M312003 八、新型說明： 【新型所屬之技術領域】 本創作是有關於一種電漿放電裝置，且特別是有關於一 種可產生低溫電漿喷射氣體的電漿放電裝置及其應用方法。 【先前技術】 電漿的組成包括有電子、離子以及電中性粒子。電漿的 形成可經由高能量粒子、電磁波（如宇宙射線、紫外線、X射 線等）對氣體撞擊，或對氣體施予高溫，或對氣體施予外加電 場來形成。一般電漿產生的方式，是將所需之氣體通入一容 器内，於某一氣壓下，加入直流電源、射頻（Radio Frequency) 或微波（Microwave)能量來源，利用電容式（Capacitive)、電感 式（Inductive)或粒子與波交互作用的方式，使氣體崩潰 (Breakdown)游離，即為電漿。簡而言之，電漿的產生乃是將 能量施於氣體，使其受激電離。 目前常見的電漿表面處理技術有電暈（corona)、介電質障 壁放電（dielectric barrier discharge)等，但是，上述處理方法 都有能量密度較低導致處理速度較慢的問題。 電漿炬（Plasma Torch)是一種常見的常壓電漿放電裝置， 可以運用於切割、熔接等工業，可以在高功率高能量密度的 條件之下進行操作，其原理係將電漿能量聚集在一小的體積 範圍内，將漩流工作氣體部份離子化，使工作氣體能產生活 化反應，提高反應性。然而，習知電漿炬在操作過程中，常 會因為放電電流加熱造成電極溫度上升，導致所產生的電漿 6 M312003 喷射氣體溫度過高’而限制了其應用的範圍。例如，在進行 液晶模組之接線端子的清潔時，由於液晶模組之光學板材及 結構多屬於熱敏感性材質，並不適合高溫電漿喷射氣體的處 理。再加上’過熱的電極會改變f漿喷射氣體的物性以及其 工作行為，例如過熱的溫度會造成電槳噴射氣體解離物中的 自由基減少’而造成處理效率的降低或失效。 、為了解決此-問題，習知基數大多在外電極之中嵌設冷 部線圈或將冷部袭置直接套設於外電極之外，’然而此一技術 僅&㈣低電極温度的方式，間接地降低電漿噴射氣體的溫 度並热法直接控制電漿噴射氣體的出口溫度。 【新型内容】 因此有需要提供-種可產生低溫電漿噴射氣體，並且可 直接控制電漿喷射氣體之出口溫度的電漿放電裝置。 本創作的目的就疋在提供一種生產低溫喷射電漿，並且 可直接控制電漿噴射氣體之出口溫度的電漿放電裝置，此帝 漿放電裝置包括：外電極、絕緣層、内電極以及導孰續片。 外雜具有^腔室以及第二腔室，其中第—腔室之一端設 2、開D第—腔室形成於此開口的外側，且並未與第一腔 至連^ ’可用來定義出_條銜接開口的通道。絕緣層位於第 盘：：之内側側璧上。内電極設於第一腔室内，藉由内電極 /、—電極電弧放電產生的電漿，係經由開口經通道喷出第一 脸至之外。導熱鰭片則形成於第二腔室的内側側璧上。 本創作的另_目的就是在提供—種生產低溫喷射電製的 M312003 電漿放電裝置，此電爿I ★ 毛水放电表置包括：外電極、内電極、结 緣層以及導熱鰭片。外f ^ 、、 設有一個開口。絕缘=ΐ有弟一腔室，第-腔室的-端 、巴緣層位於第一腔室的内側側璧上。 設於第一腔室内，获士如不上t 包極 胳〃— 糟由内電極與外電極電弧放電產生的雷 水，係經由開口嗜屮楚 電 贺出弟一腔至之外，其中内電極具有一個 來通入冷媒以進行埶六 用 極的箸"、、又換的弟二腔室。導熱鰭片形成於内電 和的弟一腔至的内側側璧上。 位於=以上所述之較佳實施例，本創作之技術特徵係採用 六減内電極之中，不與電漿放電腔室連通的腔室來 m ’藉由冷媒的熱交換冷卻内電極、外電極或喷 漿f射氣體的通道，並利用腔室内的導熱鰭片來增進熱交換 效率’以達到提供低溫電漿喷射氣體的目的。 、 【實施方式】 、，本創作的目的係在提供一種可產生低溫電漿喷射氣體， f且可控制電㈣射氣體之出口溫度的電If放電裝置。爲了 壤本創作的技術優勢、特徵能更明顯易懂，以下特舉出一種 電水炬1 〇〇作為較佳實施例來加以說明。 一 H…、第1圖，第1圖係依照本創作一較佳實施例所緣 示的一種電漿炬的剖面示意圖。 、曰 、電漿炬100包括··外電極102、絕緣層104、内電極1〇6 以及稷數個導熱鰭片12G。外電極1()2内部具有_個第一腔室 101以及一個第二腔室lu。其中第一腔室ι〇ι之末端設有一 個開口 1G3，在本創作的其他較佳實施例之中，外電極102 M312003 5 :有弟一腔室101的部份係-管狀結構，而開σ l〇3係— 員形開口。第二腔室111則獨立地形成於開口 103的外側， ί未與第一腔室101連通，而是以其（第二腔室叫側璧環繞 〇3邊緣’藉以定義出-條用來銜接開口 103,並且由開 口 103往第-腔室1〇1外部延伸的通道⑴。 絕緣層1〇4位於第一腔室1〇1之内壁上，在本實施例之 中絕緣層UM之厚度範圍實f係介於G(nm㈣5q随之間。 絕緣層1〇4之材質可以是，例如塑化材料、有機材質、或上 述任意組合’在本實施例之中，絕緣層104係由厚度丨麵之 石英材質所構成。 内電極106係藉由平板108固定於第一腔t 101内，平 板108具有複數個輸入口 109,用來輸入工作氣體㈣。内電 極1〇6具有—個放電端105 ’藉由内電極106與外電極1〇2 電弧放電可射出-條電漿柱107通過第-腔室101，到達開口 103的内緣。工作氣體係以錢流動（SwiriingFi。％)的方式導 入内電極H)6與外電極1G2之間，錢解離的錢氣體⑵ 能穩定地維持在第—腔室⑻中央，再由開口氣經通道山 :射出第-腔t ΗΠ之外，可使電漿柱的收縮，藉此減少能 量散失到管壁，以提高工作氣體11〇的游離程度。 爲了能直接控制電漿氣體m &出口溫度，在本創作的 實施例之中，係在第二腔室m通人冷媒123,例如冷卻液體、 冷卻氣體或上述兩種冷媒之組合，來進行熱交換以 通道113之中的電漿氣體ι21。 ； 在本創作的較佳實施例之中，第二腔室⑴與熱交換裝 M312003 f 125連通，藉由冷卻液體的相變進行熱交換。例如第二腔 室111與熱交換裝置的冷卻塔或屢縮機，藉由冷卻液體，例 :水、矽油、氟氯烷、液態氮、液態氨、液態二氧化碳、液 態空氣或上述任意組合，的蒸發與凝集來進行熱交換。在本 創作的其他實施例之中’可直接將冷卻氣體，例如低溫塵縮 空氣’通人第二腔tln進行熱交換後，直接排放回大氣之 中。導熱錯片12G係以-體成形、焊接、卡合、黏合或鎖固 的方式固定於第二腔室U1的内側側璧之上，藉以增進冷媒 123的熱父換效率。在本實施之中，導熱鰭片係以平行通 道113之中軸線s的方式，固定在第二腔室Ul的内側側璧 之上（請參照第2圖）。在本創作的另—實施例之中，導熱錯片 120係以垂直通道113之中軸線S的方式，固定在第二腔室 111的内側側璧之上。 為了降低外電極1〇2的工作溫度，以延長電極的使用壽 在本創作的—些實施例之中則會採用冷卻水管⑺嵌設 於第月工i ιοί的側璧之中’用以冷卻外電極1〇2。然而在另 外一些實施例之中’則採用冷卻水管129套設於第一腔室ι〇ι 的側璧之外。 卜為了L長電極的使用壽命，通常會使用耐高溫金屬 (例如白至或白金摻雜錢）作放電電極（内電極伽）。另外， 在内電極1〇6係-管殼結構，其令心還具有-個第三腔室115 來k入々媒117，例如冷卻液體、冷卻氣體 二氧化碳）或上述兩種;人姐夕彡人 ^ 虱次 ▽媒之組合，以進行熱交換來冷卻工作 中的内電極10 6。士 a i 电可 在本創作的較佳實施例之中，第三腔室115 M312003 也與熱父換裝置125連通，藉由冷卻液體的相變進行該熱交 換。例如第三腔室115與熱交換裝置的冷卻塔或壓縮機，藉 ^冷卻液體’例如水、石夕油、a氯烧、液態氮、液態氨、液 心一氧化碳、液悲空氣或上述任意組合，的蒸發與凝集來進 行熱交換。 除此之外，在本創作的較佳實施例之中，第三腔室115的 .内側側璧也具有至少一片導熱·鰭片119以-體成形、焊接、 卡合、黏合或鎖固的方式固定於第三腔室丨15的内側側璧之 _ 上，藉以增進冷媒117的熱交換效率。 由上述本創作較佳實施例可知，本創作的技術特徵乃是 採用了具有工作腔室（第一腔室）與冷卻腔室（第二腔室和第三 L室）的外電極’藉由通人冷卻腔室的冷媒進行熱交換以可降 低内、外電極的ΟΙ作溫度。再加上採用了位於冷卻腔室内側 側璧上的導熱鰭片，更可有效地直接控制電漿喷射氣體的出 口溫度’以提供低溫的電漿喷射氣體。解決了習知技術無法 直接控制電«射氣體的出σ溫度的問題，並且同時能延長電極 鲁 使用壽命。 雖然本創作已以一較佳實施例揭露如上，然其並非用以 限定本創作’任何與本創作相關技術領域具有通常知識者， 在不脫離本創作之精神和範圍内，當可作各種之更動與潤 - 飾，因此本創作之保護範圍當視後附之申請專利範圍所界= 者為準。 1 【圖式簡單說明】 11 M312003 =創作之上述和其他目的、特 更明顯易僅’所附圖式之詳細說明如下： 弟1圖係依照本創作一 Ιϋ & 的剖面示意圖。 心例所緣示的-種電聚炬 圖係依照第！圖所緣示的第二腔室結構俯視圖。 為了清楚㈣起見’㈣中的元件並未按照比例尺加以 繪:。在不同圖示之中’㈣參照號碼可能會有重複，用以 標示相對應或相似的元件。M312003 VIII. New description: [New technical field] The present invention relates to a plasma discharge device, and in particular to a plasma discharge device capable of generating low-temperature plasma injection gas and an application method thereof. [Prior Art] The composition of the plasma includes electrons, ions, and electrically neutral particles. The formation of plasma can be formed by high-energy particles, electromagnetic waves (such as cosmic rays, ultraviolet rays, X-rays, etc.) striking a gas, or applying a high temperature to a gas, or applying an external electric field to the gas. Generally, the plasma is generated by passing the required gas into a container, and adding a DC power source, a radio frequency (Radio Frequency) or a microwave (Microwave) energy source under a certain pressure, using a capacitive (capacitive), an inductor. Inductive or the way particles interact with waves, causing the gas to collapse, which is a plasma. In short, the generation of plasma is to apply energy to the gas to stimulate it. At present, common plasma surface treatment technologies include corona, dielectric barrier discharge, etc. However, the above treatment methods have problems in that the energy density is low and the processing speed is slow. Plasma Torch (Plasma Torch) is a common normal piezoelectric discharge device that can be used in industries such as cutting and welding. It can be operated under conditions of high power and high energy density. The principle is to concentrate the plasma energy. In a small volume range, the swirling working gas is partially ionized, so that the working gas can generate an activation reaction and improve the reactivity. However, in the operation of the conventional plasma torch, the temperature of the electrode is often increased due to the heating of the discharge current, and the generated plasma 6 M312003 is too high in temperature of the injection gas, which limits the range of application. For example, when cleaning the terminals of the liquid crystal module, since the optical sheets and structures of the liquid crystal module are mostly heat sensitive materials, they are not suitable for the treatment of high temperature plasma jet gases. In addition, the 'superheated electrode' will change the physical properties of the f-spray gas and its working behavior. For example, the temperature of the superheat will cause a decrease in the free radicals in the gas jet ejecting agent', resulting in a decrease in processing efficiency or failure. In order to solve this problem, the conventional base mostly incorporates a cold coil in the outer electrode or directly places the cold portion outside the outer electrode. However, this technique is only & (iv) the method of low electrode temperature, The grounding reduces the temperature of the plasma injection gas and directly controls the outlet temperature of the plasma injection gas. [New content] Therefore, there is a need to provide a plasma discharge device which can generate a low-temperature plasma jet gas and can directly control the outlet temperature of the plasma jet gas. The purpose of the present invention is to provide a plasma discharge device for producing low temperature jet plasma and directly controlling the outlet temperature of the plasma injection gas, the slurry discharge device comprising: an outer electrode, an insulating layer, an inner electrode and a guide Continued film. The outer chamber has a chamber and a second chamber, wherein one end of the first chamber is provided, and the first chamber is formed on the outer side of the opening, and is not connected to the first chamber. _ a channel that connects the openings. The insulation layer is located on the inner side of the first plate::. The inner electrode is disposed in the first chamber, and the plasma generated by the arc discharge of the inner electrode /, the electrode is sprayed out of the first face through the passage to the outside. The heat transfer fins are formed on the inner side of the second chamber. Another purpose of this creation is to provide a M312003 plasma discharge device for producing low-temperature injection electricity. The electric discharge I ★ hair discharge table includes: an outer electrode, an inner electrode, an edge layer and a heat-conducting fin. Outside f ^ , , has an opening. Insulation = a chamber with a chamber, the end of the chamber - the edge of the edge is located on the inner side of the first chamber. Set in the first chamber, if you don't get the t-package, the thunder water generated by the arc discharge of the inner electrode and the outer electrode is passed through the opening and is embarrassed. The electrode has a second chamber that is used to pass the refrigerant to carry out the crucible. The heat-conducting fins are formed on the inner side of the inner cavity and the inner cavity. In the preferred embodiment described above, the technical feature of the present invention is to use a chamber that is not in communication with the plasma discharge chamber, and to cool the inner electrode and the outside by heat exchange of the refrigerant. The electrode or the jet is used to channel the gas, and the heat-conducting fins in the chamber are used to enhance the heat exchange efficiency to achieve the purpose of providing low-temperature plasma jet gas. [Embodiment] The purpose of the present invention is to provide an electric If discharge device capable of generating a low-temperature plasma jet gas, and controlling an outlet temperature of an electric (four) jet gas. In order to make the technical advantages and features of the creation of the invention more obvious, an electric water torch 1 is specifically described as a preferred embodiment. A H, Fig. 1, and Fig. 1 are schematic cross-sectional views of a plasma torch according to a preferred embodiment of the present invention. The pulsing torch 100 includes an outer electrode 102, an insulating layer 104, an inner electrode 1〇6, and a plurality of heat conducting fins 12G. The outer electrode 1 () 2 has a first chamber 101 and a second chamber lu inside. The opening of the first chamber ι〇ι is provided with an opening 1G3. In other preferred embodiments of the present invention, the outer electrode 102 M312003 5 has a part of the tubular-structure of the chamber 101. σ l〇3 series - member-shaped opening. The second chamber 111 is independently formed on the outer side of the opening 103, ί is not in communication with the first chamber 101, but is defined by the second chamber (the side chamber is called the side edge around the edge 3) The opening 103 and the passage (1) extending from the opening 103 to the outside of the first chamber 1〇1. The insulating layer 1〇4 is located on the inner wall of the first chamber 〇1, in the embodiment, the thickness range of the insulating layer UM The actual f is between G (nm) and 5q. The material of the insulating layer 1〇4 may be, for example, a plasticized material, an organic material, or any combination of the above. In the present embodiment, the insulating layer 104 is made of a thickness. The inner electrode 106 is fixed in the first cavity t101 by the flat plate 108. The flat plate 108 has a plurality of input ports 109 for inputting the working gas (4). The inner electrode 1〇6 has a discharge end 105. 'The arc discharge can be emitted by the inner electrode 106 and the outer electrode 1 〇 2 - the plasma column 107 passes through the first chamber 101 to reach the inner edge of the opening 103. The working gas system is introduced by means of money flow (Swiriing Fi.%) Between the inner electrode H)6 and the outer electrode 1G2, the money gas (2) dissociated by the money can be stably Holding in the center of the first chamber (8), and then opening the passage through the channel mountain: injecting the first cavity t ΗΠ, the plasma column can be contracted, thereby reducing the energy loss to the pipe wall to improve the working gas 11 〇 In order to be able to directly control the plasma gas m & outlet temperature, in the embodiment of the present invention, a refrigerant 123 is passed through the second chamber m, such as a cooling liquid, a cooling gas or a combination of the above two refrigerants. The heat exchange is performed with the plasma gas ι21 in the channel 113. In the preferred embodiment of the present invention, the second chamber (1) is in communication with the heat exchange device M312003 f 125 by the phase change of the cooling liquid. Heat exchange, for example, a cooling tower or a retractor of the second chamber 111 and the heat exchange device, by cooling liquid, such as water, eucalyptus oil, chlorofluorocarbon, liquid nitrogen, liquid ammonia, liquid carbon dioxide, liquid air or any of the above Combination, evaporation and agglutination for heat exchange. In other embodiments of the present invention, 'cooling gas, such as low-temperature dust-shrinking air' can be directly exchanged into the second chamber tln for heat exchange and directly discharged back into the atmosphere. .guide The disc 12G is fixed on the inner side 璧 of the second chamber U1 by body forming, welding, snapping, bonding or locking, thereby improving the heat-replacement efficiency of the refrigerant 123. In the present embodiment, The heat-conducting fins are fixed on the inner side 璧 of the second chamber U1 in the manner of the axis s of the parallel channel 113 (please refer to FIG. 2). In another embodiment of the present invention, the thermal conductive chip The 120 series is fixed on the inner side of the second chamber 111 in the manner of the axis S of the vertical passage 113. In order to reduce the operating temperature of the outer electrode 1〇2, the life of the electrode is extended in the present invention. In the embodiment, a cooling water pipe (7) is embedded in the side sill of the month of the month to cool the outer electrode 1〇2. In still other embodiments, however, a cooling water pipe 129 is placed over the side of the first chamber ι〇ι. For the long life of the L long electrode, a high temperature resistant metal (such as white or platinum doped money) is usually used as the discharge electrode (internal electrode gamma). In addition, in the internal electrode 1〇6-shell structure, the core also has a third chamber 115 to enter the medium 117, such as cooling liquid, cooling gas carbon dioxide) or the above two; The combination of the human and the secondary media is used for heat exchange to cool the inner electrode 106 in operation. A preferred embodiment of the present invention, the third chamber 115 M312003 is also in communication with the hot parent switching device 125 for performing the heat exchange by a phase change of the cooling liquid. For example, the third chamber 115 and the cooling tower or compressor of the heat exchange device can be cooled by a liquid such as water, lycopene, a chlorination, liquid nitrogen, liquid ammonia, liquid carbon monoxide, liquid air or any combination thereof. Evaporation and agglutination for heat exchange. In addition, in the preferred embodiment of the present invention, the inner side of the third chamber 115 also has at least one heat-conducting fin 119 formed, welded, snapped, bonded or locked. The mode is fixed to the inner side of the third chamber 丨15 to enhance the heat exchange efficiency of the refrigerant 117. It can be seen from the above preferred embodiment of the present invention that the technical feature of the present invention is to use an external electrode having a working chamber (first chamber) and a cooling chamber (second chamber and third L chamber). The refrigerant passing through the cooling chamber undergoes heat exchange to lower the temperature of the inner and outer electrodes. In addition, by using the heat-conducting fins located on the side of the cooling chamber, the outlet temperature of the plasma injection gas can be directly controlled to provide a low-temperature plasma jet gas. It solves the problem that the conventional technology cannot directly control the σ temperature of the electric gas, and at the same time prolongs the service life of the electrode. Although the present invention has been disclosed in a preferred embodiment as above, it is not intended to limit the present invention to anyone having ordinary knowledge in the technical field related to the present invention, and may be used in various ways without departing from the spirit and scope of the present invention. Change and Run - Decoration, therefore the scope of protection of this creation is subject to the scope of the patent application. 1 [Simple description of the schema] 11 M312003 = The above and other purposes of the creation, the details of which are more obvious, and the detailed description of the drawings is as follows: The brother 1 is a schematic cross-sectional view of the 依照 & The kind of electric torch shown in the heart of the case is based on the first! The top view of the second chamber structure is shown. For the sake of clarity (4), the components in '(4) are not drawn to scale: Among the different illustrations, the (4) reference number may be repeated to indicate corresponding or similar components.
【主要元件符號說明】 100 電漿炬 102 外電極 104 絕緣層 106 内電極 108 平板 110 工作氣體 113 通道 117 冷媒 120 導熱鰭片 123 冷媒 127 冷卻水管[Main component symbol description] 100 Plasma torch 102 External electrode 104 Insulation layer 106 Internal electrode 108 Plate 110 Working gas 113 Channel 117 Refrigerant 120 Heat-conducting fin 123 Refrigerant 127 Cooling water pipe
101 :第一腔室 103 :開口 105 :放電端 107 :電漿柱 109 :輸入口 111 :第二腔室 115 :第三腔室 119 :導熱鰭片 121 :電漿氣體 125 :熱交換裝置 129 :冷卻水管 s :通道之中軸線 12101: first chamber 103: opening 105: discharge end 107: plasma column 109: input port 111: second chamber 115: third chamber 119: heat transfer fin 121: plasma gas 125: heat exchange device 129 : Cooling water pipe s: channel axis 12