TWI838704B - The vacuum coating equipment and the method - Google Patents

The vacuum coating equipment and the method Download PDF

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Publication number
TWI838704B
TWI838704B TW111108025A TW111108025A TWI838704B TW I838704 B TWI838704 B TW I838704B TW 111108025 A TW111108025 A TW 111108025A TW 111108025 A TW111108025 A TW 111108025A TW I838704 B TWI838704 B TW I838704B
Authority
TW
Taiwan
Prior art keywords
coating equipment
vacuum coating
vacuum
equipment
coating
Prior art date
Application number
TW111108025A
Other languages
Chinese (zh)
Other versions
TW202244291A (en
Inventor
周云
維聰 宋
潘錢森
Original Assignee
大陸商上海陛通半導體能源科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN202110493051.2A external-priority patent/CN112899632B/en
Application filed by 大陸商上海陛通半導體能源科技股份有限公司 filed Critical 大陸商上海陛通半導體能源科技股份有限公司
Publication of TW202244291A publication Critical patent/TW202244291A/en
Application granted granted Critical
Publication of TWI838704B publication Critical patent/TWI838704B/en

Links

TW111108025A 2021-05-07 2022-03-04 The vacuum coating equipment and the method TWI838704B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110493051.2A CN112899632B (en) 2021-05-07 2021-05-07 Vacuum coating process equipment and method capable of realizing convenient temperature control
CN202110493051.2 2021-05-07

Publications (2)

Publication Number Publication Date
TW202244291A TW202244291A (en) 2022-11-16
TWI838704B true TWI838704B (en) 2024-04-11

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210035849A1 (en) 2017-11-21 2021-02-04 Watlow Electric Manufacturing Company Ceramic pedestal having atomic protective layer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210035849A1 (en) 2017-11-21 2021-02-04 Watlow Electric Manufacturing Company Ceramic pedestal having atomic protective layer

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