M310201 八、新型說明·· 【新型所屬之技術領域】 本創作是關於一種充氣淨化哭， μ 容器之充氣淨化器。 的尤其關於一種存放半導體元件之 【先前技術】 存放半導體元件之容器， 避免存放其中的晶圓或光罩受^光罩存放盒等，為了 等)的污染，因此必須使容財水氣、阿摩尼亞 一種習知使容器充滿惰性氣體㈣。 體，然使容器惰:Ξ 能維持整個空間中。此外，亦需要較高的成本方 體。 nt充糾性讀，以利於自然擴散並置換容器中之氣 惰性^所;縮==式體元件之容器快速充滿 力的目標。、+¥脰兀件與5染物質的接觸時間便是目前亟需努 【新型内容】 存放題，本創作之目的在於提供—種充氣淨化器，其可使 =月=器快速充滿惰性氣體且適合於多種型式之容器。 ιίΐΐί，本創作之充氣淨化11是用以對存放半導體元件之 填—氣體，該容器設有一通氣孔，該充氣淨化器包含-外殼、 口 二二噴嘴一控制單元以及—承載基板。該氣閥單元之入 接·;―源。該噴嘴之入口端連接於該氣閥單元之出口端。該 工制早兀购氣閥單元訊號連接，用以控制該_單元之開啟盘關 M310201 置與容器之該 放车^本1:作之充氣淨化器，其可絲且快速地將情純體斧入y 罢古戈I 兄後之谷态存放在一般空間即可，而可筋含π 本創作之承載基= 容器。 、此夠乂早的充氣淨化器適用於多種型式的 【實施方式】 件之目關圖式’說明依本創作較佳實施例之存放半導體元 明。谷°° “淨化器’其中相同的元件將以相同的參照符號加^說 存放圖i，本創作較佳實施例之充氣淨化器1是用以對 ，件之—谷器充填—氣體。該氣體為-惰性氣體，例如^ m 充氣淨化器1包含一外殼1卜一氣閥單元13、-喷嘴 去入70 14、以及—承載基板12。外殼11之—侧可設置使用 1 /使用者^者^控操作。需注意者，若採自動化操作之充氣淨化器 連接一，二 則非必要’可不加以設置。氣閥單元13之入口端 門m — ^版6、，例如其為一氮氣鋼瓶。喷嘴121之入口端則連接於氣 t出口端。控制單元14與氣閥單元13訊號連接，用以控制 早二3啟與關閉。承載基板12與外殼11連接，用以承載該 盥4交之出口端設置於承載基板12之外表面，使噴嘴121 S音^減4目互連接而對該容器進行充氣，其中，7轉基板12 對應^夠相=1嘴12丨之位置與多麵式之該容器之該通氣孔相 M310201 本創作之充氣淨化器1更包含一壓力計15用以债測該容哭内 •=，並將-壓力訊號回饋至控制單元14，控制單元14即可 力峨控制氣閥單元13之開啟與關閉。充氣淨化器j亦可 ;^ 器16，其設置於喷嘴121之入口端，用以過滤 ^ ^慮 例如粒徑介於0.02⑽至〇·2师之間之微小粒子。_之被J粒子’ _ 為了讓使用者便於操作，充氣淨化器1更包含一产晋顧-如一 ^其設置於氣閥單元13之出口端，用以顯示充氣時之^體^早= ，，本創作之充氣淨化器i之充氣可分為崎段，第—階段L古 虱，第二階段為低麗充氣。因此，氣閥單元υ 'ϋ， • Si第二氣閥132。第—氣_以及第二氣閥in之弟入;^ 體!、，其中，第-氣閥131可提供較大流量之氣體，亦即ίί 亡，孔’弟一乳閥132則提供較小流量之氣體’亦即以低慶充^ :二閥131以及第二氣閥132之出口端可分別設置流量計使 ^工’例如流量顯示單it 17包含—第—流量計171連接於 = 1之出口端；以及-第二流量計172連接於第二氣閥132之=伐 又，存放半導體元件之容器若包含一定位部而。 面即可設置-定位單元⑵，定位單元m盥气板12之外表 該容器之該通氣孔與喷嘴121相以導引 對應。此外，承餘板12之外H為P與相孔或凹槽相 仙卜㈣更設置—感測單元123，其可用以 板12是否已承載該容器。舉例而言，感測單元123為:用= 基板12上承載該容ϋ時即按壓住感測單元123 完畢德 走邊各器時即釋放該按鈕。 元虱凡畢後取 嘖嘴意者’本創作之絲淨彳⑼1之承載基板12可任★更換，传 貝备121之位置與多種型式之該容器之哕 二更換使 =〒不同型式之通氣孔相對應， ：異 器。另外，承載基板12，上之定位^於?種型式之容 置亦可配合不同型式之容器加以設置，甚至可；置:二 7 M310201 以使不同型式之容器能更準確地置於承載基板12，上。簡言之，承載 基板上之噴嘴、定位單元以及感測單元等元件之數量以及相對位置， 皆可由所屬技術領域之普通技術人員依實際需求加以變更。 、a為達到自動化官理及操作，本創作之充氣淨化器1更包含一第一M310201 VIII. New description·· 【New technology field】 This creation is about a gas purifier that purifies and purifies, μ container. In particular, the prior art relates to a container for storing semiconductor components, which avoids the contamination of the wafer or the reticle of the reticle storage box, etc., so that it is necessary to make the money and gas. A common practice in Monia is to fill the container with an inert gas (4). Body, but make the container idle: Ξ can maintain the entire space. In addition, a higher cost option is required. Nt corrective reading, in order to facilitate the natural diffusion and replace the gas in the container inertia; shrink = = the body of the container is a fast-filled target. The contact time between the +, +, and the 5 dyes is currently the need for a new type of storage. The purpose of this creation is to provide a gas purifier that can quickly fill the inert gas with the month. Suitable for a wide range of containers. Ιίΐΐί, the inflated cleaning 11 of the present invention is for filling a gas for storing a semiconductor element, and the container is provided with a venting hole, and the gas purifying device comprises a casing, a second nozzle, a control unit and a carrier substrate. The gas valve unit is connected to; source. The inlet end of the nozzle is connected to the outlet end of the gas valve unit. The industrial system purchases the valve unit signal connection early, and controls the opening of the unit to be closed. The M310201 is placed in the container and the air purifier is used as the air purifier, which can be purely and purely The axe enters the y and stops the Gu Ge I. The valley of the brother is stored in the general space, and the ribs contain π. The carrier of the creation = container. The sufficiently long inflatable purifier is suitable for various types of embodiments. [Embodiment] The present invention is directed to the storage of semiconductor elements in accordance with the preferred embodiment of the present invention. The same components of the "purifier" will be denoted by the same reference numerals, and the gas purifier 1 of the preferred embodiment of the present invention is used for filling the gas-gas. The gas is an inert gas, for example, the air purifier 1 includes a casing 1 and a valve unit 13, a nozzle to enter 70 14 , and a carrier substrate 12. The side of the casing 11 can be set to use 1 / user ^ ^ Control operation. It should be noted that if the automatic operation of the air purifier is connected, the second and the second are not necessary 'can be set. The inlet end door of the gas valve unit 13 m - ^ version 6, for example, it is a nitrogen cylinder. The inlet end of the nozzle 121 is connected to the outlet end of the gas t. The control unit 14 is connected to the valve unit 13 for controlling the opening and closing of the air. The carrier substrate 12 is connected to the outer casing 11 for carrying the 盥4 intersection. The outlet end is disposed on the outer surface of the carrier substrate 12, and the nozzle 121 S is reduced by 4 meshes to interconnect the container, wherein the 7-turn substrate 12 corresponds to the position of the phase 12 and the 12-inch position and the multi-faceted The vent hole of the container M310201 The device 1 further includes a pressure gauge 15 for detecting the crying and the pressure signal, and the pressure signal is fed back to the control unit 14, and the control unit 14 can control the opening and closing of the gas valve unit 13. j can also be used; the device 16, which is disposed at the entrance end of the nozzle 121, for filtering, for example, a small particle having a particle size between 0.02 (10) and 〇·2 division. _ by the J particle ' _ The user is convenient to operate, and the gas purifier 1 further includes a production and delivery device - such as a ^ which is disposed at the outlet end of the gas valve unit 13 for displaying the body of the gas when it is inflated, and the inflatable purifier i of the present invention The aeration can be divided into the sub-segment, the first stage L ancient sputum, and the second stage is the low-grade inflation. Therefore, the gas valve unit υ 'ϋ, • Si second gas valve 132. The first gas _ and the second gas valve in The younger member enters the body of the gas valve, that is, the gas is supplied at a higher flow rate, that is, ίί is dead, and the hole 'di-one valve 132 provides a gas with a smaller flow rate' The outlets of the two valves 131 and the second gas valve 132 can be respectively provided with a flow meter to make a work flow, for example, the flow rate display unit it 17 includes - the first flow meter 171 Connected to the outlet end of = 1; and - the second flow meter 172 is connected to the second gas valve 132. The container for storing the semiconductor component includes a positioning portion. The surface can be set - the positioning unit (2), the positioning unit The vent hole of the container outside the m enthalpy plate 12 is guided to correspond to the nozzle 121. Further, outside the bearing plate 12, H is P and the phase hole or the groove phase is arranged (four) - the sensing unit 123 For example, the sensing unit 123 is: when the substrate 12 is carried on the substrate 12, the sensing unit 123 is pressed, and the button is released when the device is turned on. . After the completion of the Yuan 虱 毕 啧 啧 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The pores correspond, : different instruments. In addition, the carrier substrate 12, the positioning of the positioning type can also be set with different types of containers, or even; 2: 7 M310201 to enable different types of containers to be more accurately placed on the carrier substrate 12 ,on. In short, the number and relative positions of the components on the carrier substrate, the positioning unit, and the sensing unit can be changed by those skilled in the art according to actual needs. a, in order to achieve automation and operation, the creation of the inflatable purifier 1 further includes a first
ΐΓΪΓ18，其與控制單元14訊號連接。第—通訊介面18可用以與 二 匕控制系統訊號連接，以利生產管理，例如第一通訊介面U 1/、了 RS232介面’該自動化控制系統可為一製造執行系統 勺Γ I gExeeutlGnSystems’MES)。賴狀統雜II 1 更可 _人而f .備號連接，以進行自動充氣。例如第二通訊 —光學資料傳送器，該自動化設備可為—自動= 提放凹^ 11^，如*圖°4 Μ -又’為了配合自動化操作，可在外殼設置一 需注音^ : ^ ’關自動化設備之機械手臂提放該容器。 型輔樓丨1’之兩侧，然而， 中央部位。 之不同，亦可將提放凹槽112奴於外殼之 放丰ϊί本f作Ϊ充氣淨化11，其可主動且快速地將惰性氣體充入在 可將充氣s 省設置充滿惰性氣體空間的及體的空間中’因此可節 可依容器的型式隨意更才本創作之承載基板 式的容器。 、 匕。早的充氣淨化器適用於多種型 以上所述僅為舉例性， 了依據上述本創作之實施例進行等二任何熟悉該項技術者均 更，均應包含於後附對其進行之等效修改或 M310201 【圖式簡單說明】 - 圖1為一立體圖，顯示本創作較佳實施例之充氣淨化器之外觀。 圖2為一方塊圖，顯示本創作較佳實施例之充氣淨化器之硬體架 構。 圖3為一立體圖，顯示本創作另一較佳實施例之充氣淨化器之承 - 載基板。 圖4為一立體圖，顯示本創作另一較佳實施例之充氣淨化器之外 殼。 【主要元件符號說明】 1 充氣淨化器 11、 11’外殼 111 使用者介面 112 提放凹槽 12、 12’ 承載基板 121、121’ 噴嘴 122 定位單元 123感測單元 124次定位單元 _ 13 氣閥單元 _ 131第一氣閥 132第二氣閥 14 控制單元 15 壓力計 16 過濾器 17 流量顯示單元 171第一流量計 172第二流量計 18 第一通訊介面 第二通訊介面 9 19ΐΓΪΓ18, which is connected to the control unit 14 signal. The first communication interface 18 can be used to connect with the control system signal for production management, for example, the first communication interface U 1 /, the RS232 interface 'the automation control system can be a manufacturing execution system spoon I gExeeutlGnSystems' MES) . Lai-like compound II 1 is more _ people and f. The serial number is connected for automatic inflation. For example, the second communication-optical data transmitter, the automation device can be - automatic = lifting concave ^ 11 ^, such as * figure °4 Μ - and 'in order to cooperate with the automation operation, can set a need to sound in the shell ^ : ^ ' The robotic arm of the automated device lifts the container. The auxiliary building is on both sides of the 1', however, the central part. Differently, the lifting groove 112 can also be used as the air purifying filter 11 , which can actively and quickly charge the inert gas into the space where the inflatable gas can be filled with the inert gas space. In the space of the body, it is therefore possible to store the substrate-based container which can be created according to the type of the container. , oh. Early air purifiers are suitable for a variety of types. The above descriptions are only exemplary. According to the above-mentioned embodiments of the present invention, any one familiar with the technology should be included in the equivalent modification. Or M310201 [Simplified illustration of the drawings] - Fig. 1 is a perspective view showing the appearance of the air purifier of the preferred embodiment of the present invention. Fig. 2 is a block diagram showing the hardware structure of the gas purifier of the preferred embodiment of the present invention. Fig. 3 is a perspective view showing the carrier substrate of the air purifier of another preferred embodiment of the present invention. Fig. 4 is a perspective view showing the outer casing of the air purifier of another preferred embodiment of the present invention. [Main component symbol description] 1 Inflator purifier 11, 11' housing 111 User interface 112 Lifting grooves 12, 12' Carrier substrate 121, 121' Nozzle 122 Positioning unit 123 Sensing unit 124 Sub-positioning unit _ 13 Air valve Unit_131 First air valve 132 Second air valve 14 Control unit 15 Pressure gauge 16 Filter 17 Flow rate display unit 171 First flow meter 172 Second flow meter 18 First communication interface Second communication interface 9 19