M283314 八、新型說明： 【新型所屬之技術領域】 本創作係關於一種可快速回位之隔離閥，特別係關於一 種用於半導體產業之没備中以阻斷或開啟管路兩端連通狀 態之控制閥元件。 【先前技術】 在半導體產業之生產設備及薇務設施中，經常需要隔離 φ 閥作為真空管路之控制閥體，亦即作為與真空泵（vacuum pump)連結之控制開關。 圖1係習知隔離閥内部構造之剖面示意圖。隔離閥1〇之外 部係一具有三個開口之閥本體14,其中第一管路端lu和第 一官路端112於正常操作狀態下是被第二活塞16所阻隔。當 進氣口 13和一氣壓源（圖未示出）形成通路時，第一活塞丄5 會被注入之空氣向上推動，同時連結於第一活塞15之活塞 桿12會帶動下方的第二活塞16也向上移動。 • 在第二活塞16向上移動之過程中，會直接壓縮固定於分 隔板17上之彈簧18,最終第二活塞16會由原本隔離位置切 換至開啟位置，也就是第一管路端Hi和第二管路端I〗]會 處於連通之狀態。為使連結於第一管路端Ul或第二管路端 112之腔室有較佳之潔淨度，可以在彈簧18外部覆罩一防塵 套19。 當隔離閥10要由開啟狀態切換回隔離狀態時，進氣口 13 曰連接至大氣以排除内部空氣。因為該排氣之過程緩慢， 雖然受壓縮之彈簧18同時會自動回復而將第二活塞16移至 5 - S41832 100554 ΟΟ4686397 M283314 隔離位置，但仍然無法快速完成回位，整個行程（str〇ke)約 需要花費6〇msec。由開啟位置切換回隔離狀態之時間太 長，顯然已無法滿足半導體某些需要快速完成隔離之使用 狀況。 綜上所述，市場上亟需要一種能快速回位之隔離閥，俾使 隔離閥能即時反應目前設定狀態。 【新型内容】 φ 本創作之目的係提供一種可快速回位之隔離閥，其係利 用離合機構將隔離管路兩端之活塞變成分離狀態，如此可 僅藉由彈簧回復力而使已分離之活塞移回至隔離位置。 為達上述目的，本創作揭示一種可快速回位之隔離閥， 係用於半導體產業之設備中以隔斷或開啟管路兩端之連通 狀悲，其包含一第一活塞、一活塞桿、一第二活塞、一彈 黃及一離合機構。當適當之外力作用時，例如：大氣壓力， 該第二活塞會移動而使該管路兩端產生連通。於該作用之 鲁 外力除去時，该第二活塞藉由該彈簧之回復力而移至原本 使管路兩端隔離之位置，同時該離合機構會使該第一活塞 與活塞桿分離，因此該第二活塞可以快速回到該隔離位置。 該離合機構係-快速接頭及—電磁開關之組合，該快速 接頭可以連結該活塞桿及第一活塞，又該電磁開關能作動 使該快速接頭脫開該活塞桿，如此與該活塞桿接合之該第 二活塞可以快速回位。 【實施方式】 圖2係本創作之隔離閥内部構造之剖面示意圖。該隔離閥 M283314 20係用於半導體產業之設備中以隔斷或開啟管路兩端之連 通狀態，其包含一第一活塞25 1、一活塞桿22、一第二活夷 252、一彈簧28及一離合機構26。 隔離閥20之外部係一具有三個開口之閥本體24，其中第 一管路端211和第二管路端212於正常操作狀態下是被第二 活塞252所阻隔。當進氣口 23和一氣壓源（圖未示出）形成通 路時，第一活塞25 1會被注入之空氣向上推動，同時藉由離 φ 合機構26連結於第一活塞251之活塞桿22會帶動下方的第 -一活塞2 5 2向上移動。 在第二活塞251向上移動之過程中，會直接壓縮固定於分 隔板27上之彈百28，最終弟二活塞252會由原本隔離位置切 換至開啟位置，也就是第一管路端211和第二管路端2以會 處於連通之狀態。為使連結於第一管路端211或第二管路端 212之腔室有較佳之潔淨度，可以在彈簧28外部覆罩一防塵 套29。 • 當隔離閥20要由開啟狀態切換回隔離狀態時，進氣口 23 會連接至大氣以排除内部空氣，同時可使該離合機構26作 動以分離連結中之活塞桿22及第一活塞25卜雖然該排氣之 過程緩慢，但因為已分離之第一活塞25 1並不受第二活塞 252之拘束，所以在受壓縮彈簧28之回復力作用下會迅速回 到隔離位置。整個回位的行程約需要花費5msec，再加上離 合機構26作動所需要之時間，總共花費為15〜2〇msec。 圖3係圖2中A部分離合機構26之放大示意圖。該離合機構 26由一快速接頭265、插接銷267、彈簧266及一電磁開關264 M283314 組合而成，其中快速接頭265係包括固定殼體261、活動鋼 珠座262及複數個鋼珠263。當電磁開關264產生吸引力而壓 縮彈簣266縮短時，活動鋼珠座262推動而往固定殼體261 之内部移動，就會使鋼珠263逼向插接銷267側，也就是鋼 珠263會卡在插接銷267表面之溝槽2671内。如此與固定於 固定殼體261之活塞桿22將因快速接頭265緊卡住插接銷 267，而暫時和第一活塞25丨牢固地結合在一起。除了利用 電磁開關264產生吸引力或斥力以達到離合之目的，亦可以 採用直接接觸之推力或拉力而達到相同之目的。 如圖4所’第一活塞251上方之電磁開關264切斷後而吸引 力消失’該彈簧266就能夠自然鬆弛，如此該活動鋼珠座262 會向固定殼體261端相對運動，此時被逼緊之鋼珠263會退 至插接銷267外側餘隙。亦即插接銷267會把鋼珠263推向固 定殼體261和活動鋼珠座262間餘隙而得以脫離快速接頭 265之拘束，最後就能使第一活塞251完全在彈簧28作用力 推動下迅速回到隔離的位置。 圖5係本創作之離合機構之另一實施例示意圖。該離合機 構50係藉由電磁開關264作用於扣接件52上之斥力，而使得 扣接件52和扣接盤5 1緊密結合在一起。當電磁開關264切斷 而無作用力時，被壓縮彈簧53之回復力會推動扣接件52之 受力部521遠離中心軸541，亦即扣接件52會繞著樞接軸55 轉動（右邊扣接件52順時針轉，而左邊扣接件52逆時針轉）， 同時連接部522和抵靠端523也會遠離扣接盤51。最後，抵 靠端523會完全脫離盤面511和勾合端512間形成之卡合空 S41832 100554 ΟΟ4686397 M283314 間’與扣接盤5 1固接之活塞桿22就能自離合機構5〇自由地 为開。又支撐臂542之一端係和中心軸541固定在一起，該 樞接軸55則固定於支撐臂542之另一端，為使樞接於樞接軸 55之扣接件52容易轉動，可在樞接軸55套接一滾珠軸承 (ball beadng)56,如此連接部522和受力部521之轉接角處就 月b承罪在滾珠軸承5 6表面而易於滑動。 本創作之技術内容及技術特點已揭示如上，然而熟悉本 φ 項技術之人士仍可能基於本創作之教示及揭示而作種種不 背離本創作精神之替換及修飾。因此，本創作之保護範圍 應不限於實施例所揭示者，而應包括各種不背離本創作之 替換及修飾，並為以下之申請專利範圍所涵蓋。 【圖式簡單說明】 圖1係習知隔離閥内部構造之剖面示意圖； 圖2係本創作之隔離閥内部構造之剖面示意圖； 圖3係圖2中A部分離合機構之放大示意圖； φ 圖4係離合機構鬆開時之剖面示意圖；以及 圖5係係本創作之離合機構之另一實施例示意圖。 【主要元件符號說明】 10 隔離閥 12 活塞桿 13 進氣口 14 閥本體 15 第一活塞 16 第二活塞 17 分隔板 18 彈簧 19 防塵套 20 隔離閥 22 活塞桿 23 進氣口 S41832 100554 °〇4686397 M283314 24 閥本體 27 分隔板 29 防塵套 51 扣接盤 53 彈簧 56 滾珠軸承 112 第二管路端 212 第二管路端 252 第二活塞 262 活動鋼珠座 264 電磁開關 266 彈簧 521 受力部 523 抵靠端 452 支撐臂 26 離合機構 28 彈簧 50 離合機構 52 扣接件 55 樞接軸 111 第一管路端 211 第一管路端 251 第一活塞 261 固定殼體 263 鋼珠 265 快速接頭 267 插接銷 522 連接部 541 中心軸 2671 溝槽M283314 8. Description of the new type: [Technical field to which the new type belongs] This creation is about an isolation valve that can be quickly returned, especially about a control used in the semiconductor industry to block or open the connection state at both ends of the pipeline Valve element. [Previous technology] In the semiconductor industry's production equipment and Weiwu facilities, it is often necessary to isolate the φ valve as the control valve body of the vacuum pipeline, that is, as a control switch connected to a vacuum pump. FIG. 1 is a schematic sectional view of the internal structure of a conventional isolation valve. Outside the isolation valve 10 is a valve body 14 having three openings, wherein the first pipe end lu and the first official road end 112 are blocked by the second piston 16 in a normal operating state. When the air inlet 13 and a pressure source (not shown) form a path, the first piston 丄 5 will be pushed upward by the injected air, and the piston rod 12 connected to the first piston 15 will drive the second piston below. 16 also moves up. • During the upward movement of the second piston 16, the spring 18 fixed on the partition plate 17 will be directly compressed, and finally the second piston 16 will be switched from the original isolation position to the open position, that is, the first pipe end Hi and The second pipe end I] will be in a connected state. In order to make the chamber connected to the first pipe end Ul or the second pipe end 112 have better cleanliness, a dust cover 19 may be covered on the outside of the spring 18. When the isolation valve 10 is to be switched back from the open state to the isolated state, the air inlet 13 is connected to the atmosphere to exclude the internal air. Because the venting process is slow, although the compressed spring 18 will automatically recover at the same time, the second piston 16 will be moved to the 5-S41832 100554 ΟΟ4686397 M283314 isolation position, but it is still unable to complete the return quickly, the entire stroke (str〇ke) It takes about 60msec. It takes too long to switch from the open position to the isolated state, and it is obviously unable to meet some of the use conditions of semiconductors that need to complete isolation quickly. In summary, there is an urgent need in the market for an isolating valve that can return quickly, so that the isolating valve can respond to the current set state in real time. [New content] φ The purpose of this creation is to provide a fast-return isolation valve, which uses the clutch mechanism to change the pistons at both ends of the isolation pipeline into a separated state, so that the separated The piston moves back to the isolated position. In order to achieve the above purpose, this creation discloses a fast-returning isolation valve, which is used in the equipment of the semiconductor industry to block or open the communication between two ends of a pipeline. It includes a first piston, a piston rod, a The second piston, a spring yellow and a clutch mechanism. When an appropriate external force is applied, such as atmospheric pressure, the second piston will move to communicate with the two ends of the pipeline. When the applied external force is removed, the second piston is moved to a position where the two ends of the pipeline are originally isolated by the return force of the spring, and the clutch mechanism will separate the first piston from the piston rod, so The second piston can quickly return to this isolated position. The clutch mechanism is a combination of a quick connector and an electromagnetic switch. The quick connector can connect the piston rod and the first piston, and the electromagnetic switch can be operated to disengage the quick connector from the piston rod, so as to engage with the piston rod. The second piston can be quickly returned. [Embodiment] FIG. 2 is a schematic cross-sectional view of the internal structure of the isolation valve of the present invention. The isolation valve M283314 20 is used in the equipment of the semiconductor industry to block or open the communication state of the two ends of the pipeline, and it includes a first piston 25 1, a piston rod 22, a second movable pin 252, a spring 28 and一 clutch mechanism 26. The outside of the isolation valve 20 is a valve body 24 having three openings, of which the first pipe end 211 and the second pipe end 212 are blocked by the second piston 252 in a normal operation state. When the air inlet 23 and a pressure source (not shown) form a path, the first piston 25 1 will be pushed upward by the injected air, and at the same time connected to the piston rod 22 of the first piston 251 by the clutch mechanism 26 Will drive the first piston 2 5 2 upwards. During the upward movement of the second piston 251, it will directly compress the bullet 100 fixed on the partition plate 27. In the end, the second piston 252 will switch from the original isolation position to the open position, that is, the first pipe end 211 and The second pipe end 2 will be in a connected state. In order to make the chamber connected to the first pipe end 211 or the second pipe end 212 have better cleanliness, a dust cover 29 may be covered on the outside of the spring 28. • When the isolation valve 20 is to be switched from the open state to the isolated state, the air inlet 23 will be connected to the atmosphere to exclude the internal air, and the clutch mechanism 26 can be operated to separate the piston rod 22 and the first piston 25 in the connection. Although the exhausting process is slow, because the separated first piston 251 is not restricted by the second piston 252, it will quickly return to the isolation position under the action of the restoring force of the compression spring 28. The entire return stroke takes about 5 msec. In addition to the time required for the clutch mechanism 26 to operate, the total cost is 15 to 20 msec. FIG. 3 is an enlarged schematic view of the separating and coupling mechanism 26 in Part A of FIG. 2. The clutch mechanism 26 is composed of a quick joint 265, a plug pin 267, a spring 266, and an electromagnetic switch 264 M283314. The quick joint 265 includes a fixed housing 261, a movable steel ball seat 262, and a plurality of steel balls 263. When the electromagnetic switch 264 attracts and the compression spring 266 shortens, the movable steel ball seat 262 pushes and moves to the inside of the fixed housing 261, so that the steel ball 263 is forced to the plug pin 267 side, that is, the steel ball 263 will be caught In the groove 2671 on the surface of the plug pin 267. In this way, the piston rod 22 fixed to the fixed housing 261 is temporarily fastened to the first piston 25 丨 because the quick joint 265 tightly catches the plug pin 267. In addition to using the electromagnetic switch 264 to generate attractive or repulsive force to achieve the purpose of clutching, direct contact thrust or pulling force can also be used to achieve the same purpose. As shown in Fig. 4 "the electromagnetic switch 264 above the first piston 251 is cut off and the attractive force disappears", the spring 266 can relax naturally, so that the movable steel ball seat 262 will move relatively to the fixed housing 261 end, and at this time, it will be forced The steel ball 263 will retract to the clearance outside the plug pin 267. That is, the plug pin 267 will push the steel ball 263 toward the clearance between the fixed housing 261 and the movable steel ball seat 262 and be released from the restriction of the quick joint 265. Finally, the first piston 251 can be quickly driven by the force of the spring 28 Back to the isolated position. FIG. 5 is a schematic diagram of another embodiment of the clutch mechanism of this creation. The clutch mechanism 50 is made by the repulsive force of the electromagnetic switch 264 on the fastening member 52, so that the fastening member 52 and the fastening disc 51 are tightly coupled together. When the electromagnetic switch 264 is turned off without force, the restoring force of the compressed spring 53 will push the force receiving portion 521 of the fastener 52 away from the central axis 541, that is, the fastener 52 will rotate around the pivot axis 55 ( The right fastening member 52 rotates clockwise, and the left fastening member 52 rotates counterclockwise. At the same time, the connecting portion 522 and the abutting end 523 are also away from the fastening plate 51. Finally, the abutting end 523 will completely disengage from the engaging space formed between the disc surface 511 and the engaging end 512. The piston rod 22 fastened to the fastening plate 5 1 between S41832 100554 〇 04686397 and M283314 will be free from the clutch mechanism 50. open. One end of the support arm 542 is fixed to the central shaft 541, and the pivot shaft 55 is fixed to the other end of the support arm 542. In order to make the fastener 52 pivoted to the pivot shaft 55 easy to rotate, the pivot The connecting shaft 55 is sleeved with a ball beadng 56 so that the transition angle between the connecting portion 522 and the force receiving portion 521 is charged on the surface of the ball bearing 56 and is easy to slide. The technical content and technical characteristics of this creation have been revealed as above, however, those familiar with this φ technology may still make various substitutions and modifications based on the teaching and disclosure of this creation without departing from the spirit of this creation. Therefore, the scope of protection of this creation should not be limited to those disclosed in the embodiments, but should include various substitutions and modifications that do not depart from this creation, and are covered by the scope of patent applications below. [Brief description of the figure] Figure 1 is a schematic sectional view of the internal structure of a conventional isolation valve; Figure 2 is a schematic sectional view of the internal structure of the original isolation valve; Figure 3 is an enlarged schematic view of the separation and coupling mechanism of Part A in Figure 2; φ Figure 4 FIG. 5 is a schematic sectional view of the clutch mechanism when it is released; and FIG. 5 is a schematic diagram of another embodiment of the clutch mechanism of the present invention. [Description of symbols of main components] 10 Isolation valve 12 Piston rod 13 Air inlet 14 Valve body 15 First piston 16 Second piston 17 Partition plate 18 Spring 19 Dust cover 20 Isolation valve 22 Piston rod 23 Air inlet S41832 100554 ° 4686397 M283314 24 Valve body 27 Separator plate 29 Dust cover 51 Buckle plate 53 Spring 56 Ball bearing 112 Second line end 212 Second line end 252 Second piston 262 Movable ball seat 264 Electromagnetic switch 266 Spring 521 Forced part 523 abutting end 452 support arm 26 clutch mechanism 28 spring 50 clutch mechanism 52 fastener 55 pivot shaft 111 first pipeline end 211 first pipeline end 251 first piston 261 fixed housing 263 steel ball 265 quick joint 267 insert Pin 522 Connection 541 Center shaft 2671 Groove