TWM247331U - Novel planar type magnetic-levitated alignment apparatus - Google Patents

Description

M247331 IV. Creation Instructions (1) [Technical Field to which the New Type belongs] This creation relates to a positioning device for a bearing platform, and particularly relates to a new type of planar magnetic levitation positioning device. [Previous technology] In recent years, the information and electronics industry has developed rapidly. Among them, precision machinery and servo positioning technology play a very important role in this link. Most of the traditional precision positioning mechanisms use DC or AC servo motors in combination with lead screws to create a large number of revolutions to complete the precise positioning task. At the same time, a variety of precision positioning technologies have been developed, such as the use of piezoelectric actuators (piezoelectric actuators) to achieve a high resolution of 10 nanometers in a 10-i: m motion stroke, and piezoelectric actuation The device can also meet the requirements of fast response. However, the biggest limitation on the use of a piezoelectric actuator is that it allows a limited movement stroke, which is no longer suitable for applications that require a large movement stroke. To meet the requirements of long strokes, traditionally, a servo motor is used with a lead screw or a linear motor is directly used. However, the lead screw is affected by the backlash phenomenon (b a c k 1 a s h) and the friction between the bearings, which significantly reduces the overall positioning accuracy. The linear motor is also affected by ripple effects and end-effects, which reduces the accuracy of positioning. Generally, in the method of overcoming the above frictional force, in addition to enhancing the processing precision on the system hardware, and using extremely precise lubricants to reduce the frictional force, the control law is used to estimate the magnitude of the frictional force by various methods and apply a Reverse force to resist the effects of friction. According to the fact, in the nanometer semiconductor process, it has reached a considerable level of technology, it is obvious

M247331 IV. Creation instructions (2) During the process of 0, 0 9 // m, the surface detection technology plays an important role. Therefore, although the method of positioning the detection platform is used, there will be some friction and static electricity will be generated. Or make it fall, resulting in incorrect test results. To overcome the problems of the above-mentioned systems, it is obvious to use non-better solutions. Aerodynamic suspension systems, electrostatic forces, and magnetic levitation systems are common examples of non-contact forces. It is not suitable for some special use environments, such as clean rooms, so in order to develop a high-precision positioning performance. Applied in a variety of use environments, a system using the magnetic levitation mechanism has been developed. About the currently mature two-axis magnetic levitation technology proposed by Dr. Trumper of the Provincial Institute of Technology in 1996? For the floating positioning platform, the system uses a linear induction motor to provide the vertical levitation force required by the magnetic levitation system at the same time; however, the processing procedures required by the system are complicated and difficult to generalize to related industries. In addition, the new six-degree-of-freedom cake developed by Dr student Kim at the University of Texas is still in the development stage. This system uses coils and permanent magnets to achieve six-degree-of-freedom movement. Although it is expected to achieve high demand, The design of its hardware mechanism is inherently limited and will not be suitable for large stroke applications. In addition, a group of K wang and ο ο η proposed a framework that uses the switching two-dimensional combination and adjusts the current to make the platform move on the plane. The treatment will play a role in reducing friction and displacement. The contact force is a suspension under the precision of displacement. System, but the first two are empty environments ... and so on, and can be regarded as its basic framework. It is the first to introduce the magnetic basic architecture of the United States hemp ▽ degree of freedom. The degree of lateral advancement is higher and wider. Trumper's ί The current magnetic force of the actuator is used for the precision of the movement by the Korean electromagnet array. However, this system M247331 4. Creation instructions (3) The boundary between the coil and the coil has not been broken in the stroke. , Which means that the demand for large sports trips has not been reached. In view of the shortcomings of the known maglev positioning, the creator felt that it was not perfect, so he tried his best to study and overcome it. Based on the experience accumulated in the industry for many years, he developed a new type of flat maglev positioning device. With a simple design, it can achieve the effect of six-degree-of-freedom movement with long motion stroke and high-precision positioning performance. [New content] The main purpose of this creation is to provide a new type of planar magnetic levitation positioning device with long movement stroke and high-precision positioning performance of six degrees of freedom. In order to achieve the above purpose, a new type of planar magnetic levitation positioning device according to the present invention includes at least: a load-bearing platform with three cantilever arms at its edges, and a permanent magnet at the end of each cantilever; three sets of propulsion mechanisms, respectively Corresponding to the outer side of the permanent magnet at the end of each cantilever, there are propulsion coils respectively; three sets of levitation mechanisms are respectively arranged below each cantilever, and there are levitation coils and permanent magnets respectively on it. With the levitation force generated when the control coil is input with the control current and the propulsion force generated when the control coil is input with the control current, the platform can be controlled to perform a six-degree-of-freedom displacement to achieve a six-degree-of-freedom motion with a long motion stroke and high-precision positioning performance. Of the effect. [Embodiment]

M247331 IV. Creation Instructions (4) In order for your reviewers to understand the purpose, characteristics and effects of this creation, we will use the following specific examples and the accompanying drawings to make a detailed description of this creation. After: Please refer to the first figure, which is a schematic diagram of the magnetic field vector generated by an object in space, and then refer to the second diagram, which is a schematic diagram of the magnetic field vector generated by a cylindrical electromagnet in space, as shown in the figure: Savar's law (B i 〇t-S avart L aw) we get the magnetic field vector generated in space by a conducting current as follows: Η 1 r J (rf) xTr 4π rr where r is the position of the coil Within the circle generated by iron and length are the position vector of the observation point, the surface current position vector, the current density flowing on it, and Tv is the relative vector of the observation point and the surface current. And we generalize the above formulas to cylindrical electromagnetic square electromagnets respectively. For cylindrical electromagnets, the magnetic field vector in space is as follows:

4π is the south of the coil ΝΙ r e ^ xe

PP -rWdifdz

P — P N is the number of winding turns of the coil; r2 and 1 ^ respectively represent the outer diameter of the wire and the amount of current of the input coil. It is not difficult for us to produce the product of the position function in a space and the magnitude of the current, and I

Page 8 M247331 g, Creation Instructions (5) They can be rewritten as:

Hcyl = Kyl (x, z) Icyl Similarly, we can also obtain the magnetic field generated by the cuboid electromagnet as rec rec ^ ¥ rec Please refer to the third figure, which is a schematic diagram of the state of the permanent magnet in the magnetic field space. L〇rentzf 〇rce) can be derived from the state of a permanent magnet in a magnetic field: the state of the force by aj I read F — {m · Among them, the magnetic dipole vector of the magnet. From equations (3) and (4), it is not difficult to find that the magnetic force of the magnet in the generated magnetic field can be expressed as: Ferromagnetism F = g (x, y, (6) where g (x, less, z) is a function of the relative position of the magnet in the electromagnet. In order to obtain this relationship efficiently, we avoid using complex theoretical derivation or a large amount of finite element method (FE Μ) to obtain it. The magnitude of the force of the magnet in the coil is obtained by measuring the magnitude of the force of the magnet in the coil using a high-precision mechanical device, and then removing the current value to obtain the distribution curve of γ, ζ).

Page 9

M247331 IV. Creation Instructions (6) Please refer to Figures 4 (a) and 4 (b), which are the appearance of the rectangular magnet and the distribution curve of the force in the cuboid electromagnet, respectively. As an example, a magnet and a rectangular parallelepiped electromagnet are set with 100 measurement points inside the coil, and the magnet is placed on these measurement points to measure the magnitude of the force of the magnet at each measurement point under different current levels, and then The measured data values are fitted by a polynomial regression curve:

Frecfy = + ^ + + + + ^ + ^) 1 rec (7) where a6 = -1 · 954χ109, a5 = 4.39xl08, a4 =-3. 3 8 5 x 1 07, a3 = 1.16x 106, a2 19338 5 ^ 214.8, a 02-0.385. So we can get the " between the cuboid electromagnet and the square magnet? (· ^ 少, magic relationship. Please refer to Figures 5 (a) and 5 (b), which are schematic diagrams of the appearance of a circular magnet and the force distribution curve of a cylindrical electromagnet, respectively, as shown in the figure.) In the same manner as above, the relationship between the cylindrical electromagnet and the circular magnet is obtained as:

Fcyl, z = + b3z3 + hl2% + blZ + b〇) J cyl where b4 =-5. 6 2 x 1 06, b3 =-4. 8 9 x 1 05, b. (8) 16659, b 219.34 , B〇 = 0.0 6 6 1 9 Please ask Cha to read the six pictures of the younger brother's structure of this creation is not intended, as shown in the figure

Page 10 M247331 IV. Creation Instructions (7) The new-type planar magnetic levitation positioning device 1 of this creation includes at least: a bearing platform 10 with three cantilever arms 1 0 1, 1 2, 1 0 3 at its edges, and A permanent magnet 104, 105, 106 is provided at the end of each cantilever; three sets of propulsion mechanisms 1 1, 1 2, 1 3 are respectively corresponding to the outer side of the permanent magnet at the end of each cantilever, and respectively A propulsion coil 1 1 1, 1 2 1, 1 3 1 is provided on the propulsion coil to provide a corresponding propulsion force when a control current is input to the corresponding propulsion coil; three sets of suspension mechanisms 1 4, 1 5, and 16 are respectively Correspondingly located below each cantilever, and respectively provided with levitating coils 1 4 1, 1 5 1, 16 1 and permanent magnets 1 2 2, 15 2, 16 2 to provide corresponding suspensions. Levitation force is generated when the coil inputs the control current. Wherein, the material of the bearing platform 10 and the three cantilever 10, 1, 102, and 103 can be aluminum alloy, and the shape of the three cantilever can be a reinforced gate cantilever structure; in addition, the three cantilever 1 0 1 One of the cantilever, 10 2, and 10 3 can be bent. Please refer to Figure 7 (a) and Figure 7 (b), which are the top view and the front view of the bearing platform of this creation respectively, as shown in the figure: Using Newton's second law of mechanics, we can use the seventh (a The six magnetic forces shown in Figure) and Figure 7 (b) are sorted into the force and moment equations for the following motion platforms:

Page 11 M247331 IV. Creation Instructions (8) ^ γ ^ Γ2 + ψ2Γ3 = ΜΎ XFz = F4 + F5 + F6-Mg = Mz Στζ F ^ L3 = Izz θ where M is the mass of the moving platform and g is the acceleration of gravity respectively The inertia of the motion platform extending along the X, Y, and Z axes; reviewing equations (7) and (8), we can rewrite the above equations in a matrix form: m = B (X, UG where M 其中 diag [M, M, M, Ixx, Iyy, IZ, φ, 0, 0] τ, U three [Up u2, u3, u4, u5 mg, 0, 0, 0] τ o is known from the above formulas, by the advance coil The propulsion forces Fi, F2 and F3 generated when the control current is input can accurately control the movement of the bearing platform 10 in the X-Y axis direction, and the levitation forces F 4, F 5, F when the control current is input through the levitation coil. 6. It can accurately control the movement of the bearing platform 10 in the Z-axis direction to achieve the effect of six-degree-of-freedom movement with long motion stroke and high-precision positioning performance.

(9) Ιχχ, lyy, and I

X u 丨 10) (X, Y, = (0,0,

Page 12 M247331 IV. Creation Instructions (9) In summary, the design of a new type of flat magnetic levitation positioning device created by this is indeed feasible, and it improves the various shortcomings of conventional technology. It is a highly creative creation that meets the needs of the industry. Moreover, it is novel and progressive, and fully complies with the statutory requirements of new patents. The above is only a preferred embodiment of this creation, and is not intended to limit the scope of the patent application for this creation; all other equivalent changes or modifications made without departing from the spirit disclosed by this creation shall be included in the following Within the scope of patent application.

Page 13 M247331 Brief description of the diagram The first diagram is a schematic diagram of the magnetic field vector generated by an object in space. The second diagram is a schematic diagram of a magnetic field vector generated by a cylindrical electromagnet in space. The third figure is a schematic diagram of the state of the permanent magnet in the magnetic field space. The fourth (a) picture is a schematic diagram of the appearance of a rectangular magnet. The fourth (b) diagram is a force distribution curve diagram of a rectangular parallelepiped electromagnet. The fifth (a) diagram is a schematic diagram of the appearance of a circular magnet. The fifth (b) diagram is a force distribution curve diagram of a cylindrical electromagnet. The sixth picture is the structure diagram of this creation. The seventh (a) picture is the top view of the bearing platform of this creation. The seventh (b) picture is a front view of the bearing platform of this creation. Language " .......... Day: Right ............ No. 1 3 5 · · · · 2 1_ Figure · 000123445 1L 1L 1L 1L 1L · -_- I II 1: 1 "Ming" Magnetic suspension positioning device cantilever cantilever permanent magnet propulsion mechanism propulsion mechanism propulsion mechanism suspension mechanism permanent magnet suspension coil suspension mechanism 0 · 0 2 0 4 0 6 11 2 1 4 2 Permanent suspension table magnet magnet coil coil coil coil mechanism magnet coil

Μ Page 14 M247331

Page 15

Claims (1)

M247331 5. Scope of patent application1. A new type of flat magnetic levitation positioning device, at least: a load-bearing platform with three cantilevers at its edges, and a permanent magnet at the end of each cantilever; three sets of propulsion mechanisms are respectively corresponding It is set on the outer side of the permanent magnets at the end of each cantilever and is provided with a propulsion coil on each side; three sets of suspension mechanisms are correspondingly arranged below each cantilever, and a suspension coil and a permanent magnet are respectively provided on it. ^ 2 · The new planar magnetic levitation positioning device described in item 1 of the scope of patent application, wherein the material of the bearing platform and the three cantilever can be aluminum alloy. Φ 3 · The new planar magnetic levitation positioning device as described in item 1 of the scope of patent application, wherein the shape of the three cantilever can be a reinforced cantilever beam structure 4 · The new planar type as described in item 1 of the scope of patent application The magnetic levitation positioning device, wherein one of the three cantilevers can be bent. Page 16