M312021 八、新型說明： 【新型所屬之技術領域】 本創作係有關一種調溫式檢測承載裝置，特別係一種具有調溫功能的檢 測承載裝置。 【先前技術】M312021 VIII. New description: [New technical field] This creation is about a temperature-sensing detection bearing device, especially a detection bearing device with temperature adjustment function. [Prior Art]
按，在將晶圓分割成獨立晶粒(die)前，必須先做晶圓測試，即對晶圓上的 每-晶粒作檢測’以確定晶粒是否零故障、電氣特性正常。_般常見的晶圓測 試是利用職機㈣探針卡(prQbe。_職晶圓上每-晶粒，其巾測試機台 之檢測頭可裝上探針以與晶片上的銲墊接觸。假若在測試過程/，、發現:不二 格的晶粒’就會對不良的晶粒作上記號，以便之後對晶圓進行蝴時，就， 不良的晶粒篩檢出來’ μ再進行τ_製程，以免㈣製造成本。 其中’由於亦需檢測晶圓在不同溫度下的操作功能，遂發展出如敎失盤 (the舰1 chuck)裝置。習知的熱夾盤結構具有一本體可承載-晶圓，及一周圍 具圓Γ道的第—溫度控制組件一電加熱器、—中央具有凸起的板體、 -八有螺餘流道㈣二溫度控做件依序層疊在本體下方，巧此第一 二^控做件可通人水流至其流射控制溫度。”知的 位在第-溫度控她件下方會使最上转本體之表面溫 : 由於板體之中央突起的«面積過大，故與電加錢具有大接觸面積=得本 體溫度變化太快而難以控制。 嗎向槓使件本 ’解決上述之缺失。 有鑑於此，本_揭.種更完善_溫式檢測承載裝置 M312021 f新型内容】 以承ΖΙ之—主要目的係在提供—種調溫式_承魅置，不但可用 ^ 彳，測物並具有快速穩定升溫與 不同溫度下檢•種物理或化學性質。 <力—提供待測物在 本創作之〜目的係在提供-種調溫式檢測承载 同溫度下之品質檢測。 以0日固在不 根據本創作所揭示的調溫式檢測承載裝置，係包括 可承載待_且⑽設有—連触―電源 ，、上表面 ^ , 私力…态，亚有一溫度量測元件固 疋在本體内度，制溫度㈣組魏在本體下方 P1执古触 你卜万’且兩溫度控制組件 間叹有-板體’其中每—溫度 产1千L桃這’及一入口和一出口分別與 兩知連通，板體之-表面具數個接觸部。 底下藉由具體實施例配合所附的圖式詳加說明，當更容易瞭解本 之目的、技術内容、特點及其所達成之功效。 【實施方式】 :⑽參照4 —圖與第二圖’分別係本創作之—立體外觀示意圖 —構分解圖。如圖所示，本創作之調溫式檢測承載裝置1G係包括—本 =2 ’其上細係用以承載待測物，如晶圓且本體12内設有複數個氣體 敗⑷、142、143，母-氣體流道14卜142、143之—端連接至本體u之上 另端則連接至-抽氣管16，以透過抽氣管16連接一抽氣裝置（圖 中未示_測物吸附固定在本體上表面13，且如第三圖所示，顯示本體心 另-面尚具—空腔π，以供—可外接電源的電加熱器18置人並再透過一底件 M312021 2〇將電加熱器18固定在本體12之空腔17内，並有一溫度量測元件，如溫度感 J棒22可固疋在本體12内以讀取溫度，及兩溫度控制組件％％位在本體u 下方，兩者之間並設有一板體28。 242 其中’溫度控制組件24具一螺旋結構流道32，並有一入口如、一出口》 分別與螺旋結構流道32之兩端連通，且入口 24卜出口⑽分別與導入管如 導出管泌連接，以便藉由導入管243與姆撕連接至液體輸送裝置（圖中 /，將賴流人蝴細流道32内，蝴物嫩道％流出，達到 ，皿度控制之作用；另一溫度控制組件26結構與溫度控制組㈣相同，即亦且一 7結構流道34 ’及—入口 261、—出口 262分別與螺旋結構流道34之兩端連 入口撕、出口她分別與導入管⑽、導出管脱連接，以便藉由導入 導出管連接至液體輸送裝置（圖中未示），將液體流入至螺旋結構 ^内，而再從螺旋結構流道34流出，達到溫度控制之作用。且，板體28 之表面29則設有數個接觸部3()與溫度控制組件％接觸。 y即係揭示本調溫式檢測峨置1Q之使时式係韻待測物放 =:面13，其中當待測物體積較大時三—^ 二二=起抽氣以將待測物固定住假若待 7較小，職在本體上加3之中央處，咖細2 ==接至—電源卿上表面⑽度快速上升，如加熱至㈣， ^度控制組件26則透過輸入管261、輸出管262連接至液體 ΓΓ、錢心直軸㈣，戰物斷降低至55 c則了輸入溫度較低的冷水在蟫纹社β 一 ㈣上㈣輪㈣、進行，經由財控制組 _件24、底件20而傳導至加熱器18與 M312021 本體上表面13，互相進行熱交換侧，以使本體12溫度逐漸降低，且由於板體 28所設的此等接觸部3〇之設計可與溫度控制組件狀之間具有較小的接觸面 積’使溫度控制組件26透過接觸部3G逐漸熱料至上方層疊的元件，即_ 免溫度變化錄，轴敎㈣本體12之溫度變化，故躺此裝置就可測試如 晶圓待測物在不同溫度下的物化性f 試完畢後，溫度控做件Μ才會 開始通水至其螺紋結構流道32讀速降低電加熱器18之溫度確保安全，或 者係以便於使用者重新開始進行另—組溫度環境測試。 本創作所揭示的調溫式檢測承载裝置，在結構的配置與設計上，使承載 襄置更速疋升’皿與降溫’克服習知溫度難以調控之缺失，以更有 助於待測物在不同溫度下檢測種種物化性質。 以上所述之貝㈣僅係為說明本創作之技術思想及特點，其目的 在使4¾此項技藝之人士能夠瞭解本創作之内容並據以實施，當不能 乂之限定本作之專，g卩大凡依本創作所揭示之精神所作之均 等變化或修飾，仍應涵蓋在本創作之專利範圍内。 【圖式簡單說明】 第一圖係本創作之立體外觀示意圖。 第二圖係本創作之一結構分解示意圖。 \ 第三圖係本創作之本體結構示意圖。 【主要元件符號說明】 10調溫式檢測承載裝置12本體 13上表面 14卜142、143氣體流道 8 M312021Press, before the wafer is divided into individual dies, wafer testing must be done to detect each die on the wafer to determine if the die is zero-defect and the electrical characteristics are normal. The common wafer test is to use the probe card of the employee (4) probe card (prQbe.), the test head of the towel test machine can be equipped with a probe to contact the pad on the wafer. If during the test process, it is found that: the grain of the grain will mark the bad grain, so that after the wafer is butterflyd, the bad grain is screened out. _Processing, in order to avoid (4) manufacturing costs. Among them, 'there is also a need to detect the operation of the wafer at different temperatures, and the development of the device such as the ship 1 chuck. The conventional hot chuck structure has a body. a carrier-wafer, and a first temperature control component with a circular ramp, an electric heater, a centrally convex plate body, and an eight-snail residual flow path (four) two temperature control members are sequentially stacked on the body Below, the first two control pieces can pass the water to the flow control temperature. The known position will lower the surface temperature of the uppermost body under the first temperature control: due to the central protrusion of the plate «The area is too large, so it has a large contact area with electricity plus money = the body temperature changes too fast and difficult Control. To the bar to make this piece to solve the above-mentioned lack. In view of this, this _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The temperature detection test carries the quality test under the same temperature. The temperature-sensing detection carrying device not disclosed according to the present invention is based on 0 days, and includes a loadable standby device and (10) a connection-power source, and an upper surface ^ , private power state, Ya has a temperature measurement component solid in the body, the temperature (four) group Wei under the body P1 ancient touch you Bu Wan 'and two temperature control components sigh - plate body 'each of them The temperature produces 1 thousand L of peach, and the entrance and the outlet are respectively connected with the two, and the surface of the plate has several contacts. The bottom part is explained by the specific embodiment with the attached drawings. Understand the purpose, technical content, characteristics and [Embodiment]: (10) Refer to Figure 4 - Figure 2 and Figure 2 respectively for the creation of the three-dimensional appearance - structure decomposition diagram. As shown in the figure, the temperature control detection device of the creation 1G system Including - this = 2 'the upper system is used to carry the object to be tested, such as a wafer and the body 12 is provided with a plurality of gas defeats (4), 142, 143, the mother-gas flow channel 14 142, 143 - end connection The other end of the body u is connected to the -exhaust pipe 16 to connect an air extracting device through the exhaust pipe 16 (not shown in the figure), the object is adsorbed and fixed on the upper surface 13 of the body, and is displayed as shown in the third figure. The other side of the body has a cavity π for the electric heater 18 of the external power source to be placed and the electric heater 18 is fixed in the cavity 17 of the body 12 through a bottom member M312021 2〇, and There is a temperature measuring component, such as the temperature sensing J rod 22 can be fixed in the body 12 to read the temperature, and the two temperature control components %% are located below the body u, and a plate body 28 is disposed therebetween. 242, wherein the 'temperature control component 24 has a spiral structure flow channel 32, and has an inlet such as an outlet, respectively, which communicates with both ends of the spiral structure flow channel 32, and the inlet 24 and the outlet (10) are respectively connected with the introduction pipe such as the outlet pipe. In order to connect to the liquid delivery device by the introduction tube 243 and the tearing device (in the figure, the butterfly will flow out in the capillary channel 32, and the butterfly will flow out to reach the effect of the degree control; another temperature control component 26 structure is the same as the temperature control group (4), that is, a 7-structure flow channel 34' and - inlet 261, - outlet 262 are respectively connected to the ends of the spiral structure flow channel 34, and the outlet is separated from the inlet tube (10). The tube is disconnected so as to be connected to the liquid delivery device (not shown) by the introduction and delivery tube, and the liquid flows into the spiral structure and then flows out from the spiral structure flow path 34 to achieve the temperature control function. The surface 29 of the body 28 is provided with a plurality of contact portions 3 () in contact with the temperature control component. y is to reveal the temperature modulation type detection device 1Q, the time system rhyme test object is placed =: face 13, wherein When the volume of the object to be tested is large, three-^ 2 = pumping to fix the object to be tested if the 7 is small, the job is added to the center of the body 3, the coffee is fine 2 == connected to the power supply upper surface (10) degrees rise rapidly, such as heating to (four), The degree control unit 26 is connected to the liquid helium and the straight axis of the money core through the input pipe 261 and the output pipe 262, and the cold water of the input object is lowered to 55 c, and the cold water with a lower input temperature is on the β (four) (four) wheel of the Python Company. (4) proceeding, conducting through the financial control group _ member 24, the bottom member 20 to the upper surface 13 of the heater 18 and the M312021 body, and performing heat exchange sides on each other, so that the temperature of the body 12 is gradually lowered, and due to the plate body 28, The contact portion 3〇 can be designed to have a small contact area with the temperature control component shape. The temperature control component 26 is gradually heated to the upper laminated component through the contact portion 3G, that is, the temperature is not changed. (4) The temperature change of the body 12, so the device can be tested for the physical and chemical properties of the sample to be tested at different temperatures. After the test, the temperature control device will start to pass through the water to the thread structure flow channel 32. Speed down the temperature of the electric heater 18 to ensure safety, or to The user restarts the other-group temperature environment test. The temperature-sensing detection bearing device disclosed in the present invention makes it difficult to overcome the conventional temperature in the configuration and design of the structure, so that the load-carrying device is more rapidly ascending the 'dish and cooling' The lack of regulation is more conducive to the detection of various physicochemical properties of the test object at different temperatures. The above mentioned (four) is only to illustrate the technical ideas and characteristics of this creation, the purpose of which is to enable 43⁄4 people of this skill to Understand the content of this creation and implement it accordingly. When it is not possible to limit the content of this creation, the equivalent changes or modifications made by the company in accordance with the spirit revealed by this creation should still be covered by the scope of this creation patent. Brief description of the formula] The first picture is a schematic diagram of the three-dimensional appearance of the creation. The second picture is a schematic diagram of the structure of one of the creations. The third picture is a schematic diagram of the ontology structure of the creation. [Main component symbol description] 10 thermostat type detection bearing device 12 body 13 upper surface 14 142, 143 gas flow path 8 M312021
16抽氣管 17空腔 18電加熱器 20底件 22溫度感測棒 24、26溫度控制組件 241 入口 242 出口 243導入管 244導出管 261 入口 262 出口 263導入管 264導出管 28板體 29表面 30接觸部 32螺旋結構流道 34螺旋結構流道16 exhaust pipe 17 cavity 18 electric heater 20 bottom member 22 temperature sensing bar 24, 26 temperature control component 241 inlet 242 outlet 243 introduction pipe 244 outlet pipe 261 inlet 262 outlet 263 introduction pipe 264 outlet pipe 28 plate 29 surface 30 Contact portion 32 spiral structure flow path 34 spiral structure flow path