TWM289773U - Leakage preventing structure of vacuum film plating machine - Google Patents

Leakage preventing structure of vacuum film plating machine Download PDF

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Publication number
TWM289773U
TWM289773U TW94219326U TW94219326U TWM289773U TW M289773 U TWM289773 U TW M289773U TW 94219326 U TW94219326 U TW 94219326U TW 94219326 U TW94219326 U TW 94219326U TW M289773 U TWM289773 U TW M289773U
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Taiwan
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sealing
ring
compartment
leak
group
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TW94219326U
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Chinese (zh)
Inventor
Yi-Cheng Liou
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Taiwan Sputtering Prec Machine
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Priority to TW94219326U priority Critical patent/TWM289773U/en
Publication of TWM289773U publication Critical patent/TWM289773U/en

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• M289773 八、新S説明· 【新型所屬之技術領域】 本創作係提供一種真空鍍膜機之防漏結構(二),尤 指其技術上提供一種可以反覆開啟閉合動作中,隔艙密封 組筒形氣密容置空間之氣密防漏結構,仍可達到氣密不洩 漏功效。 【先前技術】 習用之〇型環均製成實心之軟膠質體,藉由軟膠質體 之彈性,使其在構件間之相互鎖設時,得以被壓縮而達到 緊迫之防漏特性。 惟,其習用之〇型環仍存在有下列缺失: 其一為:實心軟膠質體之〇型環,在長期受壓之狀態 下,會造成〇型環被壓扁變形,如此在維修或其他之需要 經常作開啟關閉之場所,該〇型環將需要換新或根本無法 使用,或者使用會造成洩漏問題,為其缺失者。 其二為:實心軟膠質體之〇型環,其使用範圍有嚴格 之規範,如果構件間之公差過大時,該習用〇型環即可能 無法使用,而必須尋求其他〇型環套用,為其缺失者。 是以,針對上述習知結構所存在之問題點,如何開發 一種更具理想實用性之創新結構,實消費者所殷切企盼, 亦係相關業者須努力研發突破之目標及方向。 有鑑於此,創作人本於多年從事相關產品之製造開發 與設計經驗,針對上述之目標,詳加設計與審慎評估後, 終得一確具實用性之本創作。 • M289773 【新型内容】 。欲解決之技術問題點:習用之防漏結構-般採用實,、、 軚恥’〇型%,該〇型環之問題點在於容易受壓變形,、 成其變形後無法愎原,如果機械構件間拆後再組裝澴厂 時,該變形0型環即是造成沒漏之處’另I,因為::: 製成實心軟膠質,也使其容許公差受限。 衣 解決問題之技術特點:提供-種真空鍍膜機之防漏結 構(二),該防漏結構採用呀充氣之立體〇型環,得以在= 械構件之拆離時作洩氣動作,並在機械構件之纟且壯 、 作,充氣可以確保構件問/衣日可作充 友丨〜”雕〇寸作洩氣動作,並 =:I二:可以確保構件間之密封不洩漏效果士 " 、μ防漏結構使用於機械 果,如此_ 許公差較習用者大者。 属且其充氣式防漏結構之 對照先前技術之功效:羽 — 使用於本創作之氣密蓋上,白用之貫心軟膠質Q型環如 合’將會造成習用之實心於則因氣密蓋需要經常開啟、 甚至造成茂漏之情形,'而Q型環之密閉效果減低 —問題點,再其習用〇型環之A 1作之防漏結構得改善j 防漏結構則具有較大合4公差值有限,本創作 效增進。 公差’本創作較先前技… 有關本創作所採用之技術、 仏霄施例並配合圖式詳細說叼於 '、功效,茲舉—較 的、構造及特徵,當可由之得—1相丨。本創作上述之目 f實施方式J /衣八而具體的瞭解。 -M289773 本創作係提供一種真空鍍膜機之防漏結構i二)設計 - 者。 _ 參閱第一圖所示,係為本創作之其一較佳實施例立體 _ 示意圖,該真空鍍膜機(1 )主要於平台(2 )提供真空 腔(3 )固定,平台(2 )上設滑執(6 ),提供前封板(4 ) 與後封板(5 )滑移調整位置,真空腔(3 )設上滑執(3 a )提供前封板(4 )上組設之收發料機構(5 a )校正 I 滑移,真空腔(3 )内室提供組設一隔艙密封組(1 0 ), 再其前、後封板(4 )( 5 )往真空腔(3 )作密封動作時, 前、後封板(4 )( 5 )上方組設之對應隔艙密封組(1 0 ) 開口( 2 2 )( 2 3 )之氣密蓋(3 0 )則得前、後密封隔 艙密封組(1 ◦)之數氣密容置空間(2 0 ),使其真空腔 (3)内部真空外,每一氣密容置空間(20)並可作不 同真空壓力調整,且其間灌注不同製程氣體也不會相互污 染,或相互影響。 • 參閱第二圖所示,係該本創作之隔艙密封組局部立體 分解圖,其真空鍍膜機之隔艙密封組(1 0 )設成多個氣 密容置空間(2 0 ),由第二圖之實施態樣,其氣密容置空 間(2 0 )可設成四個,且每一個氣密容置空間(2 0 ) 為多角形管體(2 1 ),多角形管體(2 1 )之前後兩端則 形成有多角形之開口(2 2)(2 3),所有多角形管體(2 1 )之一邊均相互啣接成一圓弧凹室(2 4 ); 數氣密蓋(3 0 ),前、後氣密蓋之蓋體形狀略同於開 口( 2 2 ) ( 2 3 ),蓋體大小則略大於開口( 2 2 ) ( 2 3 ), 7 M289773 並在就余备(3 Ο ..)蓋合隔搶密封組弓了 ' .¾端面之貼i位 , 置,設有環繞之溝槽(3 1 ),溝槽(3 1 ) —處並設有往 . 蓋體外部貫通之孔洞(3 1 1 ),溝槽(3 1 )内得組設立 * 體〇型環(4 0 ),〇型環(4 0 )之充氣嘴(4 1 )由孔 洞(3 1 1 )穿出; 同樣如第二圖所示,各〇型環(4 0 ),内部設具充氣 室(4 2 )(參閱第四圖所示),而〇型環外側面設有充氣 嘴(4 1 )連通充氣室(4 2 ),〇型環(4 0 )組設於氣 ® 密蓋(30)之溝槽(31)内者。 續請參閱第三圖之氣密蓋閉合於隔艙密封組之立體示 意圖,其隔艙密封組(1 0 )之每一氣密容置空間(2 0 ) 多角形管體(2 1 )(參閱第二圖所示)之數前後端開孔(2 2 )( 2 3 ),得為對應數量之氣密蓋(3 0 )所罩蓋封閉, 並該氣密蓋(3 0 )與隔搶密封組(1 0 )前端面(1 1 )、 或氣密蓋(3 0 )與隔艙密封組(1 0 )後端面(1 2 ) • 貼合處(配合參閱第五圖所示),該氣密蓋(3 0 )側設有 溝槽(3 1 )組設〇型環(4 0 ),〇型環(4 0 )充氣膨 脹得密封端面(1 1 )( 1 2 )與氣密蓋(3 0 )貼合形成 之缝隙,如此在抽真空時,得使氣密容置空間(2 0 )確 實呈現真空狀態,並使其真空腔内各氣密容置空間(2 0 ) 之真空狀態不相同,灌注之製程氣體也不會相互污染,或 相互影響者。 參閱第四圖所示,為第三圖之4 一 4剖面〇型環(4 0 )充氣前之剖示圖,其隔艙密封組(1 0 )之加工完成 M289773 或待加工前,係與氣密蓋(η !分離,待該欲鍍膜之# , 料裝於收發料機構(5 a )(參間第一圖所示)並前封板(4 ) , 與後封板(5 )封閉於真空腔(;3 ),真空腔(3 )可抽真 空外,每一氣密蓋(3 0 )亦密貼於隔艙密封組(1 0 ) 端面(1 1 )或(1 2 ),並閉合開口( 2 2 )或(2 3 ), 使其内部形成一氣密容置空間(20),氣密蓋(30)在 密貼隔艙密封組(1 0 )端面(1 1 )或(1 2 )之適處 設有多角形環狀溝槽(3 1 ),該溝槽(3 1 )内組設有〇 ® 型環(4 0 ),溝槽(3 1 )設有孔洞(3 1 1 )貫通至氣 密蓋(3 0 )之外部,孔洞(3 1 1 )提供〇型環(4 0 ) 充氣嘴(4 1 )組裝,使充氣嘴(4 1 )自由端(4 1 1 ) 突出於外。 參閱第五圖所示,為第三圖之4 一 4剖面〇型環充氣 後之剖示圖,〇型環(4 0 )藉由充氣嘴(4 1 )之自由 端(4 1 1 )突出於外,供壓力氣體啣接灌入,氣體藉由 • 充氣嘴(41)進入〇型環(40)充氣室(42),得令 〇型環(4 0 )膨脹而脹滿於溝槽(3 1 )及氣密蓋(3 0 )與隔艙密封組(1 0 )端面(1 1 )或(1 2 )縫隙, 如此得以達到確實防漏之效果,並使每一多角形管體(2 1 )内部均形成一氣密容置空間(2 0 ),並且各別氣密容 置空間(2 0 )之真空壓力均得各別調整,且不同氣密容 置空間(2 0 )之不同製程氣體也不會相互影響者。 該〇型環(4 0 )之斷面為矩形框,亦可製成其他如 圓形框等之幾何形狀,而其〇型環(4 0 )之充氣嘴(4 M289773 i )得設成一個以上,並該氣密蓋(3 (.))之孔汜 - 1)亦可配合增減 , 本創作功效增進之處如下: ' 1 、提供一種真空鍍膜機之防漏結構(二)之 構型態,使其得以在真空腔之真空環境中,再創造 不同真空壓力之氣密容置空間,並藉由充氣式之〇 供確實防漏之密封效果,且在其多次之機械分合動 依然能夠保持其最佳密封防漏效果者。 ® 2、藉此特殊改良結構設計,其主要該構件上 艙密封組設成數個多角形管體,多角形管體間並構 弧凹室,而多角形管體之二端開口 ,得以對應數量 蓋蓋合,使多角形管體内部形成氣密容置空間,氣 貼隔搶密封組之端面處得設有溝槽’溝槽内組設〇 〇型環充氣達氣密容置空間密封防漏效果,並以泵 空灌入製程氣體,讓每一氣密容置空間有不同之真 φ 與製程氣體,可進行不同之加工製程,其間之製程 會相互影響,產品品質得以提升者。 由其上述可知,本創作之真空鍍膜機之防: (二),確為業界首見而符合新型專利之新穎性要件 其全面性之創新設計,符合新型專利之進步性要件 確實防漏及反覆充氣使用均能保持密封防漏效果, 佳之產業利用性者。 前文係針對本創作之較佳實施例為本創作之技 進行具體之說明:惟,熟悉此項技術之人士當可在 創新結 出多個 型環提 作中, 利用隔 成一圓 之氣密 密蓋密 型環, 浦抽真 空壓力 氣體不 漏結構 者,而 ,而其 符合較 術特徵 不脫離 10 M289773 本創作之與原則下對本創作進行變吏與修改·而該等 變更與修改,皆應涵蓋於如下申請專利範圍所界定之範_ 中 。 【圖式簡單說明】 第一圖:係本創作之其一較佳實施例立體示意圖。 第二圖:係本創作之隔艙密封組局部立體分解圖。 第三圖:氣密蓋閉合於隔艙密封組之立體示意圖。 第四圖:第三圖之4 — 4剖面〇型環充氣前之剖示圖。 第五圖:第三圖之4 — 4剖面〇型環充氣後之剖示圖。 【主要元件符號說明】 (1)真空鍍膜機 (2)平台 (3 )真空腔 (4 )前封板 (5 a )收發料機構 (1 0 )隔艙密封組 • ( 1 2 )端面 (2 1 )多角形管體 (3 a )滑執 (5 )後封板 (6 )滑軌 (1 1 )端面 (2 0 )氣密容置空間 (2 2 )開口 (2 3 )開口 (3 0 )氣密蓋 (3 1 1 )孔洞 (4 1 )充氣嘴 (4 2 )充氣室 (2 4 )圓弧凹室 (31)溝槽 (4 0 ) 〇型環 (4 1 1 )自由端 11• M289773 VIII, new S description · [New technical field] This creation provides a leak-proof structure of vacuum coating machine (2), especially the technical provision of a can open the closing action, the compartment seal group The airtight and leakproof structure of the airtight accommodating space can still achieve the airtight and non-leakage effect. [Prior Art] Conventional ring-shaped rings are made of solid soft gels, and by the elasticity of the soft gel, they are compressed to achieve a tight leak-proof property when the components are locked to each other. However, there are still the following defects in the conventional 〇-type ring: One is: the 软-shaped ring of the solid soft gel, which will cause the 〇-shaped ring to be flattened and deformed under the condition of long-term compression, so in repair or other It needs to be opened and closed frequently. The ring will need to be replaced or not used at all, or the use will cause leakage problems, which are missing. The second is: the soft-rubber type 〇-shaped ring, its scope of use is strictly regulated. If the tolerance between the components is too large, the conventional 〇-shaped ring may not be used, and other 〇-type rings must be sought for Missing. Therefore, in view of the problems existing in the above-mentioned conventional structure, how to develop an innovative structure with more ideal and practicality, the consumers are eagerly awaiting, and the relevant industry must strive to develop the goal and direction of breakthrough. In view of this, the creator has been engaged in the manufacturing development and design experience of related products for many years. After detailed design and careful evaluation of the above objectives, the creator will have a practical and practical creation. • M289773 [new content]. The technical problem to be solved: the leak-proof structure of the conventional use - the actual use, and the shame '〇 type%. The problem of the 〇-type ring is that it is easily deformed by pressure, and it cannot be reduced after its deformation, if the machine When the components are disassembled and assembled, the deformed 0-ring is the one that causes no leakage. Because::: The solid soft gel is made, which also limits the tolerance. The technical features of the clothing solution problem: providing a leak-proof structure of the vacuum coating machine (2), the leakage-proof structure adopts a three-dimensional 〇-shaped ring which is inflated, and can be used for deflation when the detachment of the mechanical component, and in the mechanical The components are strong and strong, and the inflation can ensure that the member asks/clothes can be used as a friend-friendly ”~" 〇 〇 作 作 泄 , = = : : : : : : : : : : : 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以The leak-proof structure is used for mechanical fruit, so that the tolerance is larger than that of the conventional one. The function of the inflatable leak-proof structure is compared with the prior art: feather - used on the airtight cover of the creation, the white is soft Glue Q-rings such as 'will' will cause practical use, because the airtight cover needs to be opened frequently, or even cause leakage, and the sealing effect of the Q-ring is reduced - the problem point, and then the use of the ring type The leakage prevention structure of A 1 is improved. The anti-leakage structure has a larger tolerance value of 4, and the creative effect is improved. Tolerance 'This creation is more than the previous technique... The technology and the implementation method used in this creation In conjunction with the schema, it’s said in detail, The effect, the comparison, the structure and the characteristics, when it can be obtained - 1 phase 丨. This creation of the above-mentioned object f implementation J / clothing eight and specific understanding. -M289773 This creation provides a vacuum coating machine defense Leak structure i 2) design - _ See the first figure, which is a stereoscopic _ schematic view of a preferred embodiment of the creation, the vacuum coating machine (1) mainly provides a vacuum chamber on the platform (2) (3) Fixed, the platform (2) is provided with a slipper (6), which provides a front cover plate (4) and a rear seal plate (5) for sliding adjustment position, and the vacuum chamber (3) is provided with a sliding handle (3 a) to provide a front seal. The transceiver mechanism (5 a ) set on the board ( 4 ) corrects the I slip, and the inner chamber of the vacuum chamber ( 3 ) provides a compartment seal group ( 10 ), and then the front and rear seal plates (4) (5) When the vacuum chamber (3) is sealed, the airtightness of the corresponding compartment seal group (10) opening (2 2 ) ( 2 3 ) is set above the front and rear sealing plates (4) ( 5 ) The cover (30) has the airtight accommodating space (20) of the front and rear sealed compartment sealing group (1 ◦), so that the vacuum chamber (3) is externally vacuumed, and each airtight accommodating space (20) ) and can not The vacuum pressure is adjusted, and the gases in the process are not contaminated or interact with each other. • Refer to the second figure, which is a partial exploded view of the compartment seal group of this creation, and the compartment seal of the vacuum coating machine. The group (10) is set as a plurality of airtight accommodating spaces (20). According to the embodiment of the second figure, the airtight accommodating space (20) can be set to four, and each airtight capacity The space (2 0 ) is a polygonal pipe body (2 1 ), and a polygonal opening (2 2) (2 3) is formed in front and rear ends of the polygonal pipe body (2 1 ), and all the polygonal pipe bodies ( 2 1) One of the sides is connected to each other to form an arcuate recess (2 4 ); the number of airtight covers (30), the front and rear airtight cover are slightly the same shape as the opening (2 2 ) ( 2 3 ) The size of the cover is slightly larger than the opening ( 2 2 ) ( 2 3 ), 7 M289773 and the cover is sealed with the rest of the seal (3 Ο ..). The position of the .3⁄4 end face is set, set, set There is a surrounding groove (3 1 ), and a groove (3 1 1 ) passing through the outside of the cover body is provided at the groove (3 1 ), and the groove (3 1 ) is set up to form a body ring type (4 0 ), 〇-ring (4 0 The aeration nozzle (4 1 ) is pierced by the hole (3 1 1 ); as shown in the second figure, each of the 〇-shaped ring (40) is internally provided with a plenum (4 2 ) (see the fourth figure) Shown), while the outer side of the 〇-shaped ring is provided with an inflation nozzle (4 1 ) communicating with the plenum (4 2 ), and the 〇-shaped ring (40) is disposed in the groove (31) of the gas® cover (30) . For the continuation, please refer to the perspective view of the airtight cover of the third figure closed in the compartment seal group. Each airtight accommodation space (2 0 ) of the compartment seal group (10) is a polygonal tube body (2 1 ) (see The front and rear end openings (2 2 ) ( 2 3 ) shown in the second figure are closed for the corresponding number of airtight covers (30), and the airtight cover (30) is separated from the airtight cover. Sealing group (10) front end face (1 1 ), or airtight cover (30) and compartment seal group (10) rear end face (1 2) • fit (refer to see Figure 5) The airtight cover (30) side is provided with a groove (3 1 ) and a 〇-shaped ring (40), and the 〇-shaped ring (40) is inflated to seal the end surface (1 1 ) (1 2 ) and airtight. The cover (30) is attached to the gap formed, so that when the vacuum is applied, the airtight accommodation space (20) is indeed in a vacuum state, and the airtight accommodation space (2 0) in the vacuum chamber is made. The vacuum conditions are different, and the process gases that are infused are not contaminated or interact with each other. Refer to the fourth figure, which is a cross-sectional view of the 4th and 4th section of the third figure before the inflation of the 〇-type ring (40). The processing of the compartment seal group (10) is completed before M289773 or before processing. Airtight cover (η ! separate, to be coated #, the material is installed in the transceiver mechanism (5 a) (as shown in the first figure) and the front sealing plate (4), and the rear sealing plate (5) is closed In the vacuum chamber (;3), the vacuum chamber (3) can be evacuated, and each airtight cover (30) is also closely attached to the end face (1 1 ) or (1 2 ) of the compartment sealing group (10), and Closing the opening (2 2 ) or (2 3 ) to form an airtight accommodating space (20) inside the airtight cover (30) at the end face (1 1 ) or (1) of the sealed compartment sealing group (10) 2) Properly equipped with a polygonal annular groove (3 1 ), the groove (3 1 ) is provided with a 〇® type ring (40), and the groove (3 1 ) is provided with a hole (3 1 ) 1) penetrates to the outside of the airtight cover (30), and the hole (3 1 1) provides a 〇-shaped ring (40). The aeration nozzle (4 1 ) is assembled to make the aeration nozzle (4 1 ) free end (4 1 1 ) Prominently outside. Referring to the fifth figure, the section of the 4th to 4th section of the third figure is inflated. In the figure, the 〇-shaped ring (40) protrudes from the free end (4 1 1 ) of the aeration nozzle (4 1 ) for the pressure gas to be engaged, and the gas enters the 〇 ring by the inflation nozzle (41). (40) The plenum (42), which expands the 〇-shaped ring (40) and fills the groove (3 1 ) and the airtight cover (30) and the end of the compartment seal group (10) (1 1 ) or (1 2 ) the gap, so as to achieve the effect of preventing leakage, and forming an airtight accommodating space (20) inside each polygonal pipe body (2 1 ), and each airtight accommodating space The vacuum pressures of (2 0 ) are adjusted separately, and the different process gases of different airtight accommodation spaces (20) will not affect each other. The section of the 〇-shaped ring (40) is a rectangular frame. It can also be made into other geometric shapes such as a circular frame, and the inflation nozzle (4 M289773 i ) of the 〇-shaped ring (40) is set to be more than one, and the airtight cover (3 (.)) hole汜-1) can also be combined with increase or decrease. The enhancement of this creation is as follows: '1. Provide a configuration of the leak-proof structure of the vacuum coating machine (2), so that it can be in the vacuum environment of the vacuum chamber, Invasive Different vacuum pressures of the airtight housing space, and by the square inflatable leak-proof seal for the effect does, and its mechanical switching times of the movable still able to maintain its optimum effect by leakproof seal. ® 2, by means of a special improved structural design, the main compartment of the component is arranged in a plurality of polygonal tubes, and the polygonal tubes are arranged in an arc chamber, and the two ends of the polygonal tubes are open to correspond The quantity cover is closed to form a hermetic accommodation space inside the polygonal pipe body, and the groove is provided at the end face of the gas sealing block. The groove is arranged in the groove to be inflated to the airtight accommodating space seal. Leak-proof effect, and pumping process gas into the pump, so that each airtight accommodating space has different true φ and process gases, and different processing processes can be performed. The process in the process will affect each other and the product quality can be improved. It can be seen from the above that the vacuum coating machine of this creation is: (2) It is the first in the industry and meets the novelty requirements of the new patent. Its comprehensive and innovative design meets the progressive requirements of the new patent. Inflatable use can maintain the sealing and leakage prevention effect, and the industrial use of the good. The foregoing texts specifically describe the techniques of the present invention for the preferred embodiment of the present invention: only those who are familiar with the technology can use the airtightness of the circle in the innovation. Cover-type ring, the pumping vacuum pressure gas does not leak the structure, and its conformity with the technical characteristics does not deviate from 10 M289773. The creation and modification of this creation and the changes and modifications should be It is covered in the scope defined in the scope of the patent application below. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a preferred embodiment of the present invention. The second picture: a partial exploded view of the compartment seal group of the present creation. Third figure: a perspective view of the airtight cover closed in the compartment seal group. Figure 4: Section 4 of the third figure. Figure 5: Section 4 of the third figure. [Main component symbol description] (1) Vacuum coating machine (2) Platform (3) Vacuum chamber (4) Front sealing plate (5 a) Transceiver mechanism (1 0) Compartment sealing group • ( 1 2 ) End face (2 1) Polygonal pipe body (3 a) Slipper (5) Rear sealing plate (6) Slide rail (1 1 ) End face (20) Airtight accommodating space (2 2 ) Opening (2 3 ) Opening (3 0 Airtight cover (3 1 1 ) hole (4 1 ) aeration nozzle (4 2 ) plenum (2 4 ) arc alcove (31) groove (4 0 ) 〇 ring (4 1 1 ) free end 11

Claims (1)

M289773 jTt '申請專利範圍: - i * 一種真空鍍膜機之防漏結構I二),係包含有: , 一隔艙密封組,其隔艙密封組上設有數多角形管體, ' 多角形管體間形成一圓弧凹室,多角形管體兩端形成有開 口 ,多角形管體内部為一容置空間,隔艙密封組二端並形 成有端面, 數充氣式〇型環,〇型環内部設有充氣室,〇型環環 周設有充氣嘴連通充氣室,充氣嘴前端形成自由端; ® 數密封蓋,分別對應多角形管體之開口 ,密封蓋蓋合 於開口並密貼隔艙密封組端面,密封蓋於密貼隔艙密封組 處設有溝槽提供充氣式〇型環組設其間,溝槽並設有孔洞 貫通至密封蓋外部,孔洞供〇型環充氣嘴穿出,充氣嘴自 由端並突出於外; 密封蓋與隔艙密封組間得為密合或分離之動作,密合 時〇型環充氣密封,使各別容置空間可各別抽真空而灌入 φ 不同製程氣體。 2 ·如申請專利範圍第1項所述之真空鍍膜機之防漏 結構(二),其中該充氣嘴為一個以上充氣嘴,與密封蓋孔 洞為一個以上孔洞。 3 ·如申請專利範圍第1項所述之真空鍍膜機之防漏 結構(二),其中該〇型環斷面為幾何形狀。 4 ·如申請專利範圍第3項所述之真空鍍膜機之防漏 結構(二),其中該〇型環斷面為矩形框。M289773 jTt 'Scope of application for patents: - i * A leak-proof structure for vacuum coating machine I 2), comprising: , a compartment seal group with a plurality of polygonal tubes on the compartment seal group, 'polygonal tube An arc-shaped alcove is formed between the bodies, and an opening is formed at both ends of the polygonal pipe body. The inside of the polygonal pipe body is an accommodating space, and the two ends of the compartment sealing group are formed with end faces, the number of inflatable 〇-shaped rings, 〇 type The inside of the ring is provided with a plenum chamber, and the 〇-shaped ring ring is provided with an inflation nozzle connected to the plenum chamber, and the front end of the inflation nozzle forms a free end; the number of sealing covers respectively correspond to the opening of the polygonal pipe body, and the sealing cover is closed to the opening and closely attached The end face of the compartment sealing group, the sealing cover is provided with a groove in the sealing compartment of the close-packing compartment to provide an inflatable 〇-shaped ring set therebetween, the groove is provided with a hole penetrating to the outside of the sealing cover, and the hole is provided for the ventilating ring of the venting ring Out, the free end of the inflation nozzle protrudes from the outside; the sealing cover and the compartment sealing group are sealed or separated. When the sealing is tight, the 〇-ring is inflated and sealed, so that the respective accommodating spaces can be vacuumed separately. Into φ different process gases. 2. The leak-proof structure (2) of the vacuum coater of claim 1, wherein the gas-filling nozzle is one or more gas-filled nozzles, and the hole of the sealing cap is more than one hole. 3. The leak-proof structure (2) of the vacuum coater of claim 1, wherein the 〇-shaped ring has a geometrical shape. 4. The leak-proof structure (2) of the vacuum coater of claim 3, wherein the 〇-shaped ring has a rectangular frame.
TW94219326U 2005-11-08 2005-11-08 Leakage preventing structure of vacuum film plating machine TWM289773U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI506150B (en) * 2011-09-14 2015-11-01 Hon Hai Prec Ind Co Ltd Arc ion coating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI506150B (en) * 2011-09-14 2015-11-01 Hon Hai Prec Ind Co Ltd Arc ion coating device

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