M344347 八、新型說明： 【新型所屬之技術領域】 本創作係有關一種長晶爐下料器，特別是指一種單晶成長爐下料器。 【先前技術】 近年來半_子元件需求與日遽增，造成半導體級單晶供不應求的現 象。舉例來喊單晶是依據特別長晶技術卿金耻测。C以上的溫度下融 ^在】控制液n錢固過程，而長出所需直徑的單—結晶體以供半導 體電子元件的製程應用。 -月參閱第1圖’其係現今單晶成長爐的結構示意圖。如圖所示，現有的單 晶成長爐1G係在單晶成長爐1G _邊設置—料㈣以及-下料管14,以將料 品16裝填至料槽12後’經由下料管I4將料品16投送至單晶成刪軸 18内。但祕的設計下’料品16必須是—粒粒呈現球形的外觀，以避免塞管， «此前提下’料品16賴經過姆繁_研練程，以形成均勻—致的球狀， 以將16讀過於昂貴。再者，因為料品16是直接由_ η經下料管 14直麟至_18内’所以無法對料品1_的重量進行監控，因此每一球 狀料品的«必須—致，嶋雜下繼，崎增加了因研磨 製紅所額外增加的成本。且投料時料品Μ由料槽η落下的重力，因無適當緩 衝直接落至掛銷18中，將導致_8中的溶湯20到處噴賤。 有齡此，本創作遂針對上述習知技術之缺失，提出一種顧的單晶成長 爐下料為，以有效克服上述之該等問題。 【新型内容】 本創作之主要目的在提供_鮮晶成碰下㈣，其可有效緩衝料品落至 5 M344347 坩鍋時的衝力，以避免坩鍋内熔湯噴濺。 本則作之另目的在提供-種單晶成長爐下料器，其可即時監控已投料品 重量，達到避免過度投料所引起的料品浪費。 本創作之再目的在提供一種單晶成長爐下料器，其可即時監控以投料品 .重量’目此料品將不再必須是物積球狀料品，鑑此料品無須再次經過精密的 研製步驟，可大幅地降低料品的成本。 為達上述之目的，摘作提供—種單晶成長爐下㈣，其包含有—第一下 參料模組與一設置於第一下料模組下方的第二下料模組。第一下料模組包含有一 底端具有-第-下料開口之第—置料槽；—用以開或關第—下料開口之第一開 關閥，重里s測裝置，其係用以量測第一開關閥所承受到的料品重量；以及 -用以承接第一開關閥開啟時所導引之料品的第一下料導引管。第二下料模組 包含H置料槽，其底端具有—第二下制口且第二置料槽係接收由第一 了料v引官所導引的料品；—用以開或關第二下料開口的第二開關閥；以及一 第一下料導引官，其係承接第二開_開啟時所導引的第二置料槽内的料品。 •㉟為使貴審查委員對本創作之結構特徵及所達成之功效更有進一步之瞭 解與認識’謹佐啸佳之實施_及配合詳細之，說明如後·· 【實施方式】 •本創作之精神所在係於f知單晶歧爐的料槽内，裝域新的下料器，來 緩衝料品下料至__衝擊力道，以減対湯的喷濺。 而本創作之下料器包含有數個具有可開關下料開口之儲料槽與數個位於 堵料槽下方用以導料之下料導引管。本創作利用數個具有可開關下料口之置 料槽的配置讀輪施賴__力道，喊觸犧。 6 M344347 再者，置_下方配置有—重量量測裝置，藉此可達到監控已下料的料品 重量，以聽贿或下财h触這樣龄式，每單—料品剛林再需要^ 有相同的重里，且習知對料品球形外觀的要求也將不復存在。 以下係以各具有—置料槽與—下料導引管之第—下料模組與第二下料模組 .所構成之勒新下料器，來說明本創作，但熟知該項技術領域者當知，只要是在 本創作之精神範>#所在’賴的任何修改或者潤飾，如改變置料槪量或者下 -料導引管數量或者兩者結構上的相互配置關係的改變，當仍屬本創作之範嘴， φ於此澄明。 首先請-併_第2 _第3圖，·林創狀單晶成長爐下料器的立 體不忍圖與剖面示意圖。如圖所示，本創作之單晶成長爐下料器包含有一可緩 衝下料與已投料重量量測之第一下料模組3〇;以及一裝設於第一下料模組％下 方，用以緩衝下料的第二下料模組32。 第一下料模組30包含有一上方支撐座34，其上具有一投料開口 ％ ; 一下 方支撐座38，其上具有-穿孔（圖中未示）；而上方支撐座34與下方支撐座％ 鲁’利用適當數量之支擇柱4〇支撐定位，以定義出一容置空間42。 谷置空間42内容設有—下方具有-開口之置料槽44，其係利用-固定桿 固疋於下方支撐座38上；一用以開關置料槽44開口，且開啟時可成傾斜 、、丨料π口的開關間46 , -承載開關間46之重量量測裝置48，其係藉由量測 ^開閱46所承受到的料品重量，來獲知置料槽44内所容設料品重量；以及， &蠕穿设過重量量測裝置46與下方支撐座％之穿孔的下料導引管％，其係 承接並導引由開關閥46所導引之料品。此外，下料導管50係呈現漏斗狀。 $二下料模組32包含有-上方支撑座52，其上具有一穿孔（圖中未示）， 7 M344347 以供插設下料導引管50之下方端；一下方支擇座54，其上具有一穿孔（圖中未 T)’而上方支樓座52與下方支撑座54間利用適當數量之支樓柱56支擇定位， 定義出一容置空間58。 容置空間58容設有-下方具有—開口之置料槽6();—穿設過下方支撐座 54穿孔的下料導引管62 ;以及…設置於置料槽6()之下方，用以開關置料槽 6〇開口的開關閥64 ’其開啟時可成傾斜狀，以將料品引導至下料導引管62。其 •中置料槽60係利用一固定桿66，固定於下方支撐座54上。 • 請一併參閱第4〜6圖，其係本創作之單晶成長爐下料器的實施例示意圖。 首先如第4圖所示’利用開關閥46關閉置料槽44的開口，並將料品⑽裝設於 第-下料模組3〇之置料槽44，此時重量量測裂置將可量測開關闕46所承受到 的料品重量，以獲知原有料品68重量（例如為W1)。接續，如第5圖所示，開 啟開關閥46，將料品68引導至下料導引管5〇，由下料導引管5〇落至第二下料 模組32之置料槽60，如第6圖所示。此時可將第一下料模組3〇之開關間杯關 閉’再_量置48量測•齡置料槽44崎品所施侧關閥46之重量(例 鲁如為W2)，藉此即可獲知已下料品重量（W1_W2)。 接續，開啟第二下料模組32之開關閥64,以將料品68下料至下料導引管 62，並進入下料管14 (請-併參閱第丨圖），而紅職中2()，藉此，緩衝^ 品由料槽直接落至職的強大衝擊力，躺避免賴内熔湯喷賤。 再者’本創作模組化的架構方式，可有利於實際使用時進行適當變化，舉 例來說’當長晶爐之料槽高度較大時，可配置一具有量測重量之第一下料模組， 再搭配數個健供料^下料緩衝的下料獅，如第二下賴組，赠到較佳的 下料緩衝效果。 8 M344347 綜上所述，本創作提供-種薪新的單晶成長爐下料器其利用裝設料槽内 以避免坩鍋内熔湯的 的第一與第二下料模組，來達到緩衝料品至坩鍋的衝力， 以監控投料的量，達到 可免除習知須使用等體 喷濺，此外，第一下料模組更設置有一重量量測裝置， 省料之目的，且因第一下料模組可即時監控投料的量， 積球狀料品之話病，以降低料品因研製所增加的高額成 唯以上所射’僅縣鑛之触實關Μ，並_纽林創作實施M344347 VIII. New description: [New technical field] This creation is related to a long crystal furnace hopper, especially a single crystal growth furnace hopper. [Prior Art] In recent years, the demand for semi-sub-components has increased, resulting in a shortage of semiconductor-level single crystals. For example, the single crystal is based on the special crystal growth technology. At a temperature above C, the process of controlling the liquid is solidified, and a single crystal of the desired diameter is grown for the process application of the semiconductor electronic component. - month see Fig. 1 ' is a schematic diagram of the structure of the present single crystal growth furnace. As shown in the figure, the conventional single crystal growth furnace 1G is installed in the single crystal growth furnace 1G_side material (four) and the lower material pipe 14 to load the material 16 into the trough 12, and then through the lowering pipe I4 The item 16 is delivered to the single crystal into the shaft 18. However, under the secret design, 'item 16 must be--the grain has a spherical appearance to avoid the plug tube. «Under this premise, the item 16 is passed through the m-cultivation process to form a uniform spherical shape. To read 16 is too expensive. Furthermore, since the item 16 is directly from the _ η through the lower tube 14 to the inside of the _18, the weight of the item 1_ cannot be monitored, so the «each must be the same for each spherical item. Miscellaneous, Saki increased the additional cost of grinding red. Moreover, the gravity of the material falling from the trough η at the time of feeding is directly dropped into the hanging pin 18 without proper buffering, which causes the molten soup 20 in _8 to sneeze everywhere. At this age, the author proposes a kind of single crystal growth furnace to reduce the above problems in response to the above-mentioned lack of conventional techniques. [New content] The main purpose of this creation is to provide _ fresh crystal into a collision (4), which can effectively buffer the impact of the material falling into the 5 M344347 crucible to avoid splashing of the soup in the crucible. Another purpose of this is to provide a single crystal growth furnace hopper that instantly monitors the weight of the incoming material to avoid waste of materials caused by over-feeding. The re-purpose of the present invention is to provide a single crystal growth furnace feeder which can be monitored immediately to load the item. The weight of the item will no longer have to be a spherical material, and the item does not need to be precision again. The development steps can significantly reduce the cost of the item. For the above purposes, it is provided as a single crystal growth furnace (four) comprising a first lower ginseng module and a second blanking module disposed below the first unloading module. The first unloading module comprises a first receiving groove having a bottom end having a -first opening; a first opening and closing valve for opening or closing the first opening and the lowering opening, and a heavy-duty measuring device, which is used for Measuring the weight of the item received by the first on-off valve; and - a first unloading guide tube for receiving the item guided by the first on-off valve. The second unloading module comprises an H-groove, the bottom end of which has a second lower opening and the second receiving trough receives the item guided by the first material v; a second on-off valve that closes the second unloading opening; and a first unloading guide that receives the item in the second grooving channel that is guided by the second opening_opening. •35 In order to enable your review board to have a better understanding and understanding of the structural features and functions achieved by the authors, please refer to the details of the implementation of _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ It is located in the trough of the known single crystal furnace, and a new feeder is installed to buffer the material to the __ impact force to reduce the splash of the soup. The hopper of the present invention comprises a plurality of hoppers having switchable opening openings and a plurality of material guiding tubes located below the damming grooves for guiding the materials. This creation uses a number of configuration reading wheels with a switchable spout to apply for the __ force, shouting sacrifice. 6 M344347 Furthermore, the weight measurement device is arranged under the _ underneath, so as to monitor the weight of the material that has been unloaded, to listen to the bribe or the next wealthy type, every single item - the forest needs ^ There is the same weight, and the requirements for the spherical appearance of the item will no longer exist. The following is a description of the creation of the new unloader with the first-feeding module and the second unloading module of the grooving and unloading guide tubes, but the technology is well known. The domain knows, as long as it is any modification or retouching of the spirit of the creation, such as changing the amount of the feed or the number of the lower guide tubes or the structural relationship between the two. When it is still the mouth of this creation, φ is clear. First of all, please - and _ 2nd _ 3rd, the stereoscopic diagram and cross-section of the Lin Chuang single crystal growth furnace hopper. As shown in the figure, the single crystal growth furnace hopper of the present invention comprises a first unloading module 3 可 which can measure the unloading and the measured weight; and a device is installed under the first unloading module%. a second blanking module 32 for buffering the blanking. The first unloading module 30 includes an upper support base 34 having a feed opening % thereon; a lower support base 38 having a perforation (not shown); and the upper support base 34 and the lower support base % Lu's use a suitable number of support columns to support the positioning to define an accommodation space 42. The content of the plenum 42 is provided with a venting groove 44 having an opening below, which is fixed to the lower support base 38 by a fixing rod; a switch for opening the grooving groove 44 and being inclined when opened , the switch room 46 of the π port, the weight measuring device 48 of the carrying switch 46, which is used to measure the weight of the material received by the opening 46 to know the contents of the receiving slot 44 The weight of the item; and, &#, creeps through the weighted measuring device 46 and the perforated lowering guide tube % of the lower support base, which receives and guides the item guided by the on-off valve 46. Further, the blanking duct 50 is in the shape of a funnel. The two-feed module 32 includes an upper support base 52 having a through hole (not shown), 7 M344347 for inserting the lower end of the blank guide tube 50, and a lower support seat 54. There is a perforation (not T in the figure) and the upper support base 52 and the lower support base 54 are positioned by an appropriate number of the column columns 56 to define an accommodation space 58. The accommodating space 58 is provided with a sump 6 () having an opening below; a blank guiding tube 62 penetrating through the perforation of the lower supporting seat 54; and ... is disposed below the grooving groove 6 () The on-off valve 64' for opening and closing the opening of the hopper 6's opening can be inclined to guide the item to the blank guide tube 62. The intermediate trough 60 is fixed to the lower support base 54 by a fixing rod 66. • Please refer to Figures 4 to 6 together, which is a schematic diagram of an embodiment of the single crystal growth furnace hopper of the present invention. First, as shown in FIG. 4, the opening of the receiving groove 44 is closed by the on-off valve 46, and the item (10) is installed in the receiving groove 44 of the first-feeding module 3, at which time the weight measurement will be split. The weight of the item to which the switch 阙 46 is subjected can be measured to know the weight of the original item 68 (for example, W1). Next, as shown in FIG. 5, the on-off valve 46 is opened to guide the item 68 to the blank guiding tube 5, and is dropped from the blank guiding tube 5 to the receiving groove 60 of the second unloading module 32. As shown in Figure 6. At this time, the switch cup between the first unloading module 3〇 can be turned off, and then the weight of the side closing valve 46 (for example, W2) can be borrowed. This will give you the weight of the item you have left (W1_W2). Next, the on-off valve 64 of the second unloading module 32 is opened to discharge the item 68 to the blank guiding tube 62 and enter the lowering tube 14 (please - see also the figure), and the red office 2 (), by this, the cushioning product is directly dropped from the trough to the strong impact of the job, lying to avoid the sneeze. Furthermore, the modularized structure of the creation can be adapted to the appropriate changes in actual use. For example, when the height of the trough of the crystal growth furnace is large, a first blank with a measured weight can be configured. The module, together with a number of feeding materials ^ cutting buffer ding lion, such as the second squat group, give a better blanking buffer effect. 8 M344347 In summary, this creation provides a new type of single-crystal growth furnace hopper that uses the first and second unloading modules in the trough to avoid melting in the crucible. The impulse of the buffer material to the crucible is monitored to control the amount of material to be dispensed, so that the first unloading module is provided with a weight measuring device for saving the purpose, and The first unloading module can instantly monitor the amount of material to be fed, and the disease of the spherical material can be reduced to reduce the high amount of the material due to the development of the project. Lin Creative Implementation
之範圍。故即凡依本創射請範騎述之特徵及精神所為之均等變化或修飾^ 均應包括於本創作之申請專利範圍内。 【圖式簡單說明】 第1圖係習知單晶成長爐的下料示意圖。 第2圖係本創作之單晶成長爐下料器的立體示意圖。 第3圖係本創作之單晶成長爐下料器的剖面示意圖。 第4 6圖’其係本創作之單晶成長爐下料器的實施例示意圖。 【主要元件符號說明】 鲁10單晶成長爐 12料槽 W下料管 16料品 18坩鎮 20熔湯 30第一下料模組 32第二下料模組 9 M344347 34上方支撐座 36投料開口 38下方支撐座 40支撐柱 42容置空間 44置料槽 -45固定桿 φ 46開關閥 48重量量測裝置 50下料導引管 52上方支撐座 54下方支撐座 56支撐柱 58容置空間 φ 60置料槽 62下料導引管 64開關閥 66固定桿 68料品The scope. Therefore, any changes or modifications to the characteristics and spirit of Fan Chi's descriptions should be included in the scope of the patent application for this creation. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the cutting of a conventional single crystal growth furnace. Figure 2 is a perspective view of the single crystal growth furnace hopper of the present invention. Figure 3 is a schematic cross-sectional view of the single crystal growth furnace hopper of the present invention. Fig. 4 is a schematic view showing an embodiment of the single crystal growth furnace hopper of the present invention. [Main component symbol description] Lu 10 single crystal growth furnace 12 trough w under the material 16 material 18 坩 town 20 melt soup 30 first unloading module 32 second unloading module 9 M344347 34 upper support 36 feeding Below the opening 38 support seat 40 support column 42 accommodation space 44 storage trough - 45 fixed rod φ 46 switch valve 48 weight measuring device 50 feeding guide tube 52 above the support seat 54 below the support seat 56 support column 58 accommodation space Φ 60 storage tank 62 feeding guide pipe 64 switching valve 66 fixing rod 68 items