TWI847982B - 基板處理系統及其控制器，以及用以控制基板處理系統中的基板支架之溫度的方法 - Google Patents

基板處理系統及其控制器，以及用以控制基板處理系統中的基板支架之溫度的方法 Download PDF

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Publication number
TWI847982B
TWI847982B TW108115486A TW108115486A TWI847982B TW I847982 B TWI847982 B TW I847982B TW 108115486 A TW108115486 A TW 108115486A TW 108115486 A TW108115486 A TW 108115486A TW I847982 B TWI847982 B TW I847982B
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Taiwan
Prior art keywords
processing system
controlling temperature
substrate
controller therefor
substrate processing
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TW108115486A
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English (en)
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TW202106918A (zh
Inventor
亞倫 德彬
拉密許 謙德拉瑟哈蘭
德爾克 盧道夫
湯瑪斯 Ｇ 具沃
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美商蘭姆研究公司
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Priority to TW108115486A priority Critical patent/TWI847982B/zh
Publication of TW202106918A publication Critical patent/TW202106918A/zh
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Publication of TWI847982B publication Critical patent/TWI847982B/zh

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TW108115486A 2019-05-06 基板處理系統及其控制器，以及用以控制基板處理系統中的基板支架之溫度的方法 TWI847982B (zh)

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TW108115486A TWI847982B (zh) 2019-05-06 基板處理系統及其控制器，以及用以控制基板處理系統中的基板支架之溫度的方法

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TW108115486A TWI847982B (zh) 2019-05-06 基板處理系統及其控制器，以及用以控制基板處理系統中的基板支架之溫度的方法

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TW202106918A TW202106918A (zh) 2021-02-16
TWI847982B true TWI847982B (zh) 2024-07-11

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019078036A1 (ja) 2017-10-18 2019-04-25 新日本テクノカーボン株式会社 サセプター

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019078036A1 (ja) 2017-10-18 2019-04-25 新日本テクノカーボン株式会社 サセプター

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TWI847982B (zh) 基板處理系統及其控制器，以及用以控制基板處理系統中的基板支架之溫度的方法