by the differential pressure booster, so that the saturation pressure in the pressure accumulating tank is maintained in an optimal balance working state, and the slider 2 is maintained at any The stability of the moment and any conditions, so the processing quality is relatively improved. 7 M348658 - [Embodiment] The techniques, means and other functions of the present invention are described in detail with reference to the accompanying drawings, and the above-mentioned objects, features and other advantages are believed to be You can get a deeper and more specific understanding; this creation hydrostatic linear slide (see Figure 1 to Figure 3). Contains: A slide with a concave cross section, the slide 1 depends on the demand It is fixed on the bed of a working 0 mother machine A. The outer wall of the sliding rail 1 is provided with six sliding surfaces 11 including upper and lower four and two left and right for precision grinding, and the true straightness tolerance must reach O.Olmm/lOOmm a slider 2 of an inverted convex shape movable type, the end of the slider 2 is slidably disposed on one end of the sliding rail 1 , and when the slider 2 applies an external force, the slider 2 is caused A linear displacement along the sliding handle 1 is provided. The inner wall of the slider 2 is provided with six sliding surfaces 21 with respect to the sliding surface 11 of the sliding rail 1, and includes four upper and lower and two left and right reference surfaces for precise grinding, and The true straightness tolerance must also be within O.Olmm/lOOmm, so in the slippery 1 and the slider 2 The latter are assembled to form a precise sliding clearance. Each of the sliding surfaces 21 of the slider 2 is provided with a pressure accumulating groove 22, and a pressure sensor 4 and a nozzle 5 are disposed in each of the pressure accumulating grooves 22, and each of the pressure sensors 4 is respectively The signal line is connected to the differential pressure balance booster 6 , and the differential pressure balance booster 6 is installed in the slider 2 , and the nozzles 5 and the differential pressure balance supercharger 6 are flowed through. The rail connections are connected to each other and the differential pressure balance is increased. 8 M348658 The presser 6 is additionally connected to the working fluid via a line connection (the working fluid can be liquid or gas). After the slider 2 is combined with the slide 1 , the working fluid is sent to the respective differential balance pressurizers via the pipelines, and then discharged from the nozzles 5 to the respective pressure accumulator tanks through the respective flow passages. 22, the accumulator tanks 22 are filled with the working fluid, and the working fluid also flows into the gap between the slipper 1 and the slider 2, and the sliding gap between the slipper and the slider 2 is formed. a fluid film, and the fluid film covers the six sliding surfaces 11 of the slide rail 1, so that the slider 2 is lifted by the thrust and suspended on the fluid film, and the slider 2 is stably stabilized by an external force. High-precision linear motion is guided by the slippery guide. In addition, the pressure sensor 4 inside the pressure accumulating tanks 22 can also be controlled and connected to the differential pressure balancers 6 via a controller 7 (refer to FIG. 5), and the controller 7 can be single. a chip, a host or a server, and the controller 7 controls the Lili sensor 4 to perform dust monitoring on each of the accumulators 22, so that the slider 2 is controlled by the controller 7 under different load conditions. The dust balance balance duster 6 actively drives the wire f-mouth 5 into (four) force light, so that the slider 2 can maintain the suspension high straightness linear motion regardless of the load and external force conditions. The α-moving surface 21 does not “smooth with the sliding surface of the slide rail”, and even does not cause a temperature rise due to friction. Therefore, it is more cancerous to protect the life and accuracy of the slider 2 9 M348658 Compared with the conventional application, the hydrostatic linear sliding of the present invention has the following advantages: 1. The present invention is because the slider 2 is suspended in the sliding gap between the slider and the slide rail 1 by the working fluid, so the slider 2 with the slide 1 even if the linear motion continues to reciprocate at high speed, the slider 2 and slide 1There is no frictional heat. The heat temperature rise and the thermal deformation are greatly reduced, so the reciprocating motion for a long time does not affect the machining accuracy, and the quality and precision of the machined workpiece are more effectively improved. φ 2. This creation Since the pressure in each of the pressure accumulating tanks 22 is monitored by the respective pressure sensors 4, the adjustment pressure can be automatically compensated, and the fluid pressure in each of the pressure accumulating tanks 22 can be controlled to match various light and heavy loads, even in the case of Under high load conditions, it can also achieve better processing parameters than traditional slide rail processing. 3. This design is controlled by the pressure sensors 4 and the differential pressure booster 6 and the pressure sensing The device 4 monitors the pressure in each of the pressure accumulating tanks 22, so that when the pressure sensor 4 detects a high or low pressure, the pressure difference can be immediately changed by the differential pressure booster 6 and The fluid pressure maintains the saturation pressure in the pressure accumulating tank 22 in an optimal equilibrium working state, and maintains the stability of the slider 2 at any time and in any situation, so the processing quality is relatively improved. The control connection between the pressure sensors 4 and the differential pressure balance boosters 6 can be controlled and connected through the controller 7, and the controller 7 can be a host or a server, and the controller 7 can be automated. When controlling, it can be 10 M348658, saving the cost of manual operation and improving work efficiency. 5. The hydrostatic linear slide of the present invention, as long as the sliding surface 11 of the slide rail 1 and the sliding surface 21 of the slider 2 are respectively After precision grinding, it is not necessary to attach the traditional wear-resistant sheet of Teflon on the bone surface, which can reduce the working time of the metering program and save the working time, and it is also very convenient in maintenance and maintenance. 1 - There is no friction between the slider and the slider 2, so in the case of zero wear, maintenance - just pay attention to the cleanliness of the working fluid, greatly reducing the complicated maintenance procedures of the traditional slide. 6. The hydrostatic linear slide consisting of the concave shape of the concave shape and the slider of the inverted convex shape has more lateral support force than the conventional one, because it provides balanced equal vertical thrust. The slider can be stably and accurately suspended between the vertical gap of the slider and the lateral horizontal thrust provided on both sides of the slider, so that in addition to providing a relatively vertical static pressure rigidity, Provides a high degree of lateral horizontal static stiffness to ensure that the slipper maintains a full range of stable stiffness during the working period, thus improving its working accuracy. In order to make the (4) technicians have a good understanding of the characteristics of the paste structure and the purpose and effect of the creation, the specific embodiments described above are listed and described in detail with the accompanying drawings, but the selected examples are provided for the purpose of the case. The use of 'this case can be implemented in other ways, Wenzhi knows that the technology can not be divorced from the creative spirit of this creation, all other changes made in accordance with the description of the implementation of the sample can be covered by the patent application scope of this case , special and specified. M348658 In summary, the creation is a hydrostatic linear slide comprising a slide rail, a slider with an internal pressure accumulating groove, a plurality of pressure sensors, a plurality of nozzles and a plurality of differential pressure balances. The sliding rail is a concave-shaped rectangular parallelepiped structure, and serves as a stable, strong and straight sliding path of the sliding block; the sliding block is an inverted convex-shaped rectangular parallelepiped structure, and the inner wall of the sliding block is provided with a plurality of pressure accumulating grooves Providing a vertical hydrostatic thrust generating position for the vertical and horizontal two axes; the plurality of pressure sensing devices and the plurality of nozzles are disposed in the accumulating grooves of the sliding block as the thrust thrust The pressure accumulating pressure booster is disposed in the slider to provide a stable throttling impedance of the pressure accumulating tank; and the working fluid is obtained by a hydrostatic linear sliding force composed of the above components And generating a stable impedance through the pressure difference balance supercharger and the pressure accumulating grooves of the nozzles flowing to the slider, so that a sliding gap between the slider and the slide rail generates a vertical static and horizontal axis Pressure thrust, the slider even when the load is increased, The fluid film is maintained at a certain thickness, so that the slider smoothly moves along the sliding rail in a non-friction state; thereby, the present invention provides a hydrostatic pressure with high precision, high bearing rigidity and improved service life. Linear slides. From the above, it is known that this creation is in line with "industry availability", "novelty" and "progressiveness". It proposes a new type of patent application according to law, and prays for review and early grant of patents. 12 M348658 [Simple description of the diagram] Figure 1 is an exploded view of the creation. Figure 2 is a schematic diagram of the combination of the creation. Figure 3 is a combined sectional view of the creation. Figure 4 is a schematic diagram of the fluid system of the present creation. Figure 5 is a schematic diagram of the electrical system of the creation. • [Main component symbol description] [This creation] Slide rail 1 Sliding surface 11 Slider 2 Sliding surface 21 Accumulator groove 22 Pressure sensor 4 Nozzle 5 • Differential pressure booster 6 Controller 7
工作母機A 13Working machine A 13